Double-chamber sputter coating equipment

Abstract

The utility model relates to double-chamber sputter coating equipment which comprises a rack, a loading chamber and a coating chamber are arranged on the rack, a transfer device is arranged between the loading chamber and the coating chamber, a heating device A, a carrying table, a cleaning unit and a coating unit are arranged on the coating chamber, and the coating chamber is further connected with a cooling unit A, a vacuumizing unit A and a gas unit A; a heating device B is arranged in the loading chamber, and the loading chamber is connected with a vacuumizing unit B; and a cooling unit B, a power supply unit and an electric control unit are also arranged on the rack. According to the scheme provided by the utility model, the coating chamber is always in a vacuum state in the sputter coating process, so that the coating chamber is prevented from being exposed to the atmosphere, and the cleanliness of the sputter coating process is ensured.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a double-chamber sputtering coating device. Background Art

[0002] Existing vacuum coating equipment requires the introduction of gas into the chamber after the coating process is complete. The chamber door is then opened and the workpiece removed after the pressure inside and outside the chamber has balanced. During this process, moisture and dust from the air can enter the coating chamber, contaminating both the chamber and the workpiece. Furthermore, current vacuum coating equipment typically utilizes a modular design, with components such as the chamber, electrical cabinet, and vacuum pump being transported separately to the customer's site for assembly and commissioning. This repeated opening and closing of the sealing structure during assembly and disassembly reduces the reliability of the equipment. Summary of the Invention

[0003] The utility model aims to provide a dual-chamber sputtering coating device, which can prevent the coating chamber and the workpiece from being contaminated during the coating process.

[0004] In order to achieve the above-mentioned purpose, the present invention is implemented according to the technical solution described below.

[0005] A dual-chamber sputtering coating equipment, characterized in that: it includes a frame, the frame is provided with a loading chamber and a coating chamber that can be opened and closed, the loading chamber and the coating chamber are arranged correspondingly and are connected by a connecting channel, the connecting channel is provided with a connection adjustment component for adjusting the connection state of the connecting channel, a transfer device is provided between the loading chamber and the coating chamber, the transfer device is used to realize the transfer of the workpiece between the loading chamber and the coating chamber; a heating device A for heating the workpiece and a carrier for supporting the workpiece to be coated are provided in the coating chamber, and a cleaning device for cleaning the workpiece is provided on the coating chamber. The coating chamber is further connected to an A cooling unit for cooling the coating chamber, an A vacuum unit for evacuating the coating chamber, and an A gas unit for supplying process gas to the coating chamber; a B heating device for baking and degassing the loading chamber is provided in the loading chamber, and the loading chamber is connected to the B vacuum unit for evacuating the loading chamber; a B cooling unit, a power supply unit, and an electrical control unit are also provided on the rack; the B cooling unit is used to cool each device, the power supply unit supplies power to each device, and the electrical control unit is used to regulate the operating status of each device.

[0006] The specific plan is: the frame includes a base, a mounting frame arranged on the base, and an outer box located outside the mounting frame. The mounting frame includes a left frame part, a middle frame part, and a right frame part arranged from left to right. The coating chamber and the loading chamber are fixedly installed on the top of the left frame part and the middle frame part respectively. The power supply unit is installed inside the middle frame part, and the electrical control unit is installed inside the right frame part.

[0007] The A vacuum unit includes an A molecular pump and an A mechanical pump, and the B vacuum unit includes a B molecular pump and a B mechanical pump. The A mechanical pump is connected to the A vacuum tube provided on the coating chamber, and the B mechanical pump is connected to the B vacuum tube provided on the loading chamber. A plug-in valve and B plug-in valve are respectively provided on the A vacuum tube and the B vacuum tube. The A molecular pump and the B molecular pump are respectively connected to the A mechanical pump and the B mechanical pump. The A molecular pump and the B molecular pump are respectively fixedly installed on the rear sides of the coating chamber and the loading chamber. The A mechanical pump and the B mechanical pump are both fixedly installed inside the right frame.

[0008] A gas unit includes an airflow regulating device arranged on the top of the loading chamber, the cleaning unit includes a cleaning device arranged on the top of the coating chamber, and the coating unit includes various sputtering devices arranged on the top of the coating chamber. The airflow regulating device is used to regulate the air intake volume in the cleaning device, the sputtering device and the coating chamber.

