Air cooling equipment and epitaxial process equipment

Abstract

The utility model relates to air cooling equipment and epitaxial process equipment. The air cooling equipment comprises a fan, a monitoring device and a controller, the monitoring device is at least partially located on the fan; the monitoring device is connected with the controller; the fan comprises a bearing and blades, and the blades are arranged on the bearing and can rotate along with the bearing; the central axis of the bearing coincides with the central axis of the fan. The monitoring device is used for collecting a target monitoring signal and sending the target monitoring signal to the controller; the target monitoring signal is used for indicating whether the central axis of the bearing deviates from the central axis of the fan; the controller is used for executing a corresponding target control operation based on the target monitoring signal; and when the target monitoring signal indicates that the central axis of the bearing deviates from the central axis of the fan, the controller sends out an alarm instruction. According to the technical scheme, whether the central axis of the bearing of the draught fan deviates from the central axis of the draught fan or not can be detected, and then irreversible damage to epitaxial process equipment caused by the fact that the central axis of the bearing of the draught fan deviates from the central axis of the draught fan can be avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an air cooling device and an epitaxial process device. Background Art

[0002] In related technologies, as we move into higher process technologies, in the EPI (epitaxial) process, reduced pressure vapor deposition (RPCVD) equipment is usually used to dope boron and phosphorus to increase electrons and holes, thereby improving the carrier mobility to meet performance requirements.

[0003] EPI process equipment reaches high temperatures during operation, requiring air cooling for the reflectors and dome. However, during actual operation, fan bearing damage can cause eccentric blade rotation. Blades wear against the inner walls of the casing, creating particles that can contaminate the heating bulbs, reflectors, and dome, leading to extensive equipment maintenance. In the long term, stopping the process immediately when blades are damaged can avoid subsequent PM (partial maintenance) procedures. Therefore, hardware improvements are needed to address this issue.

[0004] The equipment's fan may occasionally experience bearing failure, causing eccentric blade rotation. If the fan failure is not detected promptly, the particles generated by the blades can cause irreversible damage to the equipment. However, the current equipment does not have a method to monitor the fan status, and trends can only be detected through the device's logs. If bearing failure is not detected promptly, there is no way to prevent the particles generated by the blades from continuing to damage the quartz components, bulbs, and reflectors. Utility Model Content

[0005] The purpose of this application is to provide an air-cooling device and an epitaxial process equipment, which can detect whether the central axis of the fan's bearing deviates from the central axis of the fan, thereby avoiding the central axis of the fan's bearing deviating from the central axis of the fan and causing irreversible damage to the epitaxial process equipment.

[0006] According to a first aspect of an embodiment of the present application, there is provided an air cooling device, comprising: a fan, a monitoring device, and a controller;

[0007] The monitoring device is at least partially located on the fan; the monitoring device is connected to the controller; the fan includes a bearing and a blade, the blade is disposed on the bearing and is capable of rotating with the bearing; when the fan is operating normally, the central axis of the bearing coincides with the central axis of the fan;

[0008] The monitoring device is used to collect a target monitoring signal and send it to the controller; the target monitoring signal is used to indicate whether the central axis of the bearing deviates from the central axis of the fan;

[0009] The controller is used to perform corresponding target control operations based on the target monitoring signal; when the target monitoring signal indicates that the central axis of the bearing deviates from the central axis of the fan, the controller issues an alarm instruction.

[0010] In one embodiment, the epitaxial process equipment further comprises an air duct housing, and the fan is located in the air duct housing;

[0011] The monitoring device includes a laser transmitter and a laser receiver, one of which is located on the air duct housing and the other is located on the top of the bearing;

[0012] The photosensitive surface of the laser receiver is opposite to the light-emitting surface of the laser emitter, and the central axis of the light-emitting surface of the laser emitter and the central axis of the photosensitive surface of the laser receiver coincide with the central axis of the bearing;

[0013] The photosensitive surface of the laser receiver includes a first area, a second area, and a third area. The first area is circular, and the central axis of the photosensitive surface passes through the center of the first area. The second area is annular and surrounds the first area. The third area is annular and surrounds the second area.

[0014] The laser receiver includes a first laser receiving element, a second laser receiving element, and a third laser receiving element, wherein the first laser receiving element is located in the first area; the second laser receiving element is located in the second area; and the third laser receiving element is located in the third area.

[0015] The first laser receiving element, the second laser receiving element and the third laser receiving element are respectively connected to the controller;

[0016] Only one of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter, or none of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter.

[0017] In one embodiment, the light-emitting surface of the laser emitter is circular, and a first diameter of the light-emitting surface is smaller than a second diameter of the first region, a ring width of the second region, and a ring width of the third region.

[0018] The distance between the first laser receiving element and the boundary of the first region is greater than the first diameter of the light emitting surface;

[0019] The distance between the second laser receiving element and the boundary of the first region and the distance between the second region and the boundary of the first region are both greater than the first diameter of the light emitting surface;

[0020] A distance between the third laser receiving element and a boundary between the second region and the first region, and a distance between the third laser receiving element and a boundary between the third region and the second region are both greater than the first diameter of the light emitting surface.

[0021] In one embodiment, a first groove is formed at the top of the bearing; the laser transmitter is located on the air duct housing and the laser receiver is located at the top of the bearing, and the laser receiver is fixed in the first groove; or,

[0022] The laser receiver is located on the air duct housing and the laser transmitter is located at the top end of the bearing, and the laser transmitter is fixed in the first groove.

[0023] In one embodiment, when the laser receiver is fixed in the first groove, the first radius of the first area is 1 mm, the second radius of the outer circle of the second area is 2 mm, and the third radius of the outer circle of the third area is 3 mm; when the laser emitter is fixed in the first groove, the first radius of the first area is 3 mm, the second radius of the outer circle of the second area is 6 mm, and the third radius of the outer circle of the third area is 9 mm.

