Arc ion plating device

Abstract

The utility model relates to an arc ion plating device, which belongs to the field of arc ion plating and comprises a base and a plating chamber fixedly connected to the upper surface of the base, and an auxiliary structure for assisting in plating is arranged on the upper surface of the base. The auxiliary structure comprises a mounting groove formed in the upper surface of the base, a servo motor fixedly connected to the inner bottom wall of the mounting groove, a rotating rod fixedly connected to an output shaft of the servo motor, a supporting disc fixedly connected to the top end of the rotating rod, a positioning assembly arranged on the upper surface of the supporting disc and a containing disc. According to the arc ion plating device, continuous and stable rotation of the workpiece in the plating chamber is realized through the auxiliary structure, and the rotation mechanism ensures that an ion beam can uniformly bombard the surface of the workpiece at different angles and directions, so that the problems of non-uniform plating thickness, performance difference and the like caused by the fact that the workpiece is fixed in a traditional device are solved; and through rotary coating, the uniformity of the coating is improved, and the quality and consistency of the coating are also remarkably improved.

Description

Technical Field

[0001] The utility model relates to an arc ion plating device, belonging to the field of arc ion plating. Background Art

[0002] In the field of modern materials science and engineering, arc ion plating technology is an advanced surface treatment technology that is widely used in aerospace, automobile manufacturing, precision machinery and electronic products industries. This technology uses high-temperature plasma generated by arc discharge in a vacuum environment to accelerate ions of metal or non-metallic target materials and bombard them onto the surface of the workpiece to be plated, thereby forming a uniform, dense and excellent performance coating on the surface of the workpiece.

[0003] However, the ion beam will always bombard the same area of ​​the workpiece at the same angle and direction, resulting in excessively high ion concentration in that area, while other areas may be less bombarded, resulting in differences in coating thickness and uniformity. At the same time, heat will be concentrated in the bombarded area, forming a localized high-temperature zone, while other areas will be cooler. This uneven temperature distribution will cause uneven thermal stress distribution within the workpiece, which may cause the coating to crack, fall off, or degrade in performance. Utility Model Content

[0004] (1) Technical problems solved

[0005] In view of the shortcomings of the existing technology, the utility model provides an arc ion plating device, which has the advantages of improving the uniformity of the plating layer.

[0006] (2) Technical solution

[0007] In order to achieve the above-mentioned purpose of improving the uniformity of the coating, the present invention provides the following technical solution: an arc ion plating device, comprising a base and a coating chamber fixedly connected to the upper surface of the base, wherein the upper surface of the base is provided with an auxiliary structure for assisting the coating;

[0008] The auxiliary structure includes a mounting groove opened on the upper surface of the base, a servo motor fixedly connected to the bottom wall of the mounting groove, a rotating rod fixedly connected to the output shaft of the servo motor, a supporting plate fixedly connected to the top of the rotating rod, a positioning component arranged on the upper surface of the supporting plate, and a placement plate.

[0009] Furthermore, a sealed door is hinged on the front of the coating chamber, and a temperature sensor is fixedly connected to the inner left wall of the coating chamber.

[0010] Furthermore, a connecting valve is fixedly connected to the upper surface of the coating chamber, the air inlet end of the connecting valve is fixedly connected to the air inlet pipe, the air outlet end of the connecting valve is fixedly connected to the air outlet pipe, and the bottom end of the air outlet pipe passes through the upper surface of the coating chamber and extends to the inner side of the coating chamber.

[0011] Furthermore, a support frame is fixedly connected between the inner left wall and the inner right wall of the coating chamber, and the shape of the support frame is circular. The inner wall of the support frame is provided with a rotation groove adapted to the support plate, and the support plate is rotatably connected to the support frame through the rotation groove.

[0012] Furthermore, the positioning assembly includes two frames fixedly connected to the upper surface of the support plate, a threaded shaft rotatably connected to the inner side of the frame, a threaded block threadedly connected to the outer side of the threaded shaft, and positioning blocks respectively fixedly connected to the opposite side walls of the two threaded blocks.

[0013] Furthermore, the two frames are respectively located on the left and right sides of the placement tray, and the left and right walls of the placement tray are both provided with positioning openings adapted to the positioning blocks.

[0014] Furthermore, the opposite ends of the threaded shafts on the left and right sides are fixedly connected to handles, two limit grooves are provided on the inner side of the threaded block, and the inner sides of the limit grooves are slidably connected to limit rods, the left end of the left limit rod is fixedly connected to the inner left wall of the frame, and the right end of the right limit rod is fixedly connected to the inner right wall of the frame.