[0009] A cooling unit includes a circulating fan located on the lower side of the coating chamber. The circulating fan is fixedly installed in the left frame. The inlet of the circulating fan is connected to the coating chamber. The outlet of the circulating fan is connected to the heat exchanger. The heat exchanger is vertically installed on the rear side of the left frame. The air outlet of the heat exchanger is connected to the coating chamber.

[0010] The B cooling unit is a water cooling unit, which includes a return water collecting device and an outflow water diverter. The return water collecting device and the outflow water diverter are installed on the rear side of the left frame.

[0011] The outer box body is composed of the rear box wall, left box wall, front box wall, right box wall and top box wall. The left box wall is composed of an opening and closing box door. An installation gap is set on the front box wall. The installation gap is used to install the chamber A door of the coating chamber and the chamber B door of the loading chamber. A display screen and a pull-out keyboard are also set on the front box wall.

[0012] The communication adjustment component consists of an A1 gate valve.

[0013] An assembly pipe is provided on the side wall of the loading chamber away from the coating chamber. The assembly pipe is located on the upper side of the right frame part. A moving adjustment component for driving the transfer device to move is provided in the assembly pipe; the carrier is connected to the lifting and rotating adjustment device and the bias device provided on the lower side of the coating chamber. The lifting and rotating adjustment device is used to adjust the carrier to lift and rotate.

[0014] The utility model also provides a dual-chamber sputtering coating process, which includes the following operations.

[0015] S1: Close the door of chamber A of the coating chamber, adjust the coating chamber to a vacuum state, close the A1 gate valve, open the door of chamber B of the loading chamber, place the workpiece to be coated on the carrier, close the door of chamber B, vacuum the loading chamber and start the B heating device to bake and degas the loading chamber, the baking temperature is 100°C, when the vacuum degree of the loading chamber and the coating chamber is balanced, open the A1 gate valve, the transfer device transfers the carrier into the coating chamber and transfers the carrier to the carrier, the transfer device returns to the loading chamber, close the A1 gate valve, the loading chamber remains in a vacuum and heating state, and the workpiece is a molding die.

[0016] S2: Start the A heating device to heat the carrier and the workpiece to above 500°C, start the cleaning device and the corresponding sputtering device to clean and coat the workpiece in sequence according to the preset process parameters.

[0017] S3: After the coating process is completed, open the process gas interface on the top of the coating chamber, introduce nitrogen or helium, adjust the pressure of the coating chamber to 50000Pa, start the circulating fan to extract the gas in the coating chamber and return it to the coating chamber after cooling through the heat exchanger, so that the temperature in the coating chamber is reduced to below 120℃, then open the A1 gate valve, and the transfer device transfers the carrier and workpiece back to the loading chamber, then close the A1 gate valve, open the B chamber door, and take out the coated workpiece.

[0018] The above solution provided by the present invention is that the coating chamber is always in a vacuum state during the sputtering coating process, which prevents the coating chamber from being exposed to the atmosphere and ensures the cleanliness of the sputtering coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of the present utility model.

[0020] Figure 2 for Figure 1 Schematic diagram of the structure after removing the outer box.

[0021] Figure 3 for Figure 2 Front view of.

[0022] Figure 4 for Figure 2 Top view of .

[0023] Figure 5 for Figure 2 rear view.

[0024] Figure 6 for Figure 2 side view.

[0025] Figure 7 Schematic diagram of the assembly of the coating chamber, loading chamber and transfer device.

[0026] Figure 8 for Figure 7 Front view of.

[0027] Figure 9 This is a schematic diagram of the assembly of the transfer device on the A guide component.

[0028] Figure 10 Schematic diagram of the structure of the transfer device.

[0029] Figure 11 A cross-sectional view of the vehicle.

[0030] Figure 12 Schematic diagram of the structure of the connecting fork.

