Seeding rod for drawing multiple silicon cores

Abstract

The utility model relates to the technical field of silicon core furnace production, in particular to a seeding rod for drawing multiple silicon cores, which comprises an inner mandrel, a seed crystal rope part and an extension rod, the seed crystal rope part comprises an upper opening sleeve which is fixedly arranged at the lower end of the inner mandrel, a lower opening sleeve which is arranged at the upper end of the extension rod, a seed crystal rope which is fixedly arranged between the upper opening sleeve and the lower opening sleeve, and a blocking sleeve assembly which sleeves the outer side of the seed crystal rope; the retaining sleeve assembly comprises a mounting rod fixedly arranged at the lower end of the upper opening sleeve and a retaining sleeve arranged at the lower end of the mounting rod in a sleeving manner, a mounting mechanism is arranged at the lower end of the extension rod, and a seed crystal bar is connected to the lower end of the mounting mechanism. The transmission device is divided into three parts, the combination cost of the hard shaft and the flexible shaft is low, meanwhile, the combination of the seed crystal rope and the spacer sleeve can effectively prevent the seed crystal rope from being folded, the length consistency of the flexible shaft is further ensured, and the perpendicularity of the transmission device can be kept consistent through the lower connecting long rod.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon core furnace production, in particular to a seeding rod used for pulling multiple silicon cores. Background Art

[0002] The growth process of the Czochralski method is to first place the raw materials of the crystal to be grown in a high-temperature resistant crucible and heat and melt them, and adjust the temperature field in the furnace so that the upper part of the melt is in a supercooled state; then place a seed crystal on the pulling rod and let the seed crystal contact the surface of the melt. After the surface of the seed crystal is slightly melted, pull and rotate the pulling rod to keep the melt in a supercooled state and crystallize on the seed crystal. During the continuous pulling and rotation process, cylindrical crystals grow.

[0003] During the pulling process of a multi-round silicon core furnace, the straightness of the seeding device needs to remain absolutely vertical. The seeding rods currently used usually adopt a hard shaft or a soft shaft for transmission connection. However, due to its rigidity, the hard shaft connection is not convenient for proper position adjustment of the seeding rod; and the soft shaft is more likely to swing during the pulling process, and the absolute verticality of the seeding device cannot be guaranteed, which leads to difficulties in pulling. Utility Model Content

[0004] In order to solve the problems of the prior art, the utility model provides a seeding rod for pulling multiple silicon cores.

[0005] The purpose of the utility model can be achieved through the following technical solutions: A seeding rod for pulling polysilicon cores, comprising: an inner shaft, a seed rope portion and an extension rod, the seed rope portion comprising an upper opening sleeve fixedly arranged at the lower end of the inner shaft, a lower opening sleeve arranged at the upper end of the extension rod, a seed rope fixedly arranged between the upper opening sleeve and the lower opening sleeve, and a stop sleeve assembly sleeved on the outside of the seed rope, the stop sleeve assembly comprising a mounting rod fixedly arranged at the lower end of the upper opening sleeve and a stop sleeve sleeved at the lower end of the mounting rod, a mounting mechanism is provided at the lower end of the extension rod, and a seed rod is connected to the lower end of the mounting mechanism.

[0006] As a further improvement, a gear sleeve nut is fixedly provided on the upper end of the gear sleeve, and the gear sleeve nut is threadedly connected to the mounting rod.

[0007] As a further improvement, a first mating surface is obliquely provided at the lower end of the gear sleeve, and a second mating surface is obliquely provided at the upper end of the lower opening sleeve, and the first mating surface and the second mating surface are provided correspondingly.

[0008] As a further improvement, the mounting mechanism includes a mounting sleeve slidably disposed on the extension rod and a locking sleeve slidably disposed on the seed crystal rod, and the mounting sleeve can be threadedly connected to the locking sleeve.

[0009] As a further improvement, the mounting mechanism includes an open-type ferrule fixedly disposed at the lower end of the extension rod and a matching sleeve disposed at the upper end of the seed crystal rod, and the open-type ferrule can be threadedly connected to the matching sleeve.

[0010] As a further improvement, the mounting mechanism is made of graphite.

