Chassis of reduction furnace

By using the threaded connection between the adjusting nut and the electrode holder in the reduction furnace chassis, the surface deformation problem caused by welding stress is solved, the automatic compensation of the surface flatness of the upper base plate is achieved, and the production efficiency and equipment reliability are improved.

CN223307318UActive Publication Date: 2025-09-05HIMILE MECHANICAL MFG
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Patent Information

Application Number
CN202422613218.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-29
Publication Date
2025-09-05
Estimated Expiration
2034-10-29

AI Technical Summary

Technical Problem

The existing reduction furnace chassis has a large amount of welding between the electrode seat and the upper, middle and lower base plates, resulting in large welding stress, deformation over time, and inability to compensate for the surface flatness of the upper base plate, affecting the polysilicon production qualification rate and equipment operation.

Method used

The threaded connection between the adjusting nut and the electrode holder is used instead of the welding connection. The position of the electrode holder is adjusted by the upper nut and the lower nut to compensate for the depression or convexity of the upper base plate and maintain the surface flatness.

Benefits of technology

The amount of welding is reduced, the automatic adjustment of the surface flatness of the upper base plate is achieved, and the polysilicon production qualification rate and equipment stability are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a reduction furnace chassis which comprises an upper bottom plate, a middle bottom plate and a lower bottom plate which are arranged in parallel, a plurality of electrode holders are vertically arranged among the upper bottom plate, the middle bottom plate and the lower bottom plate, and the electrode holders are connected with the upper bottom plate and the middle bottom plate in a welded mode. An adjusting nut is arranged in a through hole, matched with the electrode holder, of the lower bottom plate, and the adjusting nut is connected with the electrode holder in a matched mode so that the electrode holder can be driven to ascend or descend when the adjusting nut rotates. According to the utility model, the electrode holder and the lower bottom plate are not in welding connection any more, so that the welding amount between the electrode holder and the upper bottom plate, the middle bottom plate and the lower bottom plate is reduced; when the upper jacking nut rotates and moves upwards, the first type electrode holder can be promoted to move upwards through the annular step, and then the recess of the upper bottom plate is compensated; the pull-down nut is rotated to enable the corresponding second-type electrode holder to drive the middle bottom plate and the upper bottom plate to move downwards, so that the upper bulge of the upper bottom plate is leveled; therefore, the surface flatness of the upper surface of the upper bottom plate can be adjusted.
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Description

Technical Field

[0001] The utility model belongs to the technical field of reduction furnaces, and particularly relates to a reduction furnace chassis. Background Art

[0002] At present, the main production process of polysilicon is the modified Siemens method. The CVD reduction furnace is the core production equipment of this process, and the reduction furnace chassis is a component of the reduction furnace, such as Figure 1 As shown, the chassis comprises an upper base plate 01, a middle base plate 02, and a lower base plate 03 arranged in parallel. Several electrode holders 04 for mounting electrodes are vertically positioned between the upper base plate 01, the middle base plate 02, and the lower base plate 03. The electrodes are used to provide heat to the reduction furnace, and the electrode holders 04 vertically penetrate the upper base plate 01, the middle base plate 02, and the lower base plate 03. The surface flatness of the upper surface of the upper base plate 01 after machining is a key indicator of chassis accuracy. The requirement is: the surface flatness of the upper surface of the upper base plate 01 should be ≤ 0.05mm.

[0003] Currently, the electrode holder 04 on the reduction furnace chassis is welded to the upper base plate 01, the middle base plate 02 and the lower base plate 03. This fully welded chassis has the following defects:

[0004] (1) Since the electrode holder 04 is welded to the upper base plate 01, the middle base plate 02, and the lower base plate 03, the welding amount and welding stress are large. As time goes by, the welding position will be deformed, that is, the position of the electrode holder in the upper base plate 01 will be concave or convex, making the surface flatness of the upper surface of the upper base plate 01 not meet the requirements;

[0005] (2) During the use of the reduction furnace, if a depression or convexity appears at the location of the electrode holder in the upper base plate 01, it cannot be compensated or repaired, which ultimately leads to a decrease in the polysilicon production qualification rate or even equipment shutdown.

