Re-feeding device for single crystal furnace

Abstract

The utility model provides a re-throwing device for a single crystal furnace, which comprises a re-throwing main cylinder and an inner cylinder arranged in the re-throwing main cylinder, and the inner cylinder is detachably connected with the re-throwing main cylinder, so that the replacement of the inner cylinder is facilitated. The re-feeding device has the beneficial effects that in the re-feeding process, re-feeding silicon materials are firstly contacted with the inner barrel to generate collision and are not contacted with the inner side wall of the re-feeding main barrel, so that the inner side wall of the re-feeding main barrel is protected, the service life of the re-feeding main barrel is prolonged, after the inner barrel is damaged, the inner barrel can be replaced by a new inner barrel, and the re-feeding times and the re-feeding quantity of the re-feeding main barrel are prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon single crystal preparation, in particular to a recharging device for a single crystal furnace. Background Art

[0002] As the size of the thermal field of the vertical single crystal pulling furnace increases, the amount of single crystal feed increases. The existing quartz re-feeder is unable to meet the re-feeding amount used in large-sized single crystal furnaces. Due to the limitations of the existing re-feeder structure itself, the re-feeding amount each time is certain, and multiple loading and re-feeding are required to meet the feed amount requirements, which seriously affects production efficiency. Each additional re-feeding will increase the impact of the silicon material on the re-feeding tube. In severe cases, the protective effect of the quartz tube will be reduced, requiring multiple replacements, increasing production costs, directly damaging the tube, and easily bringing in impurities, thereby reducing the quality of crystal pulling.

[0003] Currently, conventional internal lifting quartz re-feeders are used. The quartz tube has a short service life and the lower end is easily damaged, which will cause the silicon material to carry the quartz into the melt in the single crystal furnace. The silicon solution and quartz will react (Si (liquid) + SiO2 (solid) = 2SiO (liquid)), which will increase the oxygen content of the silicon solution, and ultimately increase the oxygen content of the pulled single crystal silicon, and reduce the quality of the single crystal. Summary of the Invention

[0004] In view of the above problems, the present invention provides a recharging device for a single crystal furnace to solve the above or other problems existing in the prior art.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a re-feeding device for a single crystal furnace, comprising a re-feeding main cylinder and an inner cylinder arranged in the re-feeding main cylinder, the inner cylinder being detachably connected to the re-feeding main cylinder to facilitate replacement of the inner cylinder.

[0006] Furthermore, the length of the inner tube is smaller than that of the re-casting main tube, and the inner tube is arranged on a side of the re-casting main tube close to the quartz umbrella.

[0007] Furthermore, the inner wall of the re-throw main cylinder is provided with a first snap-fit structure, and the inner cylinder is provided with a second snap-fit structure. The first snap-fit structure contacts and cooperates with the second snap-fit structure so that the inner cylinder is confined in the re-throw main cylinder.

[0008] Furthermore, the inner diameter of the re-investment main cylinder is a variable diameter structure, and a first engaging structure is constructed at the variable diameter transition part.

[0009] Furthermore, along the direction from one end of the re-casting main tube close to the quartz umbrella to the other end, the re-casting main tube includes a first inner diameter section and a second inner diameter section connected to each other, and the diameter of the first inner diameter section is smaller than the diameter of the second inner diameter section.

[0010] Furthermore, the second engaging structure is formed by either end of the inner cylinder extending outward along the radial direction of the inner cylinder.

[0011] Furthermore, the outer diameter of the second engaging structure is adapted to the diameter of the second inner diameter section of the re-injection main cylinder.

[0012] Furthermore, the outer diameter of the inner cylinder is adapted to the diameter of the first inner diameter section of the re-investment main cylinder.

[0013] Furthermore, the material of the secondary casting main cylinder is different from the material of the inner cylinder.

[0014] Furthermore, the material of the re-investment main cylinder is quartz, and the material of the inner cylinder is silicon nitride.

