Stop piece synchronous lifting structure for high-vacuum coating equipment

Abstract

The utility model discloses a separation blade synchronous lifting structure for high vacuum coating equipment in the technical field of coating equipment, which comprises a substrate table lifting component, a substrate table driving component, a separation blade lifting component and a separation blade lifting component, the substrate table lifting component is mounted on a vacuum cavity, is used for driving the substrate table to lift and comprises a substrate table extending into the vacuum cavity and a substrate table driving component for controlling the substrate table to lift; the separation blade lifting assembly is mounted on the vacuum cavity, is used for driving the separation blade to lift and comprises the separation blade extending into the vacuum cavity and a separation blade driving assembly for controlling the separation blade to lift; the synchronous lifting assembly is installed on the vacuum cavity, used for driving the substrate table lifting assembly and the blocking piece lifting assembly to ascend and descend at the same time and comprises a lead screw lifting machine, a lifting nut of the lead screw lifting machine is connected with a synchronous plate, and the substrate table driving assembly and the blocking piece driving assembly are installed at the two ends of the synchronous plate. According to the utility model, the problem that the relative position adjustment of the existing substrate table and the separation blade cannot be realized is solved, the relative independent lifting of the substrate table and the separation blade can be realized, and the manual operation is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a high vacuum coating machine. Background Art

[0002] In existing technologies, the substrate stage within a coating machine is electrically controlled, allowing its height to be adjusted according to process requirements. This feature provides significant flexibility and operability in the coating process. However, the barrier currently installed below the substrate stage has certain limitations. The barrier is fixed relative to the substrate stage and can only be moved horizontally, with no lifting or lowering function.

[0003] When the substrate stage is adjusted to meet process requirements, the baffle cannot automatically adjust to the height of the stage, requiring manual adjustment. This manual adjustment method is not only inefficient and increases the operator's workload, but also can affect the accuracy and stability of the coating process due to manual inaccuracies. Furthermore, manual adjustments can cause production interruptions, reduce efficiency, and increase costs.

[0004] In summary, there are defects in the coordination between the substrate stage and the baffle in the existing coating machine, and a technical solution is needed that can automatically adjust the position of the baffle to adapt to the height change of the substrate stage. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides a baffle synchronous lifting structure for high vacuum coating equipment, which solves the problem that the relative position adjustment between the existing substrate stage and the baffle cannot be achieved.

[0006] The purpose of the utility model is achieved as follows: a baffle synchronous lifting structure for high vacuum coating equipment, comprising:

[0007] A substrate stage lifting assembly is installed on the vacuum chamber to drive the substrate stage to move up and down, including a substrate stage extending into the vacuum chamber and a substrate stage driving assembly for controlling the lifting of the substrate stage;

[0008] A baffle lifting assembly is installed on the vacuum chamber and is used to drive the baffle to rise and fall, including a baffle extending into the vacuum chamber and a baffle driving assembly for controlling the baffle to rise and fall;

[0009] A synchronous lifting assembly is installed on the vacuum chamber to simultaneously drive the substrate stage lifting assembly and the baffle lifting assembly to lift and lower. It includes a screw lifter, the lifting nut of the screw lifter is connected to the synchronous plate, and the substrate stage drive assembly and the baffle drive assembly are installed at both ends of the synchronous plate.

[0010] Furthermore, the substrate stage driving assembly includes a substrate stage telescopic bellows fixed on a synchronization plate, a substrate stage lifting motor mounting seat is installed on the top of the substrate stage telescopic bellows, a substrate stage lifting motor is installed on the substrate stage lifting motor mounting seat, an output shaft of the substrate stage lifting motor is connected to the substrate stage via a substrate stage connecting shaft, and the substrate stage connecting shaft passes through the substrate stage lifting motor mounting seat and the substrate stage telescopic bellows.