[0031] Description of the drawing numbers: 01-A plug-in valve, 02-B plug-in valve, 03-A1 plug-in valve, 04-power supply unit, 05-electrical control device, 06-circulating fan, 07-heat exchanger, 08-assembly pipeline, 10-workpiece, 11-base, 12-left box wall, 13-top box wall, 14-front box wall, 15-assembly lifting hole, 16-display, 17-plug-in keyboard, 18-A chamber door, 19-B chamber door, 21-coating chamber, 22-loading chamber, 23-cleaning device, 24-sputtering device, 25-air flow adjustment device, 26-A molecular pump, 27-B molecular pump, 28-A mechanical pump, 29-B mechanical pump, 30-return water collection device, 31-outlet water diversion device , 32-lifting and rotating adjustment device, 33-biasing device, 34-A heating device, 35-carrier, 36-plug-in positioning pin, 37-heating lifting and lowering adjustment mechanism, 38-connecting channel, 40-carrier, 41-A1 body, 42-A2 body, 43-annular mounting groove, 44-annular plug-in groove, 45-heat conduction hole, 46-plug-in positioning hole, 47-annular recess, 50-transfer trolley, 51-connecting fork, 52-A3 detection sensor, 53-A1 roller, 54-A2 roller, 55-universal connector, 56-connector, 57-A guide assembly, 58-A3 roller, 59-B guide assembly, 61-A1 detection sensor, 62-A2 detection sensor. DETAILED DESCRIPTION

[0032] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0033] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include allowances for reasonable and inconsistent machining or human errors.

[0034] like Figures 1 to 6 As shown, a dual-chamber sputtering coating equipment includes a frame, on which a loading chamber 22 and a coating chamber 21 that can be opened and closed are provided. The loading chamber 22 and the coating chamber 21 are arranged correspondingly and are connected to each other through a connecting channel. The connecting channel is provided with a connection adjustment component for adjusting the connection state of the connecting channel. A transfer device is provided between the loading chamber 22 and the coating chamber 21, and the transfer device is used to realize the transfer of the workpiece 10 between the loading chamber 22 and the coating chamber 21; a heating device A 34 for heating the workpiece 10 and a carrier for supporting the workpiece 10 to be coated are provided in the coating chamber 21, and a device for cleaning the workpiece 10 is provided on the coating chamber 21. The coating chamber 21 is connected to a cleaning unit and a coating unit for coating the workpiece 10. The coating chamber 21 is also connected to a cooling unit A for cooling the coating chamber 21, a vacuum unit A for evacuating the coating chamber 21, and a gas unit A for supplying process gas to the coating chamber 21. The loading chamber 22 is provided with a heating device B for baking and degassing the loading chamber 22. The loading chamber 22 is connected to a vacuum unit B for evacuating the loading chamber 22. The rack is also provided with a cooling unit B, a power supply unit 04, and an electrical control unit. The cooling unit B is used to cool each device, the power supply unit 04 supplies power to each device, and the electrical control unit is used to regulate the operating status of each device. By providing the coating chamber 21 and the loading chamber 22, the coating chamber 21 is always in a vacuum state during the sputtering coating process, preventing the coating chamber 21 from being exposed to the atmosphere and ensuring the cleanliness of the sputtering coating process.

[0035] like Figure 2As shown, the frame includes a base 11, a mounting frame mounted on the base 11, and an outer box located outside the mounting frame. The mounting frame comprises, from left to right, a left frame portion, a middle frame portion, and a right frame portion. The coating chamber 21 and the loading chamber 22 are fixedly mounted on the tops of the left and middle frames, respectively. The power supply unit 04 is mounted within the middle frame portion, and the electrical control unit is mounted within the right frame portion. The base 11 is a monolithic structure with two assembly lifting holes 15 provided therein. These holes are used to insert the fork arms of a forklift, thereby enabling the entire sputtering coating apparatus to be transported. This prevents repeated opening and closing of the sealing structure during assembly and disassembly, thereby improving the reliability of the apparatus. The A vacuum unit includes an A molecular pump 26 and an A mechanical pump 28, and the B vacuum unit includes a B molecular pump 27 and a B mechanical pump 29. The A mechanical pump 28 is connected to the A vacuum pipe provided on the coating chamber 21, and the B mechanical pump 29 is connected to the B vacuum pipe provided on the loading chamber 22. The A vacuum pipe and the B vacuum pipe are provided with an A plug valve 01 and a B plug valve 02, respectively. The A molecular pump 26 and the B molecular pump 27 are connected to the A mechanical pump 28 and the B mechanical pump 29, respectively. The A molecular pump 26 and the B molecular pump 27 are fixedly installed on the rear sides of the coating chamber 21 and the loading chamber 22, respectively. The A mechanical pump 28 and the B mechanical pump 29 are both fixedly installed inside the right frame. The detailed electrical control unit consists of two front and rear electrical control devices 05, which are respectively installed vertically on the front and rear sides of the right frame. The A mechanical pump 28 and the B mechanical pump 29 are located between the two electrical control devices 05. The vacuum unit A, vacuum unit B, power supply unit 04, electrical control unit, and so on are all housed within a single frame structure, saving floor space and improving on-site assembly and maintenance efficiency. Gas unit A includes an airflow control device 25 mounted on the top of the loading chamber 22. The cleaning unit includes a cleaning device 23 mounted on the top of the coating chamber. The coating unit includes sputtering devices 24 mounted on the top of the coating chamber. The airflow control device 25 is used to control the air flow within the cleaning device 23, sputtering device 24, and coating chamber 21. Specifically, one cleaning device 23 and three sputtering devices 24 can be installed on the top of the coating chamber 21, allowing different target materials to be used for coating according to different process requirements.

