Vacuum equipment gate valve device and vacuum equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly relates to a gate valve device of vacuum equipment, which is mounted on a vacuum equipment body and comprises a gate valve plate and a sealing ring connected with the gate valve plate. The switch assembly is connected with the side, away from the vacuum equipment body, of the gate valve plate, and the switch assembly is used for driving the gate valve plate to open or close an opening in the vacuum equipment body; the lifting assembly is connected with the switch assembly, and the lifting assembly is used for driving the switch assembly and the gate valve plate to ascend and descend; the cleaning assembly is arranged on the movement path of the lifting assembly, and the sealing ring makes contact with the cleaning assembly in the lifting process so that the cleaning assembly can clean the sealing ring. The utility model further discloses vacuum equipment. When the sealing ring is cleaned, a worker does not need to manually clean the sealing ring after shutdown, the effects of saving labor and improving the working efficiency are achieved, and the productivity is maximized.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, in particular to a vacuum equipment gate valve device and vacuum equipment. Background Art

[0002] Vacuum equipment is widely used in industry to coat workpieces. The workpiece is transported into the vacuum equipment through an opening on one side of the vacuum equipment. A gate valve is required at the opening of the vacuum equipment to close and seal the opening of the vacuum equipment so that a certain vacuum degree is maintained inside the vacuum equipment. The workpiece is vacuum coated inside the vacuum equipment.

[0003] In order to ensure the sealing of the gate valve, a sealing ring is usually provided on the gate valve to improve the sealing of the internal opening of the vacuum equipment when the vacuum equipment is working. However, after the existing gate valve is used for a long time, the surface of the sealing ring may be sticky with impurities such as dust and dirt. If the impurities are not cleaned in time, the vacuum equipment may leak and cause product defects. Therefore, it is necessary to stop the machine and manually wipe the impurities on the surface of the sealing ring. Stopping the machine for manual wiping is not only laborious, but also reduces production efficiency. Utility Model Content

[0004] When the cam is opened, the valve stem is moved downwards to allow the seal to be removed from the cam, and the cam is moved upwards to allow the seal to be removed from the cam, thereby closing the cam.

[0005] The utility model provides a gate valve device for vacuum equipment, which is installed on the vacuum equipment body and includes:

[0006] A gate valve plate and a sealing ring connected to the gate valve plate;

[0007] A switch assembly is connected to the side of the gate valve plate away from the vacuum equipment body, and is used to drive the gate valve plate to open or close the opening on the vacuum equipment body;

[0008] A lifting assembly, the lifting assembly being connected to the switch assembly and used to drive the switch assembly and the gate valve plate to move up and down;

[0009] A cleaning component is provided on the movement path of the lifting component, and the sealing ring contacts the cleaning component during the lifting process, so that the cleaning component cleans the sealing ring.

[0010] By adopting the above technical solution, the switch assembly drives the gate valve plate to move to the side close to the vacuum equipment body, so that the sealing ring is tightly abutted against the side wall of the vacuum equipment body, and the sealing ring seals the opening. At this time, the gate valve plate will close the opening, and the switch assembly drives the gate valve plate to move to the side away from the vacuum equipment body, so that the sealing ring is separated from the side wall of the vacuum equipment body, and the gate valve plate will open the opening. After the gate valve plate opens the opening, the lifting assembly drives the gate valve plate to move downward. During the downward movement of the gate valve plate, the cleaning assembly cleans impurities on the surface of the sealing ring. The gate valve plate drops to the bottom and stays for a period of time, and then the lifting assembly drives the gate valve plate to move upward until the gate valve plate is facing the opening. During the rising process of the gate valve plate, the cleaning assembly can also clean impurities on the surface of the sealing ring. When cleaning the sealing ring, there is no need for the staff to manually clean the sealing ring after stopping the machine, which has the effect of saving labor and improving work efficiency, thereby maximizing production capacity.

