Single crystal furnace protection plate and single crystal furnace

Abstract

The utility model discloses a single crystal furnace guard plate and a single crystal furnace, the single crystal furnace guard plate comprises a guard plate structure, the guard plate structure comprises a first guard plate and a second guard plate, the single crystal furnace guard plate also comprises a fixing assembly, the fixing assembly comprises connecting strips symmetrically arranged on the sides of the first guard plate and the second guard plate, and the sides of the connecting strips are connected with connecting parts in a penetrating manner; the alignment assembly comprises a plurality of elastic insertion strips arranged on the edge side of the first protection plate, the ends of the elastic insertion strips are connected to the edge side of the second protection plate in a penetrating and inserting mode, and a clamping part is arranged on the edge side of the second protection plate; the alignment assembly is arranged at the connecting position of the first protection plate and the second protection plate, when a damaged protection plate structure is replaced by installation personnel, the elastic insertion strip on the side of the first protection plate is inserted into the side of the second protection plate, the insertion position is fixed through the clamping part, the alignment and positioning operation facilitates rapid alignment, insertion and fixation of the connecting part, and the installation efficiency is improved. The phenomenon that when the connecting part penetrates through the fixed guard plate structure, the guard plate structure is staggered, and fixing of the fixing assembly is affected is avoided.

Description

Technical Field

[0001] The utility model relates to the field of single crystal furnaces, in particular to a single crystal furnace guard plate and a single crystal furnace. Background Art

[0002] The single crystal furnace is an important equipment for growing single crystal silicon and other materials. The guard plate is one of the key components of the single crystal furnace. It is mainly set at the bottom of the crucible inside the furnace body to protect the crucible. The guard plate is generally fixed to the outside of the crucible support rod with a splicing structure, and the splicing is fixed with high-temperature resistant bolts.

[0003] However, when the single crystal furnace guard plate is damaged after long-term use, the damaged guard plate needs to be replaced. However, when installing the guard plate, the guard plate is manually lifted to align the guard plate bolt fixing holes. Manual lifting can easily cause the guard plate to be misaligned. The misalignment of the guard plate affects the insertion and fixation of the bolts, resulting in the need to continuously spend time to adjust the guard plate position offset so that all the bolt fixing holes are aligned and the new guard plate is aligned and fixed with the old guard plate. Therefore, in order to solve the above-mentioned problems of guard plate misalignment and alignment, the utility model proposes a single crystal furnace guard plate and a single crystal furnace. Utility Model Content

[0004] The purpose of the present invention is to provide a single crystal furnace guard plate and a single crystal furnace to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a single crystal furnace guard plate, comprising a guard plate structure, wherein the guard plate structure comprises a first guard plate and a second guard plate, and further comprising:

[0006] A fixing assembly, which is used to connect and fix the first guard plate and the second guard plate, and includes connecting strips symmetrically arranged on the sides of the first guard plate and the second guard plate, and the sides of the connecting strips are interspersed with connecting portions for fixing the connecting strips;

[0007] An alignment assembly is used for the initial positioning of the first guard plate and the second guard plate during installation. The alignment assembly includes a plurality of elastic inserts arranged on the side of the first guard plate. The ends of the plurality of elastic inserts are inserted and connected to the side of the second guard plate. The side of the second guard plate is provided with a clamping portion for locking the elastic inserts.

[0008] Preferably, the clamping portion includes a locking groove opened on the side of the second guard plate, and the end of the elastic insert is provided with a clamping protrusion, and the locking groove is used to lock the clamping protrusion.

[0009] Preferably, the engaging protrusion is configured to be wedge-shaped, and the wedge shape is used to assist in the insertion of the elastic insert.

[0010] Preferably, the connecting portion includes a connecting bolt, the end of which is inserted and connected to the side of the connecting strip, and a connecting nut is sleeved on the outer side of the connecting bolt, and the connecting bolt is used to fix the overlapping connecting strips.

[0011] Preferably, a plurality of connection holes are provided on the side of the connection strip, and the connection holes are used for connection with the connection bolts.

[0012] A single crystal furnace adopts the above-mentioned single crystal furnace guard plate, including a furnace shell, a support rod is provided at the bottom of the inner cavity of the furnace shell, a crucible is provided on the top of the support rod, and the guard plate structure is sleeved on the outside of the support rod and located at the bottom of the crucible.

