Clamp for wafer-level optical element product

Abstract

A clamp for a wafer-level optical element product comprises a supporting ring (1) used for carrying out outer ring suspension supporting on the product, a fixing claw (3) used for clamping and fixing the edge of the product in a small area, and a force unloading connecting mechanism (2) used for dispersing force. The group of fixing claws (3) are distributed in the supporting ring (1) in a circle and are connected with the supporting ring (1) through the corresponding group of force unloading connecting mechanisms (2), the clamping device adopts an edge small-range clamping and suspension supporting mode, interference of a clamp on a product is avoided as much as possible, enough space is reserved for an optical element for testing, and the testing efficiency is improved. The optical element can be attached to the sample; moreover, the fixing claws are connected with the supporting ring through the corresponding force unloading connecting mechanisms, the force unloading connecting mechanisms help to clamp and fix the product, meanwhile, the force acting on the product in the thickness direction is reduced, wafer warping caused by machining errors is avoided, and the machining tolerance of the clamp is improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer-level optics, in particular to a fixture for wafer-level optical element products. Background Art

[0002] Wafer-level optics (WLO) is an advanced technology that combines semiconductor manufacturing processes with optical design, primarily used to manufacture small, high-performance optical components. Unlike traditional semiconductor products, the inspection of these optical components relies heavily on measuring transmitted light. Furthermore, these products are more sensitive to stress applied to the wafer. Reducing the clamping area, minimizing the light-blocking area, and reducing the forces applied to the wafer that can cause deformation are particularly critical.

[0003] Existing wafer clamping devices generally consist of two annular clamping rings with positioning grooves. The wafer is placed between the two clamping rings and the two clamping rings and the wafer are fixed together by bolts / clamps. Alternatively, a center-supported edge clamping solution is adopted, as shown in application publication number CN 102569154A, which includes a base plate, positioning posts, etc., and the wafer is clamped in the middle by the base plate with positioning posts on both sides.

[0004] Traditional solutions often obstruct a large area of ​​the wafer, and there is interference between the optical components and the fixture, making it difficult to achieve good detection results. Furthermore, a certain thickness limits the light output angle of the device under test, affecting the detection of devices at the wafer edge or in obscured areas. This limits the number of devices that can be inspected on a single wafer. Furthermore, traditional fixtures have high requirements for machining flatness. If the fixture itself has low flatness, it will exert a force perpendicular to the wafer, affecting the wafer's parallelism and, consequently, the device's optical performance.

[0005] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Utility Model Content

[0006] The technical problem to be solved by the present invention is to provide a fixture for wafer-level optical element products in response to the above-mentioned problems in the prior art such as large-area obstruction of optical products on the wafer, interference between the detection optical elements and the fixture, limited light output angle, and influence on the parallelism of the wafer.

[0007] The technical solution adopted by the present invention to solve the technical problem is to construct a fixture for wafer-level optical component products, which is used to clamp the products for optical testing. The fixture includes: a support ring for suspending the outer ring of the product, a fixing claw for clamping and fixing the edge of the product in a small area, and a force-releasing connection mechanism for dispersing force;

[0008] A group of the fixing claws are distributed in a circle inside the support ring and are connected to the support ring through a corresponding group of the force-releasing connection mechanisms. The force-releasing connection mechanisms can swing slightly in the first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping; wherein, the first direction refers to the direction perpendicular to the circumference of the support ring.

[0009] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the force unloading connection mechanism includes an arc-shaped force unloading beam connected to the inner side of the support ring at one end and connected to one of the fixed claws at the other end; the support ring and the force unloading beam connected thereto are coplanar with the fixed claw.

[0010] Furthermore, in the fixture for wafer-level optical component products of the present invention, a plurality of notches are provided on the inner side of the support ring, and the plurality of notches correspond to the plurality of force-releasing connection mechanisms;

[0011] In which, the unloading connection mechanism is composed of a single unloading beam, the unloading beam is located in the notch, the extension direction of the unloading beam is consistent with the extension direction of the support ring, and the inner arc line of the unloading beam is also continuous with the inner arc line of the support ring; or, the unloading connection mechanism is composed of a pair of unloading beams, a pair of the unloading beams are arranged at the notch along the extension direction of the support ring, and the pair of the unloading beams are also arranged opposite to each other and are commonly connected to the same fixed claw.