[0036] Further, such as Figure 4 、 5As shown in Figure 6: Cooling unit A includes a circulating fan 06 located at the bottom of the coating chamber 21. Circulating fan 06 is fixedly installed in the left frame. The inlet of circulating fan 06 is connected to the coating chamber 21, and the outlet of circulating fan 06 is connected to the heat exchanger 07. Heat exchanger 07 is vertically installed at the rear side of the left frame. The outlet of heat exchanger 07 is connected to the coating chamber 21. Cooling unit A also includes a process gas interface for cooling provided at the top of the coating chamber 21. The sputtering coating chamber 21 is cooled by the introduction of gas. The circulating heat exchange system composed of circulating fan 06 and heat exchanger 07 is used to extract high-temperature gas from the coating chamber 21 for circulating cooling, thereby achieving rapid cooling of the sputtering coating chamber 21. Cooling unit B is a water cooling unit. Cooling unit B includes a return water collection device 30 and an outflow water diversion device 31. The return water collection device 30 and the outflow water diversion device 31 are installed at the rear side of the left frame. The B cooling unit is used to water-cool the cleaning device 23, sputtering device 24, carrier, etc. to ensure the operational reliability of the equipment. The outer box body is composed of the rear box wall, left box wall 12, front box wall 14, right box wall, and top box wall 13. The left box wall 12 is composed of an opening and closing box door. The front box wall 14 is provided with a mounting hole for installing the A chamber door 18 of the coating chamber 21 and the B chamber door 19 of the loading chamber 22. The front box wall 14 is also provided with a display screen 16 and a plug-in keyboard 17. The setting of the display screen 16 makes it easy to observe the operating status of the equipment, and the plug-in keyboard 17 makes it easy to input control instructions and process parameters. The communication adjustment component is composed of the A1 gate valve 03. An assembly pipe 08 is provided on the side wall of the loading chamber 22 away from the coating chamber 21. The assembly pipe 08 is located on the upper side of the right frame part. A moving adjustment component for driving the transfer device to move is provided in the assembly pipe 08; the carrier is connected to the lifting and rotating adjustment device 32 and the biasing device 33 provided on the lower side of the coating chamber. The lifting and rotating adjustment device 32 is used to adjust the carrier to lift and rotate.

[0037] The transfer device can be implemented by using a magnetic arm or an electromagnet. The following solutions are preferred: Figures 6-12 As shown, the coating chamber 21 is provided with an A guide assembly 57 for supporting the transfer device, and the loading chamber 22 is provided with a B guide assembly 59 for supporting the transfer device. The A guide assembly 57 and the B guide assembly 59 are arranged in a sequentially spaced arrangement. The transfer device and the A guide assembly 57 and the B guide assembly 59 form a movable guide along the A direction, which is the length of the connecting channel 38. The transfer device and the carrier 40 form a removable plug-in connection along the A direction. A carrier for supporting the carrier 40 is provided on the coating chamber 21. The A guide assembly 57 and the B guide assembly 59 support the transfer device, preventing the carrier 40 from being in an overhanging state during transfer, thereby meeting the feeding requirements of heavy workpieces 10.

