High-flux silicon nitride powder preparation device

Abstract

The utility model discloses a high-flux silicon nitride powder preparation device, and relates to the technical field of chemical manufacturing equipment. The high-flux silicon nitride powder preparation device comprises a preparation device body, a heater is assembled on the inner wall of the preparation device body, a rotating rod is rotationally connected to the side face of the preparation device body, and a discharging baffle is fixedly connected to the side face of the rotating rod; and an air guide assembly is arranged in the preparation device body and comprises a servo motor, and the side face of the servo motor is in transmission connection with a rotating shaft. According to the high-flux silicon nitride powder preparation device, after nitrogen is introduced into the device, a servo motor is started, a rotating shaft can be driven to rotate, and a power gear, a stress gear, a fixed gear ring, a rotating rod and a rotating sleeve are matched, so that an air guide plate rotates in the direction opposite to an air swinging baffle, air guide is conducted, and the mixing effect of the device is improved; therefore, the reaction efficiency of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical product production equipment, in particular to a high-throughput silicon nitride powder preparation device. Background Art

[0002] Silicon nitride powder is a ceramic material with high hardness, stable structure, low thermal expansion coefficient, and excellent oxidation and corrosion resistance. Silicon nitride powder has high high-temperature strength, high hardness, good wear resistance, good heat resistance, and good impact resistance. Its unique physical and chemical properties make this type of nitride widely used in semiconductor devices, microelectronics, porous ceramics and other fields.

[0003] Chinese patent CN219792504U, authorized and announced on October 3, 2023, discloses a high-throughput silicon nitride powder preparation device, which includes a reaction box and a box cover movably connected to the reaction box. Support legs are fixed under the reaction box, an air intake assembly and a cylinder are provided on one outer wall, an exhaust assembly and a discharge port are provided on the other outer wall, and a scraping and cleaning assembly is provided at the lower end of the interior.

[0004] In the above application documents, a motor is used to drive the oscillating air baffle to rotate so that the silicon powder is heated and reacts evenly. However, the single fixed oscillating air baffle makes the swing direction of the nitrogen in the entire device consistent, resulting in poor mixing effect, which may affect the reaction efficiency of the device. Utility Model Content

[0005] In response to the shortcomings of the prior art, the present invention provides a high-throughput silicon nitride powder preparation device that solves the problems raised in the above-mentioned background art. To achieve the above objectives, the present invention is implemented through the following technical solutions: A high-throughput silicon nitride powder preparation device includes a preparation device body, the inner wall of the preparation device body is equipped with a heater, the side of the preparation device body is rotatably connected to a rotating rod, and the side of the rotating rod is fixedly connected to a discharge baffle;

[0006] An air guide assembly is provided inside the preparation device body, and the air guide assembly includes a servo motor, a side transmission connection of the servo motor is connected to a rotating shaft, an outer side of the rotating shaft is fixedly connected to a swing wind baffle, a side of the rotating shaft is fixedly connected to a power gear, a force-bearing gear is slidably and rotatably connected to the inner wall of the preparation device body, a fixed gear ring is fixedly connected to the inner wall of the preparation device body, a side of the force-bearing gear is rotatably connected to a rotating rod, a side of the rotating rod is slidably connected to a rotating sleeve, and an outer side of the rotating sleeve is fixedly connected to an air guide plate.

[0007] Preferably, the stressed gear is located outside the power gear, and the stressed gear and the power gear are in meshing state, so that the rotation of the power gear can drive the stressed gear to rotate.

[0008] Preferably, the fixed gear ring is located outside the stressed gear, and the fixed gear ring and the stressed gear are in meshing state.

[0009] Preferably, an auxiliary component is provided on the outside of the preparation device body, and the auxiliary component includes a hydraulic warehouse, a cam is fixedly connected to the side of the rotating shaft, one end of the hydraulic warehouse is slidably connected to a force rod, and the other end of the hydraulic warehouse is slidably connected to an arc rod, a spring is fixedly connected to the side of the force rod, and a force plate is fixedly connected to the side of the rotating shaft.

[0010] Preferably, one end of the spring away from the stressed rod is fixedly connected to the inner wall of the hydraulic chamber, so that the stressed rod can be reset under the action of the spring when it is not stressed.

[0011] Preferably, the force-bearing plate is located on the side of the arc-shaped rod, and the force-bearing plate and the arc-shaped rod are in a fixed state.

[0012] The utility model provides a high-throughput silicon nitride powder preparation device. It has the following beneficial effects:

[0013] (1) After nitrogen is introduced into the high-throughput silicon nitride powder preparation device, the servo motor is started to drive the rotating shaft to rotate, and the power gear, the force gear, the fixed gear ring, the rotating rod and the rotating sleeve are coordinated to make the air guide plate rotate in the opposite direction to the swing wind baffle to guide the air, thereby improving the mixing effect of the device and thus improving the reaction efficiency of the device.

