Reversing conveying mechanism

Abstract

The utility model relates to the technical field of semiconductor base material steering carrying, in particular to a reversing conveying mechanism. The device comprises a base, and a servo motor is installed on the upper surface of the base; the motion data adjusting module is mounted on one side of the surface of the base; one end of the driving rod is fixedly connected with the output end of the servo motor; the first conveying frame is located on one side of the upper end of the driving rod; and the second conveying frame is located on one side of the surface of the driving rod. The problems that in the transferring process of semiconductor wafers, sapphire substrates and other base materials, the semiconductor base materials are usually conveyed and carried by means of many conveying devices, at the moment, the positions of the conveying devices are staggered and complex, and rapid transferring is inconvenient are solved. And therefore, the problem that the semiconductor base material is inconvenient to convey is solved, and the production and processing speed is further improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate steering and transportation, and in particular to a reversing conveying mechanism. Background Art

[0002] During the manufacturing and processing of substrates such as semiconductor wafers and sapphire substrates, they need to be transported by specialized transfer mechanisms to ensure the integrity and performance of the materials in an extremely clean and dust-free environment. The reversing conveyor mechanism is responsible for guiding the flow of materials between different conveying paths in the automated production line, ensuring that the materials are transported along the predetermined path and sequence. It is usually used to change the conveying direction of the materials, optimize the logistics layout, and improve production efficiency.

[0003] Prior art publications such as the utility model with announcement number CN202616212U specifically disclose a fully automatic loading and unloading device for laser processing semiconductor wafers, comprising a support frame, a laser processing platform disposed on top of the support frame, a wafer transfer mechanism disposed on the support frame and below the laser processing platform, and a linked loading and unloading mechanism disposed within the support frame and below the transfer mechanism. This fully automatic loading and unloading device eliminates the need for manual loading and unloading, allowing for simultaneous loading and unloading, improving production efficiency and yield, while also avoiding potential contamination from direct contact between operators and wafers, thereby enhancing product quality. Furthermore, it seamlessly connects the current process with the process above and below it, eliminating the need for manual transfer of workpieces between processes.

[0004] In the processing and production of semiconductor substrates, during the transportation of substrates such as semiconductor wafers and sapphire substrates, the semiconductor substrates are usually transported and moved by means of a large number of conveying equipment. At this time, the positions of the conveying equipment will be complex and intertwined, making it inconvenient to transport them quickly, which in turn makes it inconvenient to transport the semiconductor substrates in position, further increasing the production and processing speed. Utility Model Content

[0005] One of the technical problems to be solved by the present application is that, in the process of transporting substrates such as semiconductor wafers and sapphire substrates, the semiconductor substrates are usually transported and carried by means of a large number of conveying equipment. At this time, the positions of the conveying equipment will be complicated and intertwined, making it inconvenient to transport them quickly, which in turn makes it inconvenient to transport the semiconductor substrates in position, further increasing the production and processing rate.

[0006] To solve the above technical problems, an embodiment of the present application provides a reversing transmission mechanism, comprising: a base, a servo motor being mounted on an upper surface of the base;

[0007] A motion data adjustment module is installed on one side of the base surface;

[0008] A driving rod, one end of which is fixedly connected to the output end of the servo motor;

[0009] A first conveying rack, the first conveying rack being located on one side of an upper end of the driving rod;

[0010] The second conveying frame is located on one side of the surface of the driving rod, and the first conveying frame and the second conveying frame are on the same central axis and are located on both sides of the driving rod;

[0011] A workpiece body, the workpiece body being located on a surface of the first conveying rack;

[0012] A mounting mechanism located on an upper end surface of the drive rod; and

[0013] An adjustment mechanism, the adjustment mechanism being arranged on an end of the driving rod close to the first conveying frame by means of a mounting mechanism;

