Clamping device and coating line equipment

Abstract

The utility model belongs to the technical field of coating, and discloses a clamping device and coating line equipment. The clamping device comprises a plurality of adjusting mechanisms which are all arranged on the mounting plate, each adjusting mechanism comprises a connecting rod and a fixing piece, the connecting rods are rotationally connected with the groove bottom of the mounting groove so that the other ends of the connecting rods can be close to or away from one another, and the fixing pieces are rotationally connected with the connecting rods so that the postures of the fixing pieces can be adjusted. According to the clamping device, flexible clamping is achieved by rotating the multiple connecting rods and the fixing pieces so as to adapt to the size and shape of the substrate, the clamping flexibility and universality are improved, meanwhile, clamping of substrates of various specifications can be achieved only through one clamping device, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a clamping device and film coating line equipment. Background Art

[0002] Magnetron sputtering coating refers to the process of bombarding a target material with energetic particles in a vacuum chamber, causing atoms or atomic groups on the target surface to escape. The escaped atoms are then deposited on the surface of a substrate to form a thin film with the same composition as the target material. Specifically, when sputtering a substrate, a substrate holder is often used to mount and secure the substrate, and then a conveyor is used to transport the substrate holder to the corresponding position to complete the corresponding sputtering coating process. However, substrate holders in the prior art can only clamp substrates of a specific size and shape to complete the sputtering coating process. For sputtering equipment, only being able to clamp substrates of one specification results in a waste of resources, which in turn has significant limitations and extremely poor flexibility and versatility. In addition, when clamping substrates of different specifications, the corresponding substrate holder must be replaced, which greatly increases the production cost of the sputtering coating process. Utility Model Content

[0003] The purpose of the utility model is to provide a clamping device and a coating line device capable of clamping substrates of various specifications.

[0004] To achieve this purpose, the present invention adopts the following technical solutions:

[0005] A clamping device for clamping a substrate, comprising:

[0006] Mounting plate;

[0007] Multiple adjustment mechanisms are all arranged on the mounting plate, and the adjustment mechanisms include a connecting rod and a fixing member. One end of the connecting rod is rotatably connected to the mounting plate and can be fixed to each other, and the other ends of the multiple connecting rods can approach or move away from each other. The fixing member is rotatably connected to the other end of the connecting rod and can be fixed to each other to adjust the postures of the multiple fixing members, and the multiple fixing members are used to clamp the substrate.

[0008] Preferably, a first connecting hole is provided at one end of the connecting rod, a mounting hole is provided on the mounting plate, and the first connecting member passes through the first connecting hole and is threadedly connected to the mounting hole.

[0009] Preferably, a second connecting hole is provided at the other end of the connecting rod, a third connecting hole is correspondingly provided on the fixing member, and the second connecting member passes through the third connecting hole and is threadedly connected to the second connecting hole.

[0010] Preferably, a mounting groove is further provided on the mounting plate, and a clamping portion is provided on the fixing member. The clamping portion extends toward the bottom of the mounting groove, and the clamping portion is used to cooperate with the substrate to clamp the substrate.

[0011] Preferably, the clamping portion is provided with a clamping groove, the clamping groove extends in a direction parallel to the bottom of the mounting groove, and the substrate can be placed in the clamping groove.

[0012] Preferably, the mounting plate is further provided with a mounting groove, a rectangular clamping area is formed in the mounting groove, four adjusting mechanisms are provided, and the four adjusting mechanisms are rotatably connected to the four corners of the bottom of the mounting groove respectively.

[0013] Preferably, the four adjustment mechanisms are grouped in pairs and are respectively arranged on opposite sides of the mounting slot, and the two adjustment mechanisms in at least one group can rotate in a direction away from the other group.

[0014] Preferably, a through hole is provided at the bottom of the mounting groove.

[0015] Preferably, the mounting plate is provided with two or more mounting grooves.

[0016] A coating line equipment comprises a coating device and the clamping device as described above, wherein the coating device is used for coating the substrate clamped by the clamping device.