[0012] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the force unloading connection mechanism is composed of a pair of force unloading beams, and the force unloading beams extend from the position connected to the support ring along the extension direction of the support ring or extend in a direction gradually deviating from the support ring, and the pair of force unloading beams extend until they gradually approach each other and the extended ends are jointly connected to the same fixed claw.

[0013] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the fixing claw is in a "human" shaped structure, the first end and the second end of the fixing claw are respectively connected and fixed to the extended ends of a pair of the unloading beams, and the third end of the fixing claw is used to fix the edge of the product.

[0014] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, a first reinforcing rib protrudes from the side of the fixing claw facing away from the product, the first end and the second end of the fixing claw are distributed on both sides of the first reinforcing rib and are symmetrical relative to the first reinforcing rib, and the first reinforcing rib is also inclined and extends toward both sides of the first reinforcing rib near the third end to form a second reinforcing rib, and the second reinforcing rib is in a "V" shape with the opening facing the third end.

[0015] Furthermore, in the fixture for wafer-level optical element products described in the present invention, positioning columns and / or positioning edges are provided on the inner side of the support ring or the fixing claws for matching and contacting with the edge of the product to achieve positioning of the product.

[0016] Furthermore, the fixture for wafer-level optical component products of the present invention further includes an auxiliary support device for supporting the support ring, wherein the auxiliary support device includes a main fixing rod and two auxiliary fixing rods, wherein the main fixing rod and the auxiliary fixing rods are arranged parallel to each other and the central axis thereof is coplanar with the support ring;

[0017] The support ring is connected to a fixing seat on the outer side of the support ring at a position corresponding to the positioning edge thereof, and the main fixing rod points to the center of the support ring and is detachably assembled and fixed to the fixing seat;

[0018] The outer side of the support ring also extends in opposite directions to form two symmetrical connecting arms, the extension direction of the connecting arms is perpendicular to the extension direction of the main fixing rod, the two auxiliary fixing rods and the two connecting arms are detachably assembled and fixed, the main fixing rod is located between the two auxiliary fixing rods and the three are flush with the end away from the support ring.

[0019] Furthermore, in the fixture for wafer-level optical component products of the present invention, there are two support rings, and each support ring is configured with a set of the force-releasing connection mechanism and a set of the fixing claws;

[0020] The two support rings are assembled with each other in the first direction and then locked by a locking piece. The first support ring is connected to the auxiliary support device; the two groups of the force unloading connection mechanisms are assembled with each other in the first direction; the two groups of the fixing claws are assembled with each other in the first direction, and the group of fixing claws corresponding to the first support ring are all protruding with positioning columns for abutting against the side of the product, and all the positioning columns jointly hold the circumferential side wall of the product to position the product, and the group of fixing claws corresponding to the second support ring are provided with positioning holes that cooperate with the positioning columns.

[0021] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the number of the support ring is one, and the support ring is equipped with a group of the force-unloading connection mechanism and a group of the fixing claws. The group of the fixing claws equipped with the support ring is also combined with another group of the fixing claws to form a clamp-shaped structure to fix the product. The group of the fixing claws equipped with the support ring is protruding with a positioning column for abutting against the side of the product, and the other group of the fixing claws is provided with a positioning hole that cooperates with the positioning column. The two groups of the fixing claws are fastened by a locking member after being aligned and combined based on the positioning column and the positioning hole.

[0022] The fixture for wafer-level optical element products of the present invention has the following beneficial effects: the present invention utilizes a support ring to perform outer ring suspension support on the product, and utilizes a plurality of fixed claws distributed in a circle inside the support ring to clamp and fix the edge of the product in a small area. In this way, a small-area clamping of the edge is adopted to avoid interference of the fixture with the product as much as possible, leaving enough space for the optical elements used for testing, and the optical elements can be close to the sample; and these fixed claws are each connected to the support ring through a corresponding force-unloading connection mechanism, and the force-unloading connection mechanism can swing slightly in a direction perpendicular to the plane of the support ring based on elastic deformation, so as to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the fixture can be adaptively fitted, avoiding wafer warping caused by processing errors, and improving the processing tolerance of the fixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only embodiments of the present invention. Those skilled in the art can obtain other drawings based on the provided drawings without inventive work.