[0015] Due to the adoption of the above technical solution, the single crystal furnace re-investment device has an inner cylinder, the inner cylinder is detachably connected to the re-investment main cylinder, the inner cylinder has a second clamping structure, the inner wall of the re-investment main cylinder is provided with a first clamping structure, the inner cylinder is installed inside the re-investment main cylinder, the first clamping structure is in contact with and cooperates with the second clamping structure, the first clamping structure limits and supports the second clamping structure, the inner cylinder is restricted in the re-investment main cylinder, and the inner cylinder is located on the side of the re-investment main cylinder close to the quartz umbrella, the length of the inner cylinder is adapted to the length of the easily damaged part of the re-investment main cylinder, and the inner cylinder and The position of the lower half of the re-throw main barrel corresponds to that of the inner barrel. During the re-throw process, the re-throw silicon material first contacts the inner barrel and collides with it, and does not contact the inner wall of the re-throw main barrel, thereby protecting the inner wall of the re-throw main barrel and extending the service life of the re-throw main barrel. After the inner barrel is damaged, a new inner barrel can be replaced to extend the re-throw times and re-throw amount of the re-throw main barrel, and meet the re-throw amount requirements of large-size single crystal furnaces. The material of the inner barrel is silicon nitride, not quartz. When the inner barrel is damaged, quartz impurities will not be brought into the silicon solution, and the quality of the single crystal will not be affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a structural diagram of a reinvestment device according to an embodiment of the present invention;

[0017] Figure 2 This is a structural schematic diagram of an inner cylinder in one embodiment of the present utility model;

[0018] Figure 3 This is another structural schematic diagram of the inner cylinder of one embodiment of the utility model;

[0019] Figure 4 This is another structural schematic diagram of the inner cylinder of one embodiment of the utility model;

[0020] Figure 5 It is a structural diagram of a re-investment main cylinder in one embodiment of the utility model.

[0021] In the picture:

[0022] 1. Re-investment main cylinder 2, inner cylinder 10, first engaging structure

[0023] 11, first inner diameter section 12, second inner diameter section 20, second inner diameter section DETAILED DESCRIPTION

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] Figure 1 A structural schematic diagram of an embodiment of the present utility model is shown. This embodiment relates to a re-feeding device for a single crystal furnace, which is used for re-feeding during the process of pulling single crystals. The re-feeding device is provided with an inner cylinder inside the re-feeding main cylinder, and the inner cylinder is arranged on the side of the re-feeding main cylinder close to the quartz umbrella. During the re-feeding process, the re-feeding silicon material first contacts the inner cylinder. When the inner cylinder is damaged, a new inner cylinder can be replaced to protect the part of the re-feeding main cylinder corresponding to the inner cylinder from being easily damaged, thereby extending the service life of the re-feeding main cylinder and reducing costs.

[0026] A re-feeding device for a single crystal furnace, such as Figure 1-5 As shown, it includes a re-investment main cylinder 1 and an inner cylinder 2 arranged in the re-investment main cylinder 1. The inner cylinder 2 is detachably connected to the re-investment main cylinder 1 to facilitate replacement of the inner cylinder 2. The re-investment main cylinder 1 is the main structure of the re-investment device, which is convenient for the installation of the inner cylinder 2 and the loading of the re-investment silicon material. The setting of the inner cylinder 2 protects the inner side wall of the re-investment main cylinder 1. The inner cylinder 2 first contacts the re-investment silicon material during the re-investment process. The silicon material collides with the inner cylinder 2 and will not contact the re-investment main cylinder 1. When the inner cylinder 2 is damaged, the inner cylinder 2 can be replaced, thereby extending the service life of the re-investment main cylinder 1, being able to adapt to the number and amount of re-investment used in large-size single crystal furnaces, and reducing production costs.

[0027] The length of the inner tube 2 can be the same as that of the re-investment main tube 1, so as to fully protect the inner wall of the re-investment main tube 1. Alternatively, the length of the inner tube 2 can be less than that of the re-investment main tube 1, and the inner tube 2 is arranged on the side of the re-investment main tube 1 close to the quartz umbrella to protect the inner wall of the re-investment main tube 1 close to the quartz umbrella. The length of the inner tube 2 is selected according to actual needs and no specific requirements are made here.