[0014] (2) The high-throughput silicon nitride powder preparation device, when the rotation completes the reaction, the swing baffle and the air guide plate are completely in a vertical state, completely blocking the gas pipe. At this time, the rotating shaft drives the protruding part of the cam to rotate to the force rod, and cooperates with the hydraulic bin, arc rod, force plate and rotating rod, so that the rotating rod drives the discharge baffle to rotate, thereby opening the discharge port, making the device more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the overall cross-sectional three-dimensional structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the three-dimensional structure of the air guide assembly of the utility model;

[0018] Figure 4 This is a schematic diagram of the three-dimensional structure of the auxiliary component of the utility model.

[0019] In the picture:

[0020] 100, preparation device body; 200, heater; 300, rotating rod; 400, discharge baffle;

[0021] 500, air guide assembly; 501, servo motor; 502, rotating shaft; 503, swing wind deflector; 504, power gear; 505, force gear; 506, fixed ring gear; 507, rotating rod; 508, rotating sleeve; 509, air guide plate;

[0022] 600, auxiliary component; 601, hydraulic chamber; 602, cam; 603, force rod; 604, arc rod; 605, spring; 606, force plate. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0024] Example 1

[0025] See also Figures 1-4 A high-throughput silicon nitride powder preparation device includes a preparation device body 100, an inner wall of the preparation device body 100 is equipped with a heater 200, a side of the preparation device body 100 is rotatably connected to a rotating rod 300, and a side of the rotating rod 300 is fixedly connected to a discharge baffle 400;

[0026] The interior of the preparation device body 100 is provided with an air guide assembly 500, which includes a servo motor 501, and a rotating shaft 502 is connected to the side of the servo motor 501 in a transmission manner. After nitrogen is introduced into the device, the servo motor 501 is started, which drives the rotating shaft 502 connected to it to rotate. A swinging wind baffle 503 is fixedly connected to the outside of the rotating shaft 502. When the rotating shaft 502 rotates, the rotating shaft 502 drives the swinging wind baffle 503 fixedly connected to it to rotate. A power gear 504 is fixedly connected to the side of the rotating shaft 502. When the swinging wind baffle 503 rotates, the rotating shaft 502 simultaneously drives the power gear 504 fixedly connected to it to rotate. A force-bearing gear 505 is slidably and rotationally connected to the inner wall of the preparation device body 100. The force-bearing gear 505 is located outside the power gear 504, and the force-bearing gear 505 and the power gear 504 are in a meshing state. When the power gear 504 rotates, the forced gear 505 is meshed with the power gear 504, and the fixed gear ring 506 is also meshed with the forced gear 505. As a result, the forced gear 505 rotates under the action of the power gear 504 and begins to revolve around the power gear 504 as the axis. At the same time, the revolving direction of the forced gear 505 is opposite to the direction of rotation of the power gear 504. A fixed gear ring 506 is fixedly connected to the inner wall of the preparation device body 100. The fixed gear ring 506 is located outside the forced gear 505. The fixed gear ring 506 and the forced gear 505 are in meshing state. The side of the forced gear 505 is rotatably connected to a rotating rod 507. The side of the rotating rod 507 is slidably connected to a rotating sleeve 508. The outer side of the rotating sleeve 508 is fixedly connected to an air guide plate 509. When the force gear 505 and the power gear 504 rotate in opposite directions, the force gear 505 immediately drives the rotating rod 507 connected to it for rotation, so that the rotating rod 507 drives the rotating sleeve 508 connected to it for sliding rotation. At this time, the rotating sleeve 508 rotates in the opposite direction to the rotating shaft 502, so that the rotating sleeve 508 drives the wind guide plate 509 fixedly connected to it to rotate in the opposite direction to the swing wind baffle 503, to guide the wind, improve the mixing effect of the device, and thus improve the reaction efficiency of the device.

[0027] When in use, after nitrogen is introduced into the device, the servo motor 501 is started, which can drive the rotating shaft 502 connected to it to rotate, so that the rotating shaft 502 drives the swing wind baffle 503 fixedly connected to it to rotate, and the rotating shaft 502 simultaneously drives the power gear 504 fixedly connected to it to rotate. Because the force-bearing gear 505 is engaged with the power gear 504, and the fixed gear ring 506 is also engaged with the force-bearing gear 505, the force-bearing gear 505 rotates under the action of the power gear 504, and the power is used to generate the force. The gear 504 is the axis and starts to rotate. At the same time, the revolution direction of the force gear 505 is opposite to the rotation direction of the power gear 504. The force gear 505 then drives the rotating rod 507 connected to it to rotate, so that the rotating rod 507 drives the rotating sleeve 508 connected to it for sliding to rotate. At this time, the rotating sleeve 508 rotates in the opposite direction of the rotating shaft 502, so that the rotating sleeve 508 drives the wind guide plate 509 fixed to it to rotate in the opposite direction of the swing wind baffle 503 to guide the wind.

