Movable device for pretreatment of metal elements in gas

Abstract

The utility model discloses a movable device for pretreatment of metal elements in gas, which comprises a first pipeline used for receiving sample introduction gas and enabling the gas to circulate in the first pipeline; the sampling module comprises an absorption device and an anti-suck-back device, gas sample absorption liquid is contained in the absorption device, and gas outlet ends extend out of the absorption device and the anti-suck-back device respectively; the purging module is used for providing purging gas to purge gas existing in the first pipeline and the sampling module; the vacuumizing module is used for vacuumizing the gas in the first pipeline; the tail gas adsorption module comprises an adsorption device, is connected with the gas outlet end of the adsorption device through a pipeline and is used for carrying out adsorption treatment on gas discharged by the adsorption device; and the tail gas absorption module is used for carrying out absorption treatment on the gas discharged by the adsorption device. According to the utility model, the pretreatment operation of metal elements can be more conveniently carried out on the gas in the key process of the production process.

Description

Technical Field

[0001] The utility model relates to the technical field of gas element detection, in particular to a movable device for pre-processing metal elements in gas. Background Art

[0002] With the advancement of modern industrial technology, all walks of life have increasingly stringent requirements for product quality. Metal impurities in gases can directly affect product quality, reduce production efficiency, damage equipment performance, and even cause quality accidents and environmental pollution. Especially in the semiconductor field, the metal element content in gases needs to be strictly controlled to ppb (10 -9 ) to ppt(10 -12 )level.

[0003] However, in the existing technology, for the detection of metal elements in gas, it is necessary to send the sample to a fixed location for analysis and testing after sampling, which is time-consuming and labor-intensive. In addition, excessive or low pressure during gas filling will affect the safety of equipment and personnel. There are also safety hazards in the sample delivery process. Utility Model Content

[0004] In order to solve the defects of the prior art, the main purpose of the utility model is to provide a movable device for pre-treatment of metal elements in gas, which can more conveniently perform pre-treatment operations of metal elements on gases in key processes of the production process.

[0005] To achieve the above-mentioned purpose of the utility model, the utility model provides a movable device for pre-processing metal elements in gas, comprising:

[0006] A first pipeline is used to receive an input gas and allow the gas to flow in the first pipeline, wherein a first needle valve, a second needle valve, a first ball valve, a second ball valve and a third ball valve are provided on the pipeline;

[0007] The sampling module includes an absorption device containing a gas sample absorption liquid and an anti-backflow device connected to the absorption device, wherein a gas outlet end extends from the absorption device and the anti-backflow device respectively, and the gas outlet end of the anti-backflow device is connected to one end of the third ball valve;

[0008] a purge module connected to one end of the second needle valve through a pipeline, and configured to provide purge gas to purge the gas in the first pipeline and the sampling module;

[0009] a vacuum pumping module connected to one end of the second ball valve via a pipeline, and configured to vacuum the gas in the first pipeline;

[0010] The tail gas adsorption module includes an adsorption device connected to the gas outlet of the absorption device through a pipeline, and is used to perform adsorption treatment on the gas discharged from the absorption device;

[0011] The tail gas absorption module is connected to the gas outlet of the adsorption device through a pipeline and is used for absorbing the gas discharged by the adsorption device.

[0012] Furthermore, the first pipeline also includes a filter for removing impurities in the gas and a mass flow meter for measuring the total mass of the incoming gas.

[0013] Furthermore, one end of the first needle valve is connected to the sample gas inlet through a pipeline, and the other end is connected to one end of the first ball valve, the second ball valve and the mass flow meter through pipelines respectively. The other end of the mass flow meter is connected to one end of the third ball valve through a pipeline, the other end of the first ball valve is connected to one end of the filter through a pipeline, and the other end of the filter is connected to one end of the second needle valve through a pipeline.

[0014] Furthermore, a porous tetrafluoro ball is provided at the end of the internal inlet pipe of the absorption device.

[0015] Furthermore, the purge module includes a self-pressurized liquid nitrogen tank, and the nitrogen generated after the self-pressurized liquid nitrogen tank is gasified is used to purge the gas in the first pipeline and the sampling module, and the gas purge flow is controlled by adjusting the valve core opening size of the second needle valve.