[0028] In some feasible embodiments, preferably, the length of the inner cylinder 2 is smaller than the length of the re-investment main cylinder 1. On the one hand, it can reduce the production cost. On the other hand, since the re-investment device is in the re-investment process, the quartz umbrella arranged at one end of the re-investment main cylinder 1 is gradually separated from the end of the re-investment main cylinder 1, so that the re-invested silicon material near the inner wall of the re-investment main cylinder 1 is first separated from the quartz umbrella and falls into the silicon solution in the quartz crucible, so that the silicon material near the edge of the inner wall of the re-investment main cylinder 1 falls first, and the re-invested silicon material at the axial middle position of the re-investment main cylinder 1 is then replenished toward its inner wall, and then falls downward along the inner wall of the re-investment main cylinder 1. In this process, the re-invested silicon material The probability of the material colliding with the re-investment main cylinder 1 increases, and the probability of the inner wall of the re-investment main cylinder 1 close to the quartz umbrella side being damaged increases, that is, the lower section of the re-investment main cylinder 1 (the part close to the quartz umbrella side) is easily damaged, while the upper section of the re-investment main cylinder 1 is not easily damaged. Therefore, the inner cylinder 2 is installed at the lower section of the re-investment main cylinder 1 to protect the lower section of the re-investment main cylinder 1. The re-invested silicon material contacts the inner cylinder 2 during the re-investment process to protect the inner wall of the lower section of the re-investment main cylinder 1 from damage. The inner cylinder 2 is detachably connected to the re-investment main cylinder 1. After the inner cylinder 2 is damaged, it can be replaced with a new inner cylinder 2, thereby extending the service life of the re-investment main cylinder 1 and increasing the number of re-investments.

[0029] like Figure 1 and 5 As shown, the above-mentioned re-investment main cylinder 1 is in cylinder contact, has a certain length, and has a accommodating space inside for storing re-invested silicon materials, and both ends of the re-investment main cylinder 1 are open structures, one end is matched with a quartz umbrella, and the quartz umbrella is used to approach or move away from the end of the re-investment main cylinder 1 to re-invest the re-invested silicon materials, and the other end is a feed port for loading the re-invested silicon materials.

[0030] In order to facilitate the installation of the inner cylinder 2 inside the re-investment main cylinder 1, the inner wall of the re-investment main cylinder 1 is provided with a first snap-fit structure 10, and the inner cylinder 2 is provided with a second snap-fit structure 20. The first snap-fit structure 10 contacts and cooperates with the second snap-fit structure 20 so that the inner cylinder 2 is restricted in the re-investment main cylinder 1 and will not fall off from the re-investment main cylinder 1. The inner cylinder 2 is installed in the re-investment main cylinder 1.

[0031] After the inner cylinder 2 is installed in the re-investment main cylinder 1, the outer wall of the inner cylinder 2 contacts the inner wall of the re-investment main cylinder 1, so that the re-investment main cylinder 1 can support the inner cylinder 2, avoiding the unbalanced force on the inner cylinder 2 caused by the collision and contact of the re-invested silicon material with the inner cylinder 2 during the re-investment process, causing damage to the second locking structure 20 on the inner cylinder 2, shortening the service life of the inner cylinder 2, and at the same time increasing the accommodation space in the inner cylinder 2 and increasing the amount of re-invested silicon material loaded.

[0032] In order to facilitate the installation of the inner cylinder 2, the inner diameter of the re-investment main cylinder 1 is a variable diameter structure, and a first snap-fit structure 10 is constructed in the variable diameter transition part, that is, the first snap-fit structure 10 can be protruded on the inner side wall of the re-investment main cylinder 1, so that the first snap-fit structure 10 contacts and cooperates with the second snap-fit structure 20 to support and limit the second snap-fit structure 20.