[0017] Beneficial effects of the utility model:

[0018] The utility model provides a clamping device and a coating line equipment. The clamping device is used to clamp substrates, including a mounting plate and multiple adjustment mechanisms, each of which is disposed on the mounting plate. The adjustment mechanisms include a connecting rod and a fixing member. One end of the connecting rod is rotatably connected to the mounting plate and can be fixed to the mounting plate. The fixing member is rotatably connected to the other end of the connecting rod and can be fixed to the connecting rod. The position of the fixing member can be adjusted when the connecting rod rotates relative to the mounting plate, and the posture of the fixing member can be adjusted when the fixing member rotates relative to the connecting rod. When a substrate is to be clamped, when the substrate is within a clamping area, a worker rotates the connecting rod until the fixing members on the connecting rod are close to each other to a position that matches the edge of the substrate. The connecting rod is fixed to the mounting plate, and then the fixing member is rotated so that the fixing member can clamp the substrate, and then the fixing member is fixed to the connecting rod. The device achieves flexible clamping by rotating the multiple connecting rods and fixing members to adapt to the size and shape of the substrate, thereby improving the flexibility and versatility of clamping. At the same time, only one clamping device is required to clamp substrates of various specifications, reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1This is a schematic structural diagram of a mounting plate of a clamping device provided in an embodiment of the present utility model;

[0020] Figure 2 It is a structural schematic diagram of a clamping device provided in an embodiment of the present utility model;

[0021] Figure 3 It is a structural schematic diagram of the adjustment mechanism of the clamping device provided in an embodiment of the present utility model;

[0022] Figure 4 It is a structural schematic diagram of a connecting rod of an adjustment mechanism provided in an embodiment of the present utility model;

[0023] Figure 5 It is a structural schematic diagram of a fixing member of an adjustment mechanism provided in an embodiment of the present utility model;

[0024] Figure 6 1 is a structural diagram of a first connecting member of an adjustment mechanism provided in an embodiment of the present utility model;

[0025] Figure 7 It is a structural schematic diagram of the second connecting member of the adjustment mechanism provided in an embodiment of the present utility model.

[0026] In the picture:

[0027] 1. Mounting plate; 11. Mounting groove; 12. Mounting hole; 10. Clamping area; 2. Connecting rod; 21. First connecting hole; 22. Second connecting hole; 3. Fixing member; 31. Third connecting hole; 32. Clamping groove; 4. First connecting member; 41. First smooth portion; 42. First threaded portion; 5. Second connecting member; 51. Second smooth portion; 52. Second threaded portion. DETAILED DESCRIPTION

[0028] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0029] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0032] The present invention provides a clamping device and a coating line device. The adjustable clamping device clamps and secures substrates using multiple adjustment mechanisms. When faced with substrates of varying sizes and dimensions, the clamping device adapts to the requirements by rotating multiple adjustment mechanisms, namely, connecting rods 2 and fixing members 3. This device exhibits high flexibility and versatility. Furthermore, only one clamping device is required to secure substrates of various specifications, thereby reducing production costs. The coating line device includes the clamping device and a coating device. After the clamping device secures the substrate, the substrate is transported to a designated location within the coating line device, whereupon the coating device performs coating. Optionally, the coating line device may be a magnetron sputtering coating line device.

[0033] Reference Figure 1The clamping device includes a mounting plate 1, on which a mounting groove 11 is recessed, and a clamping area 10 is provided in the mounting groove 11. The substrate can be clamped in the clamping area 10. Compared with the clamping area 10, smaller substrates can flexibly select the clamping position, and then the small-sized substrates are clamped and fixed at different positions in the clamping area 10, so as to select a clamping position with better uniformity for coating to improve the uniformity of the film layer. In this embodiment, there are two mounting grooves 11 and they are located at the same height. Each mounting groove 11 is provided with multiple adjustment mechanisms, so that the clamping device can clamp two substrates at the same time for subsequent coating work, thereby improving work efficiency. Of course, the number and position of the mounting grooves 11 can also be set according to needs. At the same time, the size of the mounting grooves 11 can also be improved according to needs. For example, a clamping area 10 is provided in the mounting groove 11, and the area of ​​the clamping area 10 should be larger than the size of the substrate to be clamped. If the size of the substrate to be clamped is large, the corresponding mounting groove 11 should also be improved and expanded. No further restrictions are imposed here. In addition, a through hole is provided at the bottom of the mounting groove 11. On the one hand, when the substrate is clamped, there are no obstructions on both sides of the substrate, which provides a larger operating space for the subsequent clamping process; on the other hand, when the substrate is clamped and fixed in the clamping area 10, both sides of the substrate are exposed, and the coating device in the coating line equipment can perform the coating process on both sides of the mounting plate 1, thereby improving the coating efficiency.

[0034] The clamping device also includes multiple adjustment mechanisms, all of which are arranged around the mounting slot 11 and are capable of rotating within the clamping area 10. In this embodiment, the mounting slot 11 is rectangular, and four adjustment mechanisms are provided. The four adjustment mechanisms are rotatably connected to the four corners of the bottom of the mounting slot 11. The four adjustment mechanisms use the four corners of the mounting slot 11 as their rotation centers. Compared to using the sides of the mounting slot 11 as the rotation center, the four adjustment mechanisms can clamp substrates of a wider range of sizes and specifications.