[0015] (3) Beneficial effects

[0016] Compared with the prior art, the present invention provides an arc ion plating device with the following features:

[0017] Beneficial effects:

[0018] This arc ion plating device realizes continuous and stable rotation of the workpiece in the coating chamber through an auxiliary structure. This rotation mechanism ensures that the ion beam can evenly bombard the workpiece surface at different angles and directions, thereby avoiding problems such as uneven coating thickness and performance differences caused by the fixed workpiece in traditional devices. Rotary coating not only improves the uniformity of the coating, but also significantly improves the quality and consistency of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the structure of the utility model;

[0020] Figure 2 for Figure 1 A partial enlarged schematic diagram of part A in the middle;

[0021] Figure 3 It is a three-dimensional diagram of the support frame in the structure of the utility model;

[0022] Figure 4 It is a front view of the utility model.

[0023] In the figure: 1. Base; 2. Coating chamber; 201. Sealed door; 3. Mounting slot; 4. Servo motor; 5. Rotating rod; 6. Support plate; 7. Placement plate; 8. Temperature sensor; 9. Connecting valve; 10. Inlet pipe; 11. Outlet pipe; 12. Support frame; 13. Frame; 14. Threaded shaft; 15. Threaded block; 16. Positioning block; 17. Handle; 18. Limit rod. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] See also Figures 1 to 4 An arc ion plating device includes a base 1 and a plating chamber 2 fixedly connected to the upper surface of the base 1. The upper surface of the base 1 is provided with an auxiliary structure for assisting the plating.

[0026] like Figure 1 As shown, the auxiliary structure includes a mounting groove 3 opened on the upper surface of the base 1, a servo motor 4 fixedly connected to the inner bottom wall of the mounting groove 3, a rotating rod 5 fixedly connected to the output shaft of the servo motor 4, a supporting plate 6 fixedly connected to the top of the rotating rod 5, a positioning component arranged on the upper surface of the supporting plate 6, and a placement plate 7.

[0027] It should be noted that a sealed door 201 is hinged on the front of the coating chamber 2 , and a temperature sensor 8 is fixedly connected to the inner left wall of the coating chamber 2 .

[0028] A connecting valve 9 is fixedly connected to the upper surface of the coating chamber 2, an air inlet end of the connecting valve 9 is fixedly connected to an air inlet pipe 10, an air outlet end of the connecting valve 9 is fixedly connected to an air outlet pipe 11, and the bottom end of the air outlet pipe 11 passes through the upper surface of the coating chamber 2 and extends to the inner side of the coating chamber 2.

[0029] A support frame 12 is fixedly connected between the inner left wall and the inner right wall of the coating chamber 2, and the outer shape of the support frame 12 is circular. The inner wall of the support frame 12 is provided with a rotation groove adapted to the support plate 6, and the support plate 6 is rotatably connected to the support frame 12 through the rotation groove.

[0030] The positioning assembly includes two frames 13 fixedly connected to the upper surface of the support plate 6, a threaded shaft 14 rotatably connected to the inner side of the frame 13, a threaded block 15 threadedly connected to the outer side of the threaded shaft 14, and positioning blocks 16 fixedly connected to the opposite side walls of the two threaded blocks 15.

[0031] The two frames 13 are respectively located on the left and right sides of the placement tray 7 , and the left and right walls of the placement tray 7 are both provided with positioning openings adapted to the positioning blocks 16 .

[0032] The opposite ends of the left and right threaded shafts 14 are fixedly connected to handles 17, and two limit grooves are provided on the inner side of the threaded block 15, and the inner sides of the limit grooves are slidably connected to limit rods 18. The left end of the left limit rod 18 is fixedly connected to the inner left wall of the frame 13, and the right end of the right limit rod 18 is fixedly connected to the inner right wall of the frame 13.

[0033] In addition, during the use of the positioning assembly, when the operator rotates the threaded shaft 14 through the handle 17, the threaded connection between the threaded shaft 14 and the threaded block 15 will drive the threaded block 15 to move axially. Due to the presence of the limiting groove and the limiting rod 18, the movement of the threaded block 15 is limited to a straight line direction.

