Sample table assembly and MPCVD device

Abstract

The utility model relates to the technical field of microwave plasma, in particular to a sample table assembly and an MPCVD device, the sample table assembly comprises a base, a molybdenum table and a copper plate, the molybdenum table is sleeved on the copper plate, the copper plate is sleeved on the base, the copper plate is provided with a groove, the groove and the base form a channel, and the channel is communicated with the molybdenum table. The base is provided with a cooling medium inlet and a cooling medium outlet, the cooling medium inlet and the cooling medium outlet are both communicated with the channel, the sample table assembly which can prevent the molybdenum table from being eroded by the cooling medium and is good in heat dissipation performance is provided, and the MPCVD device comprises the sample table assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave plasma, in particular to a sample stage component and an MPCVD device. Background Art

[0002] Microwave plasma chemical vapor deposition is an advanced method for preparing high-quality diamond films today. This method requires the use of microwave plasma chemical vapor deposition equipment (MPCVD for short). MPCVD introduces microwaves generated by a microwave generator into the reaction chamber through a waveguide transmission system, and introduces a mixture of methane and hydrogen. Under the excitation of microwaves, a glow discharge is generated in the reaction chamber, ionizing the molecules of the reaction gas and generating plasma, which is then deposited on the sample stage to obtain a diamond film.

[0003] The temperature inside the MPCVD reaction chamber is very high. If the sample stage components are placed in this high-temperature environment for a long time, their service life will inevitably be shortened or even damaged if they are not promptly and effectively cooled.

[0004] The molybdenum table of the existing sample table assembly is provided with a channel for the circulation of cooling medium due to the need for heat dissipation. The structure is complex and the price is expensive. The molybdenum table is corroded by the cooling medium for a long time and needs regular maintenance and replacement, which increases unnecessary maintenance work and costs, and restricts the application prospects of MPCVD equipment. Utility Model Content

[0005] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a sample stage assembly which can prevent the molybdenum stage from being corroded by a cooling medium and has good heat dissipation performance.

[0006] Another object of the present invention is to provide an MPCVD device, which adopts the above-mentioned sample stage assembly.

[0007] The purpose of this utility model is achieved through the following technical solutions:

[0008] A sample stage assembly includes a base and a molybdenum stage, and also includes a copper plate. The molybdenum stage is sleeved on the copper plate, and the copper plate is sleeved on the base. The copper plate is provided with a groove, and the groove and the base form a channel. The base is provided with a cooling medium inlet and a cooling medium outlet, and the cooling medium inlet and the cooling medium outlet are both connected to the channel.

[0009] Furthermore, the molybdenum platform is provided with a first recessed portion, and the copper plate is provided with a first protruding portion, and the first recessed portion is sleeved on the first protruding portion.

[0010] Furthermore, the top surface of the first concave portion is a first spherical surface that is concave upward, and the top surface of the first convex portion is a second spherical surface that is convex upward, and the first spherical surface is in close contact with the second spherical surface.

[0011] Furthermore, the copper plate is provided with a second recessed portion, the base is provided with a second protruding portion, and the second recessed portion is sleeved on the second protruding portion.

[0012] Furthermore, the top surface of the second concave portion is a third spherical surface that is concave upward, and the top surface of the second convex portion is a fourth spherical surface that is convex upward, and the third spherical surface is in close contact with the fourth spherical surface.

[0013] An MPCVD device comprises the sample stage assembly.

[0014] The utility model has the following advantages:

[0015] The setting of the copper plate and the channel makes it possible for the cooling medium to no longer contact the molybdenum table, so the molybdenum table will not be corroded by the cooling medium, and there is no need to maintain or replace the molybdenum table, thereby reducing unnecessary maintenance work and reducing maintenance costs; in addition, the setting of the copper plate and its channel also makes it unnecessary to process channels on the molybdenum table for the circulation of the cooling medium, and the copper plate made of copper is easier to process channels, thus reducing the difficulty of processing and manufacturing; furthermore, the molybdenum table is sleeved on the copper plate, which increases the contact area between the molybdenum table and the copper plate, and the copper plate has good thermal conductivity, which can transfer the heat of the molybdenum table to the cooling medium in the channel more quickly, thereby achieving better heat dissipation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be considered as limiting the scope. For those skilled in the art, other relevant drawings can be obtained based on these drawings without inventive effort.

[0017] Figure 1 It is a cross-sectional schematic diagram of the sample stage assembly of the present invention;

[0018] Figure 2 This is a schematic cross-sectional view of the molybdenum platform of the present invention;

[0019] Figure 3 This is a schematic cross-sectional view of the copper plate of the present invention;

[0020] Figure 4 It is a schematic cross-sectional view of the base of the utility model;

[0021] In the figure: 1-base; 11-cooling medium inlet; 12-cooling medium outlet; 13-second protrusion; 2-molybdenum table; 21-first recess; 3-copper plate; 31-groove; 32-first protrusion; 33-second recess; 4-channel. DETAILED DESCRIPTION