[0006] Based on the above problems and combined with the markings during the use of the existing reduction tray chassis: the electrode seat 04 corresponding to the position where depressions are likely to occur in the upper bottom plate 01 is marked as the first type of electrode seat, and the electrode seat 04 corresponding to the position where convexities are likely to occur in the upper bottom plate 01 is marked as the second type of electrode seat, this application proposes a reduction furnace chassis. Utility Model Content

[0007] In order to solve the problems of large welding amount between electrode seat and upper bottom plate, middle bottom plate and lower bottom plate in the existing reduction furnace chassis and inability to compensate and maintain the surface flatness of the upper surface of the upper bottom plate, the utility model proposes a reduction furnace chassis.

[0008] A reduction furnace chassis, comprising an upper bottom plate, a middle bottom plate, and a lower bottom plate arranged in parallel, wherein a plurality of electrode seats are vertically arranged between the upper bottom plate, the middle bottom plate, and the lower bottom plate, and the electrode seats penetrate the upper bottom plate, the middle bottom plate, and the lower bottom plate, and are welded to the electrode seats and the upper bottom plate and the middle bottom plate;

[0009] An adjusting nut is provided in the through hole of the lower base plate and the electrode seat, and the adjusting nut is adaptively connected to the electrode seat so that the electrode seat can be driven to rise or fall when the adjusting nut is rotated.

[0010] Preferably, the adjusting nut adapted to be connected to the first type of electrode holder is an upper nut, and the outer side wall of the upper nut is threadedly connected to the lower base plate;

[0011] The lower portion of the outer wall of the first type of electrode holder is inwardly contracted to form a connecting portion, and the top end of the connecting portion forms an annular step;

[0012] The connecting portion is inserted into the inner hole of the upper nut, and the top surface of the upper nut is in contact with the annular step.

[0013] Preferably, an external thread is provided on the outer side wall of the connecting portion, and a first locking nut is fitted on the connecting portion of the lower portion of the upper nut;

[0014] The top end surface of the first locking nut is in contact with the bottom end surface of the upper nut.

[0015] Preferably, the adjusting nut adapted to be connected to the second type of electrode holder is a pull-down nut;

[0016] An external thread is provided at the lower end of the outer side wall of the second type electrode holder, and the inner side wall of the pull-down nut is threadedly connected to the second type electrode holder;

[0017] The pull-down nut is rotationally matched with the lower base plate.

[0018] Preferably, an annular plate is coaxially fixedly provided on the bottom end of the outer side wall of the pull-down nut;

[0019] The upper end of the pull-down nut passes upward through the corresponding through hole on the lower base plate, and the top end of the annular plate is rotationally matched with the lower base plate.

[0020] Preferably, a second locking nut is provided at the lower portion of the pull-down nut, and the second locking nut is threadedly connected to the second type electrode holder;

[0021] The top end surface of the second locking nut is in contact with the bottom end surface of the pull-down nut.

[0022] Preferably, flanges are fixedly provided on the radial outer ends of the upper base plate, the middle base plate and the lower base plate;

[0023] The radial inner side of the flange is provided with a first supporting step for positioning the bottom end surface of the upper base plate, a second supporting step for positioning the top end surface of the middle base plate, and a third supporting step for positioning the top end surface of the lower base plate from top to bottom.

[0024] Preferably, a protective plate is fixedly provided on the top surface of the upper base plate, and the electrode seat passes through the protective plate.

[0025] The beneficial effects of the utility model are:

[0026] (1) In the reduction furnace chassis of the present invention, the electrode holder and the lower base plate are no longer welded, thereby reducing the amount of welding between the electrode holder and the upper base plate, the middle base plate, and the lower base plate.

