Silicon core furnace cooling device with liquid touch protection device

Abstract

The utility model relates to the technical field of silicon core furnaces, in particular to a silicon core furnace cooling device with a liquid touch protection device, which comprises a quartz crucible and a water cooling screen, the water cooling screen comprises a water inlet and outlet mechanism and a cooling ring positioned at the bottom end of the water inlet and outlet mechanism, and a stepped cooling water channel is arranged in the cooling ring. A plurality of groups of crystal guide holes for accommodating crystal bars are formed in the stepped cooling water channel in a circular array manner, a mounting hole is formed in the cooling ring in a penetrating manner, a liquid touch rod is arranged in the mounting hole in a threaded connection manner, the working end of the liquid touch rod penetrates through the cooling ring and faces the quartz crucible, and the upper end of the liquid touch rod is electrically connected with a control center. The distance between the liquid level in the quartz crucible and the water-cooling screen is monitored in real time through the liquid touch rod arranged on the water-cooling screen, when the liquid touch rod is in contact with the liquid level, an alarm signal is immediately sent out so that technicians can take protection measures more quickly, the structure is simple, operation is convenient, and the occurrence rate of production accidents is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon core furnaces, in particular to a silicon core furnace cooling device with a liquid contact protection device. Background Art

[0002] During the crystal pulling process, the silicon liquid in the quartz crucible will gradually decrease as the crystal is pulled. However, since the growth of the crystal must continue in a relatively stable temperature range, the distance between the water cooling screen and the liquid surface is at a relatively stable distance. Therefore, as the silicon material in the crucible decreases, the quartz crucible should be in a continuous rising process. However, when the growth rate of the crystal rod does not reach the ideal state, the crucible will rise relatively quickly.

[0003] In actual operation of the equipment, the silicon core furnace is a relatively sealed structure, and the distance from the water-cooling screen to the liquid surface cannot be well controlled through visual or camera observation. Utility Model Content

[0004] In order to solve the problems of the prior art, the utility model provides a silicon core furnace cooling device with a liquid contact protection device.

[0005] The purpose of the utility model can be achieved through the following technical solutions: A silicon core furnace cooling device with a liquid contact protection device, comprising: a quartz crucible and a water-cooling screen, the water-cooling screen comprising a water inlet and outlet mechanism and a cooling ring located at the bottom end of the water inlet and outlet mechanism, a stepped cooling water channel is arranged inside the cooling ring, a circular array in the stepped cooling water channel is provided with multiple groups of seeding holes for accommodating crystal rods, a mounting hole is provided through the cooling ring, a liquid contact rod is threadedly provided in the mounting hole, the working end of the liquid contact rod passes through the cooling ring and faces the quartz crucible, and its upper end is electrically connected to the control center.

[0006] As a further improvement, the water inlet and outlet mechanism includes a water inlet pipe and a water outlet pipe, and the water inlet pipe and the water outlet pipe are symmetrically arranged on both sides of the cooling ring and connected to the stepped cooling water channel.

[0007] As a further improvement, an observation hole is provided through the cooling ring.

[0008] As a further improvement, a support ring is provided on the cooling ring, and the support ring is fixed to the side wall of the water inlet and outlet mechanism.

[0009] As a further improvement, two groups of support rings are provided.

[0010] As a further improvement, a thermal insulation layer is installed at the center of the cooling ring, and the thickness of the thermal insulation layer can be adjusted according to different process conditions.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] 1. During the crystal pulling process, the quartz crucible continues to rise under the action of an external driving mechanism to ensure that a relatively stable distance is always maintained between the liquid level therein and the water-cooling screen. During the rising process of the quartz crucible, a liquid contact rod provided on the water-cooling screen monitors the distance between the liquid level in the quartz crucible and the water-cooling screen in real time. When the liquid contact rod contacts the liquid level, an alarm signal is immediately issued to facilitate process personnel to take protective measures more quickly, thereby preventing the quartz crucible from rising excessively, resulting in a gap between the quartz crucible and the water-cooling screen being too small, thereby causing the temperature between the two to rise, and ultimately affecting the normal production of crystal rods. The utility model has a simple structure, is easy to operate, and reduces the incidence of production accidents.

[0013] 2. The liquid contact rod of the utility model is threadedly connected to the mounting hole of the water cooling screen. The installation height of the liquid contact rod can be adjusted according to the process requirements, so that the equipment can meet the production requirements of crystal rods of different processes and improve the applicability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 This is a top view of the water-cooling screen of the utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the water-cooling screen of the utility model;

[0017] Figure 4 This is a schematic diagram of the internal structure of the cooling ring of the present invention.

[0018] In the figure, 1. Quartz crucible; 2. Water cooling screen; 21. Water inlet and outlet mechanism; 211. Water inlet pipe; 212. Water outlet pipe; 22. Cooling ring; 221. Stepped cooling water channel; 222. Seeding hole; 31. Mounting hole; 32. Liquid contact rod; 41. Observation hole; 51. Support ring. DETAILED DESCRIPTION

[0019] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0020] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0021] Below with reference to the embodiment and the attached Figures 1 to 4 , the technical solution of the utility model is further elaborated.