[0016] Furthermore, the vacuum module includes a vacuum pump for vacuuming the gas in the first pipeline. The inlet end of the vacuum pump is connected to the second ball valve through a pipeline, and the outlet end of the vacuum pump is connected to the external exhaust gas treatment system through a pipeline.

[0017] Furthermore, the adsorption device is provided with adsorption material for the gas sample inside, and the adsorption device is provided with a temperature controller outside for controlling the working temperature of the adsorption material.

[0018] Furthermore, a three-way valve is arranged between the absorption device and the adsorption device, the outlet end of the absorption device is connected to the a end of the three-way valve through a pipeline, the b end of the three-way valve is connected to one end of the adsorption device through a pipeline, and the c end of the three-way valve is connected to the external exhaust gas treatment system through a pipeline.

[0019] Furthermore, the exhaust gas absorption module includes a drying tube and a container with built-in exhaust gas absorption liquid connected to the outlet of the drying tube. A fourth ball valve is arranged between the drying tube and the adsorption device. One end of the adsorption device is connected to one end of the fourth ball valve through a pipeline, and the other end of the fourth ball valve is connected to the drying tube through a pipeline.

[0020] Furthermore, the drying tube is fixed by an iron frame and is located above the container with the tail gas absorption liquid built in, and the outlet end of the drying tube is located 1-2 cm below the tail gas absorption liquid level in the container.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] The utility model provides a movable device for pre-treatment of metal elements in gas, comprising a first pipeline, a purge module, a vacuum module, a sampling module, an exhaust gas adsorption module and an exhaust gas absorption module. The device can complete the pre-treatment operation of metal elements in gas at the production process site without being restricted by spatial position, and has the advantages of simple operation, safety and reliability, convenience and speed, and time and labor saving.

[0023] In addition, the device can also be used to perform dual treatment of tail gas by adsorption and absorption methods, which can not only make the adsorption material recycled and reused, saving detection costs, but also prevent the backflow of tail gas and ensure the cleanliness of the pipeline.

[0024] Other features and advantages of the present invention will be described in detail through the following specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 The utility model provides a movable device for pre-treating metal elements in ammonia.

[0027] Marking instructions: ① is the VCR cap, ② is the first needle valve, ③ is the second needle valve, ④ is the first ball valve, ⑤ is the second ball valve, ⑥ is the third ball valve, ⑦ is the three-way valve, ⑧ is the fourth ball valve, ⑨ is the particle filter, ⑩ is the mass flow meter, For vacuum pump, For self-pressurized liquid nitrogen tank, To prevent the bottle from being sucked back, For absorption bottles, For temperature controller, For wide-mouth bottles, For adsorption device, For spherical drying tube, It is an iron stand. DETAILED DESCRIPTION

[0028] The following is a detailed description of the specific embodiments of the present invention. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present invention and are not intended to limit the present invention.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0030] Unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," and "fixed" should be interpreted broadly. For example, they may refer to fixed or removable connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.

[0031] refer to Figure 1 The utility model provides a movable device for pre-processing metal elements in gas, comprising:

[0032] A first pipeline is used to receive an input gas and allow the gas to flow in the first pipeline, wherein a first needle valve, a second needle valve, a first ball valve, a second ball valve and a third ball valve are provided on the pipeline;

[0033] The sampling module includes an absorption device containing a gas sample absorption liquid and an anti-backflow device connected to the absorption device, wherein a gas outlet end extends from the absorption device and the anti-backflow device respectively, and the gas outlet end of the anti-backflow device is connected to one end of the third ball valve;

[0034] a purge module connected to one end of the second needle valve through a pipeline, and configured to provide purge gas to purge the gas in the first pipeline and the sampling module;

[0035] a vacuum pumping module connected to one end of the second ball valve via a pipeline, and configured to vacuum the gas in the first pipeline;

[0036] The tail gas adsorption module includes an adsorption device connected to the gas outlet of the absorption device through a pipeline, and is used to perform adsorption treatment on the gas discharged from the absorption device;

[0037] The tail gas absorption module is connected to the gas outlet of the adsorption device through a pipeline and is used for absorbing the gas discharged by the adsorption device.

[0038] In the present invention, there is no special restriction on the type of applicable gas.

