Reducing ring for water cooling screen of single crystal furnace

Abstract

The utility model discloses a reducing ring for a water cooling screen of a single crystal furnace, which comprises the water cooling screen with an outer screen and an inner screen, and reducing rings for a plurality of crystal pulling specifications are lapped in the inner screen. The variable-diameter ring for the water-cooling screen of the single crystal furnace comprises the water-cooling screen with an outer screen and an inner screen, and variable-diameter rings for a plurality of crystal pulling specifications are lapped in the inner screen.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing, in particular to a diameter reducing ring used for a water cooling screen of a single crystal furnace. Background Art

[0002] During the Czochralski process, a circulating water circuit is connected to the cooling plate to absorb the heat emitted by the solidifying ingot through thermal radiation. This component is used to change the temperature gradient and increase the ingot pulling rate. While ensuring safety, the pulling speed must be increased as much as possible to maximize production.

[0003] Currently, when using water-cooling screens to pull crystal rods, since crystal rods have multiple specifications and sizes, there are many types of corresponding water-cooling screens. A single water-cooling screen is expensive, and the cost of purchasing parts increases. Moreover, if the market no longer demands a certain size of crystal rod, the corresponding water-cooling screen will be idle and useless. If a large-sized water-cooling screen is used to pull small-sized crystal rods, the energy absorbed by thermal radiation will be reduced, thereby reducing the pulling speed and affecting the output. If a small-sized water-cooling screen is used to pull large-sized crystal rods, the CCD liquid nozzle distance will not be clearly captured, resulting in problems such as wire breakage.

[0004] In view of this, this application is filed. Utility Model Content

[0005] The purpose of the utility model is to provide a reducing ring for a water-cooling screen of a single crystal furnace. By overlapping the reducing ring inside the water-cooling screen, the demand for pulling crystal rods of different specifications can be achieved by simply replacing the reducing ring, thereby solving the problems existing in the prior art.

[0006] In order to solve the above technical problems, the present invention adopts the following solutions:

[0007] A reducing ring for a water-cooling screen of a single crystal furnace comprises a water-cooling screen having an outer screen and an inner screen, wherein reducing rings for multiple crystal pulling specifications are overlapped inside the inner screen.

[0008] The utility model overlaps a reducing ring inside the water-cooling screen. When placing the reducing ring, the entire reducing ring is placed inside the water-cooling screen so that the bottom end of the reducing ring passes through the bottom end of the inclined wall of the water-cooling screen. The reducing ring is overlapped on the inner screen to complete the assembly work. When dismantling, it is only necessary to move the bottom end of the reducing ring away from the bottom end of the water-cooling screen and take it out, so that the reducing ring is easy to disassemble and assemble in the water-cooling screen. The inner diameter of the water-cooling screen is changed by the reducing ring. Therefore, in the process of using crystal rods of different specifications, only the reducing ring needs to be replaced, thereby avoiding the cost and installation problems caused by replacing water-cooling screens of corresponding specifications.

[0009] Further preferably, the reducing ring includes a first ring and a second ring, the first ring is located above the second ring, the inner screen includes an inclined wall and a vertical wall connected to each other, the inclined wall is located above the vertical wall, the outer wall of the first ring is in contact with the inclined wall, and the outer wall of the second ring is in contact with the vertical wall.

[0010] Further preferably, the connection position of the first ring and the second ring is consistent with the connection position of the inclined wall and the vertical wall.

[0011] Further preferably, the first ring is a variable diameter ring, the second ring is a constant diameter ring, and the inner diameter of the first ring is greater than or equal to the inner diameter of the second ring.

[0012] Further preferably, the height of the first ring is smaller than that of the inclined wall, and the height of the second ring is consistent with that of the vertical wall.

[0013] Further preferably, the inner diameters of the first ring and the second ring are 300-340 mm.

[0014] Further preferably, the width of the first ring and the second ring is 8-22 mm.

[0015] Further preferably, the reducing ring is made of stainless steel 316L.