[0024] Figure 1 This is an exploded view of the clamp of Example 1 of the present utility model;

[0025] Figure 2 This is a schematic diagram of the clamp fixing a product according to the first embodiment of the present invention;

[0026] Figure 3 This is an exploded view of the clamp of the second embodiment of the present utility model;

[0027] Figure 4 This is a schematic diagram of a clamp fixing a product according to the second embodiment of the present invention;

[0028] Figure 5 This is an exploded view of the clamp of the third embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram of a clamp fixing a product according to the third embodiment of the present invention;

[0030] Figure 7 is a schematic structural diagram of the fixing claw of the clamp in Example 3;

[0031] Among them, the reference numerals in the figures are:

[0032] 1. Support ring; 2. Unloading connection mechanism; 3. Fixing claw; 11. Positioning edge; 31. Positioning column; 32. Positioning hole; 4. Main fixing rod; 5. Auxiliary fixing rod; 6. Connector; 100. Product; 3a. First end of the fixing claw; 3b. Second end of the fixing claw; 3c. Third end of the fixing claw; 33. First reinforcing rib; 34. Second reinforcing rib. DETAILED DESCRIPTION

[0033] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be given below with reference to the relevant drawings. Typical embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solutions of the present application, rather than limitations on the technical solutions of the present application. In the absence of conflict, the embodiments of the present invention and the technical features in the embodiments can be combined with each other.

[0034] Example 1

[0035] refer to Figure 1-2 The fixture of the wafer-level optical element product 100 of the present invention is used to clamp the product 100 for optical testing. The fixture of this embodiment includes: a support ring 1, a fixed claw 3, and a force-unloading connection mechanism 2. The support ring 1 is used to provide outer ring suspension support for the product. The fixed claw 3 is used to fix the edge of the product, and the force-unloading connection mechanism 2 is used to connect the support ring 1 and the fixed claw 3. The general idea of ​​the present invention is to use the support ring 1 to provide outer ring suspension support for the product 100, use a small number of fixed claws 3 to clamp and fix the edge of the product 100 in a small area, and connect the fixed claw 3 and the support ring 1 through the force-unloading connection mechanism 2 to disperse the force, thereby achieving adaptive clamping of the product 100 and making the product 100 more stable.

[0036] refer to Figure 2The product 100 is suspended and fixed inside the support ring 1. The support ring 1 has the same shape as the product 100, but is larger in size. For example, in this embodiment, the product 10 is circular and the support ring 1 is annular, and the inner diameter of the support ring 1 is larger than the outer diameter of the product 100. It is understood that the shape of the product 100 is not limited to the circular shape shown in this embodiment, and can also be other non-circular shapes, such as rectangular, square, etc.

[0037] A set of fixed claws 3 are evenly / symmetrically distributed in a circle within the support ring 1. This embodiment uses four fixed claws 3, but the number of fixed claws 3 is not limited and can be adjusted based on actual product requirements. The arrangement of the fixed claws 3 within the support ring 1 can be designed to align with the shape of the support ring 1. For example, if the support ring 1 is circular, the fixed claws 3 can be arranged in a circular circle. When the number of fixed claws 3 is large, especially for non-circular products, this arrangement of fixed claws 3 can ensure maximum clamping stability.

[0038] In this embodiment, in order to improve the processing tolerance of the clamp and avoid product warping, a group of the fixed claws 3 inside the support ring 1 is configured with a group of the unloading connection mechanisms 2. The fixed claws 3 inside the support ring 1 are each connected to the support ring 1 through a corresponding one of the unloading connection mechanisms 2. The support ring 1 and the unloading beam and fixed claws 3 connected thereto are coplanar and can be integrally formed. The unloading connection mechanism 2 can swing slightly in the first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting in the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping. The first direction refers to the direction perpendicular to the circumference of the support ring 1, that is, the thickness direction of the product 100 after the clamp clamps the product 100.