[0033] Specifically, in some feasible embodiments, along the direction from one end of the re-casting main barrel 1 close to the quartz umbrella to the other end, it includes a first inner diameter section 11 and a second inner diameter section 12 connected to each other, the diameter of the first inner diameter section 11 is smaller than the diameter of the second inner diameter section 12, the position of the inner barrel 2 corresponds to the position of the first inner diameter section 11 of the re-casting main barrel 1, the outer diameter of the inner barrel 2 is adapted to the diameter of the first inner diameter section 11 of the re-casting main barrel 1, the outer wall of the inner barrel 2 contacts the inner wall of the first inner diameter section 11 of the re-casting main barrel 1, and the inner wall of the first inner diameter section 11 of the re-casting main barrel 1 supports the inner barrel 2. Under this structure, the first inner diameter section 11 is a constant diameter structure, and the diameter of the first inner diameter section 11 is consistent along the axial direction of the first inner diameter section 11. At the same time, the second inner diameter section 12 is a constant diameter structure, and the diameter of the second inner diameter section 12 is consistent along the axial direction of the second inner diameter section 12. The transition part between the first inner diameter section 11 and the second inner diameter section 12 is a step structure, that is, the first clamping structure 10 is a step structure, and a boss is formed by the thickness difference between the wall thickness of the first inner diameter section 11 and the wall thickness of the second inner diameter section 12. The boss is a planar structure and is arranged along the radial direction of the re-investment main cylinder 1 to form an annular platform. The surface of the first clamping structure 10 that contacts the second clamping structure 20 is arranged perpendicular to the axis of the re-investment main cylinder 1. The contact between the first clamping structure 10 and the second clamping structure 20 is surface contact, and the first clamping structure 10 supports and positions the second clamping structure 20.

[0034] like Figure 2-4As shown, the inner cylinder 2 is a cylinder structure with a certain length. The length is selected according to the length of the re-casting main cylinder 1 that is easily damaged during the re-casting process. No specific requirements are made here. Structurally, the inner cylinder 2 can be a constant-diameter structure, in which the diameter of the inner cylinder 2 is consistent along the axial direction of the inner cylinder 2, that is, the wall thickness of the inner cylinder 2 is constant along the axial direction of the inner cylinder 2; or, the inner cylinder 2 can also be a variable-diameter structure, in which the diameter of the inner cylinder 2 gradually increases or decreases along the axial direction of the inner cylinder 2, that is, the wall thickness of the inner cylinder 2 is not a constant-thickness structure along the axial direction of the inner cylinder 2, and the wall thickness of the inner cylinder 2 gradually decreases or increases. Under this structure, the internal shape of the inner cylinder 2 is conical and the external shape is cylindrical, so that the contact between the inner cylinder 2 and the re-investment main cylinder 1 is surface contact, and the re-investment main cylinder 1 can support the inner cylinder 2, or the internal shape of the inner cylinder 2 is cylindrical and the external shape is conical. Correspondingly, at this time, the internal shape of the part of the re-investment main cylinder 1 corresponding to the inner cylinder 2 is also conical, so that the contact between the inner cylinder 2 and the re-investment main cylinder 1 is surface contact, and the re-investment main cylinder 1 can support the inner cylinder 2.

[0035] The inner surface of the inner cylinder 2 may be a smooth curved surface structure, or the structure of the inner surface of the inner cylinder 2 is as follows: the inner surface of the inner cylinder 2 is provided with a plurality of protrusions, which may be an annular structure, and whose cross-sectional shape may be an arc shape, preferably a semicircular shape, and the plurality of protrusions are sequentially arranged along the axial direction of the inner cylinder 2, covering the inner surface of the inner cylinder 2, with a certain gap between adjacent protrusions, so that the shape of the inner surface of the inner cylinder 2 is approximately wavy, with protrusions and depressions; or the protrusion is a strip structure of a certain length, and its axis may be a straight line or a curved line. The strip protrusions are arranged along the axial direction of the inner tube 2, and multiple strip protrusions are arranged in sequence along the circumferential direction of the inner tube 2. There is a certain gap between adjacent protrusions, so that the shape of the inner surface of the inner tube 2 is approximately wavy, with protrusions and depressions; or, the protrusion can be a columnar or conical structure, and multiple protrusions are arranged in sequence along the circumferential or axial direction of the inner tube 2, or arranged radially, or in other ways, which can be selected and arranged according to actual needs, so that the shape of the inner surface of the inner tube 2 is approximately wavy, with multiple protrusions and depressions.