[0016] The utility model has the beneficial effects:

[0017] The utility model provides a reducing ring, wherein the first ring is used for assembly and fixation in the water-cooling screen, and the second ring is used for camera capture in the water-cooling screen. At the same time, the inner diameter of the second ring meets the requirements for pulling crystal rods of certain specifications. The reducing ring is easy to assemble and disassemble, thereby improving the efficiency of assembling and disassembling and saving the cost of crystal pulling. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the assembly structure of the utility model and the water cooling screen;

[0019] Figure 2 It is a structural diagram of the utility model;

[0020] Figure 3 It is a schematic cross-sectional structural diagram of the present utility model.

[0021] Reference numerals: 1-first ring, 2-second ring, 3-water cooling screen, 30-inner screen, 300-inclined wall, 301-vertical wall, 31-outer screen. DETAILED DESCRIPTION

[0022] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0023] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0025] Example 1

[0026] Embodiment 1 of the present invention is a reducing ring for a water-cooling screen 3 of a single crystal furnace, comprising a water-cooling screen 3 having an outer screen 31 and an inner screen 30, wherein the inner screen 30 is overlapped with a reducing ring for multiple crystal pulling specifications.

[0027] Reference Figures 1 to 3 The utility model overlaps a reducing ring inside the water-cooling shield 3. When placing the reducing ring, the entire reducing ring is placed inside the water-cooling shield 3 so that the bottom end of the reducing ring passes through the bottom end of the inclined wall 300 of the water-cooling shield 3. The reducing ring is overlapped on the inner shield 30 to complete the assembly work. When dismantling, it is only necessary to take out the bottom end of the reducing ring away from the bottom end of the water-cooling shield 3, so that the reducing ring is easy to disassemble and assemble in the water-cooling shield 3. The inner diameter of the water-cooling shield 3 is changed by the reducing ring. Therefore, in the process of changing the crystal rods of different specifications, only the reducing ring needs to be replaced, avoiding the cost and installation problems caused by replacing the water-cooling shield 3 of the corresponding specifications.

[0028] In some preferred embodiments, the reducing ring includes a first ring 1 and a second ring 2, wherein the first ring 1 is located above the second ring 2. The inner shield 30 includes an interconnected inclined wall 300 and a vertical wall 301, wherein the inclined wall 300 is located above the vertical wall 301. The outer wall of the first ring 1 contacts the inclined wall 300, and the outer wall of the second ring 2 contacts the vertical wall 301. The connection position between the first ring 1 and the second ring 2 coincides with the connection position between the inclined wall 300 and the vertical wall 301. The first ring 1 is a reducing circular ring, and the second ring 2 is a constant diameter circular ring. The inner diameter of the first ring 1 is greater than or equal to the inner diameter of the second ring 2.

[0029] Specifically, the reducing ring includes a first ring 1 located at the top and a second ring 2 located at the bottom. During assembly, the first ring 1 contacts the inclined wall 300 of the inner shield 30, while the second ring 2 contacts the vertical wall 301 of the inner shield 30. The connection between the first and second rings 1 and 2 coincides with the connection between the inclined wall 300 and the vertical wall 301. The reducing ring 1, with its reduced diameter, ensures a secure assembly within the inner shield 30, eliminating the need for additional locking components and preventing the reducing ring from falling within the water-cooled shield 3. This facilitates assembly and disassembly, saving time. The inner diameter of the first ring 1 can be selected based on the desired ingot size.

[0030] Moreover, the connection angle between the first ring 1 and the second ring 2 is consistent with the connection angle between the inclined wall 300 and the vertical wall 301 in the inner shield 30, so that the reducing ring is assembled in the water-cooling shield 3 without gaps, thereby improving the water cooling effect.

[0031] In some preferred embodiments, the height of the first ring 1 is less than the inclined wall 300, and the height of the second ring 2 is consistent with the height of the vertical wall 301. The length of the second ring 2 is designed to follow the vertical wall 301 of the water-cooling shield 3 downward without affecting the camera's capture at this location. The second ring 2 is shorter because only the reducing ring is assembled and fixed to the water-cooling shield 3 at this location, preventing the reducing ring from falling inside the water-cooling shield 3.