[0039] In this embodiment, the fixing claw 3 is roughly disc-shaped and coplanar with the support ring 1. Of course, the shape of the fixing claw 3 is not limited to this, and any shape can be used as long as it can achieve a small area of ​​product clamping. The side of the fixing claw 3 that contacts the product 100 is provided with protruding positioning posts 31. The position of each positioning post 31 must meet the following conditions: a group of positioning posts 31 on the fixing claw 3 inside the support ring 1 can collectively embrace the circumferential side wall of the product 100 to position the product 100.

[0040] Theoretically, the unloading connection mechanism 2 can be a beam of different shapes, or combined with a spring mechanism, as long as it meets the requirements of connecting the support ring 1 and the fixed claw 3, and based on elastic deformation, it can swing slightly in the first direction to reduce the force of bending the wafer. In this embodiment, it is preferred that each of the unloading connection mechanisms 2 includes a single arc-shaped unloading beam with one end connected to the inner side of the support ring 1 and the other end connected to one of the fixed claws 3, and the unloading beam, the fixed claw 3, and the support ring 1 are coplanar. Specifically, the inner side of the support ring 1 is provided with a plurality of slender arc-shaped notches along the extension direction of the support ring 1, and the plurality of notches correspond to the plurality of unloading connection mechanisms 2. The unloading beam is located in the notch, one end of the unloading beam is integrally connected to the extension starting end of the notch, and the other end of the unloading beam is integrally connected to the fixing claw 3. The extension direction of the unloading beam is consistent with the extension direction of the support ring 1, and the inner arc line of the unloading beam is also continuous with the inner arc line of the support ring 1. In this way, the elasticity of the unloading beam in the thickness direction of the product 100 can be improved, and the force in the planar direction of the product 100 can be minimized.

[0041] After the product 100 is positioned and clamped by the positioning column 31, in order to fix the product more firmly, in this embodiment, each fixing claw 3 is also configured with a fixing claw 3 that is spliced ​​with it. Specifically, in this embodiment, the number of the support rings 1 is two, and each support ring 1 is configured with a set of the force-releasing connection mechanism 2 and a set of the fixing claws 3. The two support rings 1 are consistent in shape and size, except that one of the support rings 1 also needs to be connected to an auxiliary support device. The force-releasing connection mechanism 2 and the fixing claws 3 connected to the two support rings 1 are consistent in shape and size, except that the fixing claws 3 on the support ring 1 connected to the auxiliary support device are protruding with positioning columns 31 for abutting against the side of the product. All the positioning columns 31 together hold the circumferential side wall of the product to position the product, and the fixing claws 3 corresponding to the other support ring 1 are provided with positioning holes 32 that cooperate with the positioning columns 31. The two support rings 1 are assembled together in the first direction and locked by a locking piece, the two sets of the unloading connection mechanisms 2 are assembled together in the first direction, the two sets of the fixing claws 3 are assembled together in the first direction and the positioning column 31 is inserted into the positioning hole 32.

[0042] It should be noted that in most cases, the wafer will have a positioning edge or a positioning groove as an identification feature to indicate the direction and certain characteristics of the wafer. Generally, a four-inch wafer uses a positioning edge, and an eight-inch wafer uses a positioning groove. The circumferential side wall of the product 100 in this embodiment has a positioning edge, that is, the product 100 is not a complete circle, but has a straight cut edge as a positioning edge. Therefore, accordingly, the inner side of the support ring 1 in this embodiment is also provided with a positioning edge 11 that matches and contacts the positioning edge of the product. In other embodiments, the positioning edge 11 can also be provided on the fixing claw 3.

[0043] It should be noted that although the positioning posts 31 are provided on the surface of the fixing claws 3 and protrude beyond the plane of the fixing claws 3 in this embodiment, in other embodiments, the positioning posts 31 may also be provided on the support ring 1 and placed on the inner side of the support ring 1. The positioning posts 31 may also be replaced by the positioning edges 11 for different wafers or different wafer placement orientations.