[0034] The working principle of the above embodiment is:

[0035] When the servo motor 4 is started, its rotational power is transmitted to the support plate 6 through the rotating rod 5, driving the support plate 6 and the placement plate 7 thereon and the workpiece to perform continuous and stable rotational motion in the coating chamber 2. This rotation mechanism ensures that all points on the surface of the workpiece can be evenly bombarded by the ion beam, thereby achieving uniform coating.

[0036] The support frame 12 provided in the coating chamber 2 not only provides a stable support platform for the coating process, but also realizes a rotational connection with the support plate 6 through a rotation groove provided on its inner wall. This not only ensures the stability of the support plate 6 during the rotation process, but also avoids friction and wear caused by direct contact, thereby extending the service life of the equipment.

[0037] The coating chamber 2 is provided with a connecting valve 9, an air inlet pipe 10 and an air outlet pipe 11, which are used to fill and discharge the required gas into and out of the coating chamber 2. By adjusting the opening of the connecting valve 9, the flow rate of the air inlet pipe 10 and the air outlet pipe 11 can be controlled, thereby maintaining the constant and stable gas composition in the coating chamber 2;

[0038] After the coating is completed, the sealed door 201 is opened, and then the handle 17 is turned to drive the threaded shaft 14 to rotate. Since the threaded shaft 14 is threadedly connected to the threaded block 15, it will drive the threaded block 15 to move. The threaded block 15 then drives the positioning block 16 to move and disengage the positioning block 16 from the positioning groove of the placement tray 7, so that the user can take the placement tray 7 out of the coating chamber 2.

[0039] The electrical components mentioned in this article are all electrically connected to the main controller and the power supply. The main controller can be a conventional known device that controls a computer, etc., and the existing public power connection technology is not described in detail in this article.

[0040] It should be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not preclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0041] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An arc ion plating device, comprising a base (1) and a plating chamber (2) fixedly connected to the upper surface of the base (1), characterized in that: An auxiliary structure for assisting film coating is provided on the upper surface of the base (1); The auxiliary structure comprises a mounting groove (3) provided on the upper surface of the base (1), a servo motor (4) fixedly connected to the inner bottom wall of the mounting groove (3), a rotating rod (5) fixedly connected to the output shaft of the servo motor (4), a supporting plate (6) fixedly connected to the top end of the rotating rod (5), a positioning assembly arranged on the upper surface of the supporting plate (6), and a placement plate (7).

2. The arc ion plating device according to claim 1, characterized in that: A sealed door (201) is hinged on the front of the coating chamber (2), and a temperature sensor (8) is fixedly connected to the inner left side wall of the coating chamber (2).

3. The arc ion plating device according to claim 1, characterized in that: The upper surface of the coating chamber (2) is fixedly connected to a connecting valve (9), the air inlet end of the connecting valve (9) is fixedly connected to an air inlet pipe (10), the air outlet end of the connecting valve (9) is fixedly connected to an air outlet pipe (11), and the bottom end of the air outlet pipe (11) passes through the upper surface of the coating chamber (2) and extends to the inner side of the coating chamber (2).

4. The arc ion plating device according to claim 1, characterized in that: A support frame (12) is fixedly connected between the inner left wall and the inner right wall of the coating chamber (2), and the outer shape of the support frame (12) is circular. The inner wall of the support frame (12) is provided with a rotation groove adapted to the support plate (6), and the support plate (6) is rotatably connected to the support frame (12) through the rotation groove.

5. The arc ion plating device according to claim 1, characterized in that: The positioning assembly comprises two frames (13) fixedly connected to the upper surface of the support plate (6), a threaded shaft (14) rotatably connected to the inner side of the frame (13), a threaded block (15) threadedly connected to the outer side of the threaded shaft (14), and positioning blocks (16) respectively fixedly connected to opposite side walls of the two threaded blocks (15).

6. The arc ion plating device according to claim 5, characterized in that: The two frames (13) are respectively located on the left and right sides of the placement tray (7), and the left and right walls of the placement tray (7) are both provided with positioning openings adapted to the positioning blocks (16).

7. The arc ion plating device according to claim 5, characterized in that: The opposite ends of the threaded shafts (14) on the left and right sides are fixedly connected to handles (17), the inner side of the threaded block (15) is provided with two limiting grooves, and the inner sides of the limiting grooves are slidably connected to limiting rods (18), the left end of the left limiting rod (18) is fixedly connected to the inner left side wall of the frame (13), and the right end of the right limiting rod (18) is fixedly connected to the inner right side wall of the frame (13).

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