[0011] Furthermore, the cleaning assembly includes a first brush body, and the bristles on the first brush body are in contact with the sealing ring during the lifting process.

[0012] By adopting the above technical solution, during the rising and falling process of the gate valve plate, the bristles on the first brush body clean the sealing ring, saving labor and time of stopping the machine to wipe the sealing ring, and maximizing production capacity.

[0013] Furthermore, a blowing groove is provided on a side of the first brush body away from the vacuum equipment body, and a plurality of blowing holes for blowing air to the sealing ring are provided in the blowing groove.

[0014] By adopting the above technical solution, the air blown out from the blowing hole cleans the sealing ring, blows away stubborn dust or dirt from the surface of the sealing ring, and improves the cleaning effect of impurities on the surface of the sealing ring.

[0015] Furthermore, the lifting assembly includes a fixing frame connected to the vacuum equipment body, the first brush body is connected to the fixing frame, the fixing frame is connected to a vertically arranged first linear driver, and the driving end of the first linear driver is connected to the switch assembly.

[0016] By adopting the above technical solution, the switch assembly drives the gate valve plate to move toward the side close to the vacuum equipment body, so that the sealing ring is in close contact with the side wall of the vacuum equipment body, and the gate valve plate closes the opening; the switch assembly drives the gate valve plate to move toward the side away from the vacuum equipment body, so that the sealing ring is separated from the side wall of the vacuum equipment body, and the gate valve plate opens the opening. When the driving end of the first linear actuator descends, the driving end of the first linear actuator drives the switch assembly and the gate valve plate to descend. When the driving end of the first linear actuator rises, the driving end of the first linear actuator drives the switch assembly and the gate valve plate to rise.

[0017] Furthermore, the first brush body is detachably connected to the fixing frame, a plurality of first magnets are connected to one side of the first brush body close to the fixing frame, and a plurality of second magnets that are attracted and abutted against the first magnets are connected to one side of the fixing frame close to the first brush body.

[0018] By adopting the above technical solution, the first magnet and the second magnet attract and abut against each other, and the first brush body is connected and fixed to the fixing frame. The fixing process is relatively convenient. When the first brush body needs to be cleaned or replaced, the first magnet and the second magnet are separated, the first brush body is removed, the first brush body is cleaned or replaced with a new first brush body, and then the first brush body and the fixing frame are connected and fixed again by the abutment of the first magnet and the second magnet. The process of cleaning or replacing the first brush body is relatively convenient.

[0019] Furthermore, a second brush body connected to the fixing frame is provided in the first brush body, and the bristles on the second brush body are in contact with the sealing ring during the lifting process.

[0020] By adopting the above technical solution, during the rising and falling process of the gate valve plate, the bristles on the second brush body also clean the sealing ring, further improving the cleaning effect of the sealing ring.

[0021] Furthermore, the second brush body is detachably connected to the fixing frame, a plurality of third magnets are connected to one side of the second brush body close to the fixing frame, and a plurality of fourth magnets that are attracted and abutted against the third magnets are connected to one side of the fixing frame close to the second brush body.

[0022] By adopting the above technical solution, the third magnet and the fourth magnet attract and abut against each other, and the second brush body is connected and fixed to the fixing frame. The fixing process is relatively convenient. When the second brush body needs to be cleaned or replaced, the third magnet and the fourth magnet are separated, the second brush body is removed, the second brush body is cleaned or replaced with a new second brush body, and then the second brush body is connected and fixed to the fixing frame again by abutting against the third magnet and the fourth magnet. The process of cleaning or replacing the second brush body is relatively convenient.

[0023] Furthermore, the switch assembly includes a support frame connected to the driving end of the first linear actuator, the support frame is connected to the second linear actuator, and the driving end of the second linear actuator is connected to the side of the gate valve plate away from the sealing ring.