[0039] Preferably, the first pipeline further comprises a filter for removing impurities in the gas and a mass flow meter for measuring the total mass of the inlet gas.

[0040] In the utility model, the valve core opening of the first needle valve is adjusted to control the flow of the feed gas. The first needle valve is connected to the mass flow meter through a pipeline, wherein the mass flow meter is used to measure the total mass of the feed gas.

[0041] In some specific embodiments, when the device is not activated, the sample gas inlet may remain sealed to ensure the cleanliness of the first pipeline. For example, the sample gas inlet is sealed by a VCR cap.

[0042] In some specific embodiments, one end of the first needle valve is connected to the sample gas inlet through a pipeline, and the other end is connected to one end of the first ball valve, the second ball valve and the mass flow meter through pipelines respectively, the other end of the mass flow meter is connected to one end of the third ball valve through a pipeline, the other end of the first ball valve is connected to one end of the filter through a pipeline, and the other end of the filter is connected to one end of the second needle valve through a pipeline.

[0043] In some specific embodiments, the filter is a particle filter with built-in nanoparticles.

[0044] In the utility model, the absorption device in the sampling module is an absorption bottle, and the anti-backflow device is an anti-backflow bottle. The position of the air outlet tube of the anti-backflow bottle can be determined according to the relative density of the gas sample and nitrogen (purge gas). The interior of the absorption bottle is used to hold the absorption liquid of the gas sample; preferably, the end outlet of the inlet pipeline inside the absorption bottle is provided with a porous tetrafluoro ball, which can enable the elemental impurities in the gas to be more fully dissolved in the absorption liquid.

[0045] In some specific embodiments, the purge module includes a self-pressurized liquid nitrogen tank, and the high-purity nitrogen (5N) generated by the gasification of the self-pressurized liquid nitrogen tank is used to purge the gas in the first pipeline and the sampling module. The second needle valve adjusts the valve core opening to achieve the final effect of regulating the flow rate.

[0046] In some specific embodiments, the vacuum module includes a vacuum pump for vacuuming the gas in the first pipeline, the inlet end of which is controlled by the pipeline and the second ball valve, and the outlet end of which is connected to the external exhaust gas treatment system through the pipeline.

[0047] In some specific embodiments, the adsorption device contains an adsorbent material containing the sample, and an external temperature controller is used to adjust the operating temperature of the adsorbent material to maximize exhaust gas adsorption. After the adsorbent material is saturated multiple times, it can be sent to an external exhaust gas treatment system for desorption at elevated temperatures, allowing it to be regenerated and reused. Commonly used adsorbent materials in industry include silica gel, activated alumina, activated carbon, and molecular sieves. For example, 10X molecular sieve is used as the adsorbent for ammonia, and activated carbon is used as the adsorbent for silane.

[0048] In some specific embodiments, a three-way valve is provided between the absorption bottle and the adsorption device, the outlet end of the absorption bottle is connected to the a end of the three-way valve through a pipeline, the b end of the three-way valve is connected to one end of the adsorption device through a pipeline, and the c end of the three-way valve is connected to the exhaust gas treatment system through a pipeline.

[0049] In some specific embodiments, the exhaust gas absorption module includes a drying tube and a container with built-in exhaust gas absorption liquid. A fourth ball valve is arranged between the drying tube and the adsorption device. One end of the adsorption device is connected to one end of the fourth ball valve through a pipeline, and the other end of the fourth ball valve is connected to the drying tube through a pipeline.

[0050] In the present invention, the absorption liquid corresponding to the input gas and the tail gas absorption liquid can be the same substance, and both essentially absorb the gas. For example, in some embodiments, water is used as the absorption liquid for ammonia and the tail gas absorption liquid, and 15% KOH is used as the absorption liquid for silane and the tail gas absorption liquid.

[0051] Preferably, the drying tube is fixed by an iron frame to prevent the exhaust gas absorption liquid from being sucked back. The drying tube is located above the inside of the container containing the exhaust gas absorption liquid. The outlet end of the drying tube is located 1-2 cm below the surface of the exhaust gas absorption liquid. The exhaust gas absorption liquid can be regularly subjected to elemental analysis to determine whether the adsorption material is saturated.