[0024] In one embodiment, the distance between the light-emitting surface of the laser transmitter and the light-sensitive surface of the laser receiver, the first radius of the first area, the second radius of the outer circle of the second area, and the third radius of the outer circle of the third area satisfy the following relationship:

[0025] ;

[0026] ;

[0027] ;

[0028] Wherein, D is the distance between the light-emitting surface of the laser emitter and the photosensitive surface of the laser receiver, R1 is the first radius of the first area, R2 is the second radius R2 of the outer circle of the second area, R3 is the third radius R3 of the outer circle of the third area, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

[0029] In one embodiment, the epitaxial process equipment further comprises an air duct housing, and the fan is located in the air duct housing;

[0030] The monitoring device includes a laser transmitter, a laser receiver and a reflector;

[0031] The laser emitter and the laser receiver are integrally packaged, the laser emitter and the laser receiver are located on the air duct housing, and the reflector is located at the top of the bearing;

[0032] The laser receiver surrounds the laser emitter and is symmetrically arranged with respect to the laser emitter; the emitting surface of the laser emitter and the photosensitive surface of the laser receiver are opposite to the reflective surface of the reflector, and the central axis of the light-emitting surface of the laser emitter and the central axis of the reflective surface of the reflector coincide with the central axis of the bearing;

[0033] The emitting surface of the laser emitter is circular, and the photosensitive surface of the laser receiver includes a fourth area, a second area, and a third area. The fourth area is annular, the second area is annular and surrounds the fourth area, and the third area is annular and surrounds the second area.

[0034] The laser receiver includes a fourth laser receiving element, a second laser receiving element, and a third laser receiving element, wherein the fourth laser receiving element is located in the fourth area; the second laser receiving element is located in the second area; and the third laser receiving element is located in the third area.

[0035] The fourth laser receiving element, the second laser receiving element and the third laser receiving element are respectively connected to the controller;

[0036] Only one of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter, or none of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter.

[0037] In one embodiment, the first diameter of the light-emitting surface is smaller than the ring width of the fourth region, the ring width of the second region, and the ring width of the third region respectively;

[0038] The distance between the fourth laser receiving element and the boundary of the light emitting surface and the distance between the fourth laser receiving element and the boundary of the fourth area close to the second area are greater than the first diameter of the light emitting surface;

[0039] The distance between the second laser receiving element and the boundary of the fourth region close to the second region and the distance between the second laser receiving element and the boundary of the second region away from the fourth region are both greater than the first diameter of the light emitting surface;

[0040] A distance between the third laser receiving element and a boundary between the second region and the fourth region, and a distance between the third laser receiving element and a boundary between the third region and the second region are both greater than the first diameter of the light emitting surface.

[0041] In one embodiment, the fourth radius of the outer circle of the fourth area is 3 mm, the second radius of the outer circle of the second area is 6 mm, and the third radius of the outer circle of the third area is 9 mm.

[0042] In one embodiment, the distance between the light-emitting surface of the laser emitter and the reflective surface of the reflector, the fourth radius of the outer circle of the fourth area, the second radius of the outer circle of the second area, and the third radius of the outer circle of the third area satisfy the following relationship:

[0043] ;

[0044] ;

[0045] ;

[0046] Among them, H is the distance between the light-emitting surface of the laser emitter and the reflective surface of the reflector, R4 is the fourth radius of the outer circle of the fourth area, R2 is the second radius R2 of the outer circle of the second area, R3 is the third radius R3 of the outer circle of the third area, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

[0047] In one embodiment, the monitoring device includes a temperature sensor and a vibration sensor; the fan further includes a casing, and the bearing and the blade are located in the casing;

[0048] The temperature sensor is located on the outer wall of the housing, or a second groove is provided on the outer wall of the housing, and the temperature sensor is located in the second groove;

[0049] The vibration sensor is located on the outer wall of the housing, and the temperature sensor and the vibration sensor are respectively connected to the controller.

[0050] In one embodiment, a second groove is provided on the outer wall of the housing, and the temperature sensor is located in the second groove.

[0051] In one embodiment, the fan further comprises a bearing and a casing, the blades are arranged on the bearing, and the bearing and the blades are located in the casing;

[0052] The monitoring device includes a conductor, a current detection device, and a power supply. The conductor is connected to the power supply via the current detection device. The conductor is located on the inner wall of the housing and extends along the central axis of the bearing. The conductor is opposite to the blade, and the length of the conductor in the central axis of the bearing is greater than the length of the blade in the central axis of the bearing. The projection of the blade on the housing is located within the projection of the conductor on the housing.

[0053] The current detection device is connected to the controller; the current detection device is used to collect a target monitoring signal, and the target monitoring signal includes a current value in the monitoring device;

[0054] When the blade cuts off the conductor, the current value is zero, the blade rotates eccentrically, and the controller issues the alarm instruction and controls the epitaxial process equipment to stop operating.

[0055] Another aspect of the present application further provides an epitaxial process device, comprising a device body and the above-mentioned air cooling device, wherein the air cooling device is located on the device body.

[0056] Compared with the prior art, the beneficial effect of the present application is that: since the air-cooling equipment includes a fan, a monitoring device and a controller, the monitoring device is at least partially located on the fan, and the monitoring device is connected to the controller. The fan includes bearings and blades. The blades are arranged on the bearings and can rotate with the bearings. The central axis of the bearing coincides with the central axis of the fan. The monitoring device is used to collect a target monitoring signal indicating whether the central axis of the bearing deviates from the central axis of the fan, and sends it to the controller. The controller performs corresponding target control operations based on the target monitoring signal, and when the target monitoring signal indicates that the central axis of the bearing deviates from the central axis of the fan, the controller issues an alarm command to notify the engineer to confirm the fault or shut down. In this way, it is possible to detect whether the central axis of the fan bearing deviates from the central axis of the fan, thereby avoiding the central axis of the bearing deviating from the central axis of the fan to cause damage to the air-cooling equipment.