[0013] Preferably, a heating plate is provided in the top inner cavity of the furnace shell, and the heating plate is used to heat the crucible.

[0014] Preferably, a furnace cover is provided on the top of the furnace shell.

[0015] The technical effects and advantages of this utility model are:

[0016] The utility model provides an alignment component at the connection between the first guard plate and the second guard plate. When the installer replaces the damaged guard plate structure, he first inserts the elastic insert strip on the side of the first guard plate into the side of the second guard plate, and the clamping part fixes the insertion. This alignment and positioning operation facilitates the rapid alignment, insertion and fixation of the connection part, and avoids the guard plate structure from being misaligned when the connection part is inserted into and fixed to the guard plate structure, thereby affecting the fixation of the fixing component. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a cross-sectional schematic diagram of the entire utility model.

[0018] Figure 2 This is one of the structural schematic diagrams of the single crystal furnace guard plate of the present utility model.

[0019] Figure 3 This is the second structural diagram of the single crystal furnace guard plate of the present utility model.

[0020] Figure 4 This is the third structural diagram of the single crystal furnace guard plate of the present utility model.

[0021] Figure 5 For this utility model Figure 4 A magnified view of the structure at point A in the middle.

[0022] Figure 6 This is a schematic structural diagram of the connection between the first guard plate and the second guard plate of the present invention.

[0023] Figure 7 It is a cross-sectional view of the alignment component of the present invention.

[0024] In the figure: 1. furnace shell; 101. heating plate; 2. support rod; 201. crucible; 3. guard plate structure; 301. first guard plate; 302. second guard plate; 3021. locking groove; 4. connecting strip; 401. connecting hole; 5. connecting bolt; 501. connecting nut; 6. alignment assembly; 601. elastic insert; 602. snap-on protrusion; 7. furnace cover. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] The utility model provides Figure 1-7 A single crystal furnace guard plate shown includes a guard plate structure 3, the guard plate structure 3 includes a first guard plate 301 and a second guard plate 302, and also includes a fixing component and an alignment component 6;

[0027] It should be noted that the first guard plate 301 and the second guard plate 302 are made of silicon carbide, the fixing assembly is used to connect and fix the first guard plate 301 and the second guard plate 302, and the alignment assembly 6 is used for the initial installation and positioning of the first guard plate 301 and the second guard plate 302;

[0028] Specifically, the fixing assembly includes a connecting strip 4 symmetrically arranged on the sides of the first guard plate 301 and the second guard plate 302, and a connecting portion for fixing the connecting strip 4 is inserted through the side of the connecting strip 4;

[0029] It should be noted that the connecting strip 4 is fixed to the first guard plate 301 and the second guard plate 302 by welding. The material of the connecting strip 4 is silicon carbide. The connecting portion includes a connecting bolt 5. The end of the connecting bolt 5 is inserted and connected to the side of the connecting strip 4. The outer side of the connecting bolt 5 is provided with a connecting nut 501. The connecting bolt 5 is used to fix the overlapping connecting strips 4.

[0030] Specifically, a plurality of connection holes 401 are opened on the side of the connection bar 4, and the connection holes 401 are used for connecting the connection bolts 5. The material of the connection bolts 5 and the connection nuts 501 is a high-temperature resistant metal material, thereby splicing and fixing the first guard plate 301 and the second guard plate 302;

[0031] Specifically, the alignment assembly 6 includes a plurality of elastic inserts 601 provided on the side of the first guard plate 301. The ends of the plurality of elastic inserts 601 are inserted and connected to the side of the second guard plate 302. The side of the second guard plate 302 is provided with a clamping portion for locking the elastic inserts 601.

[0032] It should be noted that the elastic insert 601 is made of titanium alloy, and its end is connected to the side of the first guard plate 301 by interpenetration. The interpenetration is filled and fixed with a silicon carbide welding rod. The clamping portion includes a locking groove 3021 opened on the side of the second guard plate 302. The end of the elastic insert 601 is provided with a clamping protrusion 602, and the locking groove 3021 is used to lock the clamping protrusion 602.

[0033] Specifically, the snap-fit ​​protrusion 602 is set to a wedge shape, which is used to assist the elastic insert 601 in inserting into the locking groove 3021. The locking groove 3021 is connected to the surface of the second guard plate 302. By pressing the snap-fit ​​protrusion 602, the elastic insert 601 can be separated from the locking groove 3021.

