Guide mechanism capable of overcoming dead weight and substrate clamping mechanism comprising guide mechanism

Abstract

The utility model discloses a guide mechanism capable of overcoming self weight and a substrate clamping mechanism comprising the guide mechanism. The guide mechanism comprises an anti-falling spring, a guide column, a guide ejector rod and a bearing assembly. The interior of the guide column is of a hollow structure, through notches are symmetrically formed in the two sides of the guide column, the guide ejector rod is arranged in the guide column in a penetrating mode, the two ends of the guide ejector rod are slidably connected with the two ends of the guide column through the anti-disengaging spring and the bearing assembly, and the anti-disengaging spring and the bearing assembly are used for providing elastic clamping force. The auxiliary guide ejector rod overcomes the self gravity to keep balance when moving to a limit position in the guide post; two sides of the guide ejector rod are respectively connected with two substrate clamping parts to be lifted, and the middle part of the guide ejector rod is connected with a driving element; when the driving element drives the guide ejector rod to ascend and descend along the guide columns, the substrate clamping components on the two sides of the guide ejector rod ascend and descend synchronously. The clamping device has the characteristics of compact structure, convenience in operation, high synchronism and the like, and is favorable for realizing automatic clamping and releasing of the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor electron beam equipment, in particular to a guide mechanism for overcoming deadweight and a substrate clamping mechanism comprising the guide mechanism. Background Art

[0002] Electron beam lithography (EBLI) equipment is a critical infrastructure that utilizes a focused electron beam to generate, accelerate, focus, and deflect materials for high-precision exposure to fabricate micro- and nanoscale structures. In the field of micro- and nanofabrication, EBLI is a crucial process and one of the core technologies for achieving high-precision pattern production. Therefore, automated reticle clamping and release are essential for efficient mask exposure. These actions require synchronized, effective, and reliable guidance mechanisms. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a guide mechanism for overcoming deadweight with simple principle, convenient operation and good synchronization in view of the deficiencies in the prior art.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] The cam is secured to the chassis and has two guide rails which are connected to the chassis via a spring which is secured on both sides of the chassis and the guide rails are secured to the chassis via a spring which is secured on both sides of the chassis.

[0006] As a further improvement of the present invention, the guide push rod includes a guide shaft and a guide connecting rod arranged perpendicular to each other; the middle part of the guide connecting rod is fixed to the middle part of the guide shaft by a fastening screw, and the guide shaft is arranged inside the guide column in the vertical direction. Both ends of the guide shaft are slidingly connected to the two ends of the guide column through anti-slip springs and bearing assemblies. The guide connecting rod passes through the slot of the guide column, and the two ends of the guide connecting rod are respectively connected to two substrate clamping parts to be lifted and lowered, and the middle part of the guide connecting rod is also connected to the driving element.

[0007] As a further improvement of the present invention, the guide push rod also includes a lifting push block and a roller; detachable lifting push blocks are respectively provided at both ends of the guide connecting rod, and the lifting push blocks are used to connect the substrate clamping component to be lifted; a roller is provided between the guide connecting rod and the fastening screw, and the roller is slidably connected to the output end of the driving element.

[0008] As a further improvement of the present invention, a connecting hole is provided on the lifting and pushing block, and a fastening screw is screwed into the guide connecting rod and the connecting hole to achieve a detachable connection between the lifting and pushing block and the guide connecting rod.

[0009] As a further improvement of the present invention, the connecting hole is a long waist-shaped connecting hole, so as to facilitate adjustment of the installation position of the lifting and blocking block on the guide connecting rod.

[0010] As a further improvement of the present invention, the bearing assembly includes a bearing holder, a first bearing, a second bearing and a third bearing; the first bearing is arranged in the bearing holder, and the bearing holder is connected and fixed to the end of the guide column through an anti-slip spring, and the second bearing and the third bearing are fixedly arranged at the end of the guide column; when the guide shaft is arranged in the vertical direction inside the guide column and moves to the extreme position, the end of the guide shaft slides through the cavity enclosed by the first bearing, the second bearing and the third bearing.