[0057] The epitaxial process equipment detects whether the center axis of the bearing deviates from the center axis of the fan. When the center axis of the bearing deviates from the center axis of the fan, the controller issues an alarm command to notify engineers to confirm the fault or shut down the equipment. In this way, the center axis of the bearing deviates from the center axis of the fan and causes irreversible damage to the epitaxial process equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 The figure is a schematic structural diagram of an air cooling device according to an exemplary embodiment.

[0059] Figure 2 is a schematic diagram of a photosensitive surface of a laser receiver according to an exemplary embodiment.

[0060] Figure 3 The figure is a schematic structural diagram of an air cooling device according to another exemplary embodiment.

[0061] Figure 4 The figure is a schematic structural diagram of an air cooling device according to another exemplary embodiment.

[0062] Figure 5 The figure is a schematic diagram showing a light-emitting surface of a laser transmitter and a light-sensitive surface of a laser receiver according to an exemplary embodiment.

[0063] Figure 6 The figure is a schematic structural diagram of an air cooling device according to another exemplary embodiment.

[0064] Figure 7 The figure is a schematic structural diagram of an air cooling device according to another exemplary embodiment. DETAILED DESCRIPTION

[0065] Unless otherwise defined, the technical terms or scientific terms used in this specification and claims shall have the ordinary meaning understood by persons having ordinary skills in the technical field to which this application belongs. The specific embodiments of the present application will be described below in conjunction with the accompanying drawings. It should be pointed out that in the specific description of these embodiments, in order to provide a concise description, this specification cannot provide a detailed description of all the features of the actual embodiments. Without departing from the spirit and scope of this application, those skilled in the art may modify and replace the embodiments of the present application, and the resulting embodiments are also within the scope of protection of this application.

[0066] An embodiment of the present application provides an air cooling device. Figure 1 The air cooling device includes: a fan 11, a monitoring device 12, a controller (not shown) and an air duct shell (not shown).

[0067] The fan 11 is located in an air duct housing, and the air duct housing is used to provide an air duct.

[0068] like Figure 1As shown, the fan 11 includes a bearing 111, blades 112 and a housing 113. The blades 112 are arranged on the bearing 111, and the blades 112 and the bearing 111 are located in the housing 113. The blades 112 can rotate with the bearing 111. When the fan 11 is operating normally, the central axis L3 of the bearing 111 is substantially coincident with the central axis L5 of the fan 11. The substantial coincidence of the central axis L3 of the bearing 111 and the central axis L5 of the fan 11 means that the angle between the central axis L3 of the bearing 111 and the central axis L5 of the fan 11 is within a specified angle range. For example, the specified angle range may be 0°~0.4°, but is not limited thereto. Alternatively, when the fan 11 is operating normally and is shut down, the central axis L3 of the bearing 111 is substantially coincident with the central axis L5 of the fan 11.

[0069] The monitoring device is at least partially located on the fan 11. For example, part of the monitoring device is located on the fan 11, and another part is located on the air duct housing. Alternatively, all components of the monitoring device are located on the fan 11. The monitoring device is connected to the controller.

[0070] The monitoring device is used to collect target monitoring signals and transmit them to the controller. The target monitoring signals indicate whether the central axis L3 of bearing 111 deviates from the central axis L5 of fan 11 (whether blades 112 are rotating eccentrically). The controller is used to execute corresponding target control operations based on the target monitoring signals. When the target monitoring signals indicate that the central axis L3 of bearing 111 deviates from the central axis L5 of fan 11, the controller issues an alarm command. Deviating the central axis L3 of bearing 111 from the central axis L5 of fan 11 means that the angle between the central axis L3 of bearing 111 and the central axis L5 of fan 11 is outside a specified angle range. The alarm command controls the activation of an alarm to notify engineers to confirm the fault or shut down the machine. In this way, the monitoring device can detect whether the central axis L3 of bearing 111 of fan 11 deviates from the central axis L5 of fan 11, thereby preventing damage to the cooling equipment caused by the central axis L3 of bearing 111 deviating from the central axis L5 of fan 11.

[0071] In this embodiment, if Figure 1 As shown, the monitoring device may include a laser transmitter 121 and a laser receiver 122. The laser transmitter 121 is located on the air duct housing, and the laser receiver 122 is located at the top of the bearing 111 facing the laser transmitter 121.

[0072] In this embodiment, a first groove is defined at the top of the bearing 111 , and the laser receiver 122 is fixed in the first groove.

[0073] In this embodiment, if Figure 1As shown, the photosensitive surface F1 of the laser receiver 122 is opposite to the light-emitting surface F2 of the laser emitter 121, and when the fan 11 is operating normally, the central axis L1 of the light-emitting surface F2 of the laser emitter 121 and the central axis L2 of the photosensitive surface F1 of the laser receiver 122 are basically coincident with the central axis L3 of the bearing 111.

[0074] In this embodiment, if Figure 2 As shown, the photosensitive surface F1 of the laser receiver 122 includes a first area F11, a second area F12 and a third area F13. The first area F11 is circular, and the central axis L2 of the photosensitive surface F1 passes through the center of the first area F11. The second area F12 is annular and surrounds the first area F11. The third area F13 is annular and surrounds the second area F12.