[0022] Example 1

[0023] A silicon core furnace cooling device with a liquid contact protection device comprises: a quartz crucible 1 and a water-cooling screen 2, the water-cooling screen 2 comprising a water inlet and outlet mechanism 21 and a cooling ring 22 located at the bottom end of the water inlet and outlet mechanism 21, a stepped cooling water channel 221 is provided inside the cooling ring 22, a circular array in the stepped cooling water channel 221 is provided with a plurality of groups of seeding holes 222 for accommodating crystal rods, a mounting hole 31 is provided through the cooling ring 22, a liquid contact rod 32 is provided with a threaded connection in the mounting hole 31, a working end of the liquid contact rod 32 passes through the cooling ring 22 and faces the quartz crucible 1, and its upper end is electrically connected to the control center.

[0024] like Figures 1 to 4 As shown, during the crystal pulling process, the quartz crucible 1 continues to rise under the action of the external driving mechanism to ensure that the liquid level therein and the water-cooling screen 22 always maintain a relatively stable distance. During the rising process of the quartz crucible 1, the liquid contact rod 32 provided on the water-cooling screen 22 monitors the distance between the liquid level in the quartz crucible 1 and the water-cooling screen 22 in real time. When the liquid contact rod 32 contacts the liquid level, an alarm signal is immediately issued to facilitate the process personnel to take protective measures more quickly, thereby avoiding the quartz crucible 1 from rising excessively, resulting in the gap between the quartz crucible 1 and the water-cooling screen 22 being too small, thereby causing the temperature between the two to rise, and ultimately affecting the normal production of the crystal rod. The structure is simple, the operation is convenient, and the incidence of production accidents is reduced. At the same time, the liquid contact rod 32 is threadedly connected to the mounting hole 31 of the water-cooling screen 22, and the installation height of the liquid contact rod 32 can be adjusted according to process requirements, so that the equipment can meet the production requirements of crystal rods of different processes and improve the applicability of the equipment.

[0025] The water-cooling screen 22 is provided with a winding stepped cooling water channel 221 inside to cool the crystal rod in each seeding hole 222, thereby reducing the temperature difference between the seeding holes 222 at different positions, making the diameter difference of the pulled crystal rod smaller, improving the uniformity of the crystal rod diameter, and improving the quality of the crystal rod.

[0026] As a further preferred embodiment, the water inlet and outlet mechanism 21 includes a water inlet pipe 211 and a water outlet pipe 212. The water inlet pipe 211 and the water outlet pipe 212 are symmetrically arranged on both sides of the cooling ring 22 and are connected to the stepped cooling water channel 221. Specifically, the cooling effect is further improved through the circulating cooling water channel.

[0027] As a further preferred embodiment, an observation hole 41 is provided through the cooling ring 22 to facilitate intuitive observation of the distance between the water-cooling shield 22 and the liquid level in the quartz crucible 1 .

[0028] As a further preferred embodiment, a support ring 51 is provided on the cooling ring 22. The support ring 51 is fixed to the side wall of the water inlet and outlet mechanism 21. The support ring 51 supports the equipment and improves the overall strength of the equipment.

[0029] As a further preferred embodiment, two groups of support rings 51 are provided.

[0030] As a further preferred embodiment, a thermal insulation layer is installed at the center of the cooling ring 22. The thickness of the thermal insulation layer can be adjusted according to different process conditions to improve the effect of crystal rod pulling.

[0031] The above describes in detail the preferred embodiments of the present invention. It should be understood that those skilled in the art can make numerous modifications and variations based on the concepts of the present invention without inventive effort. Therefore, any technical solutions that can be derived by those skilled in the art based on the concepts of the present invention through logical analysis, reasoning, or limited experimentation based on the existing technology should be within the scope of protection defined by the claims.

Claims

1. A silicon core furnace cooling device with a liquid contact protection device, characterized in that: include: A quartz crucible (1) and a water-cooling screen (2), wherein the water-cooling screen (2) comprises a water inlet and outlet mechanism (21) and a cooling ring (22) located at the bottom end of the water inlet and outlet mechanism (21), wherein a stepped cooling water channel (221) is provided inside the cooling ring (22), wherein a circular array is provided in the stepped cooling water channel (221) with a plurality of groups of seeding holes (222) for accommodating crystal rods, wherein a mounting hole (31) is provided through the cooling ring (22), wherein a liquid contact rod (32) is provided in a threaded connection in the mounting hole (31), wherein a working end of the liquid contact rod (32) passes through the cooling ring (22) and faces the quartz crucible (1), and wherein the upper end thereof is electrically connected to a control hub.

2. A silicon core furnace cooling device with a liquid contact protection device according to claim 1, characterized in that: The water inlet and outlet mechanism (21) comprises a water inlet pipe (211) and a water outlet pipe (212). The water inlet pipe (211) and the water outlet pipe (212) are symmetrically arranged on both sides of the cooling ring (22) and are connected to the stepped cooling water channel (221).

3. The silicon core furnace cooling device with a liquid contact protection device according to claim 1, characterized in that: An observation hole (41) is provided through the cooling ring (22).

4. The silicon core furnace cooling device with a liquid contact protection device according to claim 1, characterized in that: A support ring (51) is provided on the cooling ring (22), and the support ring (51) is fixed to the side wall of the water inlet and outlet mechanism (21).

5. The silicon core furnace cooling device with liquid contact protection device according to claim 4, characterized in that: The support rings (51) are provided in two groups.

6. The silicon core furnace cooling device with a liquid contact protection device according to claim 1, characterized in that: A heat-insulating layer is installed at the center of the cooling ring (22), and the thickness of the heat-insulating layer can be adjusted according to different process conditions.

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