[0027] (2) In the reduction furnace chassis of the present invention, when the top nut is rotated and moved upward, the annular step can cause the first type of electrode seat to move upward, thereby compensating for the depression of the upper bottom plate; the pull-down nut is rotated to cause the corresponding second type of electrode seat to drive the middle bottom plate and the upper bottom plate to move downward, thereby flattening the upper protrusion of the upper bottom plate; thereby, the surface flatness of the upper surface of the upper bottom plate can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings in the specification, which constitute a part of this application, are used to provide further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute improper limitations on this application.

[0029] Figure 1 This is a schematic diagram of the structure when the reduction furnace chassis is entirely welded;

[0030] Figure 2 This is a schematic structural perspective diagram of the reduction furnace chassis of the utility model;

[0031] Figure 3 This is a schematic radial cross-sectional view of the structure of the reduction furnace chassis of the utility model;

[0032] Figure 4 This is a schematic diagram of the coordination of the upper nut, lower base plate, and first type electrode holder in the utility model;

[0033] Figure 5 This is a schematic diagram of the coordination of the pull-down nut, the lower base plate, and the second type of electrode holder in the utility model;

[0034] Figure 6 yes Figure 3 A partial enlarged view of middle A;

[0035] in:

[0036] 01-upper base plate, 02-middle base plate, 03-lower base plate, 04-electrode holder;

[0037] 1-upper nut, 2-connecting part, 21-annular step, 3-pull-down nut, 31-annular plate, 4-first locking nut, 5-second locking nut, 6-flange, 61-first supporting step, 62-second supporting step, 63-third supporting step, 7-guard plate. DETAILED DESCRIPTION

[0038] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] like Figure 2-Figure 3 As shown, a reduction furnace chassis includes an upper bottom plate 01, a middle bottom plate 02, and a lower bottom plate 03 arranged in parallel. A plurality of electrode holders 04 are vertically arranged between the upper bottom plate 01, the middle bottom plate 02, and the lower bottom plate 03. The electrode holders 04 pass through the upper bottom plate 01, the middle bottom plate 02, and the lower bottom plate 03. The electrode holders 04 are welded to the upper bottom plate 01 and the middle bottom plate 02.

[0040] An adjusting nut is provided in the through hole of the lower base plate 03 and the electrode holder 04 , and the adjusting nut is adaptively connected to the electrode holder 04 so as to drive the electrode holder 04 to rise or fall when the adjusting nut is rotated.

[0041] Preferably, Figure 4 As shown, the adjusting nut adapted to be connected to the first type of electrode holder is an upper nut 1, and the outer side wall of the upper nut 1 is threadedly connected to the lower base plate 03;

[0042] The lower portion of the outer wall of the first type of electrode holder is indented to form a connecting portion 2, and the top of the connecting portion 2 forms an annular step 21;

[0043] The connecting portion 2 is inserted into the inner hole of the upper nut 1 , and the top surface of the upper nut 1 is in contact with the annular step 21 .

[0044] Preferably, an external thread is provided on the outer side wall of the connecting portion 2, and a first locking nut 4 is threadedly fitted on the connecting portion 2 at the lower part of the top nut 1;

[0045] The top end surface of the first locking nut 4 is in contact with the bottom end surface of the upper nut 1 .

[0046] In the present application, the connection between the first type of electrode holder and the lower base plate 03 is achieved through the threaded cooperation between the upper nut 1 and the lower base plate 03, the threaded cooperation between the first locking nut 4 and the connecting part 2, the contact cooperation between the top surface of the upper nut 1 and the annular step 21, and the contact cooperation between the top surface of the first locking nut 4 and the bottom surface of the upper nut 1, replacing the existing welding connection, thereby reducing the amount of welding; at the same time, when the upper nut 1 rotates and moves upward, the annular step 21 can cause the first type of electrode holder to move upward, thereby compensating for the depression of the upper base plate 01.

[0047] Preferably, Figure 5 As shown, the adjusting nut adapted to be connected to the second type of electrode holder is a pull-down nut 3;

[0048] An external thread is provided at the lower end of the outer side wall of the second type electrode holder, and the inner side wall of the pull-down nut 3 is threadedly connected to the second type electrode holder;

[0049] The pull-down nut 3 is rotationally engaged with the lower base plate 03 .