[0044] In this embodiment, the auxiliary support device includes a main fixing rod 4 and two auxiliary fixing rods 5. The main fixing rod 4 and the auxiliary fixing rods 5 are arranged in parallel, and their central axes are coplanar with the diameter of the support ring 1. The two auxiliary fixing rods 5 are longer, and the main fixing rod 4 is shorter and is located between the two auxiliary fixing rods 5.

[0045] The support ring 1 is connected to a fixing seat 12 on the outside of the position corresponding to the positioning edge 11 thereof. The main fixing rod 4 points to the center of the support ring 1 and is detachably assembled and fixed with the fixing seat 12. For example, the two can be plugged in and then locked by screws, or the two can be directly connected by threads. The specific connection method is not limited.

[0046] The outer side of the support ring 1 further extends in opposite directions to form two symmetrical connecting arms 13. The extending direction of the connecting arms 13 is perpendicular to the extending direction of the main fixing rod 4. The two auxiliary fixing rods 5 are detachably assembled and fixed to the two connecting arms 13 via two connecting heads 6. For example, the connecting head 6 can be provided with a pair of fixing ears, and the connecting arms 13 can be inserted between the pair of fixing ears of the connecting head 6 and locked with bolts. The connecting head 6 and the auxiliary fixing rods 5 can be plugged in and locked with screws, or they can be directly connected by threads.

[0047] The main fixing rod 4 is positioned between the two auxiliary fixing rods 5, and all three are flush with the distal end of the support ring 1. "Flush" here means that the distal ends of the three fixing rods 5 are aligned in a straight line perpendicular to their extension. Because the auxiliary support device does not obstruct the optical path, the product 100 can be tested upright (of course, it can also be tested horizontally or even tilted). Furthermore, the positioning edge 11 provides support at the very bottom of the product, reducing the burden on the other fixing claws 3.

[0048] In this embodiment, the fixing claws 3 within the support ring 1 are symmetrically distributed on both sides of the first diameter of the support ring 1 and also symmetrically distributed on both sides of the second diameter of the support ring 1. The first diameter refers to the diameter colinear with the main fixing rod 4, and the second diameter is perpendicular to the first diameter. The two connecting arms 13 are also symmetrically distributed on both sides of the first diameter, and the two connecting arms 13 and the fixing seat 12 are distributed on both sides of the second diameter. If the position corresponding to the support ring 1 and the fixing seat 12 is recorded as the bottom, then the two connecting arms 13 are as close to the top of the support ring 1 as possible.

[0049] Of course, the auxiliary support device of this embodiment is only an example, and other structural designs can also be used to achieve the purpose of stably supporting the wafer, as long as the auxiliary support device avoids the internal area of ​​the support ring 1, that is, the projection of the auxiliary support device on the plane of the support ring 1 avoids the interior of the support ring 1 and falls outside the support ring 1.

[0050] This embodiment can realize the optical testing of wafers with micro-nano optical elements or other wafers that require similar optical testing. In combination with the auxiliary support device, the wafer can be stably erected to perform optical testing on each device or area. This embodiment adopts the structure of the outer ring suspension support of the external support ring 1 and the finger-shaped clamping scheme of the internal fixed claw 3, which reduces the blocked area of ​​the wafer surface, can effectively reduce the interference with the test optical elements and the blockage of the optical path of the optical component being tested, can increase the number of devices that can be processed and tested on a single wafer, and can make the test device as close to the device as possible, thereby improving the accuracy of the test. In addition, this embodiment adopts a force unloading connection mechanism 2 to connect, which removes the force applied to the wafer to cause it to bend while fixing the wafer, reducing the requirements for the processing flatness and parallelism of the device, and ensuring that when the processing flatness and parallelism are low, there is less interference with the warping degree of the wafer itself, thereby ensuring the accuracy of the optical test. In view of this, the fixture of the present invention has low requirements for the raw materials to be processed, and can be any material with a certain structural rigidity, but the surface can be processed smooth without scratching the wafer, such as commonly used materials: steel, aluminum alloy, Teflon, synthetic resin, etc.