[0052] Those skilled in the art will appreciate that, in order to further enhance safety performance, the overall device of the present invention may be placed in an explosion-proof cabinet.

[0053] On the other hand, the present invention also provides a method for using the above-mentioned mobile device for pre-processing metal elements in gas, comprising the following steps:

[0054] The first step is to connect the sample gas inlet to the production process sampling pipeline, and connect the outlet of the vacuum pump and the C end of the three-way valve to the tail gas treatment system. Vacuum the first pipeline and then purge it with high-purity nitrogen. Repeat the "vacuum-purge" operation 3-5 times;

[0055] The second step is to add the corresponding absorption liquid to the absorption bottle, and then add the tail gas absorption liquid to the tail gas absorption container (wide-mouth bottle), and connect it to the system;

[0056] The third step is to connect the ends a and b of the three-way valve and purge the entire system with high-purity nitrogen for 30-60 minutes to purge the residual gas in the sampling module;

[0057] The fourth step is to set the temperature of the temperature controller to the optimal adsorption temperature of the tail gas, so that the decompressed sample gas enters the absorption bottle through the first pipeline for absorption, and the sample tail gas is completely adsorbed in the adsorption device;

[0058] Step 5: Connect the ends a and c of the three-way valve and purge the entire system again with high-purity nitrogen for 30-60 minutes to allow the gas sample in the anti-backflow bottle and pipeline to enter the absorption bottle and be fully absorbed. At the same time, the carrier gas exhaust enters the exhaust gas treatment system for treatment to prevent the exhaust gas in the adsorption device from being carried out after a large amount of carrier gas is purged.

[0059] Step 6: Remove the absorption bottle and use an analytical instrument to perform quantitative analysis of the metal elements in the sample;

[0060] Step 7. Close all valves to prevent air from entering;

[0061] The eighth step is to estimate the number of uses based on the total amount of sample that the adsorption material can adsorb, conduct elemental analysis of the tail gas absorption liquid regularly, and send the adsorption material to the tail gas treatment system for temperature desorption to regenerate and reuse it, and then reconnect it to the system after regeneration.

[0062] In order to facilitate understanding by those skilled in the art, the present invention is clearly and completely described below with reference to the accompanying drawings and embodiments.

[0063] Example 1:

[0064] like Figure 1 As shown, the movable device for pre-treatment of metal elements in ammonia described in the utility model includes: ① is a VCR pipe cap, ② is a first needle valve, ③ is a second needle valve, ④ is a first ball valve, ⑤ is a second ball valve, ⑥ is a third ball valve, ⑦ is a three-way valve, ⑧ is a fourth ball valve, ⑨ is a particle filter, ⑩ is a mass flow meter, For vacuum pump, For self-pressurized liquid nitrogen tank, To prevent the bottle from being sucked back, For absorption bottles, For temperature controller, For wide-mouth bottles, For adsorption device, For spherical drying tube, It is an iron stand.

[0065] The VCR pipe cap ① plays the role of sealing the pipeline. One end of the first needle valve ② is connected to one end of the sleeve pipe cap ① through a pipeline, and the other end is connected to one end of the first ball valve ④, the second ball valve ⑤ and the mass flow meter ⑩ through pipelines. The other end of the second needle valve ③ is connected to the vacuum pump through a pipeline. The inlet end is connected to the vacuum pump The outlet end is connected to the exhaust gas treatment system through a pipeline. The other end of the first ball valve ④ is connected to one end of the 3nm particle filter ⑨ through a pipeline. The other end of the particle filter ⑨ is connected to one end of the second needle valve ③ through a pipeline. The other end of the second needle valve ③ is connected to the self-pressurized liquid nitrogen tank. Connected, self-pressurized liquid nitrogen tank The other end of the mass flow meter ⑩ is connected to one end of the third ball valve ⑥ through a pipeline, and the other end of the third ball valve ⑥ is connected to the anti-backflow bottle through a pipeline. The inlet end is connected to the anti-backflow bottle The air inlet end is located at the top, and the air outlet end is located at A and is connected to the absorption bottle through a pipe. The inlet end is connected to the absorption bottle The outlet end of the gas is connected to the a end of the three-way valve ⑦ through a pipeline, and the b end of the three-way valve ⑦ is connected to the adsorption device containing 10X molecular sieve through a pipeline. The end of the three-way valve ⑦ is connected to the tail gas treatment system through a pipeline, where the adsorption device Through the temperature controller Temperature control, adsorption device The other end of the fourth ball valve is connected to one end of the fourth ball valve ⑧ through a pipeline, and the other end of the fourth ball valve ⑧ is connected to the ball drying pipe through a pipeline. connected, including spherical drying tube Through the iron stand Fixing can prevent the tail gas absorption liquid from being sucked back into the adsorption device It is located above the inside of the wide-mouth bottle containing the exhaust gas absorption liquid, and its outlet end is located 1-2 cm below the exhaust gas absorption liquid surface. Elemental analysis of the exhaust gas absorption liquid is performed regularly to determine whether the adsorption material is saturated.