[0075] In this embodiment, the laser receiver 122 may include a first laser receiving element, a second laser receiving element, and a third laser receiving element. The first laser receiving element is located in the first region F11, the second laser receiving element is located in the second region F12, and the third laser receiving element is located in the third region F13.

[0076] In this embodiment, the first laser receiving element, the second laser receiving element, and the third laser receiving element are respectively connected to the controller.

[0077] In this embodiment, only one of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter 121, or none of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter 121.

[0078] In this embodiment, if Figure 2 As shown, the light emitting surface F2 of the laser emitter 121 is circular, and the first diameter of the light emitting surface F2 is smaller than the second diameter of the first area F11, the ring width W1 of the second area F12, and the ring width W2 of the third area F13.

[0079] In this embodiment, if Figure 2As shown, the distance between the first laser receiving element (not shown) and the boundary B1 of the first region F11 is greater than the first diameter of the light-emitting surface F2. The distance between the second laser receiving element (not shown) and the boundary B1 of the first region F11 and the boundary B2 of the second region F12 away from the first region F11 are both greater than the first diameter of the light-emitting surface F2. The distance between the third laser receiving element (not shown) and the boundary B2 of the second region F12 away from the first region F11 and the boundary B3 of the third region F13 away from the second region F12 are both greater than the first diameter of the light-emitting surface F2. This ensures that only one of the first, second, and third laser receiving elements can receive the laser light emitted by the laser emitter 121, or that none of the first, second, and third laser receiving elements can receive the laser light emitted by the laser emitter 121.

[0080] In this embodiment, if Figure 2 As shown, the first radius of the first region F11R1 is 1 mm, the second radius of the outer circle R2 of the second region F12 is 2 mm, and the third radius of the outer circle R3 of the third region F13 is 3 mm.

[0081] In this embodiment, if Figures 1 and 2 As shown, the distance D between the light-emitting surface F2 of the laser emitter 121 and the light-sensitive surface F1 of the laser receiver 122, the first radius R1 of the first area F11, the second radius R2 of the outer circle of the second area F12, and the third radius R3 of the outer circle of the third area F13 satisfy the following relationship:

[0082] ;

[0083] ;

[0084] ;

[0085] Wherein, D is the distance between the light-emitting surface F2 of the laser emitter 121 and the light-sensitive surface F1 of the laser receiver 122 when the wind turbine 11 is normal and stopped, R1 is the first radius of the first area F11, R2 is the second radius R2 of the outer circle of the second area F12, R3 is the third radius R3 of the outer circle of the third area F13, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

[0086] In this embodiment, when the fan 11 is operating normally and the bearing 111 is functioning properly, only the first laser receiving element can receive the laser light emitted by the laser emitter 121. When the bearing 111 is vibrating abnormally (with a small amplitude), only the second laser receiving element can receive the laser light emitted by the laser emitter 121. When the bearing 111 is vibrating significantly (with a large amplitude), only the third laser receiving element can receive the laser light emitted by the laser emitter 121. When the bearing 111 is nearing damage (with a large amplitude), none of the first, second, or third laser receiving elements can receive the laser light emitted by the laser emitter 121.

[0087] When the controller receives the first target monitoring signal from the first laser receiving element, it determines that the fan 11 is operating normally and the bearing 111 is operating well.

[0088] When the controller receives the second target monitoring signal from the second laser receiving element, it determines that the bearing 111 has abnormal shaking, and the controller issues a first alarm instruction. The first alarm instruction is used to instruct the output device (such as an alarm or display) to output a warning message. The warning message is used to indicate that the bearing 111 has abnormal shaking, so as to notify the engineer to confirm the fault.

[0089] When the controller receives the third target monitoring signal from the third laser receiving element, it determines that the bearing 111 is shaking greatly, and the controller issues a second alarm instruction. The second alarm instruction is used to instruct the output device (such as an alarm or display) to output the first alarm information. The first alarm information is used to indicate that the bearing 111 is shaking greatly, so as to notify the engineer to confirm the fault.

[0090] When the controller fails to receive the first target monitoring signal from the first laser receiving element, the second target monitoring signal from the second laser receiving element, and the third target monitoring signal from the third laser receiving element, it determines that the bearing 111 is close to a damaged state, and the controller issues a third alarm instruction and controls the air cooling equipment to shut down. The third alarm instruction is used to instruct the output device (such as an alarm or display) to output a second alarm message. The second alarm message is used to indicate that the bearing 111 is close to a damaged state, so as to notify the engineer to confirm and handle the fault.

[0091] In this embodiment, since a monitoring device is added to the air-cooling equipment, the monitoring device is used to collect a target monitoring signal indicating whether the blade 112 rotates eccentrically and send it to the controller. The controller performs a corresponding target control operation based on the target monitoring signal, and when the target monitoring signal indicates that the blade 112 rotates eccentrically, the controller issues an alarm instruction to notify the engineer to confirm the fault or shut down the machine. In this way, it is possible to detect whether the blade 112 of the fan 11 rotates eccentrically, thereby avoiding damage to the air-cooling equipment caused by the eccentric rotation of the blade 112 of the fan 11.

[0092] Another embodiment of the present application provides an air cooling device. Different from the above embodiment, in this embodiment, the laser receiver 122 is located on the air duct housing, and the laser transmitter 121 is located on the top of the bearing 111.

[0093] In this embodiment, if Figure 3 As shown, the laser receiver 122 is located on the air duct housing, and the laser transmitter 121 is located at the top of the bearing 111.

[0094] In this embodiment, a first groove is defined at the top of the bearing 111 , and the laser receiver 122 is fixed in the first groove.

[0095] In this embodiment, if Figure 2 As shown, the first radius R1 of the first region F11 is 3 mm, the second radius of the outer circle R2 of the second region F12 is 6 mm, and the third radius of the outer circle R3 of the third region F13 is 9 mm.