[0051] Example 2

[0052] refer to Figure 3-4In the first embodiment, the outer ring support ring 1 has two pieces that are aligned and spliced ​​together, the unloading connection mechanism 2 is in two groups, and the fixed claws 3 are in two groups. However, in this embodiment, there is only one support ring 1, and the corresponding unloading connection mechanism 2 only requires one group. The fixed claws 3 are in two groups, and the two groups of fixed claws 3 are also spliced ​​together. The first group of fixed claws 3 is still connected to the support ring 1 through the unloading connection mechanism 2. The first group of fixed claws 3 is provided with protruding positioning posts 31, and the second group of fixed claws 3 has positioning holes that match the positioning posts 31. The difference is that in the design of the single-piece support ring 1 of this embodiment, because the second group of fixed claws 3 has no support ring 1 and unloading connection mechanism 2 to attach to, it is considered to design the fastening point of the second group of fixed claws 3 on the first group of fixed claws 3 or at the connection between the first group of fixed claws 3 and the unloading connection mechanism 2. For example, in this embodiment, two groups of fixed claws 3 are spliced ​​and locked as a whole to form a clamp-like structure to fix the edge of the product. In this embodiment, after the second set of fixing claws 3 are positioned and assembled with the first set of fixing claws 3 through the positioning columns 31 and the positioning holes 32 , they are fastened to the first set of fixing claws 3 through locking members (such as screws).

[0053] Example 3

[0054] refer to Figure 5-6 This embodiment, like the second embodiment, also comprises a single support ring 1, a single unloading connection mechanism 2, and two sets of fixed claws 3. Unlike the previous two embodiments, the unloading connection mechanism 2 in this embodiment is comprised of a pair of unloading beams, arranged along the extension direction of the support ring 1 at the notch. The pair of unloading beams are also disposed facing each other and are connected to the same fixed claw 3. Of course, it is understood that the configuration of the unloading connection mechanism 2 consisting of a pair of unloading beams can also be implemented with two support rings 1, two sets of unloading connection mechanisms 2, and two sets of fixed claws 3, as in the first embodiment.

[0055] Specifically, in this embodiment, the notch of the support ring 1 also extends along the extension direction of the support ring 1. In this embodiment, the first end of the first unloading beam is integrally connected to the extension starting end of the notch of the support ring 1, and the first end of the second unloading beam is integrally connected to the extension ending end of the notch of the support ring 1. The two unloading beams extend from the position where they are connected to the notch in a direction gradually deviating from the support ring 1 (in other embodiments, they can also extend along the extension direction of the support ring 1). The two unloading beams extend until they gradually approach each other in an "eight" shape. The second ends of the two unloading beams (that is, the extension ends of the unloading beams mentioned in this article) are jointly connected to the same fixed claw 3. The fixed claw 3 is coplanar with the two unloading beams and a positioning column 31 is also protruding on the surface. The other fixed claw 3 spliced ​​with the fixed claw 3 has a positioning hole 32. The two fixed claws 3 are positioned and spliced ​​together by the positioning column 31 and the positioning hole 32 and then locked by a locking member.

[0056] Preferably, reference Figure 7 In this embodiment, the fixing claw 3 has a herringbone-shaped structure. The first end 3a and the second end 3b of the fixing claw 3 are respectively connected and fixed to the extended ends of a pair of the unloading beams. This connection can be integral, or slots can be provided at the edges of the first end 3a and the second end 3b of the fixing claw 3, allowing the extended ends of the unloading beams to be inserted into the slots and then secured via a locking member. The third end 3c of the fixing claw 3 is used to secure the edge of the product 100.

[0057] Further preferably, a first reinforcing rib protrudes from the side of the fixing claw 3 facing away from the product, extending across the entire surface of the fixing claw 3. The first end 3a and the second end 3b of the fixing claw 3 are located on either side of the first reinforcing rib 33 and are symmetrical with respect to the first reinforcing rib 33. The first reinforcing rib 33 extends obliquely toward both sides of the first reinforcing rib 33 near the third end 3c to form second reinforcing ribs 34. The second reinforcing ribs 34 are V-shaped, with the opening facing the third end 3c. The third end 3c is located outside the opening of the V.

