Silicon wafer cutting cooling liquid filling device

Abstract

The utility model discloses a silicon wafer cutting cooling liquid filling device, which relates to the technical field of cooling liquid filling and comprises a liquid storage barrel and a liquid storage tank, a liquid inlet pipe is fixed at the upper end of the liquid storage barrel, a liquid outlet pipe is fixed below one side of the liquid storage barrel, a water pump is mounted at the liquid outlet end of the liquid outlet pipe, and a water pump is mounted at the liquid outlet end of the liquid outlet pipe. And a liquid injection pipe, a mounting seat, a first spring, a sleeve and a buzzer are sequentially arranged at the upper end of the liquid storage tank from left to right. Along with the descending of the liquid level in the liquid storage tank, the floating plate also synchronously descends, during the period, the rope is gradually straightened, after the rope is thoroughly straightened, a first guide rod is driven to enable a connecting plate and a first contact block to gradually move downwards until the first contact block presses a first touch control switch, a buzzer gives an alarm to remind a worker to fill the cooling liquid, and then the rope is stopped from being pulled out. The floating plate ascends along with the rising of the liquid level, after the floating plate ascends to a certain height, a second contact block presses a second touch control switch, and a buzzer gives an alarm to remind a worker to stop filling.

Description

Technical Field

[0001] The utility model relates to the technical field of coolant filling, in particular to a device for filling coolant for silicon wafer cutting. Background Art

[0002] Silicon wafers are a crucial material for integrated circuits. Through processes like photolithography and ion implantation, various semiconductor devices can be fabricated. The cutting fluid used in the silicon wafer cutting process acts as a cooling agent, dissipating heat generated by the cutting machine and reducing cutting stress.

[0003] Existing coolant storage tanks usually do not have a liquid level reminder function. When the coolant remaining in the tank is low, it cannot promptly remind the worker to refill it, and when the coolant in the tank is about to be filled, it cannot promptly remind the worker to stop refilling, which is inconvenient to use. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the existing technology and to propose a silicon wafer cutting coolant filling device, which can not only remind workers to fill the coolant in time when the coolant in the liquid storage tank is running low, but also remind workers to stop filling in time after a sufficient amount of coolant is added.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A silicon wafer cutting coolant filling device includes a liquid storage barrel and a liquid storage tank. A liquid inlet pipe is fixed to the upper end of the liquid storage barrel, and a liquid outlet pipe is fixed to the lower side of the liquid storage barrel. A water pump is installed at the liquid outlet end of the liquid outlet pipe. The upper end of the liquid storage tank is provided with a liquid filling pipe, a mounting seat, a first spring, a sleeve, and a buzzer in sequence from left to right. The liquid filling pipe is connected to the water pump through a hose.

[0007] A first touch switch and a second touch switch are respectively provided at the upper and lower ends of the mounting seat, a first guide rod is provided through the middle of the sleeve, a connecting plate is fixed to the upper end of the first guide rod, a first contact block is fixed below one end of the connecting plate, the first spring is fixed between the connecting plate and the liquid storage tank, a rope is fixedly connected to the lower end of the first guide rod, one end of the rope is fixedly connected to a floating plate, and a second contact block is provided above the floating plate.

[0008] Preferably, a second guide rod is symmetrically fixed inside the liquid storage tank, and through holes are formed at both ends of the floating plate, and the through holes are slidably connected to the second guide rod.

[0009] Preferably, the first guide rod is slidably connected to the sleeve.

[0010] Preferably, the upper end of the liquid inlet pipe is threadedly connected to a sealing cover, and the surface of the sealing cover is provided with anti-slip grooves.

[0011] Preferably, a drain pipe is fixedly connected to the lower end of the liquid storage tank, and a drain valve is installed at one end of the drain pipe.

[0012] Preferably, a third guide rod is fixed to the lower end of the second contact block, the third guide rod passes through the floating plate and is slidably connected thereto, a second spring is sleeved on the outside of the third guide rod, and both ends of the second spring are fixedly connected to the second contact block and the floating plate respectively.

[0013] Preferably, the first touch switch and the second touch switch are both electrically connected to the buzzer.

[0014] Preferably, a fixing plate is symmetrically fixed on one side of the liquid storage tank; a supporting foot is fixed to the lower end of the liquid storage barrel, and a visual window is provided on the surface of the liquid storage barrel; a bracket is fixed below the water pump, and one end of the bracket is fixedly connected to the supporting foot.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. As the liquid level in the liquid storage tank drops, the float also drops synchronously. During this period, the rope is gradually straightened. After the rope is completely straightened, it drives the first guide rod to gradually move the connecting plate and the first contact block downward until the first contact block presses the first touch switch, causing the buzzer to sound an alarm, reminding the worker to add coolant. Then, as the coolant is added, the float rises with the increase in the liquid level. When the float rises to a certain height, the second contact block presses the second touch switch, causing the buzzer to sound an alarm, reminding the worker to stop adding coolant to the liquid storage tank, which is convenient for the worker to use.