[0014] Among them, the adjustment mechanism includes a mounting plate, both sides of the inner wall of the mounting plate are slidably connected with fork plates, the surface of the fork plate is fixedly connected with a positioning plate, the cross-section of the positioning plate is "L"-shaped, and the surface of the positioning plate is threaded with an extrusion rod, one end of the extrusion rod is fixedly connected with an extrusion pad, and the surface of the extrusion pad abuts against the side wall of the mounting plate. The mounting mechanism includes an electric push rod, the output end of the electric push rod is fixedly connected to one side of the mounting plate, both side surfaces of the electric push rod are fixedly connected with a connecting rod, the arc surface of the connecting rod is slidably connected with a moving plate, and the side of the two moving plates close to each other is clamped with the same fixed block, and the lower surface of the fixed block is fixedly connected to the upper end of the driving rod.

[0015] In some embodiments, the adjustment mechanism also includes a slide groove, which is opened on the lower surface of the mounting plate. The lower surface of the fork plate is rotatably connected to a pulley, the surface of the pulley slides through the inner wall of the slide groove, and the arc surface of the pulley is slidably connected to a slide rail, and one side of the slide rail is fixedly connected to the lower surface of the mounting plate.

[0016] In some embodiments, a friction pad is fixedly connected to the upper surface of the fork plate, and a surface of the friction pad abuts against the lower surface of the workpiece body.

[0017] In some embodiments, the two fork plates are located on the inner wall of the first conveying rack, and the spacing between the two fork plates is adapted to the size of the inner wall of the first conveying rack.

[0018] In some embodiments, the mounting mechanism also includes a spring, which is sleeved on the arc surface of the connecting rod. The two ends of the spring are fixedly connected to the movable plate and the connecting rod respectively. The surface of one movable plate is rotatably connected to the rotating rod, and the inner wall of the other movable plate is clamped with the arc surface of the rotating rod. The arc surface of the rotating rod is threadedly connected to the extrusion shaft.

[0019] In some embodiments, the side wall of the fixed block is fixedly connected to the limiting column, and a plurality of limiting holes are opened on the surface of the movable plate, wherein the inner wall of one of the limiting holes is plugged into the arc surface of the limiting column.

[0020] In some embodiments, the arc surface of the rotating rod is covered with a protective ring, and the surface of the protective ring abuts against a side surface of the extrusion shaft.

[0021] Through the above technical solution, the reversing conveying mechanism provided by the present application can use the servo motor to drive the rotation of the entire driving rod when reversing the conveying of substrate workpieces such as semiconductor wafers and sapphire substrates, and at the same time rotate the fork plate in the adjustment mechanism at the upper end of the driving rod, so as to use the fork plate to transfer the position of the workpiece body on the surface of the first conveying rack and move the workpiece body toward the second conveying rack. In this process, the position of the fork plate is lifted and lowered by the electric push rod in the installation mechanism. At this time, the entire equipment has a simple structure, flexible movement, and the rotation angle can be adjusted arbitrarily, which can realize fast, efficient, and compatible with multiple angles of reversing conveying functions. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0023] Figure 1 Schematic diagram of the three-dimensional structure of the reversing transmission mechanism disclosed in the embodiment of the present application;

[0024] Figure 2 Schematic diagram of the structure of the adjustment mechanism of the reversing transmission mechanism disclosed in the embodiment of the present application;

[0025] Figure 3 It is a partial structural diagram of the adjustment mechanism of the reversing transmission mechanism disclosed in the embodiment of the present application;

[0026] Figure 4 It is a structural schematic diagram of the installation mechanism of the reversing transmission mechanism disclosed in the embodiment of the present application.