[0058] In this embodiment, each unloading connection mechanism 2 comprises a pair of unloading beams, further ensuring that the support ring 1 cannot move horizontally, or in the plane of the wafer product, but remains relatively free in the vertical direction of the wafer product. The structure of the fixed claws 3 allows for a thinner structure while maintaining the same clamping force. The first and second reinforcing ribs 33, 34 form a support structure similar to a leaf skeleton, ensuring structural strength.

[0059] It is emphasized again that the force-releasing connection mechanism 2 is not limited to the solutions in the above-described embodiments. In fact, the specific implementation of the force-releasing connection mechanism 2 can be various, as long as it connects the support ring 1 and the fixed claw 3 and can slightly swing in the first direction based on elastic deformation to reduce the force of wafer bending. For example, the force-releasing connection mechanism 2 can be implemented by adding a pressure sensor to the fixed claw 3, and the force-releasing connection mechanism 2 can be a connection structure that can move in the first direction. In response to pressure data, the coordinates of the force-releasing connection mechanism 2 are adjusted in real time to achieve force unloading. Alternatively, the force-releasing connection mechanism 2 can be a clamping structure shaped like chopsticks, connected to the fixed claw 3 by a spring in the middle to achieve force unloading.

[0060] In summary, the fixture for wafer-level optical element products of the present invention has the following beneficial effects: the present invention utilizes a support ring to perform outer ring suspension support on the product, and utilizes a plurality of fixed claws distributed in a circle inside the support ring to clamp and fix the edge of the product in a small area. In this way, a small-area clamping of the edge is adopted to avoid interference of the fixture with the product as much as possible, leaving enough space for the optical elements used for testing, and the optical elements can be close to the sample; and these fixed claws are each connected to the support ring through a corresponding force-unloading connection mechanism, and the force-unloading connection mechanism can swing slightly in a direction perpendicular to the plane of the support ring based on elastic deformation, so as to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the fixture can be adaptively fitted, avoiding wafer warping caused by processing errors, and improving the processing tolerance of the fixture.

[0061] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be an element centered thereon. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an element centered thereon at the same time. The terms "vertical", "horizontal" and similar expressions used herein are for illustrative purposes only. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this utility model pertains. The terms used herein in the specification of this utility model are for the purpose of describing specific embodiments only and are not intended to limit this utility model.

[0062] Terms containing ordinal numbers, such as "first" and "second," used in this specification may be used to describe various components, but these components are not limited by these terms. The purpose of using these terms is solely to distinguish one component from other components. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component. The term "or / and" as used herein includes any and all combinations of one or more of the relevant listed items.

[0063] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present invention and the claims, which are all within the protection of the present invention.

Claims

1. A fixture for wafer-level optical component products, used to clamp the product for optical testing, characterized in that: The clamp comprises: a support ring (1) for supporting the outer ring of the product in suspension, a fixing claw (3) for clamping and fixing the edge of the product in a small area, and a force-releasing connection mechanism (2) for dispersing force; A group of the fixing claws (3) are distributed in a circle inside the support ring (1) and are connected to the support ring (1) through a corresponding group of the unloading connection mechanisms (2). The unloading connection mechanisms (2) can swing slightly in a first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping; wherein, the first direction refers to a direction perpendicular to the circumference of the support ring (1).

2. The fixture for wafer-level optical component products according to claim 1, wherein: The unloading connection mechanism (2) comprises an arc-shaped unloading beam connected to the inner side of the support ring (1) at one end and connected to a fixed claw (3) at the other end; the support ring (1) and the unloading beam connected thereto and the fixed claw (3) are coplanar.

3. The fixture for wafer-level optical component products according to claim 2, wherein: A plurality of notches are provided on the inner side of the support ring (1), and the plurality of notches correspond to the plurality of force-releasing connection mechanisms (2); The unloading connection mechanism (2) is composed of a single unloading beam, the unloading beam is located in the notch, the extension direction of the unloading beam is consistent with the extension direction of the support ring (1), and the inner arc of the unloading beam is also continuous with the inner arc of the support ring (1); or, the unloading connection mechanism (2) is composed of a pair of unloading beams, the pair of unloading beams are arranged at the notch along the extension direction of the support ring (1), and the pair of unloading beams are also arranged facing each other and are commonly connected to the same fixed claw (3).