[0011] As a further improvement of the present invention, the first bearing, the second bearing and the third bearing are evenly distributed at the end of the guide column along the circumferential direction.

[0012] As a further improvement of the present invention, both ends of the guide shaft are provided with tapers.

[0013] As a general technical concept, the utility model also provides a substrate clamping mechanism, comprising: a mounting base plate, a mounting top plate, a support column, a first clamping assembly, a second clamping assembly, a third clamping assembly, a first lever assembly, a second lever assembly, and the above-mentioned guide mechanism;

[0014] The mounting base and the mounting top plate are connected and fixed by multiple support columns, and the first lever assembly, the second lever assembly and the guide mechanism are all arranged on the mounting base; the first clamping assembly, the second clamping assembly and the third clamping assembly arranged on the mounting top plate have the same structural setting and all include a push rod component; the first clamping assembly and the second clamping assembly are arranged opposite to each other, and the second clamping assembly and the third clamping assembly are on the same side; the push rod component of the first clamping assembly passes through the mounting top plate and is connected to one end of the first lever assembly, the push rod components of the second clamping assembly and the third clamping assembly pass through the mounting top plate and are connected to the guide mechanism, the guide mechanism is connected to one end of the second lever assembly, and the other end of the first lever assembly and the other end of the second lever assembly are both connected to the driving element; under the drive of the driving element, the lever assembly drives the push rod component of the clamping assembly to rise and fall to clamp or release the substrate.

[0015] As a further improvement of the present invention, the guide link is connected to one end of the second lever assembly, and the push rod components of the second clamping assembly and the third clamping assembly are respectively connected to both ends of the guide link.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] The cam is secured to the chassis and the guide rail is secured to the chassis by a spring, which allows the guide rail to be moved in a straight line and out of the chassis, thereby facilitating the movement of the guide rail when the chassis is in a straight line. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the main structural principle of the guide mechanism for overcoming deadweight in a specific embodiment of the present utility model;

[0019] Figure 2 This is a schematic diagram of the top view of the structural principle of the guide mechanism for overcoming deadweight in a specific embodiment of the utility model;

[0020] Figure 3This is a schematic diagram of the bottom-up structural principle of the guide mechanism for overcoming deadweight in a specific embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram of the structural principle of the guide push rod in a specific embodiment of the present utility model;

[0022] Figure 5 for Figure 4 Schematic diagram of the structural principle in the middle AA direction;

[0023] Figure 6 This is a schematic diagram of the structural principle of a specific embodiment of the utility model in which the guide push rod is in the upper limit position; in the figure, d represents the movement clearance of the bearing seat;

[0024] Figure 7 This is a schematic diagram of the structural principle of a specific embodiment of the utility model in which the guide push rod is in the lower limit position;

[0025] Figure 8 This is a schematic diagram of the force principle when the guide push rod is in the upper limit position state in a specific embodiment of the utility model;

[0026] Figure 9 This is a schematic diagram of the force principle when the guide push rod is in the lower limit position state in a specific embodiment of the utility model;

[0027] Figure 10 This is a schematic diagram of the structural principle of the substrate clamping mechanism in a specific embodiment of the present utility model;

[0028] Figure 11 This is a schematic diagram of the structural principle of the clamping mechanism clamping the substrate in a specific embodiment of the utility model;

[0029] Legend: 1. Base plate; 2. Push rod component; 100. Guide mechanism; 101. Anti-slip spring; 102. Guide column; 103. Guide push rod; 1031. Guide shaft; 1032. Guide connecting rod; 1033. Lifting and blocking block; 1034. Roller; 1035. Fastening screw; 104. Bearing holder; 105. First bearing; 106. Second bearing; 107. Third bearing; 200. Mounting base plate; 300. Mounting top plate; 400. Support column; 500. First clamping assembly; 600. Second clamping assembly; 700. Third clamping assembly; 800. First lever assembly; 900. Second lever assembly. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby.

