Water-gas dual-purpose high-pressure washing deep hole connector

Abstract

The utility model discloses a water-gas dual-purpose high-pressure washing deep hole connector. Comprising a deep hole shaft, a first locking device, a first connector, a second locking device and a second connector, wherein a plurality of hole channels are defined in the deep hole shaft; the first locking device is detachably arranged at one end of the deep hole shaft; the first connector is detachably arranged at one end of the deep hole shaft; the first connector is connected with the deep hole shaft in a sealed mode, the second connector is connected with the deep hole shaft in a sealed mode, the first connector is detachably connected with the deep hole shaft through the first locking device, and the second connector is detachably connected with the deep hole shaft through the second locking device. According to the deep hole connector, air or water enters the first connector and enters the second connector through the hole channels, the multiple hole channels are flushed at a time, and the cleaning efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing equipment, in particular to a water and gas dual-purpose high-pressure flushing deep hole joint. Background Art

[0002] In the field of semiconductor equipment manufacturing, CMP polishing equipment is needed to polish the parts of semiconductor equipment. The CMP polishing equipment is equipped with a deep hole shaft and a suction cup. There are multiple deep holes in the deep hole shaft for air suction. When processing deep holes, the burrs and iron chips at the junction of the deep holes are particularly difficult to clean.

[0003] The existing technology uses an air gun to blow air to clean burrs and iron chips, but the direct blowing of burrs and iron chips is not effective. There are currently no conventional connectors on the market that can connect to deep-hole shafts, resulting in low work efficiency. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the Invention

[0004] The utility model aims to provide a water-gas dual-purpose high-pressure flushing deep hole joint, which allows air or water to enter from a first joint and enter a second joint through a hole, thereby flushing multiple holes at one time and achieving high cleaning efficiency.

[0005] In order to achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the utility model is: a water-gas dual-purpose high-pressure flushing deep hole joint, characterized in that it includes a deep hole shaft defined by a plurality of channels, a first locking device detachably arranged at one end of the deep hole shaft, a first joint detachably arranged at one end of the deep hole shaft, a second locking device detachably arranged at the other end of the deep hole shaft, and a second joint detachably arranged at the other end of the deep hole shaft, the first joint is sealed and connected to the deep hole shaft, the second joint is sealed and connected to the deep hole shaft, the first joint is detachably connected to the deep hole shaft through the first locking device, and the second joint is detachably connected to the deep hole shaft through the second locking device.

[0006] As a preferred technical solution, the channels are evenly arranged around the circumference of the central axis of the deep hole shaft.

[0007] As a preferred technical solution, the channel includes a first section and a second section arranged in sequence, the first section and the second section extend axially, the first section passes through one end of the deep hole shaft, one end of the second section is connected to the first section, and the other end is closed, an inclined hole section is inclined at the bottom of the second section, one end of the inclined hole section is connected to the second section, and one end of the inclined hole section passes through the deep hole shaft.

[0008] As a preferred technical solution, a connecting disk is provided at the other end of the deep hole shaft, and the connecting disk is detachably connected to the second joint via the second locking device.

[0009] As a preferred technical solution, the second joint includes a connecting seat, a boss arranged on the side of the connecting seat away from the connecting disk, the boss and the connecting seat are provided with a through hole axially passing through them, and a joint body sealed and inserted in the through hole, the connecting seat and the connecting disk are connected through the second locking device, and the through hole is connected to the inclined hole section.

[0010] As a preferred technical solution, an air groove is provided on the side of the connecting seat facing the connecting disk, the inclined hole section is connected to the air groove, and the air groove is connected to the through hole.

[0011] As a preferred technical solution, a first sealing ring is provided between the first joint and one end of the deep hole shaft, and a second sealing ring is provided between the connecting disk and the other end of the deep hole shaft.

[0012] As a preferred technical solution, the second section passes through the connecting plate, and a plug is inserted into the end of the second section away from the first section.

[0013] As a preferred technical solution, two keyways are symmetrically provided on the outer circumference of the deep hole shaft.