[0036] Of course, the outer surface of the inner cylinder 2 can also be arranged in the above-mentioned approximately wavy shape. In this case, the inner surface of the re-investment main cylinder 1 that contacts the inner cylinder 2 is also a complementary wavy structure. The protrusion on the outer surface of the inner cylinder 2 can be embedded in the recess of the re-investment main cylinder 1, so that the outer surface of the inner cylinder 2 and the inner surface of the re-investment main cylinder 1 are in surface contact, and the re-investment main cylinder 1 supports the inner cylinder 2.

[0037] The above-mentioned second snap-fit structure 20 is formed by extending outward along the radial direction of the inner cylinder 2 from either end of the inner cylinder 2, that is, the second snap-fit structure 20 is arranged at either end of the inner cylinder 2, and the second snap-fit structure 20 is an annular plate structure. The inner diameter side of the second snap-fit structure 20 is fixedly connected to the end of the inner cylinder 2, and the second snap-fit structure 20 is arranged along the radial direction of the inner cylinder 2, that is, the second snap-fit structure 20 is arranged perpendicular to the axis of the inner cylinder 2, so that when the inner cylinder 2 is installed in the re-investment main cylinder 1, the second snap-fit structure 20 can contact the first snap-fit structure 10, and the inner cylinder 2 is inserted into the re-investment main cylinder 1.

[0038] In some feasible embodiments, the second engaging structure 20 and the inner cylinder 2 are preferably fixedly connected by integral molding.

[0039] In order to facilitate the installation of the inner cylinder 2 into the re-investment main cylinder 1, the outer diameter of the second snap-fit structure 20 is adapted to the diameter of the second inner diameter section 12 of the re-investment main cylinder 1. During the process of the inner cylinder 2 being installed into the re-investment main cylinder 1, the outer diameter end of the second snap-fit structure 20 slides along the inner wall of the second inner diameter section 12 of the re-investment main cylinder 1. When it moves to the first snap-fit structure 10, the first snap-fit structure 10 blocks the second snap-fit structure 20, and the inner cylinder 2 stops moving. The second snap-fit structure 20 contacts the first snap-fit structure 10, and the first snap-fit structure 10 supports and limits the second snap-fit structure 20, so that the inner cylinder 2 is fitted into the inside of the re-investment main cylinder 1.

[0040] Alternatively, in some other feasible embodiments, the first engaging structure 10 may be a stepped structure, and the surface of the first engaging structure 10 that contacts the second engaging structure 20 is an inclined surface, such that the first engaging structure 10 is an annular structure with a conical inner diameter side and a cylindrical outer diameter side, and the diameter of the first engaging structure 10 at one end connected to the second inner diameter section 12 is larger than the diameter of the other end. Accordingly, the second engaging structure 20 is disposed at either end of the inner cylinder 2, and the second engaging structure 20 is disposed so as to intersect the axis of the inner cylinder 2, that is, the second engaging structure 20 is disposed at an angle, and the free end of the second engaging structure 20 is formed by extending obliquely from the end connected to the inner cylinder 2 in a direction away from the other end of the inner cylinder 2. The diameter of the second engaging structure 20 at one end connected to the inner cylinder 2 is smaller than the diameter of the other end, and the second engaging structure 20 is a tapered structure. The contact surfaces of the first engaging structure 10 and the second engaging structure 20 are both inclined surfaces, so that the first engaging structure 10 can limit and support the second engaging structure 20 .

