Connecting device for cavity

Abstract

The utility model discloses a connecting device for a cavity, which comprises a hinge structure, the hinge structure comprises a first hinge piece and a second hinge piece which are hinged through a rotating shaft, and the first hinge piece is provided with a limiting structure; locking holes are formed in the two sides of the first hinge piece, bolt springs and bolts are arranged in the locking holes, the bolts can move in the axial direction of the bolt springs, the axial direction of the bolt springs is parallel to the axial direction of the rotating shaft, locking plates are arranged on the two sides of the second hinge piece, and pin holes allowing the bolts to be inserted are formed in the locking plates. When the second hinge piece rotates until the plug pin is aligned with the pin hole, the plug pin extends out of the locking hole and is inserted into the pin hole under the elastic force action of the plug pin spring, and at the moment, the hinge structure is locked; the limiting structure can prevent the plug pin from extending out of the locking hole when the hinge structure is not locked. The problem that an existing hinge with a self-locking function is not suitable for a cavity of wafer manufacturing equipment is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing equipment, in particular to a connection device for a cavity. Background Art

[0002] During the maintenance and commissioning of wafer manufacturing equipment, the reaction chamber needs to be opened multiple times. Therefore, the hinge connecting the cavity body and the upper cover of the reaction chamber must have a self-locking function to ensure that the upper cover can be firmly locked after opening, thereby effectively preventing the upper cover from accidentally falling and causing harm to workers, and ensuring a safe and stable working environment.

[0003] Currently, self-locking hinges generally utilize a spring, gear, and toothed lever to achieve locking. This structure allows the hinge to be locked in any position through the meshing of the gear and the toothed lever. However, in practical applications, locking in any position is not essential; locking at a specific angle is sufficient.

[0004] The mechanism of meshing between the gears and the toothed joystick requires the operator to exert a relatively large force to press the joystick when performing the switching action, which makes the switching process very strenuous. In addition, during the cover opening process, unnecessary noise is generated due to the physical contact between the gears and the joystick, which also has a negative impact on the actual usage experience. Summary of the Invention

[0005] The utility model provides a connection device for a cavity, so as to overcome the problem that the existing hinges with a self-locking function are not suitable for the cavity of wafer manufacturing equipment.

[0006] In order to achieve the above purpose, the technical solution of the utility model is:

[0007] A connection device for a cavity, comprising: a hinge structure, the hinge structure comprising a first leaf and a second leaf hingedly connected by a rotating shaft, the first leaf being provided with a limiting structure;

[0008] The first leaf is provided with locking holes on both sides, wherein a latch spring and a latch are provided in the locking holes, wherein the latch can move along the axial direction of the latch spring, wherein the axial direction of the latch spring is parallel to the axial direction of the rotating shaft, and the second leaf is provided with locking plates on both sides, wherein the locking plates are provided with a pin hole for allowing the latch to be inserted;

[0009] When the second leaf is rotated until the latch is aligned with the pin hole, the latch extends from the locking hole under the elastic force of the latch spring and is inserted into the pin hole, and the hinge structure is locked.

[0010] The limiting structure can prevent the latch from extending from the locking hole when the hinge structure is not locked.

[0011] Furthermore, the limiting structure includes a limiting slider and a slide groove, the slide groove is arranged on both sides of the first leaf, and a spring is arranged in the slide groove;

[0012] The limiting slider includes a stopper and a sliding portion, wherein the sliding portion is slidably arranged in the slide groove, and rotating the second page can cause the locking plate to push the stopper;

[0013] Under the elastic force of the spring, the sliding portion can slide along the sliding groove until the stop portion blocks the locking hole;

[0014] Under the thrust of the locking plate, the sliding portion can slide in the opposite direction along the sliding groove until the stopping portion no longer blocks the locking hole.

[0015] Furthermore, unlocking grooves connected to the locking hole are provided on both sides of the first page, and the unlocking grooves extend along the axial direction of the latch spring. A handle is provided on the latch, and the handle extends from the unlocking groove. Pulling the handle can retract the latch into the locking hole.

[0016] Furthermore, a damping device is included;

[0017] The first sheet is fixed on the cavity, the second sheet is fixed on the upper cover, and the damping device can provide resistance during the closing process of the upper cover and the cavity.