[0066] The pretreatment process of metal elements in ammonia is carried out according to the following steps, wherein the valve state in the figure is the initial closed state:

[0067] The first step is to remove the VCR cap ①, connect the sampling line to the production process sampling line, connect the outlet end of the vacuum pump and the C end of the three-way valve to the exhaust gas treatment system, open the first needle valve ②, the first ball valve ④, the second ball valve ⑤ and the vacuum pump , vacuum the first pipeline, and then close the second ball valve⑤;

[0068] Step 2: Open the second needle valve ③ and adjust the self-pressurized liquid nitrogen tank The pressure is adjusted to about 0.2 bar, and the high-purity nitrogen after gasification passes through the 3nm particle filter ⑨ to purge the first pipeline. After completion, close the second needle valve ③;

[0069] Step 3: Repeat steps 1 and 2 for 3 times;

[0070] Step 4: Add water to the absorption bottle Pour 700mL of ultrapure water into the wide-mouth bottle. Inject 300mL of ultrapure water into the absorption bottle and and wide-mouthed jars Connect to the system;

[0071] Step 5: Open the third ball valve ⑥ and the fourth ball valve ⑧, and adjust the three-way valve ⑦ to connect ends a and b. Open the second needle valve ③ to allow the vaporized high-purity nitrogen to continuously purge the entire system for 30 minutes to purge the residual gas in the sampling module. After completion, close the first ball valve ④.

[0072] Step 6: Set the temperature controller The temperature is set at 30°C, and the ammonia sample is introduced at a flow rate of 300 mL / min at a volume of about 20 L, and enters the absorption bottle through the first pipeline. After the absorption is completed, record the reading of the mass flow meter ⑩, and then Complete tail gas adsorption in the process;

[0073] Step 7: Adjust the three-way valve ⑦ to connect ends a and c, open the first ball valve ④, and use high-purity nitrogen to continuously purge the first pipeline and sampling device for 30 minutes. After completion, close all valves;

[0074] Step 8: Remove the absorption bottle , using analytical instruments to quantitatively analyze the metal elements in ammonia samples;

[0075] Step 9: Seal the sampling pipe inlet with a VCR cap to prevent air from entering.

[0076] In the tenth step, after the adsorption material (62 g 10X molecular sieve) has been used 10 times, the tail gas absorption liquid is subjected to elemental analysis, and the adsorption material is sent to the tail gas treatment system for temperature desorption at 90°C to regenerate it for reuse, and then reconnected to the system after regeneration.

[0077] Example 2:

[0078] like Figure 1As shown, the movable device for pre-treatment of metal elements in silane described in the utility model includes: ① is a VCR pipe cap, ② is a first needle valve, ③ is a second needle valve, ④ is a first ball valve, ⑤ is a second ball valve, ⑥ is a third ball valve, ⑦ is a three-way valve, ⑧ is a fourth ball valve, ⑨ is a particle filter, ⑩ is a mass flow meter, For vacuum pump, For self-pressurized liquid nitrogen tank, To prevent the bottle from being sucked back, For absorption bottles, For temperature controller, For wide-mouth bottles, For adsorption device, For spherical drying tube, It is an iron stand.