[0024] By adopting the above technical solution, when the driving end of the second linear actuator moves toward the side away from the vacuum equipment body, the gate valve plate will open the opening; when the driving end of the second linear actuator moves toward the side close to the vacuum equipment body, the gate valve plate will close the opening.

[0025] Furthermore, a plurality of guide wheels are connected to the top of the support frame.

[0026] By adopting the above technical solution, when the gate valve plate descends to the bottom, the workpiece carrier passes through the guide wheel, which supports and transmits the workpiece carrier. The workpiece carrier enters the interior of the vacuum equipment body through the opening, and the guide wheel supports the workpiece carrier. The guide wheel has the effect of making the transmission process of the workpiece carrier more stable.

[0027] The utility model also provides a vacuum device, comprising a vacuum device body, on which any one of the above-mentioned gate valve devices is installed.

[0028] Compared with the prior art, the beneficial effects of the present invention are:

[0029] (1) The switch assembly drives the gate valve plate to move toward the side close to the vacuum equipment body, so that the sealing ring is tightly abutted against the side wall of the vacuum equipment body, and the sealing ring seals the opening. At this time, the gate valve plate closes the opening, and the switch assembly drives the gate valve plate to move toward the side away from the vacuum equipment body, so that the sealing ring is separated from the side wall of the vacuum equipment body, and the gate valve plate opens the opening. After the gate valve plate opens the opening, the lifting assembly drives the gate valve plate to move downward. During the downward movement of the gate valve plate, the cleaning assembly cleans impurities on the surface of the sealing ring. The gate valve plate drops to the bottom and stays for a while. Then the lifting assembly drives the gate valve plate to move upward until the gate valve plate is facing the opening. During the rising process of the gate valve plate, the cleaning assembly can also clean impurities on the surface of the sealing ring. When cleaning the sealing ring, there is no need for the staff to manually clean the sealing ring after stopping the machine, which saves labor and improves work efficiency, thereby maximizing production capacity.

[0030] (2) During the rising and falling process of the gate valve plate, the bristles on the first brush body clean the sealing ring, saving labor and downtime for wiping the sealing ring, thereby maximizing production capacity.

[0031] (3) The air blown out of the blowing hole blows the sealing ring, blowing away the stubborn dust or dirt from the surface of the sealing ring, thereby improving the cleaning effect of impurities on the surface of the sealing ring.

[0032] (4) When the gate valve plate descends to the bottom, the workpiece carrier passes through the guide wheel, which supports and transmits the workpiece carrier. The workpiece carrier enters the interior of the vacuum equipment body through the opening, and the guide wheel supports the workpiece carrier. The guide wheel has the effect of making the transmission process of the workpiece carrier more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0034] Figure 1 This is a schematic structural diagram of an embodiment of the present application;

[0035] Figure 2 This is a schematic diagram of the structure of the sealing ring in this embodiment;

[0036] Figure 3 This is a schematic diagram showing closing the opening in this embodiment;

[0037] Figure 4 This is a schematic diagram showing the gate valve plate descending in this embodiment;

[0038] Figure 5 This is a schematic diagram of the structure of the air blowing pipe in this embodiment;

[0039] Figure 6 for Figure 5 A magnified schematic diagram of part A;

[0040] Figure 7 This is a schematic diagram of the structure of the air inlet duct in this embodiment;

[0041] Figure 8 This is a schematic diagram of the structure of the reserved slot in this embodiment;

[0042] Figure 9 This is a schematic diagram showing the abutment between the first magnet and the second magnet in this embodiment;

[0043] Figure 10 Schematic diagram showing the abutment between the third magnet and the fourth magnet in this embodiment.