[0022] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0025] In the present invention, unless otherwise expressly specified or limited, a first feature being above or below a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0026] like Figures 1 to 4As shown, a sample stage assembly includes a base 1 and a molybdenum stage 2, and also includes a copper plate 3. The molybdenum stage 2 is sleeved on the copper plate 3, and the copper plate 3 is sleeved on the base 1. The molybdenum stage 2, the copper plate 3 and the base 1 are arranged in sequence from top to bottom and are detachably connected by bolts (not shown in the figure). The upper surface of the copper plate 3 is in close contact with the lower surface of the molybdenum stage 2, and the lower surface of the copper plate 3 is in close contact with the upper surface of the base 1. The lower surface of the copper plate 3 is provided with a groove 31, and the groove 31 and the upper surface of the base 1 form a channel 4 for the circulation of a cooling medium. A cooling medium inlet 11 is provided in the middle of the base 1, and a cooling medium outlet 12 is provided at the edge of the base 1. The cooling medium inlet 11 and the cooling medium outlet 12 are both connected to the channel 4; the arrangement of the copper plate 3 and the channel 4 makes it possible for the cooling medium to no longer contact the molybdenum platform 2, so the molybdenum platform 2 will not be corroded by the cooling medium, and there is no need to maintain or replace the molybdenum platform 2, thereby reducing unnecessary maintenance work and reducing maintenance costs; in addition, the arrangement of the copper plate 3 and its channel 4 also makes it unnecessary to process a channel for the circulation of the cooling medium on the molybdenum platform 2, and the copper plate 3 made of copper is easier to process the channel 4, thereby reducing the difficulty of processing and manufacturing; furthermore, the molybdenum platform 2 is sleeved on the copper plate 3, which increases the contact area between the molybdenum platform 2 and the copper plate 3, and the copper plate 3 has good thermal conductivity, which can transfer the heat of the molybdenum platform 2 to the cooling medium in the channel 4 more quickly, thereby obtaining a better heat dissipation effect.

[0027] Furthermore, in order to increase the contact area between the molybdenum platform 2 and the copper plate 3, thereby obtaining a better heat dissipation effect, the lower surface of the molybdenum platform 2 is provided with a first recessed portion 21 that is recessed upward, and the upper surface of the copper plate 3 is provided with a first protruding portion 32 that is protruding upward. The first recessed portion 21 is sleeved on the first protruding portion 32, and the first recessed portion 21 matches and is in close contact with the first protruding portion 32.

[0028] Furthermore, in order to further increase the contact area between the molybdenum platform 2 and the copper plate 3, thereby obtaining a better heat dissipation effect, the top surface of the first recessed portion 21 is a first spherical surface that is recessed upward, and the top surface of the first protruding portion 32 is a second spherical surface that is protruding upward, and the first spherical surface matches and is in close contact with the second spherical surface; in addition, in actual production, the temperature in the middle of the molybdenum platform 2 is higher than the temperature at its edge, and the first spherical surface can also make the thickness in the middle of the molybdenum platform 2 smaller than the thickness at the edge, which is more conducive to rapid cooling of the middle of the molybdenum platform 2 and makes the temperature distribution on the entire molybdenum platform 2 more uniform.

[0029] Furthermore, since the base 1 is usually connected to the frame of the MPCVD device, part of the heat on the copper plate 3 can also be dissipated through the base 1. In order to increase the contact area between the copper plate 3 and the base 1, thereby obtaining a better heat dissipation effect, the lower surface of the copper plate 3 is provided with a second recessed portion 33 that is recessed upward, and the upper surface of the base 1 is provided with a second protruding portion 13 that is protruding upward. The second recessed portion 33 is sleeved on the second protruding portion 13, and the second recessed portion 33 matches and is in close contact with the second protruding portion 13.

[0030] Furthermore, in order to further increase the contact area between the copper plate 3 and the base 1, thereby obtaining a better heat dissipation effect, the top surface of the second recessed portion 33 is a third spherical surface that is recessed upward, and the top surface of the second protruding portion 13 is a fourth spherical surface that is protruding upward, and the third spherical surface matches and is in close contact with the fourth spherical surface; in addition, the temperature in the middle of the molybdenum platform 2 is higher than the temperature at its edge, and the third spherical surface can also make the thickness in the middle of the copper plate 3 smaller than the thickness at the edge. It cooperates with the fourth spherical surface to make the cross-section of the channel 4 in the middle of the copper plate 3 smaller than the cross-section of the channel 4 at the edge, and then make the flow rate of the cooling medium in the middle of the copper plate 3 greater than the flow rate of the cooling medium at the edge, so that the temperature in the middle of the copper plate 3 drops more than the temperature at the edge, and finally achieves a more uniform temperature distribution on the entire molybdenum platform 2.

[0031] An MPCVD device comprises the sample stage assembly.

[0032] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A sample stage assembly, comprising a base (1) and a molybdenum stage (2), characterized in that: The molybdenum platform (2) is sleeved on the copper plate (3), and the copper plate (3) is sleeved on the base (1). The copper plate (3) is provided with a groove (31), and the groove (31) and the base (1) form a channel (4). The base (1) is provided with a cooling medium inlet (11) and a cooling medium outlet (12), and both the cooling medium inlet (11) and the cooling medium outlet (12) are connected to the channel (4).

2. The sample stage assembly according to claim 1, wherein: The molybdenum platform (2) is provided with a first recessed portion (21), the copper plate (3) is provided with a first protruding portion (32), and the first recessed portion (21) is sleeved on the first protruding portion (32).

3. The sample stage assembly according to claim 2, wherein: The top surface of the first recessed portion (21) is a first spherical surface that is recessed upward, and the top surface of the first protruding portion (32) is a second spherical surface that is protruding upward, and the first spherical surface is in close contact with the second spherical surface.

4. The sample stage assembly according to any one of claims 1 to 3, characterized in that: The copper plate (3) is provided with a second recessed portion (33), the base (1) is provided with a second protruding portion (13), and the second recessed portion (33) is sleeved on the second protruding portion (13).

5. The sample stage assembly according to claim 4, characterized in that: The top surface of the second recessed portion (33) is a third spherical surface that is recessed upward, and the top surface of the second protruding portion (13) is a fourth spherical surface that is protruding upward, and the third spherical surface is in close contact with the fourth spherical surface.

6. An MPCVD device, characterized in that: A sample stage assembly comprising any one of claims 1 to 5.

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