[0031] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0033] Example

[0034] like Figure 1 、 Figure 2 and Figure 3 As shown, the guide mechanism for overcoming deadweight of the present invention comprises: an anti-slip spring 101, a guide column 102, a guide push rod 103 and a bearing assembly. The interior of the guide column 102 is a hollow structure, and symmetrical notches are provided on both sides of the guide column 102. The guide push rod 103 is arranged inside the guide column 102. Both ends of the guide push rod 103 are slidably connected to the two ends of the guide column 102 by the anti-slip spring 101 and the bearing assembly. The anti-slip spring 101 and the bearing assembly are used to provide elastic clamping force to assist the guide push rod 103 in overcoming its own gravity and maintaining balance when it moves to the extreme position inside the guide column 102. Two substrate clamping components to be lifted and lowered are connected to both sides of the guide push rod 103 respectively, and the middle part of the guide push rod 103 is connected to a driving element; when the driving element drives the guide push rod 103 to lift and lower along the guide column 102, the substrate clamping components on both sides of the guide push rod 103 are lifted and lowered synchronously.

[0035] In this embodiment, the interior of the guide post 102 is configured as a hollow structure, and notches are symmetrically provided on both sides of the guide post 102. A guide push rod 103 is arranged throughout the interior of the guide post 102. Both ends of the guide push rod 103 are slidably connected to the two ends of the guide post 102 by anti-slip springs 101 and bearing assemblies, thus forming a compact guide mechanism. At the same time, the elastic clamping force provided by the anti-slip springs 101 and bearing assemblies can effectively assist the guide push rod 103 in overcoming its own gravity and maintaining balance when it moves to the lower end limit position or the upper end limit position inside the guide post 102. Furthermore, two substrate clamping components to be raised and lowered are connected to each side of the guide push rod 103, and the middle part of the guide push rod 103 is connected to a driving element. When the driving element drives the guide push rod 103 to rise and fall along the guide post 102, the substrate clamping components on both sides of the guide push rod 103 can be raised and lowered synchronously, and the guide push rod 103 will not slide down when it reaches the two limit positions, which is conducive to realizing automatic clamping and release of substrates.

[0036] like Figure 4 and Figure 5 As shown, the guide push rod 103 includes a guide shaft 1031 and a guide link 1032, which are arranged perpendicular to each other. The middle portion of the guide link 1032 is fixed to the middle portion of the guide shaft 1031 by a fastening screw 1035. The guide shaft 1031 is vertically arranged inside the guide column 102. Both ends of the guide shaft 1031 are slidably connected to the ends of the guide column 102 via an anti-slip spring 101 and a bearing assembly. The guide link 1032 passes through the notch of the guide column 102. The two ends of the guide link 1032 are respectively connected to two substrate clamping components to be raised and lowered. The connection between the middle portion of the guide link 1032 and the middle portion of the guide shaft 1031 is also connected to the driving element.

[0037] like Figure 4 As shown, guide push rod 103 also includes a lifting block 1033 and a roller 1034. Removable lifting blocks 1033 are provided at each end of guide link 1032. Lifting blocks 1033 are used to connect to the substrate clamping component to be raised or lowered. Roller 1034 is provided between guide link 1032 and fastening screw 1035. Roller 1034 is slidably connected to the output end of the drive element.

[0038] Furthermore, a connecting hole 1036 is provided on the lifting and pushing block 1033. A fastening screw 1035 is screwed into the guide link 1032 and the connecting hole 1036 to achieve a detachable connection between the lifting and pushing block 1033 and the guide link 1032. The connecting hole 1036 is an elongated waist-shaped connecting hole to facilitate adjustment of the installation position of the lifting and pushing block 1033 on the guide link 1032.