[0018] Furthermore, the damping device is a gas spring, one end of the gas spring is rotatably connected to the upper cover, and the other end of the gas spring is rotatably connected to the cavity.

[0019] Furthermore, the locking plate is provided with an arc portion, and the locking plate pushes the stop portion through the arc portion.

[0020] Furthermore, a blind plate is included, wherein the sliding groove has an opening at one end away from the locking hole, the sliding portion is inserted into the sliding groove from the opening, and the blind plate is used to block the opening;

[0021] The sliding portion is provided with a blind hole, one end of the spring is inserted into the blind hole, and the other end of the spring abuts against the blind plate.

[0022] Furthermore, it also includes a handle, which is fixed on the upper cover.

[0023] Beneficial effects:

[0024] Compared with the prior art, the connection device for the cavity provided by the present invention does not adopt the traditional mechanism of meshing gears with toothed operating levers to achieve the self-locking function. Instead, when the second leaf is rotated to a specific position where the latch is aligned with the pin hole, the latch spring provides elastic force to insert the latch into the pin hole, so that the hinge structure can be locked firmly and reliably, and the hinge structure can be opened and closed smoothly, which is both labor-saving and noise-free. By setting a limit structure, the latch is prevented from popping out when the latch is not aligned with the pin hole, thereby ensuring that the hinge structure can work normally. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0026] Figure 1 A schematic diagram of the structure of a connection device for a cavity provided by the present invention installed on the cavity;

[0027] Figure 2 This is a schematic structural diagram of a hinge structure of a connection device for a cavity provided by the present invention;

[0028] Figure 3 A side view of a hinge structure of a connection device for a cavity provided by the utility model Figure 1 ;

[0029] Figure 4 for Figure 3 CC cross-sectional view;

[0030] Figure 5 A side view of a hinge structure of a connection device for a cavity provided by the utility model Figure 2 ;

[0031] Figure 6 for Figure 5 DD cross-sectional view;

[0032] Figure 7 This is a front view of a hinge structure of a connection device for a cavity provided by the present invention;

[0033] Figure 8 for Figure 7 EE cross-sectional view;

[0034] Figure 9 This is a structural schematic diagram of a limiting slider for a cavity connection device provided by the utility model;

[0035] Figure 10 This is a side view of a limiting slider of a connection device for a cavity provided by the utility model.

[0036] In the picture:

[0037] 1. First page; 101. Locking hole; 102. Slide slot; 103. Unlocking slot;

[0038] 2. The second page;

[0039] 3. Locking plate; 301. Pin hole; 302. Arc-shaped portion;

[0040] 4. Latch spring;

[0041] 5. Latch;

[0042] 6. Limiting slider; 601. Stopper; 602. Sliding portion; 603. Blind hole;

[0043] 7. Spring;

[0044] 8. Handle;

[0045] 9. Gas spring;

[0046] 10. Handle;

[0047] 11. Blind plate;

[0048] 12. Rotating shaft;

[0049] A. Cavity; B. Upper cover. DETAILED DESCRIPTION

[0050] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0051] This embodiment provides a connection device for a cavity, such as Figure 1 and Figure 2 As shown, including: hinge structure, such as Figure 6 As shown, the hinge structure includes a first leaf 1 and a second leaf 2 hingedly connected by a rotating shaft 12, and a limiting structure is provided on the first leaf 1;

[0052] like Figure 4 and Figure 8As shown, the first leaf 1 is provided with locking holes 101 on both sides, and the locking holes 101 are provided with latch springs 4 and latches 5. The latches 5 can move along the axial direction of the latch springs 4. The axial direction of the latch springs 4 is parallel to the axial direction of the rotating shaft 12. Figure 2 As shown, the second sheet 2 is provided with locking plates 3 on both sides, and the locking plates 3 are fixed to the second sheet 2 by bolts, as shown in FIG. Figure 4 and Figure 5 As shown, the locking plate 3 is provided with a pin hole 301 for allowing the latch 5 to be inserted;

[0053] When the second leaf 2 rotates until the latch 5 is aligned with the pin hole 301, the latch 5 extends from the locking hole 101 under the elastic force of the latch spring 4 and is inserted into the pin hole 301, and the hinge structure is locked.