[0017] 2. After a sufficient amount of coolant is added to the liquid storage tank, a second spring and a third guide rod are provided to give the worker time to turn off the water pump. Even if the liquid level continues to rise within a certain period of time, the second contact block will not exert excessive force on the second touch switch, thereby preventing damage to the second contact block and the second touch switch, as the second spring is compressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of a silicon wafer cutting coolant filling device proposed by the present invention;

[0019] Figure 2 This is a schematic diagram of the cross-sectional structure of a liquid storage tank in a silicon wafer cutting coolant filling device proposed by the present invention, viewed from above;

[0020] Figure 3This is a schematic diagram of the cross-sectional structure of a liquid storage tank in a silicon wafer cutting coolant filling device proposed in the present invention, as viewed from the front;

[0021] Figure 4 This utility model proposes a silicon wafer cutting coolant filling device Figure 3 Schematic diagram of the enlarged structure at A in the middle;

[0022] Figure 5 This utility model proposes a silicon wafer cutting coolant filling device Figure 3 Schematic diagram of the enlarged structure at point B in the middle.

[0023] In the figure: 1. Liquid storage barrel; 2. Liquid inlet pipe; 3. Support foot; 4. Liquid outlet pipe; 5. Water pump; 6. Bracket; 7. Liquid storage tank; 8. Liquid filling pipe; 9. Hose; 10. Mounting base; 11. First touch switch; 12. Second touch switch; 13. First spring; 14. Sleeve; 15. First guide rod; 16. Connecting plate; 17. First contact block; 18. Rope; 19. Float; 20. Second guide rod; 21. Third guide rod; 22. Second contact block; 23. Second spring; 24. Buzzer; 25. Drain pipe; 26. Fixing plate. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0025] Reference Figure 1-5 A silicon wafer cutting coolant filling device includes a liquid storage barrel 1 and a liquid storage tank 7. A liquid inlet pipe 2 is fixed to the upper end of the liquid storage barrel 1, and a liquid outlet pipe 4 is fixed to the lower side of the liquid storage barrel 1. A water pump 5 is installed at the liquid outlet end of the liquid outlet pipe 4. The upper end of the liquid storage tank 7 is provided with a liquid injection pipe 8, a mounting seat 10, a first spring 13, a sleeve 14 and a buzzer 24 from left to right. The liquid injection pipe 8 is connected to the water pump 5 through a hose 9. A large amount of coolant is stored in the liquid storage barrel 1 and can be placed directly on the ground, while the liquid storage tank 7 is installed on the cutting machine.

[0026] A first touch switch 11 and a second touch switch 12 are respectively provided at the upper and lower ends of the mounting base 10. The first touch switch 11 and the second touch switch 12 are both electrically connected to the buzzer 24. A first guide rod 15 is provided through the middle of the sleeve 14, and the first guide rod 15 is slidably connected to the sleeve 14. A connecting plate 16 is fixed to the upper end of the first guide rod 15, and a first contact block 17 is fixed below one end of the connecting plate 16. The first spring 13 is fixed between the connecting plate 16 and the liquid storage tank 7. A rope 18 is fixedly connected to the lower end of the first guide rod 15, and one end of the rope 18 is fixedly connected to a floating plate 19. A second contact block 22 is provided above the floating plate 19. The arrangement of this structure can not only remind the worker to refill the liquid storage tank 7 in time when there is not much coolant left in the liquid storage tank 7, but also remind the worker to stop refilling in time after sufficient coolant is added.

[0027] A second guide rod 20 is symmetrically fixed inside the liquid storage tank 7, and through holes are provided at both ends of the floating plate 19, which are slidably connected to the second guide rod 20. When the floating plate 19 rises or falls with the change of the liquid level, the second guide rod 20 limits the floating plate 19 to prevent the position of the second contact block 22 from deviating from the position of the second touch switch 12.

[0028] The upper end of the liquid inlet pipe 2 is threadedly connected to a cover, and the surface of the cover is provided with anti-slip grooves. By unscrewing the cover, coolant can be injected into the liquid storage barrel 1 through the liquid inlet pipe 2.

[0029] A fixing plate 26 is symmetrically fixed to one side of the liquid storage tank 7 for fixing the liquid storage tank 7 on the cutting machine. A drain pipe 25 is fixedly connected to the lower end of the liquid storage tank 7. A drain valve is installed at one end of the drain pipe 25, and the liquid outlet end of the drain pipe 25 is connected to a conduit. The liquid outlet end of the conduit is connected to a spray head (not shown in the figure) so that the coolant can be accurately sprayed on the silicon wafer being cut.

[0030] A third guide rod 21 is fixed to the lower end of the second contact block 22. The third guide rod 21 passes through the floating plate 19 and is slidably connected thereto. A second spring 23 is sleeved on the outside of the third guide rod 21. The two ends of the second spring 23 are fixedly connected to the second contact block 22 and the floating plate 19, respectively. In order to reserve time for the worker to turn off the water pump 5, the second spring 23 and the third guide rod 21 are provided. Even if the liquid level continues to rise within a certain period of time, when the second spring 23 is compressed, the second contact block 22 and the second touch switch 12 will not be damaged due to excessive force exerted by the second contact block 22 on the second touch switch 12.