[0096] In this embodiment, if Figures 2 and 3 As shown, the distance D between the light-emitting surface F2 of the laser emitter 121 and the light-sensitive surface F1 of the laser receiver 122, the first radius R1 of the first area F11, the second radius of the outer circle R2 of the second area F12, and the third radius of the outer circle R3 of the third area F13 satisfy the following relationship:

[0097] ;

[0098] ;

[0099] ;

[0100] Wherein, D is the distance between the light-emitting surface F2 of the laser emitter 121 and the light-sensitive surface F1 of the laser receiver 122 when the wind turbine 11 is normal and stopped, R1 is the first radius of the first area F11, R2 is the second radius R2 of the outer circle of the second area F12, R3 is the third radius R3 of the outer circle of the third area F13, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

[0101] In this embodiment, since a monitoring device is added to the air-cooling equipment, the monitoring device is used to collect a target monitoring signal indicating whether the central axis L3 of the bearing 111 deviates from the central axis of the fan 11, and send it to the controller. The controller performs a corresponding target control operation based on the target monitoring signal, and when the target monitoring signal indicates that the central axis L3 of the bearing 111 deviates from the central axis of the fan 11, the controller issues an alarm instruction to notify the engineer to confirm the fault or shut down the equipment. In this way, it is possible to detect whether the central axis L3 of the bearing 111 of the fan 11 deviates from the central axis of the fan 11, thereby avoiding the central axis L3 of the bearing 111 deviating from the central axis of the fan 11 and causing damage to the air-cooling equipment.

[0102] Another embodiment of the present application provides an air-cooling device. Unlike the above embodiment, in this embodiment, the laser emitter 121 and the laser receiver 122 are integrally packaged and located on the air duct housing, and a reflector is provided at the top of the bearing 111.

[0103] In this embodiment, if Figure 4 As shown, the monitoring device includes a laser transmitter 121 , a laser receiver 122 and a reflector 123 .

[0104] In this embodiment, if Figure 4 As shown, the laser emitter 121 and the laser receiver 122 are integrally packaged, the laser emitter 121 and the laser receiver 122 are located on the air duct housing, and the reflector is located at the top of the bearing 111 .

[0105] In this embodiment, the laser receiver 122 surrounds the laser emitter 121 and is symmetrically arranged with respect to the laser emitter 121. The emitting surface of the laser emitter 121 and the light-sensitive surface F1 of the laser receiver 122 are opposite to the reflective surface of the reflector, and the central axis L1 of the light-emitting surface F2 of the laser emitter 121 and the central axis L4 of the reflective surface of the reflector coincide with the central axis L3 of the bearing 111.

[0106] In this embodiment, if Figure 5 As shown, the emitting surface of the laser emitter 121 is circular, and the photosensitive surface F1 of the laser receiver 122 includes a fourth area F14, a second area F12 and a third area F13. The fourth area F14 is annular, the second area F12 is annular and surrounds the fourth area F14, and the third area F13 is annular and surrounds the second area F12.

[0107] In this embodiment, the laser receiver 122 may include a fourth laser receiving element, a second laser receiving element, and a third laser receiving element. The fourth laser receiving element is located in the fourth region F14, the second laser receiving element is located in the second region F12, and the third laser receiving element is located in the third region F13.

[0108] The fourth laser receiving element, the second laser receiving element, and the third laser receiving element are respectively connected to the controller.

[0109] Only one of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter 121 , or none of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter 121 .

[0110] In this embodiment, if Figure 5 As shown, the first diameter d1 of the light emitting surface F2 is smaller than the ring width W3 of the fourth region, the ring width W1 of the second region F12, and the ring width W2 of the third region F13.

[0111] The distance between the fourth laser receiving element and the boundary B4 of the light-emitting surface F2 and the distance between the fourth laser receiving element and the boundary B5 of the fourth region close to the second region F12 are both greater than the first diameter d1 of the light-emitting surface F2. The distance between the second laser receiving element and the boundary B5 of the fourth region close to the second region F12 and the distance between the second laser receiving element and the boundary B2 of the second region F12 away from the fourth region are both greater than the first diameter d1 of the light-emitting surface F2. The distance between the third laser receiving element and the boundary B2 of the second region F12 away from the fourth region F14 and the distance between the third laser receiving element and the boundary B3 of the third region F13 away from the second region F12 are both greater than the first diameter d1 of the light-emitting surface F2. In this way, it can be ensured that only one of the fourth laser receiving element, the second laser receiving element, and the third laser receiving element can receive the laser light emitted by the laser emitter 121, or that none of the fourth laser receiving element, the second laser receiving element, and the third laser receiving element can receive the laser light emitted by the laser emitter 121.

[0112] In this embodiment, if Figure 5 As shown, the fourth radius R4 of the outer circle of the fourth region is 3 mm, the second radius R2 of the outer circle of the second region F12 is 6 mm, and the third radius R3 of the outer circle of the third region F13 is 9 mm.

[0113] In this embodiment, if Figures 4 and 5 As shown, when the wind turbine 11 is normal and stopped, the distance H between the light-emitting surface F2 of the laser emitter 121 and the reflective surface F3 of the reflector, the fourth radius R4 of the outer circle of the fourth area, the second radius R2 of the outer circle of the second area F12, and the third radius R3 of the outer circle of the third area F13 satisfy the following relationship:

[0114] ;

[0115] ;

[0116] ;

[0117] Among them, H is the distance between the light-emitting surface F2 of the laser emitter 121 and the reflective surface F3 of the reflector when the wind turbine 11 is normal and stopped, R4 is the fourth radius of the outer circle of the fourth area, R2 is the second radius R2 of the outer circle of the second area F12, R3 is the third radius R3 of the outer circle of the third area F13, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

[0118] In this embodiment, the laser emitter 121 and the laser receiver 122 are integrally packaged, and the laser emitter 121 and the laser receiver 122 are located on the air duct shell. A reflector is provided at the top of the bearing 111. The laser emitter 121 is used to emit laser light, and the reflector is used to reflect laser light. The reflected laser light is received by one of the fourth laser receiving element, the second laser receiving element, and the third laser receiving element, or the fourth laser receiving element, the second laser receiving element, and the third laser receiving element cannot receive the laser light reflected by the reflector.