[0028] Example 2

[0029] See also Figures 1-4 Based on the first embodiment, an auxiliary assembly 600 is installed on the outside of the preparation device body 100. The auxiliary assembly 600 includes a hydraulic chamber 601, a cam 602 fixedly connected to the side of the rotating shaft 502, and a force-bearing rod 603 slidably connected to one end of the hydraulic chamber 601. When the rotation reaction is completed, the swing wind deflector 503 and the wind guide plate 509 are completely vertical, completely blocking the gas pipeline. At this time, the rotating shaft 502 drives the protruding portion of the cam 602 fixedly connected to it to rotate to the force-bearing rod 603, causing the force-bearing rod 603 to be squeezed and moved. In combination with the hydraulic chamber 601 slidably connected to the force-bearing rod 603, the pressure within the hydraulic chamber 601 is increased. The other end of the hydraulic chamber 601 is slidably connected to a curved rod 604, and a spring 605 is fixedly connected to the side of the force-bearing rod 603. The end of the spring 605, away from the force-bearing rod 603, is fixedly connected to the inner wall of the hydraulic chamber 601. The side of the rotating shaft 502 is fixedly connected to a force-bearing plate 606, which is located at the side of the curved rod 604 and is fixed to the curved rod 604. When the pressure in the hydraulic chamber 601 increases, the curved rod 604, which is slidably connected to the hydraulic chamber 601, moves, causing the curved rod 604 to drive the force-bearing plate 606, which is fixedly connected to it, to rotate. The force-bearing plate 606 drives the rotating rod 300, which is fixedly connected to it, to rotate, causing the rotating rod 300 to drive the discharge baffle 400, which is fixedly connected to it, to rotate, thereby opening the discharge port, making the device more convenient to use.

[0030] During use, based on Example 1, after the rotation reaction is completed, the swing wind baffle 503 and the wind guide plate 509 are completely in a vertical state, completely blocking the air supply pipe. At this time, the rotating shaft 502 drives the protruding part of the cam 602 fixedly connected to it to rotate to the force rod 603, so that the force rod 603 is squeezed and moves, and cooperates with the hydraulic warehouse 601 slidingly connected to the force rod 603, so that the pressure in the hydraulic warehouse 601 increases, driving the arc rod 604 slidingly connected to the hydraulic warehouse 601 to move, so that the arc rod 604 drives the force plate 606 fixedly connected to it to rotate, and the force plate 606 drives the rotating rod 300 fixedly connected to it to rotate, so that the rotating rod 300 drives the discharge baffle 400 fixedly connected to it to rotate, thereby opening the discharge port.

[0031] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A high-throughput silicon nitride powder preparation device, comprising a preparation device body (100), an inner wall of the preparation device body (100) being equipped with a heater (200), a side surface of the preparation device body (100) being rotatably connected to a rotating rod (300), and a side surface of the rotating rod (300) being fixedly connected to a discharge baffle (400); Its characteristics are: An air guide assembly (500) is provided inside the preparation device body (100), and the air guide assembly (500) includes a servo motor (501), a rotating shaft (502) is connected to the side of the servo motor (501), a wind baffle (503) is fixedly connected to the outside of the rotating shaft (502), a power gear (504) is fixedly connected to the side of the rotating shaft (502), a force-bearing gear (505) is slidably and rotatably connected to the inner wall of the preparation device body (100), a fixed gear ring (506) is fixedly connected to the inner wall of the preparation device body (100), a rotating rod (507) is rotatably connected to the side of the force-bearing gear (505), a rotating sleeve (508) is slidably connected to the side of the rotating rod (507), and an air guide plate (509) is fixedly connected to the outside of the rotating sleeve (508).

2. A high-throughput silicon nitride powder preparation device according to claim 1, characterized in that: The force-bearing gear (505) is located outside the power gear (504), and the force-bearing gear (505) and the power gear (504) are in a meshing state.

3. A high-throughput silicon nitride powder preparation device according to claim 2, characterized in that: The fixed gear ring (506) is located outside the stressed gear (505), and the fixed gear ring (506) and the stressed gear (505) are in meshing state.

4. A high-throughput silicon nitride powder preparation device according to claim 3, characterized in that: An auxiliary component (600) is provided on the outside of the preparation device body (100), and the auxiliary component (600) includes a hydraulic chamber (601), a cam (602) is fixedly connected to the side of the rotating shaft (502), one end of the hydraulic chamber (601) is slidably connected to a force-bearing rod (603), and the other end of the hydraulic chamber (601) is slidably connected to an arc rod (604), a spring (605) is fixedly connected to the side of the force-bearing rod (603), and a force-bearing plate (606) is fixedly connected to the side of the rotating shaft (502).

5. The high-throughput silicon nitride powder preparation device according to claim 4, characterized in that: One end of the spring (605) away from the force-bearing rod (603) is fixedly connected to the inner wall of the hydraulic chamber (601).

6. The high-throughput silicon nitride powder preparation device according to claim 5, characterized in that: The force-bearing plate (606) is located on the side of the arc-shaped rod (604), and the force-bearing plate (606) and the arc-shaped rod (604) are in a fixed state.

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