[0038] The structure of the carrier 40 is as follows Figure 11As shown, it includes a carrier 40 body, and the carrier 40 body is provided with an A1 plug-in portion, an A2 plug-in portion and a supporting portion. The supporting portion is used to support the workpiece 10, the A1 plug-in portion is used to form a detachable plug-in fit with the transfer device, and the A2 plug-in portion is used to form a detachable plug-in fit with the carrier along the B direction, and the B direction is a vertical direction arranged perpendicular to the A direction. By setting two plug-in structures in different directions, the transfer requirements of the carrier 40 can be well met, and the transfer operation is simple, which can meet the assembly requirements of the coating environment. The B direction is set to be arranged vertically, so that the supporting platform in the existing coating chamber 21 can be used for improvement and assembly, simplifying the equipment cost and simplifying the structure of the coating equipment. A heat conducting portion is also provided on the carrier 40 body, and the heat conducting portion is used to conduct heat to heat the workpiece 10 on the carrier 40 body. The setting of the heat conducting portion is mainly to improve the heating effect of the workpiece 10 and improve the efficiency of the coating treatment of the workpiece 10. The supporting portion is composed of an annular mounting groove 43 provided on the upper surface of the carrier body 40. The notch of the annular mounting groove 43 is arranged upward, and the width of the annular mounting groove 43 matches the size of the workpiece 10. The annular groove can well meet the assembly requirements of the workpiece 10 such as the tungsten steel die. The assembly operation of the workpiece 10 is simple, and the workpiece 10 can be assembled in multiples, and the rotation in the coating chamber 21 is stable. Preferably, the carrier body 40 is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove 44 provided on the side wall of the carrier body 40. The annular plug-in groove 44 and the carrier body 40 are arranged concentrically, and the notch of the annular plug-in groove 44 points in the same radial direction as the carrier body 40. The heat conduction portion is composed of heat conduction holes 45 provided on the bottom of the annular mounting groove 43. The heat conduction holes 45 are arranged at intervals along the circumference of the carrier body 40. This embodiment can improve the heat conduction effect and reduce the weight of the carrier 40. The carrier 40 body consists of an A1 body 41 and an A2 body 42 arranged in an upper and lower arrangement. The outer diameter of the A1 body 41 is larger than that of the A2 body 42. An annular mounting groove 43 is provided on the upper surface of the A1 body 41, and an annular insertion groove 44 is provided on the sidewall of the A2 body 42 and adjacent to the A2 body 42. A heat conduction hole 45 is located on the outer side of the A2 body 42. The width of the annular insertion groove 44 is greater than the thickness of the plate inserted into the annular insertion groove 44 on the connecting fork 51. This ensures the reliability of the carrier 40 transfer. The A2 insertion portion is formed by a plug-in positioning hole 46 provided in the middle of the carrier 40 body. The length of the plug-in positioning hole 46 is aligned with the height of the carrier 40 body. The plug-in positioning hole 46 is concentric with the carrier 40 body, and the lower end of the plug-in positioning hole 46 is configured as an expanded hole. An annular recess 47 is also provided on the upper surface of the carrier 40 body, located between the annular mounting groove 43 and the plug-in positioning hole 46.The setting of the annular recess 47 can reduce the weight of the carrier 40 and increase the strength of the carrier 40. The lower end of the plug-in positioning hole 46 is set to an expanded hole shape to facilitate the assembly connection between the plug-in positioning pin 36 and the plug-in positioning hole 46. The upper end of the corresponding plug-in positioning pin 36 can also be set to a pointed cone shape.

[0039] like Figure 7 、 9 As shown: the transfer device includes a transfer trolley 50 and an A plug-in portion provided on the transfer trolley 50, and a B plug-in portion is provided on the carrier 40, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit. Through the detachable plug-in fit, the carrier 40 and the transfer trolley 50 can be quickly and conveniently assembled and separated to meet the operational requirements of the coating environment. The transfer trolley 50 and the A guide component 57 and the B guide component 59 are assembled by rolling or sliding. The A guide component 57 and the B guide component 59 have the same structure. The A guide component 57 has an A guide channel in the shape of a closing groove. The transfer trolley 50 is constrained to move in the A guide channel, and the A plug-in portion is located outside the A guide channel. Specifically: The transfer trolley 50 is provided with A1 rollers 53 and A2 rollers 54 for rolling assembly with the A guide assembly 57. The center line of the A1 roller 53 is arranged horizontally, and the center line of the A2 roller 54 is arranged vertically. A3 rollers 58 are arranged at intervals along the A direction at the bottom of the A guide channel. The center lines of the A3 rollers 58 are arranged horizontally. The transfer trolley 50 and the A guide assembly 57 are connected by the A1 rollers 53, A2 rollers 54, and A3 rollers 58 to form a rolling assembly. In detail, the A guide assembly 57 can be composed of two L-shaped A guide rails arranged opposite to each other at intervals. The bottom vacant area between the two A guide rails is used to install the A3 roller 58. A strips are respectively provided on the upper part of the A guide rails. The two A strips and the two A guide rails enclose a closed groove-shaped A guide channel. The transfer trolley 50 can be specifically composed of a plate. The A guide assembly 57 and the B guide assembly 59 of the above-described structure can effectively meet the mobile guidance requirements of the transfer device and provide reliable support for the connecting fork 51, enabling the connecting fork 51 to lift heavy loads. The A1 roller 53 and the A2 roller 54 are respectively rotatably assembled with the horizontal guide surface and the vertical guide surface of the L-shaped A guide rail.