[0054] The limiting structure can prevent the latch 5 from extending from the locking hole 101 when the hinge structure is not locked;

[0055] Compared with the prior art, the connection device for the cavity provided in this embodiment does not adopt the traditional mechanism of meshing gears with toothed operating levers to achieve the self-locking function. Instead, when the second leaf 2 is rotated to a specific position where the latch 5 is aligned with the pin hole 301, the latch spring 4 provides elastic force to insert the latch 5 into the pin hole 301, so that the hinge structure can be firmly and reliably locked, and the hinge structure can be opened and closed smoothly, which is both labor-saving and noise-free. By setting a limit structure, the latch 5 is prevented from popping out when the latch 5 is not aligned with the pin hole 301, thereby ensuring that the hinge structure can work normally.

[0056] In a specific embodiment, the limiting structure includes: Figure 2 The limit slider 6 shown and Figure 4 The slide grooves 102 are arranged on both sides of the first sheet 1. Figure 4 As shown, a spring 7 is provided in the slide groove 102;

[0057] like Figure 9 and Figure 10 As shown, the limiting slider 6 includes a stopper 601 and a sliding portion 602. The sliding portion 602 is slidably disposed in the slide groove 102. Rotating the second page 2 can enable the locking plate 3 to push the stopper 601.

[0058] Under the elastic force of the spring 7, the sliding portion 602 can slide along the slide groove 102 until the stop portion 601 blocks the locking hole 101, thereby preventing the latch 5 from extending from the locking hole 101;

[0059] The second leaf 2 rotates, driving the locking plate 3 to rotate, so that the locking plate 3 pushes the stop portion 601. Under the thrust of the locking plate 3, the sliding portion 602 can slide in the opposite direction along the sliding groove 102, and the stop portion 601 moves away from the locking hole 101 until the stop portion 601 no longer blocks the locking hole 101. When the second leaf 2 rotates until the latch 5 is aligned with the pin hole 301, the latch 5 extends from the locking hole 101 and is inserted into the pin hole 301, thereby locking the hinge structure.

[0060] In a specific embodiment, Figure 7 and Figure 8 As shown, unlocking grooves 103 communicating with the locking hole 101 are further provided on both sides of the first leaf 1. The unlocking grooves 103 extend along the axial direction of the latch spring 4. A handle 10 is provided on the latch 5. In this embodiment, the latch 5 is threadedly connected to the handle 10. The handle 10 extends from the unlocking grooves 103. Pulling the handle 10 can retract the latch 5 into the locking hole 101 to unlock the hinge structure.

[0061] In a specific application, after the latch 5 extends from the locking hole 101, the distance between the handles 10 on both sides should be less than the length of the thumb and index finger of a normal person, and can be designed to be 5-10 cm, so as to facilitate single-handed operation of the two handles 10 for unlocking.

[0062] In a specific embodiment, a damping device is further included;

[0063] like Figure 1 As shown, the first leaf 1 is fixed on the cavity A, and the second leaf 2 is fixed on the upper cover B. The damping device can provide resistance during the closing process of the upper cover B and the cavity A, so that when the operator closes the upper cover B, he needs to apply pressure to the upper cover B with one hand and operate the two handles 10 with the other hand to unlock them. Both hands need to operate at the same time to avoid the operator being accidentally pinched by the upper cover B.

[0064] In a specific embodiment, Figure 1 As shown, the damping device is a gas spring 9, one end of which is rotatably connected to the upper cover B, and the other end of which is rotatably connected to the cavity A. The elasticity of the gas spring can be adjusted by filling it with gas of different pressures, so that the resistance during the closing process of the upper cover B and the cavity A can be controlled.

[0065] In a specific embodiment, Figure 4 and Figure 5 As shown, the locking plate 3 is provided with an arc portion 302 , and the locking plate 3 pushes the stop portion 601 through the arc portion 302 ;

[0066] By providing the arc portion 302 , when the locking plate 3 pushes the stop portion 601 , the top surface of the stop portion 601 is always tangent to the arc portion 302 , ensuring that the pushing process can proceed smoothly.