[0044] Explanation of the accompanying drawings: 1. Vacuum equipment body; 11. Opening; 2. Gate valve plate; 21. Sealing ring; 3. Switch assembly; 31. Support frame; 32. Second linear actuator; 4. Lifting assembly; 41. Fixing frame; 411. Second connecting groove; 412. Second magnet; 413. Fourth connecting groove; 414. Fourth magnet; 42. First linear actuator; 5. Cleaning assembly; 51. First brush body; 511. Blowing groove; 512. Reserved groove; 513. First connecting groove; 514. First magnet; 52. Blowing air pipe; 521. Air inlet pipe; 522. Blowing hole; 53. Second brush body; 531. Third connecting groove; 532. Third magnet; 6. Guide wheel. DETAILED DESCRIPTION

[0045] The following is a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0046] The following is combined with Figure 1 To the attached Figure 10 And specific embodiments discuss the present invention in detail.

[0047] like Figures 1 to 10 As shown, the present invention provides a vacuum equipment gate valve device, which is installed on the vacuum equipment body 1 and is used to seal the opening 11 of the vacuum equipment body 1. The gate valve device includes a gate valve plate 2, and a sealing ring 21 is fixedly connected to the side of the gate valve plate 2 close to the vacuum equipment body 1.

[0048] The side of the gate valve plate 2 away from the vacuum equipment body 1 is connected to a switch assembly 3. The switch assembly 3 drives the gate valve plate 2 toward the side closer to the vacuum equipment body 1, causing the sealing ring 21 to tightly abut against the side wall of the vacuum equipment body 1. The sealing ring 21 seals the opening 11, and the gate valve plate 2 closes the opening 11. The switch assembly 3 drives the gate valve plate 2 toward the side away from the vacuum equipment body 1, separating the sealing ring 21 from the side wall of the vacuum equipment body 1, and the gate valve plate 2 opens the opening 11. The vacuum equipment body 1 is connected to a lifting assembly 4, which is connected to the switch assembly 3 and drives the switch assembly 3 and the gate valve plate 2 to rise and fall.

[0049] The gate valve device also includes a cleaning component 5. After the gate valve plate 2 opens the opening 11, the lifting component 4 drives the switch component 3 and the gate valve plate 2 to move downward. During the downward movement of the gate valve plate 2, the cleaning component 5 contacts the sealing ring 21, and the cleaning component 5 cleans the impurities on the surface of the sealing ring 21. After the gate valve plate 2 drops to the bottom and stays for a while, the lifting component 4 drives the gate valve plate 2 to move upward until the gate valve plate 2 is facing the opening 11. During the rising process of the gate valve plate 2, the cleaning component 5 can also clean the impurities on the surface of the sealing ring 21. The switch component 3 drives the gate valve plate 2 to move toward the side close to the vacuum equipment body 1, so that the gate valve plate 2 closes the opening 11. When cleaning the sealing ring 21, there is no need for the staff to manually clean the sealing ring 21 after stopping the machine, which has the effect of saving labor and improving work efficiency, thereby maximizing production capacity.

[0050] The lifting assembly 4 includes a mounting bracket 41 connected to the side wall of the vacuum apparatus body 1 and secured thereto via bolts. A pair of vertically disposed first linear actuators 42 are attached to the lower surface of the mounting bracket 41 and secured thereto via bolts. In this embodiment, the first linear actuators 42 are hydraulic cylinders, pneumatic cylinders, or electric telescopic rods. The number and specific placement of the first linear actuators 42 are not limited thereto.

[0051] The driving end of the first linear actuator 42 is connected to the switch assembly 3. The driving end of the first linear actuator 42 is the moving end of the first linear actuator 42. When the driving end of the first linear actuator 42 descends, the driving end of the first linear actuator 42 drives the switch assembly 3 and the gate valve plate 2 to descend. When the driving end of the first linear actuator 42 rises, the driving end of the first linear actuator 42 drives the switch assembly 3 and the gate valve plate 2 to rise.

[0052] The switch assembly 3 includes a support frame 31 fixedly connected to the driving end of the first linear actuator 42. A pair of horizontally arranged second linear actuators 32 are connected to the side of the support frame 31 away from the gate valve plate 2. The second linear actuators 32 are fixed to the support frame 31 by bolts. In this embodiment, the second linear actuators 32 are hydraulic cylinders, air cylinders or electric telescopic rods. The number and specific setting positions of the second linear actuators 32 are not limited to this.