[0034] A single crystal furnace adopts the above-mentioned single crystal furnace guard plate, including a furnace shell 1, a support rod 2 is provided at the bottom of the inner cavity of the furnace shell 1, a crucible 201 is provided on the top of the support rod 2, and a guard plate structure 3 is sleeved on the outside of the support rod 2 and located at the bottom of the crucible 201;

[0035] The cross-sectional diameter of the top of the support rod 2 is smaller than the cross-sectional diameter of the bottom, and the cross-sectional diameter of the bottom of the guard plate structure 3 is larger than the cross-sectional diameter of the top of the support rod 2 and smaller than the cross-sectional diameter of the bottom, so that the guard plate structure 3 is fixed to the top of the support rod 2;

[0036] Specifically, a heating plate 101 is provided in the top inner cavity of the furnace shell 1 . The heating plate 101 is used to heat the crucible 201 . The heating plate 101 is heated by energizing electrodes. A furnace cover 7 is provided on the top of the furnace shell 1 .

[0037] During actual use, when the installer replaces the damaged guard plate structure 3, he first inserts the elastic insert strip 601 on the side of the first guard plate 301 into the side of the second guard plate 302, and the clamping part fixes the insertion. This alignment and positioning operation facilitates the rapid alignment, insertion and fixation of the connecting bolt 5, and avoids the misalignment of the first guard plate 301 and the second guard plate 302 when the connecting bolt 5 is inserted and fixed. This affects the insertion and fixation of the connecting bolt 5.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A single crystal furnace guard plate, comprising a guard plate structure (3), characterized in that: The guard plate structure (3) comprises a first guard plate (301) and a second guard plate (302), and further comprises: A fixing assembly, the fixing assembly being used for connecting and fixing the first guard plate (301) and the second guard plate (302), the fixing assembly comprising connecting strips (4) symmetrically arranged on the sides of the first guard plate (301) and the second guard plate (302), the sides of the connecting strips (4) being interspersed with connecting portions for fixing the connecting strips (4); An alignment component (6) is used for preliminary positioning of the first guard plate (301) and the second guard plate (302) during installation. The alignment component (6) comprises a plurality of elastic inserts (601) arranged on the side of the first guard plate (301). The ends of the plurality of elastic inserts (601) are inserted and connected to the side of the second guard plate (302). The side of the second guard plate (302) is provided with a clamping portion for locking the elastic inserts (601).

2. A single crystal furnace guard plate according to claim 1, characterized in that: The clamping portion comprises a locking groove (3021) provided on the side of the second guard plate (302); the end of the elastic inserting strip (601) is provided with a clamping protrusion (602); and the locking groove (3021) is used to lock the clamping protrusion (602).

3. A single crystal furnace guard plate according to claim 2, characterized in that: The locking protrusion (602) is configured to be wedge-shaped, and the wedge shape is used to assist in the insertion of the elastic insert (601).

4. The single crystal furnace guard plate according to claim 1, characterized in that: The connecting portion comprises a connecting bolt (5), the end of which is inserted and connected to the side of the connecting strip (4), and a connecting nut (501) is sleeved on the outer side of the connecting bolt (5). The connecting bolt (5) is used to fix the overlapping connecting strips (4).

5. The single crystal furnace guard plate according to claim 4, characterized in that: A plurality of connection holes (401) are provided on the side of the connection bar (4), and the connection holes (401) are used for connecting the connection bolts (5).

6. A single crystal furnace, comprising the single crystal furnace guard plate according to any one of claims 1 to 5, characterized in that: The invention comprises a furnace shell (1), a support rod (2) is provided at the bottom of the inner cavity of the furnace shell (1), a crucible (201) is provided at the top of the support rod (2), and the guard plate structure (3) is sleeved on the outside of the support rod (2) and located at the bottom of the crucible (201).

7. A single crystal furnace according to claim 6, characterized in that: A heating plate (101) is provided in the top inner cavity of the furnace shell (1), and the heating plate (101) is used for heating the crucible (201).

8. The single crystal furnace according to claim 7, characterized in that: A furnace cover (7) is provided on the top of the furnace shell (1).

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