[0011] Furthermore, a substrate stage lifting locking assembly is also provided on the substrate stage lifting motor mounting seat, and the substrate stage lifting locking assembly includes a locking ring fixedly sleeved on the outer periphery of the substrate stage connecting shaft and a locking pin installed on the substrate stage lifting motor mounting seat, and the axial locking of the substrate stage connecting shaft is achieved by inserting the locking pin into the locking ring.

[0012] Furthermore, the baffle drive assembly includes a baffle telescopic bellows fixed on the synchronization plate, a baffle lifting motor mounting seat is installed on the top of the baffle lifting bellows, a baffle lifting motor is installed on the baffle lifting motor mounting seat, and the output shaft of the baffle lifting motor is connected to the baffle via a baffle connecting shaft, and the baffle connecting shaft passes through the baffle lifting motor mounting seat and the baffle telescopic bellows.

[0013] Furthermore, the synchronous lifting assembly also includes an elevator mounting seat, the screw elevator is installed on the elevator mounting seat, a guide rod is provided in the elevator mounting seat, and the synchronous plate is installed on the guide rod via a guide cylinder.

[0014] Furthermore, a limiting slot is provided on one side of the elevator mounting seat to cooperate with the synchronization plate to achieve limiting.

[0015] Compared with the prior art, the beneficial effect of the present invention is that: the present invention solves the problem of manual adjustment of the baffle after the substrate stage is lifted or lowered by setting a substrate stage lifting component and a baffle lifting component, and can achieve relatively independent lifting of the two. The present invention can also achieve synchronous lifting of the baffle and the substrate as needed, reducing manual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of the utility model.

[0018] Figure 2This is a schematic diagram of the structure of the substrate stage lifting component in the utility model.

[0019] Figure 3 This is a structural diagram of the middle baffle lifting assembly of the utility model.

[0020] Figure 4 This is a cross-sectional view of the middle baffle lifting assembly of the utility model.

[0021] Figure 5 This is a schematic diagram of the structure of the synchronous lifting component in the utility model.

[0022] Among them, 100 substrate stage lifting assembly, 101 substrate stage, 102 substrate stage drive assembly, 102a substrate stage telescopic bellows, 102b substrate stage lifting motor mounting base, 102c substrate stage lifting motor, 102d substrate stage connecting shaft, 102e bushing, 102f coupling, 102g support rod, 102h locking ring, 102i locking pin, 102j bracket, 200 baffle lifting assembly, 201 baffle, 202 baffle drive assembly, 202a baffle telescopic bellows, 202b baffle lifting motor mounting base, 202c baffle lifting motor, 202d baffle connecting shaft, 202e motor bracket, 300 synchronous lifting assembly, 301 screw elevator, 302 synchronous plate, 303 elevator mounting base, 303a limit slot, 304 guide rod, 305 guide cylinder, 400 vacuum chamber. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Example 1

[0025] As shown in the figure, a baffle synchronous lifting structure for high vacuum coating equipment includes:

[0026] The substrate stage lifting assembly 100 is installed on the vacuum chamber 400 to drive the substrate stage 101 to move up and down. The substrate stage 101 is provided in the vacuum chamber 400 and the substrate stage driving assembly 102 controls the movement of the substrate stage 101.

[0027] The baffle lifting assembly 200 is installed on the vacuum chamber 400 and is used to drive the baffle 201 to rise and fall. It includes the baffle 201 extending into the vacuum chamber 400 and the baffle driving assembly 202 for controlling the baffle 201 to rise and fall.

[0028] The synchronous lifting assembly 300 is installed on the vacuum chamber 400 and is used to simultaneously drive the substrate stage lifting assembly 100 and the baffle lifting assembly 200 to lift and lower. It includes a screw lift 301, and the lifting nut of the screw lift 301 is connected to the synchronous plate 302. The substrate stage drive assembly 102 and the baffle drive assembly 202 are installed at both ends of the synchronous plate 302.