[0041] In addition, the connection method between the first snap-fit structure 10 and the second snap-fit structure 20 can also be an adhesive connection. In some feasible embodiments, adhesive is set on the contact surface between the first snap-fit structure 10 and the second snap-fit structure 20 and / or the contact surface between the second snap-fit structure 20 and the first snap-fit structure 10 to bond the first snap-fit structure 10 and the second snap-fit structure 20 together.

[0042] Alternatively, the connection method between the first clamping structure 10 and the second clamping structure 20 can also be a plug-in connection. In some feasible embodiments, a groove is provided on the side of the first clamping structure 10 that contacts the second clamping structure 20, and a protrusion is provided on the side of the second clamping structure 20 that contacts the first clamping structure 10. When the first clamping structure 10 contacts the second clamping structure 20, the first protrusion is inserted into the groove to realize the plug-in connection between the first clamping structure 10 and the second clamping structure 20; or, a protrusion is provided on the side of the first clamping structure 10 that contacts the second clamping structure 20, and a groove is provided on the side of the second clamping structure 20 that contacts the first clamping structure 10. When the first clamping structure 10 contacts the second clamping structure 20, the first protrusion is inserted into the groove to realize the plug-in connection between the first clamping structure 10 and the second clamping structure 20.

[0043] The material of the above-mentioned re-investment main cylinder 1 is different from the material of the inner cylinder 2. In some feasible embodiments, preferably, the material of the re-investment main cylinder 1 is quartz, and the material of the inner cylinder 2 is silicon nitride. Compared with the inner cylinder 2 made of quartz, the inner cylinder 2 made of silicon nitride has better wear resistance and fatigue resistance, which can extend the service life of the inner cylinder 2. At the same time, when the inner cylinder 2 is damaged, quartz impurities will not be brought into the silicon solution, which will not affect the quality of the single crystal.

[0044] When the inner tube 2 is installed inside the re-casting main tube 1, the inner tube 2 will not extend beyond the end of the re-casting main tube 1 close to the quartz umbrella, that is, the length of the inner tube 2 is not greater than the length of the first inner diameter section 11 of the re-casting main tube 1, so as to avoid interference with the coordinated installation of the quartz umbrella and the re-casting main tube 1.

[0045] When the re-investment device for a single crystal furnace is in use, the inner cylinder 2 is installed inside the re-investment main cylinder 1, and the inner cylinder 2 enters from the port of the second inner diameter section 12 of the re-investment main cylinder 1 and moves along the axial direction of the re-investment main cylinder 1 toward the direction of the second inner diameter section 12. When the second clamping structure 20 on the inner cylinder 2 contacts the first clamping structure 10 on the inner side wall of the re-investment main cylinder 1, the first clamping structure 10 blocks the second clamping structure 20, and the second clamping structure 20 no longer moves and is restricted to this position. The first clamping structure 10 supports the second clamping structure 20, and the outer side wall of the inner cylinder 2 contacts the inner side wall of the first inner diameter section 11 of the re-investment main cylinder 1, and the inner side wall of the re-investment main cylinder 1 supports the inner cylinder 2. Then, a connecting rod and a limit piece are installed on the outer wall of the re-investment main cylinder 1, and the molybdenum rod is installed inside the re-investment main cylinder 1, and the quartz umbrella contacts the end of the re-investment main cylinder 1 where the inner cylinder 2 is installed, and the re-investment silicon material is loaded;

[0046] When the re-cast silicon material is being re-cast, the quartz umbrella gradually leaves the end of the re-cast main cylinder 1, and the re-cast silicon material near the inner wall of the inner cylinder 2 falls down and is re-cast. Then, the re-cast silicon material located in the axial middle part of the re-cast main cylinder 1 is replenished toward the inner wall. This part of the re-cast silicon material contacts the inner wall of the inner cylinder 2 and falls downward along the inner wall of the inner cylinder 2 without contacting the inner wall of the first inner diameter section 11 of the re-cast main cylinder 1, thereby extending the service life of the re-cast main cylinder 1;

[0047] After multiple re-dosing, if the inner cylinder 2 is damaged, a new inner cylinder 2 can be replaced and the re-dosing of silicon material can be continued. Since the material of the inner cylinder 2 is not quartz, quartz impurities will not be brought into the silicon solution when the inner cylinder 2 is damaged, and the quality of the single crystal will not be affected.