[0053] The driving direction of the second linear drive 32 intersects with the driving direction of the first linear drive 42 . Preferably, the driving direction of the second linear drive 32 is horizontal, and the driving direction of the first linear drive 42 is vertical. The second linear drive 32 is perpendicular to the driving direction of the first linear drive 42 .

[0054] The driving end of the second linear driver 32 is fixedly connected to the gate valve plate 2. The driving end of the second linear driver 32 is the movable end of the second linear driver 32. When the driving end of the second linear driver 32 moves toward the side away from the vacuum equipment body 1, the driving end of the second linear driver 32 drives the gate valve plate 2 to move toward the side away from the vacuum equipment body 1, and the gate valve plate 2 opens the opening 11. When the driving end of the second linear driver 32 moves toward the side close to the vacuum equipment body 1, the driving end of the second linear driver 32 drives the gate valve plate 2 to move toward the side close to the vacuum equipment body 1, and the gate valve plate 2 closes the opening 11.

[0055] The cleaning assembly 5 includes a first brush body 51 connected to the fixing frame 41. The first brush body 51 is provided with a plurality of bristles (not shown) on the side away from the vacuum equipment body 1. After the opening 11 is opened, the door valve plate 2 descends. During the descent, the bristles on the first brush body 51 come into contact with the sealing ring 21. The first brush body 51 cleans impurities on the surface of the sealing ring 21. After the door valve plate 2 descends to the bottom and stays for a period of time, the first linear actuator 42 drives the door valve plate 2 to ascend. During the ascent, the first brush body 51 can also clean impurities on the surface of the sealing ring 21. The first brush body 51 cleans the sealing ring 21 during the descent and ascent process, saving labor and downtime for wiping the sealing ring 21, thereby maximizing production capacity.

[0056] A blowing groove 511 is provided inwardly on the side of the first brush body 51 away from the vacuum equipment body 1. A blowing pipe 52 is provided in the blowing groove 511. The blowing pipe 52 is fixedly connected to the fixing frame 41 and arranged around the blowing groove 511. An air inlet pipe 521 is fixedly connected to the bottom of the blowing pipe 52. A reserved groove 512 is provided on the side of the first brush body 51 near the air inlet pipe 521. The air inlet pipe 521 plugs into the reserved groove 512. The lower end of the air inlet pipe 521 passes through the fixing frame 41. The end of the air inlet pipe 521 away from the air inlet pipe 522 is connected to an air source such as an air pump. Compressed air is introduced into the air inlet pipe 521 and blows air into the interior of the air inlet pipe 52 through the air inlet pipe 521. A plurality of blowing holes 522 are provided on the sidewall of the air inlet pipe 52, through which air inside the air inlet pipe 52 is blown out.

[0057] During the process of the first brush body 51 cleaning the sealing ring 21, the air blown out from the blowing hole 522 blows the sealing ring 21. When the gate valve plate 2 drops and stops, the blowing air pipe 52 is set directly facing the sealing ring 21, blowing away stubborn dust or dirt from the surface of the sealing ring 21, thereby improving the cleaning effect of impurities on the surface of the sealing ring 21.

[0058] A second brush body 53 is provided in the blowing groove 511. The second brush body 53 is placed in the space surrounded by the blowing air pipe 52 and the second brush body 53 is connected to the fixing frame 41. The second brush body 53 is also provided with bristles on the side away from the vacuum equipment body 1 (not shown in the figure). During the rising and falling process of the gate valve plate 2, the bristles on the second brush body 53 also clean the sealing ring 21, further improving the cleaning effect of the sealing ring 21.