[0035] Furthermore, the four adjustment mechanisms are grouped in pairs, and the two groups of adjustment mechanisms are respectively placed on the corresponding sides of the mounting groove 11, and the two adjustment mechanisms of at least one group can rotate in a direction away from the other group of adjustment mechanisms. Figure 2 , the adjustment mechanisms are in a state where no substrate is clamped, and are located on the corresponding sides of the mounting groove 11. When a substrate is to be clamped, the substrate is located in the clamping area 10, and the staff rotates the multiple adjustment mechanisms to approach and contact the substrate to clamp and secure it. Similarly, when the substrate is disassembled after the coating work is completed, the staff rotates the adjustment mechanisms away from the substrate to release the clamping fixation of the substrate and complete the disassembly. It is understandable that during the clamping and disassembly processes, the staff can hold the substrate with one hand and rotate the adjustment mechanisms with the other hand to improve clamping accuracy.

[0036] It should be noted that when securing a substrate of the maximum size that can be clamped within the clamping area 10, one set of adjustment mechanisms can be rotated away from the other set of adjustment mechanisms to reserve installation space for clamping the substrate and prevent interference between the substrate and the adjustment mechanisms, which could prevent the substrate from being clamped and secured. In other embodiments, both sets of adjustment mechanisms can be simultaneously rotated away from the other set of adjustment mechanisms to reserve installation space for clamping the substrate.

[0037] Specifically, the adjustment mechanism includes a connecting rod 2 and a fixing member 3. One end of the connecting rod 2 is rotatably connected to the bottom of the mounting groove 11, and the connecting rod 2 can be fixed to the mounting plate 1 so that the other ends of the multiple connecting rods 2 are closer to or farther away from each other. The fixing member 3 is rotatably connected to the other end of the connecting rod 2 and can be fixed to the connecting rod 2 to adjust the posture of the multiple fixing members 3. The multiple fixing members 3 are used to clamp substrates. When the connecting rod 2 rotates relative to the mounting plate 1, the position of the fixing member 3 can be adjusted. When the fixing member 3 rotates relative to the connecting rod 2, the posture of the fixing member 3 can be adjusted, that is, the orientation of the fixing member 3 can be adjusted. When a substrate is to be clamped, when the substrate is located in the clamping area 10, the staff rotates the connecting rod 2 so that the ends of the connecting rod 2 near the fixing member 3 are closer to each other, that is, the fixing members 3 on the connecting rod 2 are closer to each other and fixed to a position that matches the edge of the substrate. Then, the staff rotates the fixing member 3. When the fixing member 3 just clamps the edge of the substrate, the fixing member 3 is fixed to the connecting rod 2, thereby achieving clamping and fixing of the substrate. It should be noted that the “position adapted to the edge of the substrate” here refers to the position where the edge of the substrate can be clamped and fixed after the subsequent rotation of the fixing member 3 .

[0038] Reference Figures 3 to 5To connect the connecting rod 2 to the mounting plate 1, a first connecting hole 21 is provided at one end of the connecting rod 2. The first connecting hole 21 is a smooth hole. A corresponding mounting hole 12 is provided on the bottom of the mounting groove 11. The inner surface of the mounting hole 12 is provided with an internal thread. The first connecting member 4 passes through the first connecting hole 21 and is threadedly connected to the mounting hole 12. The first connecting member 4 may include a first smooth portion 41 and a first threaded portion 42. When the first connecting member 4 connects the connecting rod 2 to the bottom of the mounting groove 11, the first smooth portion 41 cooperates with the first connecting hole 21, and the first threaded portion 42 cooperates with the mounting hole 12. Specifically, the first connecting member 4 is threadedly connected to the mounting hole 12 to secure the connecting rod 2 to the bottom of the mounting groove 11. Before rotating the connecting rod 2, you can first slightly rotate the first connecting member 4 to make the first threaded portion 42 slightly rotate along the internal thread of the mounting hole 12, reducing the clamping force of the first connecting member 4 on the connecting rod 2, so that the connecting rod 2 no longer fits tightly against the bottom of the mounting groove 11. At this time, the connecting rod 2 is in a movable state, and then the connecting rod 2 is rotated to make the first connecting hole 21 and the first smooth portion 41 rotate relative to each other, thereby realizing the rotation of the connecting rod 2 relative to the mounting plate 1; when the connecting rod 2 is rotated to the target position, the first connecting member 4 can be rotated in the opposite direction to press the connecting rod 2, so that it is fixed in the target position, thereby realizing the relative fixation of the connecting rod 2 and the mounting plate 1.