[0119] In this embodiment, when the fan 11 is operating normally and the bearing 111 is functioning properly, only the fourth laser receiving element can receive the laser light reflected from the reflector. When the bearing 111 is vibrating abnormally (with a small amplitude), only the second laser receiving element can receive the laser light reflected from the reflector. When the bearing 111 is vibrating significantly (with a large amplitude), only the third laser receiving element can receive the laser light reflected from the reflector. When the bearing 111 is nearing damage (with a large amplitude), none of the first, second, or third laser receiving elements can receive the laser light reflected from the reflector.

[0120] When the controller receives the fourth target monitoring signal from the fourth laser receiving element, it determines that the fan 11 is operating normally and the bearing 111 is operating well.

[0121] When the controller receives the second target monitoring signal from the second laser receiving element, it determines that the bearing 111 has abnormal shaking, and the controller issues a first alarm instruction. The first alarm instruction is used to instruct the output device (such as an alarm or display) to output a warning message. The warning message is used to indicate that the bearing 111 has abnormal shaking, so as to notify the engineer to confirm the fault.

[0122] When the controller receives the third target monitoring signal from the third laser receiving element, it determines that the bearing 111 is shaking greatly, and the controller issues a second alarm instruction. The second alarm instruction is used to instruct the output device (such as an alarm or display) to output the first alarm information. The first alarm information is used to indicate that the bearing 111 is shaking greatly, so as to notify the engineer to confirm the fault.

[0123] When the controller does not receive the fourth target monitoring signal from the fourth laser receiving element, the second target monitoring signal from the second laser receiving element, and the third target monitoring signal from the third laser receiving element, it determines that the bearing 111 is close to a damaged state, and the controller issues a third alarm instruction and controls the air cooling equipment to shut down. The third alarm instruction is used to instruct the output device (such as an alarm or display) to output a second alarm message. The second alarm message is used to indicate that the bearing 111 is close to a damaged state, so as to notify the engineer to confirm and handle the fault.

[0124] In this embodiment, since a monitoring device is added to the air-cooling equipment, the monitoring device is used to collect a target monitoring signal indicating whether the central axis L3 of the bearing 111 deviates from the central axis of the fan 11, and send it to the controller. The controller performs a corresponding target control operation based on the target monitoring signal, and when the target monitoring signal indicates that the central axis L3 of the bearing 111 deviates from the central axis of the fan 11, the controller issues an alarm instruction to notify the engineer to confirm the fault or shut down the machine. In this way, it is possible to detect whether the central axis L3 of the bearing 111 of the fan 11 deviates from the central axis of the fan 11, thereby avoiding the central axis L3 of the bearing 111 of the fan 11 deviating from the central axis of the fan 11 and causing damage to the air-cooling equipment.

[0125] Another embodiment of the present application provides an air-cooling device. Unlike the above embodiment, in this embodiment, the monitoring device includes a temperature sensor and a vibration sensor, and the controller is configured to determine whether the central axis L3 of the bearing 111 deviates from the central axis of the fan 11 based on temperature information sensed by the temperature sensor and vibration intensity information sensed by the vibration sensor.

[0126] In this embodiment, if Figure 6 As shown, the monitoring device includes a temperature sensor 124 and a vibration sensor 125. The temperature sensor 124 and the vibration sensor 125 are located on the outer wall of the housing 113, and the temperature sensor 124 and the vibration sensor 125 are connected to the controller 13 respectively.

[0127] In one embodiment, a second groove may be provided on the outer wall of the housing 113 , and the temperature sensor 124 is located in the second groove. The temperature sensor 124 is used to sense the temperature of the housing 113 and send the sensed temperature information to the controller 13 .

[0128] In this embodiment, the vibration sensor 125 is fixed on the outer wall of the housing 113 and is used to sense the intensity of vibration of the housing 113 and send the sensed vibration intensity information to the controller 13 .

[0129] In this embodiment, when the controller 13 determines that the temperature of the casing 113 is greater than the specified temperature threshold and the vibration intensity of the casing 113 is greater than the specified vibration intensity threshold based on the received sensed temperature information, vibration intensity information, and the specified temperature threshold and the specified vibration intensity threshold, it issues a third alarm instruction and controls the air-cooling equipment to shut down. The third alarm instruction is used to instruct the output device (such as an alarm or display) to output a second alarm message. The second alarm message is used to indicate that the bearing 111 is close to a damaged state, so as to notify the engineer to confirm and handle the fault.

[0130] In this embodiment, the controller determines whether the central axis L3 of the bearing 111 deviates from the central axis of the fan 11 based on the temperature information sensed by the temperature sensor and the vibration intensity information sensed by the vibration sensor, which can improve the accuracy of the determination.

[0131] Another embodiment of the present application provides an air cooling device. Different from the above embodiment, Figure 7 As shown, in this embodiment, the monitoring device includes a conductor 126, a current detection device 127, and a power source E. Conductor 126 is connected to the power source via current detection device 127. Conductor 126 is located on the inner wall of housing 113 and extends along the central axis L3 of bearing 111. Conductor 126 is positioned opposite blade 112, and the length of conductor 126 along the central axis L3 of bearing 111 is greater than the length of blade 112 along the central axis L3 of bearing 111. The projection of blade 112 on housing 113 is within the projection of conductor 126 on housing 113. This ensures that blade 112 can cut off conductor 126 when the central axis L3 of bearing 111 deviates from the central axis of fan 11 by an excessive angle.