[0059] A plurality of first connecting grooves 513 are provided on a side of the first brush body 51 near the fixing frame 41. A first magnet 514 is fixedly connected to each first connecting groove 513. A plurality of second connecting grooves 411 are provided on a side of the fixing frame 41 near the first brush body 51. The second connecting grooves 411 correspond to the first connecting grooves 513 in a one-to-one manner. A second magnet 412 is fixedly connected to each second connecting groove 411. The first magnet 514 and the second magnet 412 are attracted to each other and abutted against each other, thereby connecting and fixing the first brush body 51 to the fixing frame 41, making the fixing process relatively convenient.

[0060] When the first brush body 51 needs to be cleaned or replaced, the first magnet 514 and the second magnet 412 are separated, the first brush body 51 is removed, the first brush body 51 is cleaned or replaced with a new first brush body 51, and then the first brush body 51 and the fixing frame 41 are connected and fixed again by the first magnet 514 and the second magnet 412. The process of cleaning or replacing the first brush body 51 is relatively convenient. In this embodiment, the first brush body 51 and the fixing frame 41 are connected and fixed by the first magnet 514 and the second magnet 412.

[0061] A plurality of third connecting slots 531 are provided on a side of the second brush body 53 near the fixing frame 41. A third magnet 532 is fixedly connected to each third connecting slot 531. A plurality of fourth connecting slots 413 are provided on a side of the fixing frame 41 near the second brush body 53. The fourth connecting slots 413 correspond to each of the third connecting slots 531, and a fourth magnet 414 is fixedly connected to each of the fourth connecting slots 413. The third magnets 532 and the fourth magnets 414 attract and abut against each other, thereby connecting and securing the second brush body 53 to the fixing frame 41, making the securing process relatively convenient.

[0062] When the second brush body 53 needs to be cleaned or replaced, the third magnet 532 and the fourth magnet 414 are separated, the second brush body 53 is removed, the second brush body 53 is cleaned or replaced with a new second brush body 53, and then the second brush body 53 and the fixing frame 41 are connected and fixed again by the third magnet 532 and the fourth magnet 414. The process of cleaning or replacing the second brush body 53 is relatively convenient. In this embodiment, the second brush body 53 and the fixing frame 41 are connected and fixed by the third magnet 532 and the fourth magnet 414.

[0063] A plurality of guide wheels 6 are fixedly mounted on the upper surface of the support frame 31. When the gate valve plate 2 descends to the bottom, the workpiece carrier passes through the guide wheels 6, which support and transmit the workpiece carrier. The workpiece carrier then passes through the opening 11 and enters the interior of the vacuum equipment body 1. A bearing assembly for receiving the workpiece carrier is provided inside the vacuum equipment body 1. When the guide wheels 6 move to the bottom, the guide wheels 6 align with the bearing assembly inside the vacuum equipment body 1. The bearing assembly includes but is not limited to several groups of rollers, conveyor belts, etc., which will not be described in detail here. After the workpiece carrier enters the interior of the vacuum equipment body 1, the gate valve plate 2 rises and then the gate valve plate 2 closes the opening 11. The guide wheels 6 support the workpiece carrier, and the guide wheels 6 make the transmission process of the workpiece carrier more stable.

[0064] The gate valve device for vacuum equipment provided by the present invention operates as follows: when the driving end of the second linear actuator 32 moves away from the vacuum equipment body 1, the gate valve plate 2 opens the opening 11; when the driving end of the second linear actuator 32 moves toward the side closer to the vacuum equipment body 1, the gate valve plate 2 closes the opening 11. When the driving end of the first linear actuator 42 descends, it drives the switch assembly 3 and the gate valve plate 2 downward; when the driving end of the first linear actuator 42 ascends, it drives the switch assembly 3 and the gate valve plate 2 upward.

[0065] The first brush body 51 and the second brush body 53 clean the sealing ring 21 during the lifting process. The air blown out of the air outlet blows the sealing ring 21 to remove impurities on the surface of the sealing ring 21.