[0039] like Figure 2 and Figure 3As shown, the bearing assembly includes a bearing seat 104, a first bearing 105, a second bearing 106 and a third bearing 107. The first bearing 105 is set in the bearing seat 104, and the bearing seat 104 is connected and fixed to the end of the guide column 102 through the anti-drop spring 101. The second bearing 106 and the third bearing 107 are fixedly set at the end of the guide column 102. Figure 6 As shown, there is a gap d between the bearing holder 104 and the end of the guide column 102. The gap d is the movable space of the bearing holder 104. The bearing holder 104 drives the first bearing 105 to move, so as to realize the corresponding horizontal spring force on the side of the guide shaft 1031, so that the guide shaft 1031 can overcome its own gravity and maintain balance when it moves to the upper and lower limit positions. Figure 7 、 Figure 8 and Figure 9 As shown, when the guide shaft 1031 is arranged inside the guide column 102 in the vertical direction and moves to the extreme position, the end of the guide shaft 1031 slides through the cavity enclosed by the first bearing 105, the second bearing 106 and the third bearing 107, that is, the three sides of the guide shaft 1031 are respectively supported by the first bearing 105, the second bearing 106 and the third bearing 107.

[0040] Furthermore, the first bearing 105, the second bearing 106 and the third bearing 107 are evenly distributed at the end of the guide column 102 along the circumferential direction. The first bearing 105, the second bearing 106 and the third bearing 107 can all adopt deep groove ball bearings to improve the reliability and stability of the reciprocating lifting motion of the guide shaft 1031.

[0041] like Figure 7 As shown, in this embodiment, both ends of the guide shaft 1031 are provided with a small taper. Figure 8 and Figure 9 As shown, when the guide shaft 1031 moves to the upper limit position, in addition to its own downward gravity, the upper part of the guide shaft 1031 is mainly subjected to the horizontal spring force, and the horizontal spring force and the gravity of the guide shaft 1031 are balanced with each other. The conical end of the lower part of the guide shaft 1031 is subjected to the upward support force provided by the bearing assembly and the horizontal spring force. The two forces balance each other, and finally the guide push rod 103 is kept balanced as a whole.

[0042] Specifically, if Figure 8 As shown, the principle of the guide mechanism 100 overcoming its own weight at the upper limit position is:

[0043] The guide push rod 103 can slide up and down within the guide column 102. The guide shaft 1031 in the guide push rod 103 has a slight taper at both ends. When the guide shaft 1031 slides to its upper limit within the guide column 102, the lower taper of the guide shaft 1031 slightly retracts in the radial direction. At this point, the bearing holder 104, under the action of the anti-drop spring 101, stretches radially toward the guide shaft 1031, generating a spring force sufficient to overcome the weight of the guide push rod 103, preventing it from falling under its own weight.

[0044] like Figure 9 As shown, the principle by which the guide mechanism 100 overcomes its own weight at the lower limit position is as follows: when the guide shaft 1031 slides within the guide post 102 to the lower limit position, the upper taper of the guide shaft 1031 retracts slightly in the radial direction. At this point, the bearing holder 104, under the action of the anti-slip spring 101, stretches in a direction perpendicular to the guide shaft 1031, generating a spring force sufficient to overcome the weight of the guide push rod 103, preventing the guide push rod 103 from sliding freely under its own weight.

[0045] like Figure 10 and Figure 11 As shown, this embodiment also provides a substrate clamping mechanism, including: a mounting base plate 200, a mounting top plate 300, a support column 400, a first clamping assembly 500, a second clamping assembly 600, a third clamping assembly 700, a first lever assembly 800, a second lever assembly 900 and the above-mentioned guide mechanism 100.