[0079] The VCR pipe cap ① plays the role of sealing the pipeline. One end of the first needle valve ② is connected to one end of the sleeve pipe cap ① through a pipeline, and the other end is connected to one end of the first ball valve ④, the second ball valve ⑤ and the mass flow meter ⑩ through pipelines. The other end of the second needle valve ③ is connected to the vacuum pump through a pipeline. The inlet end is connected to the vacuum pump The outlet end is connected to the exhaust gas treatment system through a pipeline. The other end of the first ball valve ④ is connected to one end of the 3nm particle filter ⑨ through a pipeline. The other end of the particle filter ⑨ is connected to one end of the second needle valve ③ through a pipeline. The other end of the second needle valve ③ is connected to the self-pressurized liquid nitrogen tank. Connected, self-pressurized liquid nitrogen tank The other end of the mass flow meter ⑩ is connected to one end of the third ball valve ⑥ through a pipeline, and the other end of the third ball valve ⑥ is connected to the anti-backflow bottle through a pipeline. The inlet end is connected to the anti-backflow bottle The air inlet end is located at the top, and the air outlet end is located at B and is connected to the absorption bottle through a pipe. The inlet end is connected to the absorption bottle The outlet end of the gas is connected to the a end of the three-way valve ⑦ through a pipeline, and the b end of the three-way valve ⑦ is connected to the adsorption device containing activated carbon through a pipeline. The end of the three-way valve ⑦ is connected to the tail gas treatment system through a pipeline, where the adsorption device Through the temperature controller Temperature control, adsorption device The other end of the fourth ball valve is connected to one end of the fourth ball valve ⑧ through a pipeline, and the other end of the fourth ball valve ⑧ is connected to the ball drying pipe through a pipeline. connected, including spherical drying tube Through the iron stand Fixing can prevent the tail gas absorption liquid from being sucked back into the adsorption device It is located above the inside of the wide-mouth bottle containing the exhaust gas absorption liquid, and its outlet end is located 1-2 cm below the exhaust gas absorption liquid surface. Elemental analysis of the exhaust gas absorption liquid is performed regularly to determine whether the adsorption material is saturated.

[0080] The pretreatment process of metal elements in silane is carried out according to the following steps, wherein the valve state in the figure is the initial closed state:

[0081] The first step is to remove the VCR cap ①, connect the sampling line to the production process sampling line, connect the outlet end of the vacuum pump and the C end of the three-way valve to the exhaust gas treatment system, open the first needle valve ②, the first ball valve ④, the second ball valve ⑤ and the vacuum pump , vacuum the first pipeline, and then close the second ball valve⑤;

[0082] Step 2: Open the second needle valve ③ and adjust the self-pressurized liquid nitrogen tank The pressure is adjusted to about 0.2 bar, and the high-purity nitrogen after gasification passes through the 3nm particle filter ⑨ to purge the first pipeline. After completion, close the second needle valve ③;

[0083] Step 3: Repeat steps 1 and 2 for 3 times;

[0084] Step 4: Add water to the absorption bottle Pour 700mL of 15% KOH solution into the wide-mouth bottle. Inject 300mL of 15% KOH solution into the absorption bottle and and wide-mouthed jars Connect to the system;

[0085] Step 5: Open the third ball valve ⑥ and the fourth ball valve ⑧, and adjust the three-way valve ⑦ to connect ends a and b. Open the second needle valve ③ to allow the vaporized high-purity nitrogen to continuously purge the entire system for 30 minutes to purge the residual gas in the sampling module. After completion, close the first ball valve ④.

[0086] Step 6: Set the temperature controller The temperature is set at 40°C, and the silane sample is introduced at a flow rate of 300 mL / min into the absorption bottle through the first pipeline. After the absorption is completed, record the reading of the mass flow meter ⑩, and then Complete tail gas adsorption in the process;

[0087] Step 7: Adjust the three-way valve ⑦ to connect ends a and c, open the first ball valve ④, and use high-purity nitrogen to continuously purge the first pipeline and sampling device for 30 minutes. After completion, close all valves;

[0088] Step 8: Remove the absorption bottle , using analytical instruments to quantitatively analyze the metal elements in ammonia samples;

[0089] Step 9: Seal the sampling pipe inlet with a VCR cap to prevent air from entering.

[0090] In the tenth step, after the adsorption material (52g activated carbon) is used five times, the tail gas absorption liquid is subjected to elemental analysis, and the adsorption material is sent to the tail gas treatment system for temperature desorption at 160°C to regenerate it for reuse, and then reconnected to the system after regeneration.