[0014] As a preferred technical solution, the first locking device and the second locking device are locking clamps.

[0015] The beneficial effects of the utility model are:

[0016] 1) Air or water enters from the first joint, passes through the hole and enters the second joint, flushing multiple holes at one time, with high cleaning efficiency;

[0017] 2) The inclined channel and the air groove cooperate to achieve good suction effect;

[0018] 3) The connection plate makes the installation of the second joint more stable;

[0019] 4) The sealing ring improves the overall sealing performance;

[0020] 5) The keyway facilitates the installation of deep hole shafts;

[0021] 6) The locking clamp is easy to install and disassemble. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a working diagram of a deep hole joint provided by one embodiment of the utility model;

[0023] Figure 2 This is a structural diagram of a second connector provided by one embodiment of the present utility model;

[0024] Figure 3 This is a cross-sectional view of a deep hole joint provided by one embodiment of the present utility model;

[0025] Figure 4 This is a structural diagram of a first sealing ring provided by an embodiment of the present utility model;

[0026] Figure 5 This is a structural diagram of a second sealing ring provided in one embodiment of the present utility model.

[0027] exist Figure 1-Figure 5 Among them, 1. deep hole shaft; 101. first section; 102. second section; 103. inclined hole section; 104. connecting plate; 105. keyway; 106. rib; 2. first locking device; 3. first joint; 4. second locking device; 5. second joint; 501. connecting seat; 5011. air groove; 502. boss; 503. through hole; 504. joint body; 6. first sealing ring; 7. second sealing ring; 8. plug. DETAILED DESCRIPTION

[0028] The present invention will be further described below in conjunction with the accompanying drawings.

[0029] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside" and the like appear to indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, they are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0030] See also Figure 1-Figure 5 , One embodiment of the utility model provides a water-gas dual-purpose high-pressure flushing deep hole joint, comprising a deep hole shaft 1 defined with a plurality of channels, a first locking device 2 detachably arranged at one end of the deep hole shaft 1, a first joint 3 detachably arranged at one end of the deep hole shaft 1, a second locking device 4 detachably arranged at the other end of the deep hole shaft 1, and a second joint 5 detachably arranged at the other end of the deep hole shaft 1, the first joint 3 is sealedly connected to the deep hole shaft 1, the second joint 5 is sealedly connected to the deep hole shaft 1, the first joint 3 is detachably connected to the deep hole shaft 1 through the first locking device 2, and the second joint 5 is detachably connected to the deep hole shaft 1 through the second locking device 4, compressed air or pressure water enters from the first joint 3, passes through the channels and enters the second joint 5, and multiple channels are flushed at one time, burrs and iron chips are flushed out of the deep hole shaft 1, and the cleaning efficiency is high.

[0031] like Figure 1-Figure 5 As shown, the channels are evenly arranged around the central axis of the deep hole shaft 1, so that the flow of air and water is more stable.

[0032] like Figure 1-Figure 5 As shown, the channel includes a first section 101 and a second section 102 arranged in sequence, the first section 101 and the second section 102 extend in the axial direction, the first section 101 passes through one end of the deep hole shaft 1, the second section 102 is connected to the first section 101 at one end, and the other end is closed, the bottom of the second section 102 is inclinedly provided with an inclined hole section 103, one end of the inclined hole section 103 is connected to the second section 102, and one end of the inclined hole section 103 passes through the deep hole shaft 1, the second joint 5 includes a connecting seat 501, and is arranged on the side of the connecting seat 501 away from the connecting disk 104 The boss 502 and the connecting seat 501 are provided with a through hole 503 which penetrates them axially, and a joint body 504 which is sealed and inserted in the through hole 503. The connecting seat 501 is connected to the connecting disk 104 through the second locking device 4. The through hole 503 is connected to the inclined hole section 103. The connecting seat 501 is provided with an air groove 5011 on the side facing the connecting disk 104. The inclined hole section 103 is connected to the air groove 5011. The air groove 5011 is connected to the through hole 503. The inclined hole section 103 and the air groove 5011 cooperate to achieve a good air suction effect.