[0046] Specifically, the mounting base 200 and the mounting top plate 300 are connected and fixed via a plurality of support columns 400. The first lever assembly 800, the second lever assembly 900, and the guide mechanism 100 are all disposed on the mounting base 200. The first clamping assembly 500, the second clamping assembly 600, and the third clamping assembly 700 disposed on the mounting top plate 200 have the same structural arrangement and each include a push rod component 2. The first clamping assembly 500 and the second clamping assembly 600 are disposed opposite each other, and the second clamping assembly 600 and the third clamping assembly 700 are on the same side, thereby providing clamping force from three directions. The top rod component 2 of the first clamping assembly 500 extends through the top mounting plate 300 and is connected to one end of the first lever assembly 800. The top rod components 2 of the second clamping assembly 600 and the third clamping assembly 700 extend through the top mounting plate 300 and are connected to the guide mechanism 100. The guide mechanism 100 is connected to one end of the second lever assembly 900. The other ends of the first lever assembly 800 and the second lever assembly 900 are both connected to a driving element. Driven by the driving element, the lever assembly drives the top rod components of the clamping assembly to rise and fall, thereby clamping or releasing the substrate 1.

[0047] It can be understood that the structures of the first clamping assembly 500, the second clamping assembly 600, the third clamping assembly 700, the first lever assembly 800 and the second lever assembly 900 can adopt conventional settings in the field and will not be repeated here.

[0048] In this embodiment, the guide link 1032 is connected to one end of the second lever assembly 900, and the ejector rods 2 of the second clamping assembly 600 and the third clamping assembly 700 are respectively connected to both ends of the guide link 1032. The guide mechanism 100 drives the ejector rods 2 of the second clamping assembly 600 and the third clamping assembly 700 to move synchronously, thereby improving the reliability of the automatic clamping and releasing of the substrate 1.

[0049] In this embodiment, the driving element can specifically be a stepper motor. By setting a motor operation program, the displacement of the lever assembly can be precisely controlled, and thus the displacement of the three clamping assemblies can be precisely controlled, thereby improving the reliability of clamping the substrate 1. In other embodiments, the first clamping assembly 500, the second clamping assembly 600, and the third clamping assembly 700 can also be installed outside the mounting base 200 to avoid installing a lifting mechanism within the limited space of the mounting base 200, thereby facilitating the application of lifting force outside the mounting base 200.

[0050] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, certain improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A guide mechanism for overcoming deadweight, characterized in that: The guide mechanism (100) comprises: an anti-slip spring (101), a guide column (102), a guide push rod (103) and a bearing assembly; the interior of the guide column (102) is a hollow structure, and two sides of the guide column (102) are symmetrically provided with through slots, the guide push rod (103) is arranged inside the guide column (102), and both ends of the guide push rod (103) are slidably connected to the two ends of the guide column (102) through the anti-slip spring (101) and the bearing assembly. 1) and the bearing assembly are used to provide an elastic clamping force to assist the guide push rod (103) to overcome its own gravity and maintain balance when it moves to the extreme position inside the guide column (102); two sides of the guide push rod (103) are respectively connected to two substrate clamping components to be lifted, and the middle of the guide push rod (103) is connected to a driving element; when the driving element drives the guide push rod (103) to be lifted along the guide column (102), the substrate clamping components on both sides of the guide push rod (103) are lifted synchronously.

2. The guide mechanism for overcoming deadweight according to claim 1, characterized in that: The guide push rod (103) comprises a guide shaft (1031) and a guide connecting rod (1032) which are arranged perpendicular to each other; the middle part of the guide connecting rod (1032) is fixed to the middle part of the guide shaft (1031) by a fastening screw (1035); the guide shaft (1031) is arranged inside the guide column (102) along the vertical direction; both ends of the guide shaft (1031) are slidably connected to the two ends of the guide column (102) by an anti-slip spring (101) and a bearing assembly; the guide connecting rod (1032) passes through the notch of the guide column (102); the two ends of the guide connecting rod (1032) are respectively connected to two substrate clamping components to be lifted and lowered, and the middle part of the guide connecting rod (1032) is also connected to a driving element.