4. The fixture for wafer-level optical component products according to claim 2, wherein: The unloading connection mechanism (2) is composed of a pair of unloading beams, which extend from the position where they are connected to the support ring (1) along the extension direction of the support ring (1) or in a direction gradually deviating from the support ring (1), and the pair of unloading beams extend until they gradually approach each other and the extended ends are connected to the same fixed claw (3).

5. The fixture for wafer-level optical component products according to claim 4, characterized in that: The fixing claw (3) is in a herringbone structure, the first end and the second end of the fixing claw (3) are respectively connected and fixed to the extended ends of a pair of the unloading beams, and the third end of the fixing claw (3) is used to fix the edge of the product.

6. The fixture for wafer-level optical component products according to claim 5, characterized in that: A first reinforcing rib protrudes from the side of the fixing claw (3) facing away from the product, and the first end and the second end of the fixing claw (3) are distributed on both sides of the first reinforcing rib and are symmetrical relative to the first reinforcing rib. The first reinforcing rib is further inclined and extends toward both sides of the first reinforcing rib at a position close to the third end to form a second reinforcing rib, and the second reinforcing rib is in a "V" shape with an opening toward the third end.

7. The fixture for wafer-level optical component products according to claim 1, wherein: A positioning column (31) and / or a positioning edge (11) for matching and contacting with the edge of the product to position the product is also provided on the inner side of the support ring (1) or the fixing claw (3).

8. The fixture for wafer-level optical component products according to claim 7, wherein: It also includes an auxiliary support device for supporting the support ring (1), the auxiliary support device including a main fixing rod (4) and two auxiliary fixing rods (5), the main fixing rod (4) and the auxiliary fixing rods (5) are arranged in parallel, and the central axis is coplanar with the support ring (1); The support ring (1) is connected to a fixing seat (12) on the outer side of the position corresponding to the positioning edge (11) thereof, and the main fixing rod (4) points to the center of the support ring (1) and is detachably assembled and fixed to the fixing seat (12); The outer side of the support ring (1) further extends in opposite directions to form two symmetrical connecting arms (13), the extending direction of the connecting arms (13) being perpendicular to the extending direction of the main fixing rod (4), the two auxiliary fixing rods (5) and the two connecting arms (13) being detachably assembled and fixed, the main fixing rod (4) being located between the two auxiliary fixing rods (5), and the three being flush with the end away from the support ring (1).

9. The fixture for wafer-level optical component products according to claim 1, wherein: There are two support rings (1), and each support ring (1) is equipped with a set of the unloading connection mechanism (2) and a set of the fixing claws (3); The two support rings (1) are assembled with each other in the first direction and then locked by a locking member, and the first support ring (1) is connected to the auxiliary support device; the two groups of the unloading connection mechanisms (2) are assembled with each other in the first direction; the two groups of the fixing claws (3) are assembled with each other in the first direction, and the group of the fixing claws (3) corresponding to the first support ring (1) are all protrudingly provided with positioning columns (31) for abutting against the side of the product, and all the positioning columns (31) together hold the circumferential side wall of the product to position the product, and the group of the fixing claws (3) corresponding to the second support ring (1) are provided with positioning holes (32) that cooperate with the positioning columns (31).

10. The fixture for wafer-level optical element products according to claim 1, wherein the number of the support ring (1) is one piece, the support ring (1) is configured with a group of the force-releasing connection mechanism (2) and a group of the fixing claws (3), the group of the fixing claws (3) configured by the support ring (1) is also combined with another group of the fixing claws (3) to form a clamp-shaped structure to fix the product, the group of the fixing claws (3) configured by the support ring (1) is protrudingly provided with a positioning column (31) for abutting against the side of the product, and the other group of the fixing claws (3) is provided with a positioning hole (32) that cooperates with the positioning column (31), and the two groups of the fixing claws (3) are aligned and combined based on the positioning column (31) and the positioning hole (32) and are fastened by a locking member.

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