[0011] Compared with the prior art, the present invention has the following beneficial effects: the present invention adopts a three-section layout, including an inner shaft and an extension rod of the hard shaft part and a seed crystal rope part of the soft shaft part. In actual use, when the seed crystal rod is installed, the seed crystal rope between the inner shaft and the extension rod can realize the swing adjustment of the seed crystal rod within a certain range, so that each seed crystal rod can smoothly pass through the water cooling screen into the silicon crystal furnace. At the same time, the setting of the extension rod can keep the verticality of the transmission device consistent, thereby improving the stability of the equipment during operation. The gear sleeve assembly arranged on the outside of the seed crystal rope can limit the seed crystal rope, avoiding large swings during the drawing process, while also ensuring the consistency of the seed crystal rope length. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic structural diagram of Example 1 of the present utility model;

[0013] Figure 2 This is a cross-sectional view of Example 1 of the present utility model;

[0014] Figure 3 For this utility model Figure 2 Enlarged view of the part A in the middle;

[0015] Figure 4 This is a schematic structural diagram of the installation mechanism in Example 1 of the present utility model;

[0016] Figure 5 This is a structural diagram of the installation mechanism in Example 2 of the present utility model.

[0017] In the figure, 1. inner shaft; 2. seed crystal rope; 21. upper open sleeve; 22. lower open sleeve; 23. seed crystal rope; 24. stop sleeve assembly; 241. mounting rod; 242. stop sleeve; 2421. stop sleeve nut; 2422. first mating surface; 3. extension rod; 4. mounting mechanism; 41. mounting sleeve; 42. locking sleeve; 5. seed crystal rod; 6. open ferrule; 61. open ferrule; 62. mating sleeve. DETAILED DESCRIPTION

[0018] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0019] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0020] Below with reference to the embodiment and the attached Figures 1 to 4 , the technical solution of the utility model is further elaborated.

[0021] Example 1

[0022] A seeding rod for pulling polysilicon cores, comprising: an inner shaft 1, a seed crystal rope portion 2 and an extension rod 3, the seed crystal rope portion 2 comprising an upper open sleeve 21 fixedly arranged at the lower end of the inner shaft 1, a lower open sleeve 22 arranged at the upper end of the extension rod 3, a seed crystal rope 23 fixedly arranged between the upper open sleeve 21 and the lower open sleeve 22, and a stop sleeve assembly 24 sleeved on the outside of the seed crystal rope 23, the stop sleeve assembly 24 comprising a mounting rod 241 fixedly arranged at the lower end of the upper open sleeve 21 and a stop sleeve 242 sleeved at the lower end of the mounting rod 241, a mounting mechanism 4 is provided at the lower end of the extension rod 3, and a seed crystal rod 5 is connected to the lower end of the mounting mechanism 4.

[0023] like Figures 1 to 5 As shown, the utility model adopts a three-section layout, including an inner shaft 1 and an extension rod 3 of the hard shaft part and a seed crystal rope part 2 of the soft shaft part. In actual use, when the seed crystal rod is installed, the seed crystal rope 23 between the inner shaft 1 and the extension rod 3 can realize the swing adjustment of the seed crystal rod within a certain range, so that each seed crystal rod can smoothly pass through the water cooling screen into the silicon crystal furnace. At the same time, the setting of the extension rod 3 can make the verticality of the transmission device consistent, and improve the stability of the equipment during operation. The gear sleeve assembly 24 sleeved on the outside of the seed crystal rope 23 can limit the seed crystal rope 23, avoiding large swings during the drawing process, and also ensuring the consistency of the seed crystal rope length.

[0024] In this embodiment, a gear sleeve nut 2421 is fixedly provided on the upper end of the gear sleeve 242 , and the gear sleeve nut 2421 is threadedly connected to the mounting rod 241 .

[0025] Specifically, such as Figure 5 As shown, during actual use, the length of the seed crystal rope 23 can be selected according to the process requirements. After the installation of the seed crystal rope 23 is completed, the gear sleeve nut 2421 can be rotated to adjust the installation position of the gear sleeve 242 on the installation rod 241, thereby realizing the adjustment of the overall length of the gear sleeve assembly 24, so that the length of the gear sleeve assembly 24 can meet the use requirements of different seed crystal ropes 23, thereby improving the applicability of the equipment.