[0033] like Figure 1-Figure 5 As shown, a connecting disk 104 is provided at the other end of the deep hole shaft 1. The connecting disk 104 is detachably connected to the second joint 5 through the second locking device 4. The connecting disk 104 makes the installation of the second joint 5 more stable.

[0034] like Figure 1-Figure 5 As shown, a first sealing ring 6 is provided between the first joint 3 and one end of the deep hole shaft 1, a retaining edge 106 is provided at one end of the deep hole shaft 1 for blocking the first sealing ring 6, and a second sealing ring 7 is provided between the connecting plate 104 and the other end of the deep hole shaft 1, and the sealing ring improves the sealing performance.

[0035] like Figure 1-Figure 5 As shown, the second section 102 passes through the connecting plate 104 , and a plug 8 is tightly inserted into the end of the second section 102 facing away from the first section 101 , so as to prevent the second section 102 from leaking.

[0036] like Figure 1-Figure 5 As shown, two key slots 105 are symmetrically provided on the outer circumference of the deep hole shaft 1 , and the key slots 105 are convenient for installing the deep hole shaft 1 .

[0037] like Figure 1-Figure 5 As shown, the first locking device 2 and the second locking device 4 are locking clamps, which are easy to install and disassemble.

[0038] The above embodiments are merely descriptions for the purpose of clearly illustrating the present invention, and are not limitations on the implementation methods. Technicians in the relevant field may make other different forms of changes or modifications based on the above descriptions. It is not necessary and impossible to enumerate all implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A water-gas dual-purpose high-pressure flushing deep hole joint, characterized in that: It includes a deep hole shaft defined by multiple channels, a first locking device detachably arranged at one end of the deep hole shaft, a first joint detachably arranged at one end of the deep hole shaft, a second locking device detachably arranged at the other end of the deep hole shaft, and a second joint detachably arranged at the other end of the deep hole shaft, the first joint is sealed and connected to the deep hole shaft, the second joint is sealed and connected to the deep hole shaft, the first joint is detachably connected to the deep hole shaft through the first locking device, and the second joint is detachably connected to the deep hole shaft through the second locking device.

2. A water-gas dual-purpose high-pressure flushing deep hole joint according to claim 1, characterized in that: The holes are evenly arranged around the circumference of the central axis of the deep hole shaft.

3. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 2, characterized in that: The channel includes a first section and a second section arranged in sequence, the first section and the second section extend axially, the first section passes through one end of the deep hole shaft, one end of the second section is connected to the first section, and the other end is closed, an inclined hole section is tilted at the bottom of the second section, one end of the inclined hole section is connected to the second section, and one end of the inclined hole section passes through the deep hole shaft.

4. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 3, characterized in that: A connecting disk is provided at the other end of the deep hole shaft, and the connecting disk is detachably connected to the second joint via the second locking device.

5. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 4, characterized in that: The second joint includes a connecting seat, a boss arranged on the side of the connecting seat away from the connecting disk, the boss and the connecting seat are provided with a through hole axially passing through them, and a joint body sealed and inserted in the through hole, the connecting seat and the connecting disk are connected through the second locking device, and the through hole is connected to the inclined hole section.

6. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 5, characterized in that: An air groove is provided on a side of the connecting seat facing the connecting disk, the inclined hole section is communicated with the air groove, and the air groove is communicated with the through hole.

7. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 6, characterized in that: A first sealing ring is provided between the first joint and one end of the deep hole shaft, and a second sealing ring is provided between the connecting disk and the other end of the deep hole shaft.

8. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 4, characterized in that: The second section passes through the connecting plate, and a plug is inserted into one end of the second section away from the first section.

9. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 1, characterized in that: Two keyways are symmetrically arranged on the outer circumference of the deep hole shaft.

10. The water-gas dual-purpose high-pressure flushing deep hole joint according to claim 1, characterized in that: The first locking device and the second locking device are locking clamps.

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