[0040] like Figure 10 、 12 As shown: the A plug-in portion includes a connecting fork 51, which has a U-shaped fork opening. The connecting fork 51 is composed of a plate, and the plate thickness direction is arranged vertically. The plate thickness at both ends of the fork opening gradually increases along the reverse direction of A, and the distance between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork 51 is assembled and connected to the middle part of the transfer trolley 50 through a connecting member 56. The reverse direction A is the direction in which the mobile trolley moves from the coating chamber 21 to the loading chamber 22.

[0041] like Figure 7 、 9 As shown, the loading chamber 22 is provided with an assembly pipe 08 arranged along the A direction, and the transport adjustment mechanism includes an electric push rod provided in the assembly pipe 08, and the electric push rod is connected to the A connector 56 through a universal connector 55. The electric push rod can also be an electric cylinder or other components with the same function. Figure 9 、 10 As shown, an A1 detection sensor 61 and an A2 detection sensor 62 are provided in the coating chamber 21 or the loading chamber 22. The A1 detection sensor 61 and the A2 detection sensor 62 are used to detect and determine whether the transfer vehicle 50 has reached the starting and ending positions of the moving path, respectively. An A3 detection sensor 52 is provided on the A plug-in portion to detect the positional relationship between the carrier 40 and the connecting fork 51. The A1 detection sensor 61, the A2 detection sensor 62, and the A3 detection sensor 52 transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device based on the results of the analysis and processing. The A1 detection sensor 61 and the A2 detection sensor 62 can be specifically provided in the loading chamber 22, and can be specifically provided at both ends of the A guide assembly 57. The A1 detection sensor 61 and the A2 detection sensor 62 are provided in the loading chamber 22 and will not be subjected to the high temperature heat radiation of the coating chamber 21, making the control process more reliable. The A3 detection sensor 52 can be specifically set on the connecting fork 51. When the carrier 40 moves into the fork of the connecting fork 51, the A3 detection sensor 52 will be triggered to detect a signal. By setting various sensors and control devices, the movement of the transfer device can be automatically and reliably regulated. The position of the transfer trolley 50 is determined by the electric push rod in conjunction with each sensor, without the need for a vacuum servo cylinder, thus saving costs. The electric push rod and the transfer trolley 50 are connected using a universal connector 55. When the transfer trolley 50 is spatially displaced, the electric push rod can be protected from deformation.

[0042] The carrier 40 is provided with plug-in positioning holes 46 arranged in a vertical direction. The carrier 35 is rotatably mounted and raised within the coating chamber 21. The carrier 35 is connected to a lifting and rotating adjustment device 32 that adjusts its rotation and elevation. A plug-in positioning pin 36 is provided in the middle of the carrier for detachable assembly with the plug-in positioning hole 46. The A heating device 34 includes an annular heating assembly, which is located outside the carrier 35 and arranged concentrically with the carrier 35. The annular heating assembly is mounted and raised within the coating chamber 21 and is connected to a heating and lifting adjustment mechanism 37 that adjusts its elevation. The annular heating assembly provides radiant heating to the carrier 40 and the workpiece 10. Specifically, the carrier 35 and the annular heating assembly are located outside the end of the B guide assembly 59 away from the A guide assembly 57. The carrier 40 is received by the carrier 35, achieving reliable transfer of the carrier 40. The A heating device 34 is used to heat the workpiece 10 and improve heating efficiency. The lifting and rotating adjustment device 32 can be implemented in accordance with existing coating equipment, namely, it consists of an A1 lifting adjustment cylinder and an A rotation adjustment motor located outside the coating chamber 21. The A1 lifting adjustment cylinder and the A rotation adjustment motor are connected to the rotary lifting shaft mounted on the underside of the carrier 35 via a transmission mechanism. The heating lifting adjustment mechanism 37 consists of two heating lifting adjustment units, located on either side of the lifting and rotating adjustment device 32. Each heating lifting adjustment unit is composed of a heating lifting cylinder located on the underside of the coating chamber 21. The annular heating assembly is mounted on a heating bracket, and the piston rod of each heating lifting cylinder is connected to the heating lifting bracket. By adjusting the lifting motion of the carrier 35 and the annular heating assembly, the entry and exit of the carrier 40 is facilitated.