[0048] Due to the adoption of the above technical solution, the single crystal furnace re-investment device has an inner cylinder, the inner cylinder is detachably connected to the re-investment main cylinder, the inner cylinder has a second clamping structure, the inner wall of the re-investment main cylinder is provided with a first clamping structure, the inner cylinder is installed inside the re-investment main cylinder, the first clamping structure is in contact with and cooperates with the second clamping structure, the first clamping structure limits and supports the second clamping structure, the inner cylinder is restricted in the re-investment main cylinder, and the inner cylinder is located on the side of the re-investment main cylinder close to the quartz umbrella, the length of the inner cylinder is adapted to the length of the easily damaged part of the re-investment main cylinder, and the inner cylinder and The position of the lower half of the re-throw main barrel corresponds to that of the inner barrel. During the re-throw process, the re-throw silicon material first contacts the inner barrel and collides with it, and does not contact the inner wall of the re-throw main barrel, thereby protecting the inner wall of the re-throw main barrel and extending the service life of the re-throw main barrel. After the inner barrel is damaged, a new inner barrel can be replaced to extend the re-throw times and re-throw amount of the re-throw main barrel, and meet the re-throw amount requirements of large-size single crystal furnaces. The material of the inner barrel is silicon nitride, not quartz. When the inner barrel is damaged, quartz impurities will not be brought into the silicon solution, and the quality of the single crystal will not be affected.

[0049] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A recharging device for a single crystal furnace, characterized by: It includes a re-throwing main cylinder and an inner cylinder arranged in the re-throwing main cylinder, wherein the inner cylinder is detachably connected to the re-throwing main cylinder to facilitate replacement of the inner cylinder; The inner cylinder is arranged on a side of the re-casting main cylinder close to the quartz umbrella; The inner wall of the re-dispensing main cylinder is provided with a first clamping structure, and the inner cylinder is provided with a second clamping structure. The first clamping structure contacts and cooperates with the second clamping structure to restrict the inner cylinder in the re-dispensing main cylinder.

2. The recharging device for a single crystal furnace according to claim 1, characterized in that: The length of the inner cylinder is smaller than the length of the re-investment main cylinder.

3. The recharging device for a single crystal furnace according to claim 1, characterized in that: The inner diameter of the re-investment main cylinder is a variable diameter structure, and the first engaging structure is constructed at the variable diameter transition part.

4. The recharging device for a single crystal furnace according to claim 3, characterized in that: Along the direction from one end of the re-casting main tube close to the quartz umbrella to the other end, the re-casting main tube includes a first inner diameter section and a second inner diameter section connected to each other, and the diameter of the first inner diameter section is smaller than the diameter of the second inner diameter section.

5. The recharging device for a single crystal furnace according to claim 1, characterized in that: The second engaging structure is formed by extending either end of the inner cylinder toward the outside along the radial direction of the inner cylinder.

6. The recharging device for a single crystal furnace according to claim 4, characterized in that: The outer diameter of the second engaging structure is adapted to the diameter of the second inner diameter section of the re-injection main cylinder.

7. The recharging device for a single crystal furnace according to claim 6, characterized in that: The outer diameter of the inner cylinder is adapted to the diameter of the first inner diameter section of the re-injection main cylinder.

8. The recharging device for a single crystal furnace according to any one of claims 1 to 7, characterized in that: The material of the re-investment main cylinder is different from that of the inner cylinder.

9. The recharging device for a single crystal furnace according to claim 8, characterized in that: The material of the re-investment main cylinder is quartz, and the material of the inner cylinder is silicon nitride.

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