[0027] Description of reference numerals:

[0028] 1. Base; 2. Servo motor; 3. Motion data adjustment module; 4. Adjustment mechanism; 41. Mounting plate; 42. Fork plate; 43. Friction pad; 44. Positioning plate; 45. Extrusion rod; 46. Extrusion pad; 47. Slide rail; 48. Pulley; 49. Slide groove; 5. Mounting mechanism; 501. Fixed block; 502. Electric push rod; 503. Connecting rod; 504. Spring; 505. Moving plate; 506. Limiting column; 507. Limiting hole; 508. Rotating rod; 509. Protective ring; 510. Extrusion shaft; 6. First conveyor rack; 7. Workpiece body; 8. Second conveyor rack; 9. Driving rod. DETAILED DESCRIPTION

[0029] The following detailed description of the embodiments of the present application is provided in conjunction with the accompanying drawings and examples. The detailed description of the following examples and the accompanying drawings are intended to illustrate the principles of the present application, but are not intended to limit the scope of the present application. The present application may be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but rather includes all technical solutions within the scope of the claims.

[0030] The present application provides these embodiments to make this application thorough and complete, and to fully express the scope of this application to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangement of parts and steps, the composition of materials, numerical expressions and numerical values ​​set forth in these embodiments should be interpreted as merely exemplary, and not as limiting.

[0031] It should be noted that, in the description of this application, unless otherwise specified, "plurality" means greater than or equal to two; the terms "upper," "lower," "left," "right," "inner," "outer," and the like, indicating directions or positional relationships, are intended solely to facilitate the description of this application and simplify the description, and do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0032] In addition, the terms "first," "second," and similar terms used in this application do not denote any order, quantity, or importance, but are simply used to distinguish different parts. "Perpendicular" does not mean perpendicular in the strict sense, but rather means within the tolerance range. "Parallel" does not mean parallel in the strict sense, but rather means within the tolerance range. "Include" or "comprising" and similar terms mean that the elements preceding the word include the elements listed after the word, and do not exclude the possibility of other elements being included.

[0033] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections or indirect connections through an intermediary. A person of ordinary skill in the art will understand the specific meanings of the above terms in this application depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intervening device between the specific device and the first or second device.

[0034] All terms used in this application have the same meaning as understood by one of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in, for example, common dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and should not be interpreted in an idealized or highly formal sense, unless explicitly defined as such herein.

[0035] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0036] Reference Figure 1 As shown, the utility model provides a technical solution: a reversing transmission mechanism, comprising a base 1, a servo motor 2 is mounted on the upper surface of the base 1;

[0037] A motion data adjustment module 3 is installed on one side of the surface of the base 1;

[0038] A driving rod 9, one end of which is fixedly connected to the output end of the servo motor 2;

[0039] A first conveying frame 6, the first conveying frame 6 is located on one side of the upper end of the driving rod 9;

[0040] The second conveying frame 8 is located on one side of the surface of the driving rod 9. The first conveying frame 6 and the second conveying frame 8 are on the same central axis and are located on both sides of the driving rod 9.

[0041] The workpiece body 7 is located on the surface of the first conveying rack 6;

[0042] A mounting mechanism 5 located on the upper end surface of the driving rod 9; and

[0043] The adjusting mechanism 4 is arranged at one end of the driving rod 9 close to the first conveying rack 6 by means of the mounting mechanism 5 .

[0044] The specific settings and functions of the adjustment mechanism 4 and the installation mechanism 5 are described in detail below.

[0045] Reference Figure 2 、 Figure 3 ,and Figure 4 As shown, in this embodiment: the adjusting mechanism 4 includes a mounting plate 41, and fork plates 42 are slidably connected to both sides of the inner wall of the mounting plate 41, and a positioning plate 44 is fixedly connected to the surface of the fork plate 42, and the cross-section of the positioning plate 44 is "L"-shaped, and an extrusion rod 45 is threaded through the surface of the positioning plate 44, and one end of the extrusion rod 45 is fixedly connected to an extrusion pad 46, and the surface of the extrusion pad 46 abuts against the side wall of the mounting plate 41, and the mounting mechanism 5 includes an electric push rod 502, and the output end of the electric push rod 502 is fixedly connected to one side of the mounting plate 41, and both side surfaces of the electric push rod 502 are fixedly connected to a connecting rod 503, and the arc surface of the connecting rod 503 is slidably connected to a moving plate 505, and the two moving plates 505 are clamped with the same fixed block 501 on the side close to each other, and the lower surface of the fixed block 501 is fixedly connected to the upper end of the driving rod 9.