[0031] A supporting foot 3 is fixed to the lower end of the liquid storage barrel 1, and a visual window is opened on the surface of the liquid storage barrel 1. The visual window is used to observe the changes in the liquid level in the liquid storage barrel 1. A bracket 6 is fixed below the water pump 5, and one end of the bracket 6 is fixedly connected to the supporting foot 3.

[0032] In the present invention, a large amount of coolant is stored in the liquid storage barrel 1, which can be placed directly on the ground, and the liquid storage tank 7 is installed on the cutting machine so that the coolant discharged from the drain pipe 25 can be sprayed more accurately on the silicon wafer being cut. As the coolant is used, the liquid level in the liquid storage tank 7 gradually decreases. Under the action of gravity, the float 19 decreases along with the decrease in the liquid level. During the descending process of the float 19, the rope 18 is gradually straightened. After the rope 18 is completely straightened, the rope 18 will drive the first guide rod 15 to move gradually downward, and the first guide rod 15 will drive the connecting plate 16 to move gradually downward. During this period, the first spring 13 is compressed until the first contact block 17 presses the first touch switch 11, causing the buzzer 24 to sound an alarm, reminding the worker that the liquid level in the liquid storage tank 7 is too low, and the water pump 5 should be started in time to add water to the inside of the liquid storage tank 7. The coolant is injected, and then, as the coolant is injected, the liquid level in the liquid storage tank 7 gradually rises, the float plate 19 rises as the liquid level rises, the rope 18 gradually relaxes, and under the action of the first spring 13 rebounding, the first guide rod 15 drives the connecting plate 16 and the first contact block 17 to reset upward. When the float plate 19 rises to a certain height, the second contact block 22 presses the second touch switch 12, causing the buzzer 24 to sound an alarm, reminding the worker to turn off the water pump 5 and stop adding coolant to the liquid storage tank 7. In order to reserve time for the worker to turn off the water pump 5, the second spring 23 and the third guide rod 21 are provided. Even if the liquid level continues to rise within a certain period of time, when the second spring 23 is compressed, the second contact block 22 will not act on the second touch switch 12 due to excessive force, thereby not causing damage to the second contact block 22 and the second touch switch 12.

[0033] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A silicon wafer cutting coolant filling device, comprising a liquid storage barrel (1) and a liquid storage tank (7), characterized in that: A liquid inlet pipe (2) is fixed to the upper end of the liquid storage barrel (1), and a liquid outlet pipe (4) is fixed to the lower side of the liquid storage barrel (1), and a water pump (5) is installed at the liquid outlet end of the liquid outlet pipe (4). A liquid injection pipe (8), a mounting seat (10), a first spring (13), a sleeve (14) and a buzzer (24) are sequentially provided at the upper end of the liquid storage tank (7) from left to right, and the liquid injection pipe (8) is connected to the water pump (5) through a hose (9); A first touch switch (11) and a second touch switch (12) are respectively provided at the upper and lower ends of the mounting seat (10); a first guide rod (15) is provided through the middle of the sleeve (14); a connecting plate (16) is fixed to the upper end of the first guide rod (15); a first contact block (17) is fixed below one end of the connecting plate (16); the first spring (13) is fixed between the connecting plate (16) and the liquid storage tank (7); a rope (18) is fixedly connected to the lower end of the first guide rod (15); one end of the rope (18) is fixedly connected to a floating plate (19); a second contact block (22) is provided above the floating plate (19); The first guide rod (15) is slidably connected to the sleeve (14); A third guide rod (21) is fixed to the lower end of the second contact block (22), and the third guide rod (21) passes through the floating plate (19) and is slidably connected thereto. A second spring (23) is sleeved on the outside of the third guide rod (21), and two ends of the second spring (23) are fixedly connected to the second contact block (22) and the floating plate (19), respectively.

2. The silicon wafer cutting coolant filling device according to claim 1, characterized in that: A second guide rod (20) is symmetrically fixed inside the liquid storage tank (7), and through holes are provided at both ends of the floating plate (19), and the through holes are slidably connected to the second guide rod (20).

3. The silicon wafer cutting coolant filling device according to claim 1, characterized in that: The upper end of the liquid inlet pipe (2) is threadedly connected to a sealing cover, and the surface of the sealing cover is provided with anti-slip grooves.

4. The silicon wafer cutting coolant filling device according to claim 1, characterized in that: The lower end of the liquid storage tank (7) is fixedly connected to a liquid discharge pipe (25), and one end of the liquid discharge pipe (25) is equipped with a liquid discharge valve.

5. The silicon wafer cutting coolant filling device according to claim 1, characterized in that: The first touch switch (11) and the second touch switch (12) are both electrically connected to the buzzer (24).

6. The silicon wafer cutting coolant filling device according to claim 1, characterized in that: A fixing plate (26) is symmetrically fixed to one side of the liquid storage tank (7); a supporting foot (3) is fixed to the lower end of the liquid storage barrel (1), and a visual window is provided on the surface of the liquid storage barrel (1); a bracket (6) is fixed below the water pump (5), and one end of the bracket (6) is fixedly connected to the supporting foot (3).

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