[0032] In some preferred embodiments, the inner diameters of the first and second rings 1 and 2 are 300-340 mm. The water-cooling shield 3 in this embodiment is designed for 12-inch ingots. For example, when pulling 11-inch ingots, the inner diameter of the reducing ring is 330-340 mm, and when pulling 10-inch ingots, the inner diameter of the reducing ring is 300-310 mm. When the pulling size changes, simply replacing the reducing ring can meet the production requirements of ingots of different specifications. The specific inner diameter of the reducing ring can also be adjusted according to the crystal pulling requirements.

[0033] In some preferred embodiments, the width of the first ring 1 and the second ring 2 ranges from 8 to 22 mm. The widths of the first ring 1 and the second ring 2 are set based on the specific inner diameter, so that the final inner diameter meets the requirements for pulling 11-inch and 10-inch ingots.

[0034] In some preferred embodiments, the reducer ring is made of 316L stainless steel. The first ring 1 and the second ring 2 of the reducer ring are aligned with the water-cooling shield 3 to ensure a tight fit. The 316L stainless steel material allows thermal contact between the water-cooling shield 3 and the reducer ring, achieving a water-cooling cooling effect with excellent cooling effect.

[0035] The working principle of the present invention: When in use, according to the requirements of the crystal rod drawing specifications, the inner diameter of the matching reducing ring is selected, so that the second ring 2 in the reducing ring is passed through the bottom end of the inclined wall 300 of the water-cooled screen 3, so that the outer walls of the first ring 1 and the second ring 2 are tightly fitted with the inclined wall 300 and the vertical wall 301 respectively, so that thermal contact is formed between the water-cooled screen 3 and the reducing ring, and the water-cooled cooling effect is improved. When replacing the reducing ring, it is only necessary to lift it from the bottom up from the reducing ring. The present invention sets a reducing ring, and the first ring 1 is used for assembly and fixation in the water-cooled screen 3, and the second ring 2 is used for camera capture in the water-cooled screen 3. At the same time, the inner diameter of the second ring 2 meets the requirements of drawing crystal rods of certain specifications. The reducing ring is easy to disassemble and assemble, which improves the disassembly and assembly efficiency and saves the cost of crystal pulling.

[0036] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Based on the technical essence of the present invention and within the spirit and principles of the present invention, any simple modification, equivalent replacement and improvement of the above embodiment shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A reducing ring for a water cooling plate of a single crystal furnace, characterized in that: The invention comprises a water-cooled screen (3) having an outer screen (31) and an inner screen (30), wherein a reducing ring for a plurality of crystal pulling specifications is overlapped inside the inner screen (30), wherein the reducing ring comprises a first ring (1) and a second ring (2), wherein the first ring (1) is located above the second ring (2), and the inner screen (30) comprises an inclined wall (300) and a vertical wall (301) connected to each other, wherein the inclined wall (300) is located above the vertical wall (301), wherein the outer wall of the first ring (1) contacts the inclined wall (300), and the outer wall of the second ring (2) contacts the vertical wall (301).

2. The reducing ring for the water cooling plate of a single crystal furnace according to claim 1, characterized in that: The connection position of the first ring (1) and the second ring (2) is consistent with the connection position of the inclined wall (300) and the vertical wall (301).

3. The reducing ring for the water cooling plate of a single crystal furnace according to claim 1, characterized in that: The first ring (1) is a variable diameter ring, the second ring (2) is a constant diameter ring, and the inner diameter of the first ring (1) is greater than or equal to the inner diameter of the second ring (2).

4. The reducing ring for a water cooling plate of a single crystal furnace according to claim 1, characterized in that: The height of the first ring (1) is smaller than that of the inclined wall (300), and the height of the second ring (2) is consistent with that of the vertical wall (301).

5. The reducing ring for the water cooling plate of a single crystal furnace according to claim 1, characterized in that: The inner diameters of the first ring (1) and the second ring (2) are 300-340 mm.

6. The reducing ring for a water cooling plate of a single crystal furnace according to claim 1, characterized in that: The width of the first ring (1) and the second ring (2) is 8 to 22 mm.

7. The reducing ring for a water cooling plate of a single crystal furnace according to claim 1, characterized in that: The reducing ring is made of stainless steel 316L.

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