[0043] The utility model also provides a dual-chamber sputtering coating process, which includes the following operations.

[0044] S1: Close the A chamber door 18 of the coating chamber 21, adjust the coating chamber 21 to be in a vacuum state, close the A1 gate valve 03, open the B chamber door 19 of the loading chamber 22, place the workpiece 10 to be coated on the carrier, close the B chamber door 19, vacuum the loading chamber 22 and start the B heating device to bake and degas the loading chamber 22, the baking temperature is 100°C, when the vacuum degree of the loading chamber 22 and the coating chamber 21 are balanced, open the A1 gate valve 03, the transfer device transfers the carrier to the coating chamber 21 and transfers the carrier to the carrier, the transfer device retracts to the loading chamber 22, closes the A1 gate valve 03, the loading chamber 22 maintains the vacuum and heating baking state, and the workpiece 10 is a molding die. In more detail: Initially, the transfer trolley 50 is located in the loading chamber 22, and the A1 detection sensor 61 detects that the transfer trolley 50 is in the initial position. The A3 detection sensor 52 detects that the carrier 40 is in the fork of the connecting fork 51, and the connecting fork 51 lifts the carrier 40, places the workpiece 10 to be processed on the carrier 40, and adjusts the internal environment of the coating chamber 21 and the loading chamber 22 to meet the requirements. After adjusting the connecting channel 38 to be in a connected state, the electric push rod is started to push the transfer trolley 50 into the coating chamber 21. When the A2 detection sensor 62 detects that the transfer trolley 50 moves to the end position, the electric push rod stops pushing, adjusts the carrier 35 to lift, and the carrier 35 lifts the carrier 40. The electric push rod pulls the transfer trolley 50 back to the coating chamber 21, and the A3 detection sensor 52 detects that the carrier 40 and the connecting fork 51 are separated, until the A1 detection sensor 61 detects that the transfer trolley 50 moves back to the initial position, and then adjusts the connecting channel 38 to be in a closed state.

[0045] S2: Heating device A 34 is activated to heat the carrier and workpiece 10 to a temperature above 500°C. The cleaning device 23 and the corresponding sputtering device 24 are then activated to sequentially clean and coat the workpiece 10 according to preset process parameters. Specifically, the annular heating assembly within the coating chamber 21 is adjusted to rise and align with the carrier 40 to provide radiant heating to the carrier and workpiece 10.

[0046] S3: After the coating process is completed, open the process gas interface on the top of the coating chamber 21, introduce nitrogen or helium, adjust the pressure of the coating chamber 21 to 50000Pa, start the circulating fan 06 to extract the gas in the coating chamber 21 and return it to the coating chamber 21 after cooling through the heat exchanger 07, so that the temperature in the coating chamber 21 is reduced to below 120°C, and then open the A1 gate valve 03, and the transfer device transfers the carrier and the workpiece 10 back to the loading chamber 22, and then close the A1 gate valve 03, open the B chamber door 19, and take out the coated workpiece 10. The specific operation is: first adjust the annular heating assembly to descend back to the initial position, adjust the connecting channel 38 to be in a connected state, start the electric push rod to push the transfer cart 50 to move into the A cavity, and when the A2 detection sensor 62 detects that the transfer cart 50 has moved to the end position, the electric push rod stops pushing, and the A3 detection sensor 52 detects that the carrier 40 is located in the fork of the connecting fork 51, adjust the carrier 35 to descend, and the carrier 40 is supported by the connecting fork 51. When the carrier 35 descends to the initial position, the electric push rod pulls the transfer cart 50 back to the loading chamber 22 until the A1 detection sensor 61 detects that the transfer cart 50 has returned to the initial position, and then adjusts the connecting channel 38 to be in a closed state, and takes the workpiece 10 out of the loading chamber 22.

[0047] In the above scheme, a precious metal film layer is plated on the surface of the molding die at high temperature. During the coating process, the annular A heating device 34 radiates heat to the tray and the workpiece 10, and the heat is evenly distributed, so that the surface temperature of the molding die can reach above 500°C, thereby improving the bonding strength of the precious metal element film layer, improving the wear resistance of the molding die, and increasing the number of uses.