3. The guide mechanism for overcoming deadweight according to claim 2, characterized in that: The guide push rod (103) further comprises a lifting push block (1033) and a roller (1034); detachable lifting push blocks (1033) are respectively provided at both ends of the guide connecting rod (1032), and the lifting push blocks (1033) are used to connect the substrate clamping component to be lifted; a roller (1034) is provided between the guide connecting rod (1032) and the fastening screw (1035), and the roller (1034) is slidably connected to the output end of the driving element.

4. The guide mechanism for overcoming deadweight according to claim 3, characterized in that: The lifting and pushing block (1033) is provided with a connecting hole (1036), and a fastening screw (1035) is screwed into the guide connecting rod (1032) and the connecting hole (1036) to achieve a detachable connection between the lifting and pushing block (1033) and the guide connecting rod (1032).

5. The guide mechanism for overcoming deadweight according to claim 4, characterized in that: The connecting hole (1036) is a long, waist-shaped connecting hole, so as to facilitate adjustment of the installation position of the lifting and blocking block (1033) on the guide connecting rod (1032).

6. The guide mechanism for overcoming deadweight according to any one of claims 2 to 5, characterized in that: The bearing assembly comprises a bearing holder (104), a first bearing (105), a second bearing (106) and a third bearing (107); the first bearing (105) is arranged in the bearing holder (104), the bearing holder (104) is connected and fixed to the end of the guide column (102) through an anti-drop spring (101), and the second bearing (106) and the third bearing (107) are fixedly arranged at the end of the guide column (102); when the guide shaft (1031) is arranged in the vertical direction inside the guide column (102) and moves to the extreme position, the end of the guide shaft (1031) slides through the cavity enclosed by the first bearing (105), the second bearing (106) and the third bearing (107).

7. The guide mechanism for overcoming deadweight according to claim 6, characterized in that: The first bearing (105), the second bearing (106) and the third bearing (107) are evenly distributed at the end of the guide column (102) along the circumferential direction.

8. The guide mechanism for overcoming deadweight according to any one of claims 2 to 5, characterized in that: Both ends of the guide shaft (1031) are provided with tapers.

9. A substrate clamping mechanism, characterized in that: include: A mounting base plate (200), a mounting top plate (300), a support column (400), a first clamping assembly (500), a second clamping assembly (600), a third clamping assembly (700), a first lever assembly (800), a second lever assembly (900), and a guide mechanism (100) according to any one of claims 2 to 8; The mounting base plate (200) and the mounting top plate (300) are connected and fixed via a plurality of support columns (400); the first lever assembly (800), the second lever assembly (900) and the guide mechanism (100) are all arranged on the mounting base plate (200); the first clamping assembly (500), the second clamping assembly (600) and the third clamping assembly (700) arranged on the mounting top plate (300) have the same structural arrangement and all include a top rod component (2); the first clamping assembly (500) and the second clamping assembly (600) are arranged opposite to each other, and the second clamping assembly (600) and the third clamping assembly (700) are in the same side; the top rod component (2) of the first clamping assembly (500) passes through the mounting top plate (300) and is connected to one end of the first lever assembly (800); the top rod components (2) of the second clamping assembly (600) and the third clamping assembly (700) pass through the mounting top plate (300) and are connected to the guide mechanism (100); the guide mechanism (100) is connected to one end of the second lever assembly (900); the other end of the first lever assembly (800) and the other end of the second lever assembly (900) are both connected to the driving element; under the drive of the driving element, the lever assembly drives the top rod component (2) of the clamping assembly to rise and fall, so as to clamp or release the substrate (1).

10. The substrate clamping mechanism according to claim 9, wherein: The guide link (1032) is connected to one end of the second lever assembly (900), and the push rod components (2) of the second clamping assembly (600) and the third clamping assembly (700) are respectively connected to both ends of the guide link (1032).

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