[0067] In a specific embodiment, Figure 3 and Figure 4 As shown, a blind plate 11 is further included. The sliding groove 102 is open at one end away from the locking hole 101. The sliding portion 602 is inserted into the sliding groove 102 from the opening to facilitate installation. The blind plate 11 is connected to the first leaf 1 by bolts to block the opening.

[0068] like Figure 9 As shown, a blind hole 603 is provided on the sliding portion 602 , one end of the spring 7 is inserted into the blind hole 603 , and the other end of the spring 7 abuts against the blind plate 11 . The blind hole 603 enables the spring 7 to better exert force on the sliding portion 602 .

[0069] In a specific embodiment, Figure 1 As shown, it also includes a handle 8, which is fixed on the upper cover B. The handle 8 is convenient for the operator to hold so as to better apply force to the upper cover B and facilitate the opening and closing of the upper cover B.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A connection device for a cavity, characterized in that: include: A hinge structure, comprising a first leaf (1) and a second leaf (2) hingedly connected via a rotating shaft (12), wherein the first leaf (1) is provided with a limiting structure; The first leaf (1) is provided with locking holes (101) on both sides, and a latch spring (4) and a latch (5) are provided in the locking hole (101), and the latch (5) can move along the axial direction of the latch spring (4), and the axial direction of the latch spring (4) is parallel to the axial direction of the rotating shaft (12); the second leaf (2) is provided with locking plates (3), and the locking plates (3) are provided with pin holes (301) for allowing the latch (5) to be inserted; When the second leaf (2) is rotated until the latch (5) is aligned with the pin hole (301), the latch (5) extends from the locking hole (101) and is inserted into the pin hole (301) under the elastic force of the latch spring (4), and the hinge structure is locked at this time; The limiting structure can prevent the latch (5) from extending from the locking hole (101) when the hinge structure is not locked.

2. A connection device for a cavity according to claim 1, characterized in that: The limiting structure comprises a limiting slider (6) and a slide groove (102), wherein the slide groove (102) is arranged on both sides of the first leaf (1), and a spring (7) is arranged in the slide groove (102); The limiting slider (6) comprises a stopper (601) and a sliding portion (602), wherein the sliding portion (602) is slidably arranged in the slide groove (102), and rotating the second leaf (2) enables the locking plate (3) to push the stopper (601); Under the elastic force of the spring (7), the sliding portion (602) can slide along the sliding groove (102) until the stop portion (601) blocks the locking hole (101); Under the thrust of the locking plate (3), the sliding portion (602) can slide in the opposite direction along the sliding groove (102) until the stop portion (601) no longer blocks the locking hole (101).

3. A connection device for a cavity according to claim 1, characterized in that: The first leaf (1) is also provided with unlocking grooves (103) on both sides thereof, which are connected to the locking hole (101). The unlocking grooves (103) extend along the axial direction of the latch spring (4). The latch (5) is provided with a handle (10). The handle (10) extends from the unlocking groove (103). Pulling the handle (10) can retract the latch (5) into the locking hole (101).

4. A connection device for a cavity according to claim 3, characterized in that: Also included is a damping device; The first sheet (1) is fixed on the cavity (A), the second sheet (2) is fixed on the upper cover (B), and the damping device can provide resistance during the closing process of the upper cover (B) and the cavity (A).

5. A connection device for a cavity according to claim 4, characterized in that: The damping device is a gas spring (9), one end of the gas spring (9) is rotatably connected to the upper cover (B), and the other end of the gas spring (9) is rotatably connected to the cavity (A).

6. A connection device for a cavity according to claim 2, characterized in that: The locking plate (3) is provided with an arc-shaped portion (302), and the locking plate (3) pushes the stop portion (601) via the arc-shaped portion (302).

7. The connection device for a cavity according to claim 2, characterized in that: It also includes a blind plate (11), the sliding groove (102) is open at one end away from the locking hole (101), the sliding portion (602) is inserted into the sliding groove (102) from the opening, and the blind plate (11) is used to block the opening; A blind hole (603) is provided on the sliding portion (602), one end of the spring (7) is inserted into the blind hole (603), and the other end of the spring (7) abuts against the blind plate (11).

8. The connection device for a cavity according to claim 4, characterized in that: It also includes a handle (8), which is fixed on the upper cover (B).

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