[0050] Preferably, an annular plate 31 is coaxially fixedly provided on the bottom end of the outer side wall of the pull-down nut 3;

[0051] The upper end of the pull-down nut 3 passes upward through the corresponding through hole on the lower base plate 03 , and the top end of the annular plate 31 is rotationally engaged with the lower base plate 03 .

[0052] Preferably, a second locking nut 5 is provided at the lower portion of the pull-down nut 3, and the second locking nut 5 is threadedly connected to the second type electrode holder;

[0053] The top end surface of the second locking nut 5 is in contact with the bottom end surface of the pull-down nut 3 .

[0054] In the present application, the connection between the second type of electrode seat and the lower base plate 03 is achieved through the threaded cooperation between the pull-down nut 3 and the second type of electrode seat, the threaded cooperation between the second locking nut 5 and the second type of electrode seat, the rotational cooperation between the annular plate 31 and the lower base plate 03, and the contact cooperation between the top end surface of the second locking nut 5 and the bottom end surface of the pull-down nut 3, replacing the existing welding connection, thereby reducing the amount of welding; at the same time, the rotation of the pull-down nut 3 can realize the downward movement of the second type of electrode seat, thereby compensating for the upward bulge of the upper base plate 01.

[0055] Preferably, flanges 6 are fixedly provided on the radial outer ends of the upper base plate 01, the middle base plate 02 and the lower base plate 03;

[0056] like Figure 6As shown, the radial inner side of the flange 6 is provided with a first support step 61 for positioning the bottom end surface of the upper base plate 01, a second support step 62 for positioning the top end surface of the middle base plate 02, and a third support step 63 for positioning the top end surface of the lower base plate 03 in sequence from top to bottom.

[0057] Specifically, the radial outer ends of the upper base plate 01 , the middle base plate 02 , and the lower base plate 03 are all welded to the flange 6 , and the first support step 61 , the second support step 62 , and the third support step 63 are all steps of annular structure.

[0058] Preferably, a protective plate 7 is fixedly provided on the top surface of the upper base plate 01 to prevent silicon powder from falling and affecting the electrode and reduce the influence of heat transfer on the deformation of the upper base plate 01 , and the electrode seat 04 passes through the protective plate 7 .

[0059] Specifically, the guard plate 7 is connected to the upper base plate 01 by welding, and the guard plate 7 is fixedly connected to the flange 6 .

[0060] In the reduction furnace chassis of the present application, the electrode holder 04 and the lower base plate 03 are no longer welded, thereby reducing the welding amount between the electrode holder 04 and the upper base plate 01, the middle base plate 02, and the lower base plate 03.

[0061] Based on the distribution of locations where depressions and convexities appear at the welds of the upper base plate 01 during use of existing reduction furnaces, the electrode holders 04 corresponding to locations on the upper base plate 01 prone to depressions are marked as first-type electrode holders, and top nuts 1 are installed on the first-type electrode holders. The electrode holders 04 corresponding to locations on the upper base plate 01 prone to convexities are marked as second-type electrode holders, and pull-down nuts 3 are installed on the second-type electrode holders. For depressions and convexities that appear at the welds of the upper base plate 01 after post-weld heat treatment, or after the equipment has been in operation for a period of time, the reduction furnace chassis of this application can be compensated and repaired, specifically as follows:

[0062] For the depression of the upper base plate 01, first remove the first locking nut 4 at the bottom end of the first type electrode seat corresponding to the depression, then rotate the upper nut 1 to move it upward. During the upward movement of the upper nut 1, the corresponding first type electrode seat is pushed up through the annular step 21, so that the corresponding first type electrode seat drives the middle base plate 02 and the upper base plate 01 to move upward, and finally the depression of the upper base plate 01 is leveled, and then the first locking nut 4 is installed and reset;

[0063] For the bulge of the upper base plate 01, first remove the second locking nut 5 at the bottom end of the second type electrode seat corresponding to the bulge position, then rotate the pull-down nut 3 to make the corresponding second type electrode seat drive the middle base plate 02 and the upper base plate 01 to move downward, and finally flatten the bulge of the upper base plate 01, and then install and reset the second locking nut 5.