[0046] When the workpiece body 7 is being transported, the spacing between the two fork plates 42 is first adjusted, and the fork plates 42 are slid along the inner wall of the mounting plate 41. Then, the extrusion rod 45 on one side surface of the rotation positioning plate 44 is made to squeeze and fix the extrusion rod 45 with the side wall of the mounting plate 41 with the help of the extrusion pad 46 at one end. At the same time, the spacing between the two fork plates 42 is adapted to the spacing between the inner walls of the first conveying rack 6 and the second conveying rack 8, so that the workpiece body 7 can be lifted and transported. Then, with the help of the combination between the servo motor 2 and the motion data adjustment module 3, the motion data can be adjusted according to the needs. According to the data adjustment of the adjustment module 3, the parameters of the servo motor 2, such as acceleration, deceleration, etc., are effectively adjusted to ensure that the servo motor 2 can smoothly and accurately rotate the drive rod 9 at the output end of the servo motor 2 to a specified angle. At the same time, the entire adjustment mechanism 4 is raised and lowered with the help of the electric push rod 502 in the installation mechanism 5. At this time, the fork plate 42 can be accurately raised and lowered to the first conveyor rack 6 and directly below the first conveyor rack 6. Then, the workpiece body 7 on the surface of the first conveyor rack 6 is lifted and transferred to the surface of the second conveyor rack to perform the transfer operation between the positions of the workpiece body 7.

[0047] The adjusting mechanism 4 also includes a slide groove 49, which is opened on the lower surface of the mounting plate 41, and the slide groove 49 can guide and limit the position of the pulley 48. The lower surface of the fork plate 42 is rotatably connected to the pulley 48, and the surface of the pulley 48 slides through the inner wall of the slide groove 49. The sliding between the pulley 48 and the slide rail 47 can effectively reduce friction, which is convenient for better movement and regulation of the position of the fork plate 42.

[0048] The mounting mechanism 5 also includes a spring 504, which is sleeved on the arc surface of the connecting rod 503. The two ends of the spring 504 are fixedly connected to the moving plate 505 and the connecting rod 503 respectively. The surface of one moving plate 505 is rotatably connected to the rotating rod 508, and the inner wall of the other moving plate 505 is clamped with the arc surface of the rotating rod 508. The arc surface of the rotating rod 508 is threadedly connected to the extrusion shaft 510. The side wall of the fixed block 501 is fixedly connected to the limiting column 506. The surface of the moving plate 505 is provided with a plurality of limiting holes 507, and the inner wall of one limiting hole 507 is plugged into the arc surface of the limiting column 506. With the help of the plugging between the limiting hole 507 and the limiting column 506, the position of the moving plate 505 and the electric push rod 502 can be fixed and protected to avoid position deviation. The arc surface of the rotating rod 508 is sleeved with a protective ring 509, and the surface of the protective ring 509 abuts against the side surface of the extrusion shaft 510.

[0049] When the lever 502 is in the upright position, the lever 502 is in the upright position, and the lever 502 is in the upright position, so that the lever 502 can be moved in a straight line and the lever 502 can be moved in a straight line.

[0050] So far, the various embodiments of the present application have been described in detail. To avoid obscuring the concept of the present application, some details well known in the art have not been described. Based on the above description, those skilled in the art can fully understand how to implement the technical solutions disclosed herein.

[0051] Although some specific embodiments of the present application have been described in detail through examples, those skilled in the art will understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present application. Those skilled in the art will understand that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present application. In particular, as long as there are no structural conflicts, the various technical features mentioned in the various embodiments may be combined in any manner.