[0132] In this embodiment, the current detection device 127 is connected to the controller 13. The current detection device 127 is used to collect the target monitoring signal, which includes the current value in the monitoring device, that is, the current value in the loop formed by the conductor 126, the current detection device 127 and the power supply E.

[0133] When the central axis L3 of the bearing 111 deviates from the central axis of the fan 11 by an excessively large angle and the blade 112 cuts off the conductor 126, the current value becomes zero, and the circuit formed by the conductor 126, the current detection device 127, and the power supply E becomes disconnected. When the controller 13 determines that the current value is zero based on the target monitoring signal, it issues an alarm command and controls the air-cooling equipment to stop operating. Specifically, when the controller 13 determines that the current value is zero based on the target monitoring signal, it may issue a third alarm command and control the air-cooling equipment to shut down. The third alarm command is used to instruct an output device (such as an alarm or display) to output a second alarm message. The second alarm message is used to indicate that the bearing 111 is approaching a damaged state, so as to notify engineers to confirm and handle the fault.

[0134] In this embodiment, the conductor 126 can be a soft conductor, for example, the material of the conductor 126 can be tin, which is easily cut by the blade 112. In addition, the thickness of the conductor 126 can be slightly thicker, and the specific thickness can be determined according to the situation, so that the housing 113 can be protected.

[0135] In this embodiment, a circle of conductor 126 can be set on the inner wall of the casing 113. In this way, once the central axis L3 of the bearing 111 deviates from the central axis of the fan 11 by too large an angle, the blade 112 can cut off the conductor 126 at any position, so as to promptly detect the deviation of the central axis L3 of the bearing 111 from the central axis of the fan 11, thereby reducing the risk of damage to the air-cooling equipment.

[0136] Another exemplary embodiment of the present application further provides an epitaxial process device, which includes a device body and an air cooling device according to any of the above embodiments, wherein the air cooling device is located on the device body.

[0137] In this embodiment, the epitaxial process equipment detects whether the central axis L3 of the bearing 111 of the fan 11 deviates from the central axis of the fan 11. When the central axis L3 of the bearing 111 deviates from the central axis of the fan 11, the controller controls the epitaxial process equipment to cool down and stop urgently, and issues an alarm command to notify the engineer to confirm the fault or shut down the equipment. In this way, the central axis L3 of the bearing 111 deviating from the central axis of the fan 11 can be avoided to cause irreversible damage to the epitaxial process equipment, and the PM (maintenance) cycle of the epitaxial process equipment can be effectively extended.

[0138] In this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. The term "plurality" refers to two or more than two, unless otherwise clearly defined.

[0139] The above description of the embodiments is intended to facilitate understanding and application of the present application by those skilled in the art. It will be apparent that those skilled in the art can readily make various modifications to these embodiments and apply the general principles described herein to other embodiments without expending any creative effort. Therefore, the present application is not limited to the embodiments described herein, and improvements and modifications made by those skilled in the art based on the disclosure of this application without departing from the scope and spirit of this application are within the scope of this application.

Claims

1. An air cooling device, characterized in that: include: fans, monitoring devices and controllers; The monitoring device is at least partially located on the fan; The monitoring device is connected to the controller; the fan includes a bearing and a blade, the blade is arranged on the bearing and can rotate with the bearing; when the fan is operating normally, the central axis of the bearing coincides with the central axis of the fan; The monitoring device is used to collect a target monitoring signal and send it to the controller; the target monitoring signal is used to indicate whether the central axis of the bearing deviates from the central axis of the fan; The controller is used to perform corresponding target control operations based on the target monitoring signal; when the target monitoring signal indicates that the central axis of the bearing deviates from the central axis of the fan, the controller issues an alarm instruction.

2. The air cooling device according to claim 1, characterized in that It also includes an air duct housing, wherein the fan is located in the air duct housing; The monitoring device includes a laser transmitter and a laser receiver, one of which is located on the air duct housing and the other is located on the top of the bearing; The photosensitive surface of the laser receiver is opposite to the light-emitting surface of the laser emitter, and the central axis of the light-emitting surface of the laser emitter and the central axis of the photosensitive surface of the laser receiver coincide with the central axis of the bearing; The photosensitive surface of the laser receiver includes a first area, a second area, and a third area. The first area is circular, and the central axis of the photosensitive surface passes through the center of the first area. The second area is annular and surrounds the first area. The third area is annular and surrounds the second area. The laser receiver includes a first laser receiving element, a second laser receiving element, and a third laser receiving element, wherein the first laser receiving element is located in the first area; The second laser receiving element is located in the second area; The third laser receiving element is located in the third area; The first laser receiving element, the second laser receiving element and the third laser receiving element are respectively connected to the controller; Only one of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter, or none of the first laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter.

3. The air cooling device according to claim 2, characterized in that: The light-emitting surface of the laser emitter is circular, and a first diameter of the light-emitting surface is smaller than a second diameter of the first region, a ring width of the second region, and a ring width of the third region. The distance between the first laser receiving element and the boundary of the first region is greater than the first diameter of the light emitting surface; The distance between the second laser receiving element and the boundary of the first region and the distance between the second region and the boundary of the first region are both greater than the first diameter of the light emitting surface; A distance between the third laser receiving element and a boundary between the second region and the first region, and a distance between the third laser receiving element and a boundary between the third region and the second region are both greater than the first diameter of the light emitting surface.