[0064] Although the above describes the specific implementation methods of the present invention in conjunction with the accompanying drawings, it is not a limitation of the present invention. Those skilled in the art should understand that on the basis of the technical solution of the present invention, various modifications or variations that can be made by those skilled in the art without creative work are still within the scope of protection of the present invention.

Claims

1. A reduction furnace chassis, comprising an upper bottom plate (01), a middle bottom plate (02), and a lower bottom plate (03) arranged in parallel, wherein a plurality of electrode holders (04) are vertically arranged between the upper bottom plate (01), the middle bottom plate (02), and the lower bottom plate (03), wherein the electrode holders (04) pass through the upper bottom plate (01), the middle bottom plate (02), and the lower bottom plate (03), and the electrode holders (04) are welded to the upper bottom plate (01) and the middle bottom plate (02); characterized in that: An adjusting nut is provided in a through hole matched with the lower base plate (03) and the electrode seat (04); the adjusting nut is adaptively connected to the electrode seat (04) so ​​as to drive the electrode seat (04) to rise or fall when the adjusting nut is rotated.

2. The reduction furnace chassis according to claim 1, characterized in that: The adjusting nut adapted to be connected to the first type of electrode holder is an upper nut (1), and the outer side wall of the upper nut (1) is threadedly connected to the lower base plate (03); The lower portion of the outer wall of the first type of electrode seat is inwardly contracted to form a connecting portion (2), and the top end of the connecting portion (2) forms an annular step (21); The connecting portion (2) is inserted into the inner hole of the upper nut (1), and the top surface of the upper nut (1) is in contact with the annular step (21).

3. The reduction furnace chassis according to claim 2, characterized in that: An external thread is provided on the outer side wall of the connecting portion (2), and a first locking nut (4) is threadedly matched on the connecting portion (2) below the top nut (1); The top end surface of the first locking nut (4) is in contact with the bottom end surface of the upper nut (1).

4. The reduction furnace chassis according to claim 1, characterized in that: The adjusting nut adapted to be connected to the second type electrode holder is a pull-down nut (3); An external thread is provided at the lower end of the outer side wall of the second type electrode seat, and the inner side wall of the pull-down nut (3) is threadedly connected to the second type electrode seat; The pull-down nut (3) is rotationally engaged with the lower base plate (03).

5. The reduction furnace chassis according to claim 4, characterized in that: An annular plate (31) is coaxially fixedly provided on the bottom end of the outer side wall of the pull-down nut (3); The upper end of the pull-down nut (3) passes upward through the corresponding through hole on the lower base plate (03), and the top end of the annular plate (31) is rotationally engaged with the lower base plate (03).

6. The reduction furnace chassis according to claim 4, characterized in that: A second locking nut (5) is provided at the lower portion of the pull-down nut (3), and the second locking nut (5) is threadedly connected to the second type electrode holder; The top end surface of the second locking nut (5) is in contact with the bottom end surface of the pull-down nut (3).

7. The reduction furnace chassis according to claim 1, characterized in that: Flanges (6) are fixedly provided at the radial outer ends of the upper base plate (01), the middle base plate (02), and the lower base plate (03); The radial inner side of the flange (6) is provided with a first supporting step (61) for positioning the bottom end surface of the upper base plate (01), a second supporting step (62) for positioning the top end surface of the middle base plate (02), and a third supporting step (63) for positioning the top end surface of the lower base plate (03) in sequence from top to bottom.

8. The reduction furnace bottom plate according to claim 1, wherein: A protective plate (7) is fixedly provided on the top surface of the upper base plate (01), and the electrode seat (04) passes through the protective plate (7).