[0026] In this embodiment, a first mating surface 2422 is obliquely provided at the lower end of the gear sleeve 242, and a second mating surface 221 is obliquely provided at the upper end of the lower opening sleeve 22. The first mating surface 2422 and the second mating surface 221 are arranged correspondingly. Through the arrangement of the mating surfaces, there is a certain gap between the lower end of the gear sleeve 242 and the upper end of the lower opening sleeve 22, which meets the needs of swing adjustment and avoids the lower end of the gear sleeve 242 from separating from the lower opening sleeve 22 during the swinging process.

[0027] In this embodiment, the mounting mechanism 4 includes a mounting sleeve 41 slidably arranged on the extension rod 3 and a locking sleeve 42 slidably arranged on the seed crystal rod 5. A limiting ring is provided at the upper end of the seed crystal rod 5. The mounting sleeve 41 can be threadedly connected to the locking sleeve 42. Through the connection method of the mounting sleeve 41 and the locking sleeve 42, the structure is simple and the operation is convenient. At the same time, the material of the mounting sleeve 41 and the locking sleeve 42 is preferably graphite, which improves the high temperature resistance of the equipment.

[0028] Example 2

[0029] The difference between Example 2 and Example 1 is that the mounting mechanism 4 includes an open-type clamping sleeve 61 fixedly arranged at the lower end of the extension rod 3 and a matching sleeve 62 arranged at the upper end of the seed crystal rod 5. The open-type clamping sleeve 61 can be threadedly connected to the matching sleeve 62. During use, the seed crystal rod 5 is first inserted into the extension rod 3, and then the matching sleeve 62 is rotated. During the rotation of the matching sleeve 62, the inner side of the open-type clamping sleeve 61 is squeezed inward, thereby achieving fixation of the connecting rod 3, realizing rapid clamping and disassembly of the seed crystal, and the structure is compact and easy to install.

[0030] The above describes in detail the preferred embodiments of the present invention. It should be understood that those skilled in the art can make numerous modifications and variations based on the concepts of the present invention without inventive effort. Therefore, any technical solutions that can be derived by those skilled in the art based on the concepts of the present invention through logical analysis, reasoning, or limited experimentation based on the existing technology should be within the scope of protection defined by the claims.

Claims

1. A seeding rod for multi-silicon core pulling, characterized in that: include: An inner shaft (1), a seed crystal rope portion (2) and an extension rod (3), wherein the seed crystal rope portion (2) comprises an upper opening sleeve (21) fixedly arranged at the lower end of the inner shaft (1), a lower opening sleeve (22) arranged at the upper end of the extension rod (3), a seed crystal rope (23) arranged between the upper opening sleeve (21) and the lower opening sleeve (22), and a stop sleeve assembly (24) sleeved on the outside of the seed crystal rope (23), wherein the stop sleeve assembly (24) comprises a mounting rod (241) fixedly arranged at the lower end of the upper opening sleeve (21) and a stop sleeve (242) sleeved on the lower end of the mounting rod (241), and a mounting mechanism (4) is provided at the lower end of the extension rod (3), and a seed crystal rod (5) is connected to the lower end of the mounting mechanism (4).

2. A seed rod for multi-silicon core pulling according to claim 1, characterized in that: A gear sleeve nut (2421) is fixedly provided on the upper end of the gear sleeve (242), and the gear sleeve nut (2421) is threadedly connected to the mounting rod (241).

3. The seed rod for multi-silicon core pulling according to claim 1, characterized in that: The lower end of the gear sleeve (242) is provided with a first mating surface (2422) at an angle, and the upper end of the lower opening sleeve (22) is provided with a second mating surface (221) at an angle, and the first mating surface (2422) and the second mating surface (221) are provided correspondingly.

4. The seed rod for multi-silicon core pulling according to claim 1, characterized in that: The mounting mechanism (4) comprises a mounting sleeve (41) slidably arranged on the extension rod (3) and a locking sleeve (42) slidably arranged on the seed crystal rod (5); the mounting sleeve (41) can be threadedly connected to the locking sleeve (42).

5. The seed rod for multi-silicon core pulling according to claim 1, characterized in that: The mounting mechanism (4) comprises an open-type clamping sleeve (61) fixedly arranged at the lower end of the extension rod (3) and a matching sleeve (62) arranged at the upper end of the seed crystal rod (5); the open-type clamping sleeve (61) can be threadedly connected to the matching sleeve (62).

6. The seed rod for multi-silicon core pulling according to claim 1, characterized in that: The material of the mounting mechanism (4) is graphite.

Images