[0091] In the above embodiments 1-2, the anti-backflow bottle Whether the outlet is at A or B depends on the density of the feed gas and nitrogen. If the density of the feed gas is less than the density of nitrogen, the outlet is at A; otherwise, it is at B.

[0092] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the implementation methods of the present invention. Those skilled in the art will readily appreciate that other variations or modifications based on the above description are possible. It is not possible to enumerate all implementation methods here. Any obvious variations or modifications arising from the technical solution of the present invention are intended to fall within the spirit and scope of the present invention.

Claims

1. A mobile device for pre-treatment of metal elements in gas, characterized by: include: A first pipeline is used to receive an input gas and allow the gas to flow in the first pipeline, wherein a first needle valve, a second needle valve, a first ball valve, a second ball valve and a third ball valve are provided on the pipeline; The sampling module includes an absorption device containing a gas sample absorption liquid and an anti-backflow device connected to the absorption device, wherein a gas outlet end extends from the absorption device and the anti-backflow device respectively, and the gas outlet end of the anti-backflow device is connected to one end of the third ball valve; a purge module connected to one end of the second needle valve through a pipeline, and configured to provide purge gas to purge the gas in the first pipeline and the sampling module; a vacuum pumping module connected to one end of the second ball valve via a pipeline, and configured to vacuum the gas in the first pipeline; The tail gas adsorption module includes an adsorption device connected to the gas outlet of the absorption device through a pipeline, and is used to perform adsorption treatment on the gas discharged from the absorption device; The tail gas absorption module is connected to the gas outlet of the adsorption device through a pipeline and is used for absorbing the gas discharged by the adsorption device.

2. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: The first pipeline also includes a filter for removing impurities in the gas and a mass flow meter for measuring the total mass of the inlet gas.

3. The mobile device for pre-treatment of metal elements in gas according to claim 2, characterized in that: One end of the first needle valve is connected to the sample gas inlet through a pipeline, and the other end is connected to the first ball valve, the second ball valve and one end of the mass flowmeter through pipelines respectively. The other end of the mass flowmeter is connected to one end of the third ball valve through a pipeline, the other end of the first ball valve is connected to one end of the filter through a pipeline, and the other end of the filter is connected to one end of the second needle valve through a pipeline.

4. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: A porous tetrafluoro ball is arranged at the end of the internal inlet pipeline of the absorption device.

5. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: The purge module includes a self-pressurized liquid nitrogen tank. The nitrogen generated after the self-pressurized liquid nitrogen tank is gasified is used to purge the gas in the first pipeline and the sampling module. The gas purge flow rate is controlled by adjusting the valve core opening size of the second needle valve.

6. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: The vacuum pump module includes a vacuum pump for vacuuming the gas in the first pipeline. The inlet end of the vacuum pump is connected to the second ball valve through a pipeline, and the outlet end of the vacuum pump is connected to the external exhaust gas treatment system through a pipeline.

7. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: The adsorption device is provided with adsorption material for the gas sample inside, and the adsorption device is provided with a temperature controller outside for controlling the working temperature of the adsorption material.

8. The mobile device for pre-treatment of metal elements in gas according to claim 1 or 7, characterized in that: A three-way valve is arranged between the absorption device and the adsorption device. The outlet end of the absorption device is connected to the a end of the three-way valve through a pipeline, the b end of the three-way valve is connected to one end of the adsorption device through a pipeline, and the c end of the three-way valve is connected to the external exhaust gas treatment system through a pipeline.

9. The mobile device for pre-treatment of metal elements in gas according to claim 1, characterized in that: The tail gas absorption module includes a drying pipe and a container with built-in tail gas absorption liquid connected to the outlet of the drying pipe. A fourth ball valve is arranged between the drying pipe and the adsorption device. One end of the adsorption device is connected to one end of the fourth ball valve through a pipeline, and the other end of the fourth ball valve is connected to the drying pipe through a pipeline.

10. The mobile device for pre-treatment of metal elements in gas according to claim 9, characterized in that: The drying tube is fixed by an iron frame and is located above a container with built-in tail gas absorption liquid. The outlet end of the drying tube is located 1-2 cm below the tail gas absorption liquid level in the container.

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