[0029] During operation, when the substrate stage 101 and the baffle 201 need to move simultaneously, the screw elevator 301 in the synchronous lifting assembly 300 drives the synchronous plate 302 to move up and down, and the synchronous plate 302 can synchronously drive the substrate stage lifting assembly 100 and the baffle lifting assembly 200 to move up and down to achieve synchronous movement; when independent lifting is required, the substrate stage drive assembly 102 drives the substrate stage 101 to move up and down, and the baffle drive assembly 202 drives the baffle 201 to move up and down.

[0030] Furthermore, the substrate stage driving assembly 102 includes a substrate stage telescopic bellows 102a fixed on the synchronization plate 302, a substrate stage lifting motor mounting seat 102b is installed on the top of the substrate stage telescopic bellows 102a, a substrate stage lifting motor 102c is installed on the substrate stage lifting motor mounting seat 102b, an output shaft of the substrate stage lifting motor 102c is connected to the substrate stage 101 via a substrate stage connecting shaft 102d, and the substrate stage connecting shaft 102d passes through the substrate stage lifting motor mounting seat 102b and the substrate stage telescopic bellows 102a.

[0031] Specifically, the substrate stage lifting motor mounting base 102b has a T-shaped cross-section, and the substrate stage telescopic bellows 102a is inserted into the lower end. The outer periphery of the substrate stage connecting shaft 102d is also sleeved with a bushing 102e to achieve sealing. The output shaft of the substrate stage lifting motor 102c is connected to the substrate stage connecting shaft 102d by a coupling 102f. The substrate stage lifting motor 102c is fixedly mounted on the substrate stage lifting motor mounting base 102b through four support rods 102g. The gap between the four support rods 102g facilitates the installation of the photoelectric limit switch.

[0032] It should be noted that the substrate stage lifting motor 102c drives the substrate stage connecting shaft 102d to move up and down through the coupling 102f, thereby driving the substrate stage 101 to move up and down independently.

[0033] Furthermore, a substrate stage lifting locking assembly is also provided on the substrate stage lifting motor mounting base 102b. The substrate stage lifting locking assembly includes a locking ring 102h fixedly sleeved on the outer periphery of the substrate stage connecting shaft 102d and a locking pin 102i installed on the substrate stage lifting motor mounting base 102b. The axial locking of the substrate stage connecting shaft 102d is achieved by inserting the locking pin 102i into the locking ring 102h.

[0034] Specifically, the locking pin 102i is installed on the bracket 102j, and the outer periphery of the locking ring 102h is processed with a locking hole that cooperates with the locking pin 102i, which can achieve axial locking of the substrate stage connecting shaft 102d as needed.

[0035] Furthermore, the baffle drive assembly 202 includes a baffle expansion and contraction bellows 202a fixed on the synchronization plate 302, a baffle lifting motor mounting seat 202b is installed on the top of the baffle lifting motor mounting seat 202b, a baffle lifting motor 202c is installed on the baffle lifting motor mounting seat 202b, and the output shaft of the baffle lifting motor 202c is connected to the baffle 201 via the baffle connecting shaft 202d, and the baffle connecting shaft 202d passes through the baffle lifting motor mounting seat 202b and the baffle expansion and contraction bellows 202a.

[0036] Specifically, the upper section of the baffle telescopic bellows 202a extends to form a pipe, a bypass is provided on one side of the pipe, a baffle lifting motor mounting seat 202b is installed on the top of the pipe, a motor bracket 202e is provided on the baffle lifting motor mounting seat 202b, a baffle lifting motor 202c is installed on the motor bracket 202e, and the output shaft of the baffle lifting motor 202c is transmission-connected to the baffle connecting shaft 202d.

[0037] It should be noted that the baffle lifting motor 202c drives the baffle connecting shaft 202d to move up and down, thereby driving the baffle 201 to move up and down independently.

[0038] Furthermore, the synchronous lifting assembly 300 also includes an elevator mounting seat 303, the screw elevator 301 is installed on the elevator mounting seat 303, a guide rod 304 is provided in the elevator mounting seat 303, and the synchronous plate 302 is installed on the guide rod 304 via a guide cylinder 305.