4. The air cooling device according to claim 2, characterized in that: A first groove is formed on the top of the bearing; The laser transmitter is located on the air duct housing and the laser receiver is located on the top of the bearing, and the laser receiver is fixed in the first groove; or, The laser receiver is located on the air duct housing and the laser transmitter is located at the top end of the bearing, and the laser transmitter is fixed in the first groove.

5. The air cooling device according to claim 4, characterized in that: When the laser receiver is fixed in the first groove, the first radius of the first area is 1 mm, the second radius of the outer circle of the second area is 2 mm, and the third radius of the outer circle of the third area is 3 mm; When the laser emitter is fixed in the first groove, the first radius of the first area is 3 mm, the second radius of the outer circle of the second area is 6 mm, and the third radius of the outer circle of the third area is 9 mm.

6. The air cooling device according to claim 4, characterized in that: The distance between the light-emitting surface of the laser transmitter and the light-sensitive surface of the laser receiver, the first radius of the first area, the second radius of the outer circle of the second area, and the third radius of the outer circle of the third area satisfy the following relationship: ； ； ； Wherein, D is the distance between the light-emitting surface of the laser emitter and the photosensitive surface of the laser receiver, R1 is the first radius of the first area, R2 is the second radius R2 of the outer circle of the second area, R3 is the third radius R3 of the outer circle of the third area, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

7. The air cooling device according to claim 1, characterized in that: It also includes an air duct housing, wherein the fan is located in the air duct housing; The monitoring device includes a laser transmitter, a laser receiver and a reflector; The laser emitter and the laser receiver are integrally packaged, the laser emitter and the laser receiver are located on the air duct housing, and the reflector is located at the top of the bearing; The laser receiver surrounds the laser emitter and is symmetrically arranged with respect to the laser emitter; the emitting surface of the laser emitter and the photosensitive surface of the laser receiver are opposite to the reflective surface of the reflector, and the central axis of the light-emitting surface of the laser emitter and the central axis of the reflective surface of the reflector coincide with the central axis of the bearing; The emitting surface of the laser emitter is circular, and the photosensitive surface of the laser receiver includes a fourth area, a second area, and a third area. The fourth area is annular, the second area is annular and surrounds the fourth area, and the third area is annular and surrounds the second area. The laser receiver includes a fourth laser receiving element, a second laser receiving element, and a third laser receiving element, wherein the fourth laser receiving element is located in the fourth area; The second laser receiving element is located in the second area; The third laser receiving element is located in the third area; The fourth laser receiving element, the second laser receiving element and the third laser receiving element are respectively connected to the controller; Only one of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter, or none of the fourth laser receiving element, the second laser receiving element and the third laser receiving element can receive the laser emitted by the laser emitter.

8. The air cooling device according to claim 7, characterized in that: The first diameter of the light-emitting surface is smaller than the ring width of the fourth area, the ring width of the second area, and the ring width of the third area respectively; The distance between the fourth laser receiving element and the boundary of the light emitting surface and the distance between the fourth laser receiving element and the boundary of the fourth area close to the second area are greater than the first diameter of the light emitting surface; The distance between the second laser receiving element and the boundary of the fourth region close to the second region and the distance between the second laser receiving element and the boundary of the second region away from the fourth region are both greater than the first diameter of the light emitting surface; A distance between the third laser receiving element and a boundary between the second region and the fourth region, and a distance between the third laser receiving element and a boundary between the third region and the second region are both greater than the first diameter of the light emitting surface.

9. The air cooling device according to claim 7, characterized in that: The fourth radius of the outer circle of the fourth area is 3 mm, the second radius of the outer circle of the second area is 6 mm, and the third radius of the outer circle of the third area is 9 mm.

10. The air cooling device according to claim 7, characterized in that: The distance between the light-emitting surface of the laser emitter and the reflective surface of the reflector, the fourth radius of the outer circle of the fourth area, the second radius of the outer circle of the second area, and the third radius of the outer circle of the third area satisfy the following relationship: ； ； ； Among them, H is the distance between the light-emitting surface of the laser emitter and the reflective surface of the reflector, R4 is the fourth radius of the outer circle of the fourth area, R2 is the second radius R2 of the outer circle of the second area, R3 is the third radius R3 of the outer circle of the third area, the range of θ1 is 0°~0.4°, the range of θ2 is 0.4°~0.8°, and the range of θ3 is 0.8°~1.2°.

11. The air cooling device according to claim 1, wherein: The monitoring device includes a temperature sensor and a vibration sensor; the fan also includes a casing, and the bearing and the blade are located in the casing; The temperature sensor is located on the outer wall of the housing, or a second groove is provided on the outer wall of the housing, and the temperature sensor is located in the second groove; The vibration sensor is located on the outer wall of the housing, and the temperature sensor and the vibration sensor are respectively connected to the controller.

12. The air cooling device according to claim 1, wherein: The fan further comprises a casing, wherein the bearing and the blade are located in the casing; The monitoring device includes a conductor, a current detection device, and a power supply. The conductor is connected to the power supply via the current detection device. The conductor is located on the inner wall of the housing and extends along the central axis of the bearing. The conductor is opposite to the blade, and the length of the conductor in the central axis of the bearing is greater than the length of the blade in the central axis of the bearing. The projection of the blade on the housing is located within the projection of the conductor on the housing. The current detection device is connected to the controller; the current detection device is used to collect a target monitoring signal, and the target monitoring signal includes a current value in the monitoring device; When the blade cuts off the conductor, the current value is zero, the blade rotates eccentrically, and the controller issues the alarm instruction and controls the air cooling device to stop running.

13. An epitaxial process equipment, characterized in that: It comprises a device body and the air cooling device according to any one of claims 1 to 12, wherein the air cooling device is located on the device body.

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