Claims

1. Reversing transmission mechanism, characterized in that: include: A base (1), wherein a servo motor (2) is mounted on an upper surface of the base (1); A motion data adjustment module (3), the motion data adjustment module (3) being installed on one side of the surface of the base (1); A driving rod (9), one end of which is fixedly connected to the output end of the servo motor (2); A first conveying frame (6), the first conveying frame (6) is located on one side of the upper end of the driving rod (9); a second conveying frame (8), the second conveying frame (8) being located on one side of the surface of the driving rod (9), the first conveying frame (6) and the second conveying frame (8) being on the same central axis and being located on both sides of the driving rod (9); A workpiece body (7), the workpiece body (7) being located on a surface of the first conveying rack (6); a mounting mechanism (5) located on the upper end surface of the driving rod (9); and An adjusting mechanism (4), wherein the adjusting mechanism (4) is arranged at one end of the driving rod (9) close to the first conveying frame (6) by means of a mounting mechanism (5); The adjusting mechanism (4) comprises a mounting plate (41), both sides of the inner wall of the mounting plate (41) are slidably connected to fork plates (42), the surface of the fork plate (42) is fixedly connected to a positioning plate (44), the cross section of the positioning plate (44) is "L" shaped, the surface of the positioning plate (44) is threaded with an extrusion rod (45), one end of the extrusion rod (45) is fixedly connected to an extrusion pad (46), the surface of the extrusion pad (46) is in contact with the side wall of the mounting plate (41), and the mounting plate (41) is fixedly connected to the fork plate (42). The mounting mechanism (5) comprises an electric push rod (502), the output end of the electric push rod (502) is fixedly connected to one side of the mounting plate (41), both side surfaces of the electric push rod (502) are fixedly connected to a connecting rod (503), the arc surface of the connecting rod (503) is slidably connected to a moving plate (505), and the sides of the two moving plates (505) close to each other are clamped with the same fixed block (501), and the lower surface of the fixed block (501) is fixedly connected to the upper end of the driving rod (9).

2. The reversing transmission mechanism according to claim 1, characterized in that: The adjustment mechanism (4) further comprises a slide groove (49), wherein the slide groove (49) is provided on the lower surface of the mounting plate (41), the lower surface of the fork plate (42) is rotatably connected to a pulley (48), the surface of the pulley (48) slides through the inner wall of the slide groove (49), the arc surface of the pulley (48) is slidably connected to a slide rail (47), and one side of the slide rail (47) is fixedly connected to the lower surface of the mounting plate (41).

3. The reversing transmission mechanism according to claim 1, characterized in that: A friction pad (43) is fixedly connected to the upper surface of the fork plate (42), and the surface of the friction pad (43) abuts against the lower surface of the workpiece body (7).

4. The reversing transmission mechanism according to claim 1, characterized in that: The two fork plates (42) are located on the inner wall of the first conveying rack (6), and the spacing between the two fork plates (42) is adapted to the size of the inner wall of the first conveying rack (6).

5. The reversing transmission mechanism according to claim 1, characterized in that: The mounting mechanism (5) further comprises a spring (504), the spring (504) being sleeved on the arc surface of the connecting rod (503), the two ends of the spring (504) being fixedly connected to the movable plate (505) and the connecting rod (503), respectively, the surface of one of the movable plates (505) being rotatably connected to a rotating rod (508), the inner wall of the other movable plate (505) being clamped to the arc surface of the rotating rod (508), and the arc surface of the rotating rod (508) being threadedly connected to an extrusion shaft (510).

6. The reversing transmission mechanism according to claim 1, characterized in that: The side wall of the fixed block (501) is fixedly connected to the limiting column (506), and a plurality of limiting holes (507) are opened on the surface of the movable plate (505), wherein the inner wall of one of the limiting holes (507) is plugged into the arc surface of the limiting column (506).

7. The reversing transmission mechanism according to claim 5, characterized in that: The arc surface of the rotating rod (508) is covered with a protective ring (509), and the surface of the protective ring (509) is in contact with the surface of one side of the extrusion shaft (510).

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