Auxiliary chromaticity test device for wafer

Abstract

The utility model discloses a chromaticity test auxiliary device for wafers, which comprises an operation table, a wafer bearing table, an operation rod, a chromaticity tester, a bearing frame and an adjusting frame assembly, the adjusting frame assembly is fixedly arranged at one end of the operation table, the bearing frame is adjustably arranged on the adjusting frame assembly, the chromaticity tester is fixedly arranged on the bearing frame, and the chromaticity tester is fixedly arranged on the wafer bearing table. A sliding groove is formed in the operation table, the operation rod is arranged in the sliding groove in a sliding mode and matched with the sliding groove, the wafer bearing table is fixedly arranged on the operation rod and arranged between the bearing frame and the operation table, a loading groove matched with a wafer is formed in the upper surface of the wafer bearing table, and the loading groove is matched with the chromaticity tester. And a through detection gap is formed in the wafer bearing table. The chromaticity tester is fixed on the operation table through the bearing frame, then the wafer is placed on the wafer bearing table, and then the wafer bearing table is pushed to move to the detection position of the chromaticity tester for detection, so that the operation is simple, the detection efficiency is improved, and accurate detection can be realized.

Description

Technical Field

[0001] The utility model relates to the field of wafer testing, in particular to a chromaticity testing auxiliary device for wafers. Background Art

[0002] Colorimetric detection of wafers plays an important role in the wafer production process. The colorimeter is a device used for wafer colorimetric detection. The existing detection method is to install the colorimeter and then manually hold the wafer for detection, or place the wafer on a workbench and have workers lift the colorimeter for detection. Both working methods are very inconvenient, resulting in not only low detection efficiency but also large detection errors. Utility Model Content

[0003] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a colorimetric testing auxiliary device for wafers.

[0004] The purpose of this utility model is achieved through the following technical solutions:

[0005] A colorimetry auxiliary device for wafers comprises an operating table, a wafer carrier, an operating rod, a colorimeter, a carrier frame and an adjustment frame assembly, wherein the adjustment frame assembly is fixedly arranged on one end of the operating table, the carrier frame is adjustably arranged on the adjustment frame assembly, the colorimeter is fixedly arranged on the carrier frame, a sliding groove is provided on the operating table, the operating rod is slidably arranged in the sliding groove and cooperates with the sliding groove, the wafer carrier frame is fixedly arranged on the operating rod, and the wafer carrier frame is arranged between the carrier frame and the operating table, a loading groove cooperating with the wafer is provided on the upper surface of the wafer carrier frame, the loading groove cooperates with the colorimeter, and a penetrating detection notch is provided on the wafer carrier frame.

[0006] Furthermore, the cross section of the operating rod is square, the sliding groove is provided with a rotation hole that cooperates with the operating rod, and four detection notches are evenly arranged on the wafer support table.

[0007] Furthermore, a positioning groove is provided on the operating table, and a positioning block is detachably provided on the positioning groove, and the positioning block cooperates with the wafer support table.

[0008] Furthermore, the cross section of the wafer support platform is square, and the inner side of the positioning block is right-angled and matched with the corner of the wafer support platform.

[0009] Furthermore, the adjustment frame assembly includes a guide column, a locking ring and a locking rod. Two guide columns are fixedly provided on the operating table, and the supporting frame is slidably provided on the guide columns. Two locking rings cooperating with the guide columns are fixedly provided on the supporting frame. The locking ring is threadedly engaged with the locking rod, and the end of the locking rod is engaged with the guide column.

[0010] Furthermore, a micrometer is provided on the operating table, and the end of the micrometer cooperates with the supporting frame.

[0011] Furthermore, at least three supporting legs are provided under the operating table, and all the supporting legs are not provided on the same straight line.

[0012] Furthermore, an adjustment seat is provided on the lower end of the supporting foot, and the adjustment seat is threadedly engaged with the supporting foot.

[0013] Furthermore, the colorimeter is fixed to the carrier frame via a locking belt.

[0014] The beneficial effects of the utility model are:

[0015] 1) In this technology, the colorimeter is fixed to the operating table through a carrier, and then the wafer is placed on the wafer stage, which is then pushed and moved to the detection position of the colorimeter for detection. This not only simplifies the operation and improves the detection efficiency, but also enables accurate detection.

[0016] 2) In this technology, a detection gap is set on the wafer stage, which is convenient for detecting the wafer on the wafer stage of the colorimeter and for removing the wafer on the wafer stage.