[0048] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A dual-chamber sputtering coating device, characterized in that: The machine comprises a frame, on which are provided an openable and closable loading chamber and coating chamber, the loading chamber and the coating chamber are arranged correspondingly and are connected via a connecting channel, the connecting channel is provided with a connection adjustment component for adjusting the connection state of the connecting channel, a transfer device is provided between the loading chamber and the coating chamber, the transfer device is used to realize the transfer of the workpiece between the loading chamber and the coating chamber; a heating device A for heating the workpiece and a carrier for supporting the workpiece to be coated are provided in the coating chamber, a cleaning unit for cleaning the workpiece and a carrier for coating the workpiece are provided on the coating chamber. The coating unit for film processing, the coating chamber is also connected to the A cooling unit for cooling the coating chamber, the A vacuum unit for vacuuming the coating chamber, and the A gas unit for supplying process gas to the coating chamber; a B heating device for baking and degassing the loading chamber is provided in the loading chamber, and the loading chamber is connected to the B vacuum unit for vacuuming the loading chamber; the rack is also provided with a B cooling unit, a power supply unit, and an electrical control unit, the B cooling unit is used to cool each device, the power supply unit supplies power to each device, and the electrical control unit is used to regulate the operating status of each device.

2. The dual-chamber sputtering coating equipment according to claim 1, characterized in that: The frame includes a base, a mounting frame arranged on the base, and an outer box located outside the mounting frame. The mounting frame includes a left frame part, a middle frame part, and a right frame part arranged from left to right. The coating chamber and the loading chamber are fixedly installed on the top of the left frame part and the middle frame part respectively. The power supply unit is installed inside the middle frame part, and the electrical control unit is installed inside the right frame part.

3. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: The A vacuum unit includes an A molecular pump and an A mechanical pump, and the B vacuum unit includes a B molecular pump and a B mechanical pump. The A mechanical pump is connected to the A vacuum tube provided on the coating chamber, and the B mechanical pump is connected to the B vacuum tube provided on the loading chamber. A plug-in valve and B plug-in valve are respectively provided on the A vacuum tube and the B vacuum tube. The A molecular pump and the B molecular pump are respectively connected to the A mechanical pump and the B mechanical pump. The A molecular pump and the B molecular pump are respectively fixedly installed on the rear sides of the coating chamber and the loading chamber. The A mechanical pump and the B mechanical pump are both fixedly installed inside the right frame.

4. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: A gas unit includes an airflow regulating device arranged on the top of the loading chamber, the cleaning unit includes a cleaning device arranged on the top of the coating chamber, and the coating unit includes various sputtering devices arranged on the top of the coating chamber. The airflow regulating device is used to regulate the air intake volume in the cleaning device, the sputtering device and the coating chamber.

5. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: A cooling unit includes a circulating fan located on the lower side of the coating chamber. The circulating fan is fixedly installed in the left frame. The inlet of the circulating fan is connected to the coating chamber. The outlet of the circulating fan is connected to the heat exchanger. The heat exchanger is vertically installed on the rear side of the left frame. The air outlet of the heat exchanger is connected to the coating chamber.

6. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: The B cooling unit is a water cooling unit, which includes a return water collecting device and an outflow water diverter. The return water collecting device and the outflow water diverter are installed on the rear side of the left frame.

7. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: The outer box body is composed of the rear box wall, left box wall, front box wall, right box wall and top box wall. The left box wall is composed of an opening and closing box door. An installation gap is set on the front box wall. The installation gap is used to install the chamber A door of the coating chamber and the chamber B door of the loading chamber. A display screen and a pull-out keyboard are also set on the front box wall.

8. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: The communication adjustment component consists of an A1 gate valve.

9. The dual-chamber sputtering coating equipment according to claim 2, characterized in that: An assembly pipe is provided on the side wall of the loading chamber away from the coating chamber. The assembly pipe is located on the upper side of the right frame portion. A moving adjustment component for driving the transfer device to move is provided in the assembly pipe.

10. The dual-chamber sputtering coating equipment according to claim 9, characterized in that: The carrier is connected to a lifting and rotating adjustment device and a biasing device provided on the lower side of the coating cavity. The lifting and rotating adjustment device is used to adjust the carrier to lift and rotate.

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