[0039] Furthermore, to achieve the connection between the fixing member 3 and the connecting rod 2, the other end of the connecting rod 2 is provided with a second connecting hole 22, the inner surface of which is provided with an internal thread. A corresponding third connecting hole 31 is provided on the fixing member 3. The third connecting hole 31 is a smooth hole, and the second connecting member 5 passes through the third connecting hole 31 and is threadedly connected to the second connecting hole 22. The second connecting member 5 may include a second smooth portion 51 and a second threaded portion 52. When the second connecting member 5 connects the fixing member 3 and the connecting rod 2, the second smooth portion 51 cooperates with the third connecting hole 31, and the second threaded portion 52 cooperates with the second connecting hole 22. The second connecting member 5 specifically secures the fixing member 3 to the connecting rod 2 by being threadedly connected to the second connecting hole 22. Before rotating the fixing member 3, you can first slightly rotate the second connecting member 5 to make the second threaded portion 52 slightly rotate along the internal thread of the second connecting hole 22, reducing the clamping force of the second connecting member 5 on the fixing member 3, so that the fixing member 3 is no longer tightly fitted to the connecting rod 2. At this time, the fixing member 3 is in a movable state, and then the fixing member 3 is rotated to make the third connecting hole 31 and the second smooth portion 51 rotate relative to each other, thereby realizing the rotation of the fixing member 3 relative to the connecting rod 2; when the fixing block is rotated to the target orientation, the second connecting member 5 can be rotated in the opposite direction to press the fixing member 3, so that it is fixed in the target orientation, thereby realizing the relative fixation of the fixing member 3 and the connecting rod 2.

[0040] To facilitate the fixing of the substrate by the fixing member 3, a clamping portion is provided on the fixing member 3. The clamping portion extends toward the bottom of the mounting groove 11 and is adapted to engage with the substrate. Preferably, the clamping portion is provided with a clamping groove 32 extending parallel to the bottom of the mounting groove 11. The substrate can be placed within the clamping groove 32. When multiple fixing members 3 are used to clamp and secure the substrate, the edges of the substrate are trapped within the clamping groove 32, thereby improving the substrate's clamping stability.

[0041] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A clamping device for clamping a substrate, characterized in that: include: Mounting plate (1); A plurality of adjustment mechanisms are provided on the mounting plate (1), and the adjustment mechanisms include a connecting rod (2) and a fixing member (3). One end of the connecting rod (2) is rotatably connected to the mounting plate (1) and can be fixed to each other. The other ends of the plurality of connecting rods (2) can move closer to or farther away from each other. The fixing member (3) is rotatably connected to the other end of the connecting rod (2) and can be fixed to each other to adjust the postures of the plurality of fixing members (3). The plurality of fixing members (3) are used to clamp the substrate.

2. The clamping device according to claim 1, characterized in that: A first connecting hole (21) is provided at one end of the connecting rod (2), a mounting hole (12) is provided on the mounting plate (1), and a first connecting member (4) passes through the first connecting hole (21) and is threadedly connected to the mounting hole (12).

3. The clamping device according to claim 1, characterized in that: The other end of the connecting rod (2) is provided with a second connecting hole (22), and the fixing member (3) is correspondingly provided with a third connecting hole (31), and the second connecting member (5) passes through the third connecting hole (31) and is threadedly connected to the second connecting hole (22).

4. The clamping device according to claim 1, characterized in that: The mounting plate (1) is further provided with a mounting groove (11), and the fixing member (3) is provided with a clamping portion, the clamping portion extending toward the bottom of the mounting groove (11), and the clamping portion is used to cooperate with the substrate to clamp the substrate.

5. The clamping device according to claim 4, characterized in that: The clamping portion is provided with a clamping groove (32), the clamping groove (32) extending in a direction parallel to the bottom of the installation groove (11), and the substrate can be placed in the clamping groove (32).

6. The clamping device according to any one of claims 1 to 5, characterized in that: The mounting plate (1) is further provided with a mounting groove (11), a rectangular clamping area (10) is formed in the mounting groove (11), and four adjusting mechanisms are provided, and the four adjusting mechanisms are rotatably connected to the four corners of the bottom of the mounting groove (11).

7. The clamping device according to claim 6, characterized in that: The four adjusting mechanisms are grouped in pairs and are respectively arranged on opposite sides of the mounting groove (11), and the two adjusting mechanisms in at least one group can rotate in a direction away from the other group.

8. The clamping device according to claim 6, characterized in that: A through hole is provided at the bottom of the installation groove (11).

9. The clamping device according to claim 6, characterized in that: The mounting plate (1) is provided with two or more mounting grooves (11).

10. A coating line equipment, characterized in that, It comprises a coating device and the clamping device according to any one of claims 1 to 9, wherein the coating device is used to coat the substrate clamped by the clamping device.

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