[0039] It should be noted that the screw lift 301 drives the synchronous plate 302 to move up and down, and the arrangement of the guide cylinder 305 and the guide rod 304 ensures the stability of the lifting of the synchronous plate 302.

[0040] Furthermore, a limiting slot 303 a is provided on one side of the elevator mounting seat 303 to cooperate with the synchronization plate 302 to achieve limiting.

[0041] The above embodiments are only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A baffle synchronous lifting structure for high vacuum coating equipment, characterized in that: include: A substrate stage lifting assembly (100) is mounted on the vacuum chamber (400) and is used to drive the substrate stage (101) to move up and down, comprising a substrate stage (101) extending into the vacuum chamber (400) and a substrate stage driving assembly (102) for controlling the movement of the substrate stage (101); A baffle lifting assembly (200) is installed on the vacuum chamber (400) and is used to drive the baffle (201) to rise and fall, comprising a baffle (201) extending into the vacuum chamber (400) and a baffle driving assembly (202) for controlling the baffle (201) to rise and fall; A synchronous lifting assembly (300) is installed on the vacuum chamber (400) and is used to simultaneously drive the substrate stage lifting assembly (100) and the baffle lifting assembly (200) to lift and lower, and includes a screw lift (301), the lifting nut of the screw lift (301) is connected to the synchronous plate (302), and the substrate stage driving assembly (102) and the baffle driving assembly (202) are installed at both ends of the synchronous plate (302).

2. The baffle synchronous lifting structure for high vacuum coating equipment according to claim 1, characterized in that: The substrate stage drive assembly (102) comprises a substrate stage telescopic bellows (102a) fixed on a synchronization plate (302); a substrate stage lifting motor mounting seat (102b) is mounted on the top end of the substrate stage telescopic bellows (102a); a substrate stage lifting motor (102c) is mounted on the substrate stage lifting motor mounting seat (102b); an output shaft of the substrate stage lifting motor (102c) is connected to the substrate stage (101) via a substrate stage connecting shaft (102d); and the substrate stage connecting shaft (102d) is arranged to pass through the substrate stage lifting motor mounting seat (102b) and the substrate stage telescopic bellows (102a).

3. The baffle synchronous lifting structure for high vacuum coating equipment according to claim 2, characterized in that: A substrate stage lifting locking assembly is also provided on the substrate stage lifting motor mounting seat (102b), the substrate stage lifting locking assembly comprising a locking ring (102h) fixedly sleeved on the outer periphery of the substrate stage connecting shaft (102d) and a locking pin (102i) mounted on the substrate stage lifting motor mounting seat (102b), wherein the axial locking of the substrate stage connecting shaft (102d) is achieved by inserting the locking pin (102i) into the locking ring (102h).

4. A baffle synchronous lifting structure for high vacuum coating equipment according to any one of claims 1 to 3, characterized in that: The baffle drive assembly (202) comprises a baffle telescopic bellows (202a) fixed on a synchronization plate (302); a baffle lifting motor (202c) mounting seat (202b) is mounted on the top end of the baffle telescopic bellows (202a); a baffle lifting motor (202c) is mounted on the baffle lifting motor (202c) mounting seat (202b); an output shaft of the baffle lifting motor (202c) is connected to the baffle (201) via a baffle connecting shaft (202d); and the baffle connecting shaft (202d) is arranged to pass through the baffle lifting motor (202c) mounting seat (202b) and the baffle telescopic bellows (202a).

5. A baffle synchronous lifting structure for high vacuum coating equipment according to any one of claims 1 to 3, characterized in that: The synchronous lifting assembly (300) further comprises an elevator mounting seat (303), the screw elevator (301) is mounted on the elevator mounting seat (303), a guide rod (304) is provided in the elevator mounting seat (303), and the synchronous plate (302) is mounted on the guide rod (304) via a guide cylinder (305).

6. The baffle synchronous lifting structure for high vacuum coating equipment according to claim 5, characterized in that: A limiting slot (303a) is provided on one side of the elevator mounting seat (303) to cooperate with the synchronization plate (302) to achieve limiting.

Images