[0066] The present invention further provides a vacuum device, comprising a vacuum device body 1, on which the above-mentioned gate valve device is mounted. The vacuum device provided by the present invention adopts all technical solutions of the gate valve device and has all advantages of the gate valve device, which will not be described in detail here.

[0067] The above further describes the present invention with the help of specific embodiments, but it should be understood that the specific description here should not be construed as limiting the essence and scope of the present invention. Various modifications made to the above embodiments by ordinary technicians in this field after reading this specification are all within the scope of protection of the present invention.

Claims

1. A gate valve device for vacuum equipment, mounted on a vacuum equipment body (1), characterized in that: include: A gate valve plate (2) and a sealing ring (21) connected to the gate valve plate (2); a switch assembly (3), the switch assembly (3) being connected to a side of the gate valve plate (2) away from the vacuum equipment body (1), the switch assembly (3) being used to drive the gate valve plate (2) to open or close the opening (11) on the vacuum equipment body (1); A lifting assembly (4), wherein the lifting assembly (4) is connected to the switch assembly (3), and the lifting assembly (4) is used to drive the switch assembly (3) and the gate valve plate (2) to move up and down; A cleaning component (5) is provided on the movement path of the lifting component (4); the sealing ring (21) contacts the cleaning component (5) during the lifting process, so that the cleaning component (5) cleans the sealing ring.

2. A gate valve device for vacuum equipment according to claim 1, characterized in that: The cleaning assembly (5) comprises a first brush body (51), and the bristles on the first brush body (51) are in contact with the sealing ring (21) during the lifting process.

3. A gate valve device for vacuum equipment according to claim 2, characterized in that: A blowing groove (511) is provided on a side of the first brush body (51) away from the vacuum equipment body (1), and a plurality of blowing holes (522) for blowing air to the sealing ring (21) are provided in the blowing groove (511).

4. A gate valve device for vacuum equipment according to claim 2, characterized in that: The lifting assembly (4) comprises a fixing frame (41) connected to the vacuum equipment body (1); the first brush body (51) is connected to the fixing frame (41); the fixing frame (41) is connected to a vertically arranged first linear driver (42); and the driving end of the first linear driver (42) is connected to the switch assembly (3).

5. A gate valve device for vacuum equipment according to claim 4, characterized in that: The first brush body (51) is detachably connected to the fixing frame (41); a plurality of first magnets (514) are connected to a side of the first brush body (51) close to the fixing frame (41); and a plurality of second magnets (412) are connected to a side of the fixing frame (41) close to the first brush body (51) and are attracted to and abutted against the first magnets (514).

6. A gate valve device for vacuum equipment according to claim 4, characterized in that: A second brush body (53) connected to the fixing frame (41) is provided in the first brush body (51), and the bristles on the second brush body (53) are in contact with the sealing ring (21) during the lifting process.

7. A gate valve device for vacuum equipment according to claim 6, characterized in that: The second brush body (53) is detachably connected to the fixing frame (41); a plurality of third magnets (532) are connected to a side of the second brush body (53) close to the fixing frame (41); and a plurality of fourth magnets (414) that are attracted and abutted against the third magnets (532) are connected to a side of the fixing frame (41) close to the second brush body (53).

8. A gate valve device for vacuum equipment according to claim 4, characterized in that: The switch assembly (3) includes a support frame (31) connected to a driving end of a first linear actuator (42), the support frame (31) is connected to a second linear actuator (32), the driving end of the second linear actuator (32) is connected to a side of the gate valve plate (2) away from the sealing ring (21), and the driving direction of the second linear actuator (32) intersects with the driving direction of the first linear actuator (42).

9. A gate valve device for vacuum equipment according to claim 8, characterized in that: A plurality of guide wheels (6) are connected to the top of the support frame (31).

10. A vacuum device, characterized in that: The invention comprises a vacuum equipment body (1), on which the gate valve device according to any one of claims 1 to 9 is installed.

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