[0017] 3) In this technology, an adjustment seat is provided on the support foot, which can effectively level the operating table. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A three-dimensional diagram of the device when placing or removing a wafer;

[0019] Figure 2 This is a three-dimensional structural diagram of the device when detecting wafers;

[0020] Figure 3 This is a three-dimensional structural diagram of the operating table;

[0021] Figure 4 It is a three-dimensional connection structure diagram between the film holding platform and the operating rod;

[0022] In the figure, 1-operating table, 2-wafer holding table, 3-operating lever, 4-colorimeter, 5-carrying frame, 6-sliding slot, 7-wafer, 8-loading slot, 9-detection notch, 10-positioning slot, 11-positioning block, 12-guide column, 13-locking ring, 14-locking rod, 15-micrometer, 16-support foot, 17-adjusting seat, 18-locking belt, 19-rotation hole. DETAILED DESCRIPTION

[0023] The following will be combined with the embodiments to clearly and completely describe the technical solutions of the present invention. Obviously, the embodiments described are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work shall fall within the scope of protection of the present invention.

[0024] See Figure 1-Figure 4 , the utility model provides a technical solution:

[0025] A colorimetric test auxiliary device for wafers includes an operating table 1, a wafer carrier 2, an operating rod 3, a colorimetric tester 4, a carrier 5, and an adjustment frame assembly. The adjustment frame assembly is fixedly mounted on one end of the operating table 1, the carrier 5 is adjustably mounted on the adjustment frame assembly, the colorimetric tester 4 is fixedly mounted on the carrier 5, the operating table 1 is provided with a sliding groove 6, the operating rod 3 is slidably mounted in the sliding groove 6 and cooperates with the sliding groove 6, the wafer carrier 2 is fixedly mounted on the operating rod 3, and the wafer carrier 2 is disposed between the carrier 5 and the operating table 1, the upper surface of the wafer carrier 2 is provided with a loading groove 8 that cooperates with the wafer 7, the loading groove 8 cooperates with the colorimetric tester 4, and the wafer carrier 2 is provided with a penetrating detection notch 9. The colorimetric tester 4 is fixed to the carrier 5 by a locking belt 18. The operating table 1 is used to mount the operating rod 3 and the adjustment frame assembly, the adjustment frame assembly is used to adjust the installation height of the carrier 5, and the carrier 5 is used to mount the colorimetric tester 4 in the prior art and is fixed by the locking belt 18 in the prior art. The operating rod 3 is used to slide the carrier 5 in the sliding groove 6. Wafers 7 can be placed or taken out of the sliding groove 6 at one end, and the colorimeter 4 can be used to test the wafers 7 at the other end. The wafer stage 2 is used to place the wafers 7 to be tested. During the test, the lower side of the wafer 7 needs to be hollowed out, so a testing notch 9 is provided. The loading slot 8 is used to position the wafer 7.

[0026] In some embodiments, the operating rod 3 has a square cross-section, the sliding slot 6 is provided with a rotation hole 19 that cooperates with the operating rod 3, and the wafer stage 2 is evenly distributed with four detection notches 9. Generally, five locations on the wafer 7 need to be inspected: the center of the wafer 7 and the four edges of the wafer 7. Therefore, the operating rod 3 and the wafer stage 2 are configured in a square shape, and the detection notches 9 are located in the middle of the four edges of the wafer stage 2. A hollow hole is provided in the wafer stage 2. The detection notches 9 also facilitate access to the wafer 7 in the loading slot 8.

[0027] In some embodiments, the operating table 1 is provided with a positioning slot 10, which is removably provided with a positioning block 11. The positioning block 11 engages with the wafer table 2. The wafer table 2 has a square cross-section, and the inner side of the positioning block 11 is at a right angle and engages with the corner of the wafer table 2. The positioning slot 10 is used to receive the positioning block 11, which serves to position the wafer table 2, facilitating inspection after the wafer table 2 is positioned.

[0028] In some embodiments, the adjustment frame assembly includes guide posts 12, locking rings 13, and locking rods 14. Two guide posts 12 are fixedly mounted on the operating table 1, and the carrier 5 is slidably mounted on the guide posts 12. Two locking rings 13 are fixedly mounted on the carrier 5, and engage with the guide posts 12. The locking rings 13 are threadedly engaged with the locking rods 14, and the ends of the locking rods 14 engage with the guide posts 12. The guide posts 12 facilitate the upward and downward sliding of the carrier 5, and the locking rings 13 and the locking rods 14 cooperate to secure the carrier 5 to the guide posts 12.

[0029] In some embodiments, a micrometer 15 is provided on the operating table 1, and the end of the micrometer 15 is engaged with the carrier 5. The function of the micrometer 15 is to facilitate the adjustment of the height of the carrier 5, and the height of the colorimeter 4 is adjusted by the carrier 5, so that the colorimeter 4 can better detect the wafer 7.

[0030] In some embodiments, at least three support legs 16 are disposed beneath the operating platform 1, and all support legs 16 are not arranged in a straight line. Adjustment seats 17 are disposed at the lower ends of the support legs 16, and threaded engagement is provided between the adjustment seats 17 and the support legs 16. The support legs 16 are used to support the operating platform 1, and the adjustment seats 17 are used to level the operating platform 1.

[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "bottom", "one end", "top", "middle", "the other end", "coaxial", "one side", "inside", "front", "center", "two ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the present invention, unless otherwise clearly stipulated and limited, the terms "setting", "installation", "connection", "fixation", "hinge" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0033] The above description is merely a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the form disclosed herein and should not be construed as excluding other embodiments. Instead, the present invention can be used in various other combinations, modifications, and environments and can be modified within the scope of the concept described herein through the above teachings or techniques or knowledge in the relevant fields. Modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention are intended to be protected by the claims appended hereto.

Claims

1. A wafer colorimetric test auxiliary device, characterized by: The invention comprises an operating table (1), a wafer carrier (2), an operating rod (3), a colorimeter (4), a carrier (5) and an adjustment frame assembly, wherein the adjustment frame assembly is fixedly arranged on one end of the operating table (1), the carrier (5) is adjustably arranged on the adjustment frame assembly, the colorimeter (4) is fixedly arranged on the carrier (5), a sliding groove (6) is provided on the operating table (1), the operating rod (3) is slidably arranged in the sliding groove (6) and cooperates with the sliding groove (6), the wafer carrier (2) is fixedly arranged on the operating rod (3), and the wafer carrier (2) is arranged between the carrier (5) and the operating table (1), a loading groove (8) cooperating with the wafer (7) is provided on the upper surface of the wafer carrier (2), the loading groove (8) cooperates with the colorimeter (4), and a penetrating detection notch (9) is provided on the wafer carrier (2).

2. The wafer colorimetric testing auxiliary device according to claim 1, wherein: The cross section of the operating rod (3) is square, the sliding groove (6) is provided with a rotation hole (19) that cooperates with the operating rod (3), and four detection notches (9) are evenly arranged on the wafer support platform (2).

3. The wafer colorimetric testing auxiliary device according to claim 1 or 2, characterized in that: The operating table (1) is provided with a positioning groove (10), and the positioning groove (10) is detachably provided with a positioning block (11), and the positioning block (11) cooperates with the wafer support table (2).

4. The wafer colorimetric testing auxiliary device according to claim 3, wherein: The cross section of the wafer support platform (2) is square, and the inner side of the positioning block (11) is right-angled and matched with the corner of the wafer support platform (2).

5. The wafer colorimetric testing auxiliary device according to claim 1 or 2, characterized in that: The adjustment frame assembly includes a guide column (12), a locking ring (13) and a locking rod (14); two guide columns (12) are fixedly provided on the operating table (1); the supporting frame (5) is slidably provided on the guide columns (12); two locking rings (13) matched with the guide columns (12) are fixedly provided on the supporting frame (5); the locking ring (13) and the locking rod (14) are threadedly matched; and the end of the locking rod (14) is matched with the guide column (12).

6. The wafer colorimetric testing auxiliary device according to claim 1 or 2, characterized in that: A micrometer (15) is provided on the operating table (1), and an end of the micrometer (15) is matched with the supporting frame (5).

7. The wafer colorimetric testing auxiliary device according to claim 1 or 2, characterized in that: At least three supporting legs (16) are arranged under the operating table (1), and all the supporting legs (16) are not arranged on the same straight line.

8. The wafer colorimetric testing auxiliary device according to claim 7, wherein: An adjustment seat (17) is provided on the lower end of the support leg (16), and the adjustment seat (17) and the support leg (16) are threadedly engaged.

9. The wafer colorimetric testing auxiliary device according to claim 1 or 2, characterized in that: The colorimeter (4) is fixed on the carrier (5) via a locking belt (18).

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