Spray head structure and deposition preparation device

Abstract

The utility model belongs to the technical field of film material growth, and discloses a spray head structure and a deposition preparation device, the spray head structure comprises a spray head body, a cooling pipe and an air supply pipe, the spray head body is internally provided with mutually isolated inner cavities, and the spray head body is provided with air outlet holes communicated with the inner cavities; one end of the cooling pipe is connected to the spray head body, the cooling pipe is provided with a fluid inlet pipe, the fluid inlet pipe is used for being communicated with a supply device for supplying cooling fluid, the cooling pipe is further provided with a fluid outlet, and one end of the air supply pipe penetrates into the spray head body from the cooling pipe to be communicated with an inner cavity. The nozzle body is arranged in the cavity so as to supply gas for reaction into the cavity, so that cooling fluid can be filled into the cooling pipe, the temperature of the nozzle body is reduced, and the phenomenon that the gas reacts in advance on the nozzle body is avoided; and through the separated inner cavities, the air supply amount of different positions can be adjusted, so that the film thickness is more uniform, and the product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film material growth, in particular to a shower head structure and a deposition preparation device. Background Art

[0002] When the deposition preparation device is in operation, the gas is distributed by the shower head and then enters the reaction chamber. The gas in the reaction chamber undergoes a chemical reaction on the surface of the substrate to grow a thin film material.

[0003] In the prior art, due to the high temperature of the reaction chamber, more heat is radiated onto the shower head, resulting in a high temperature inside the shower head. The gas is likely to react prematurely in the shower head before touching the surface of the substrate (i.e., the substrate), resulting in slow growth of the thin film material on the substrate. Moreover, most shower heads are unable to adjust the gas output in different places, resulting in the thin film material growing on the substrate thicker in some places and thinner in others, making the film thickness uneven at different positions of the film, affecting product quality. Utility Model Content

[0004] The purpose of the utility model is to provide a shower head structure and a deposition preparation device, which can reduce the temperature of the shower head on one hand and adjust the gas output at different positions of the shower head on the other hand.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] The shower head structure comprises:

[0007] A nozzle body, wherein a plurality of mutually isolated inner cavities are provided in the nozzle body, and a plurality of air outlets communicating with the inner cavities are opened on the nozzle body, and each of the inner cavities corresponds to the air outlet;

[0008] A cooling pipe, one end of which is connected to the nozzle body, the cooling pipe being provided with a fluid inlet pipe for connecting to a supply device for supplying cooling fluid, and the cooling pipe being provided with a fluid outlet;

[0009] A plurality of air supply pipes are provided corresponding to the inner cavity one by one, and one end of the air supply pipe is passed through the cooling pipe into the nozzle body and communicated with the inner cavity.

[0010] In some embodiments, the cooling tube includes a tube body, the air supply pipe passes through the tube body at both axial ends of the tube body, the fluid outlet is arranged at one end of the tube body close to the nozzle body, and the fluid inlet pipe penetrates into the tube body from one end of the tube body away from the nozzle body, and the fluid inlet pipe is used to provide the tube body with fluid that flows through the tube body and flows out from the fluid outlet.

[0011] In some embodiments, the nozzle body includes a gas distributor, a first gas distributor support, and a second gas distributor support, wherein the second gas distributor support is smaller than the first gas distributor support, and both the first gas distributor support and the second gas distributor support are funnel-shaped;

[0012] The small end of the first gas distributor is connected to the cooling pipe, an air distributor ring block is provided in the first gas distributor, and the small end of the second gas distributor is provided on the air distributor ring block, so that the second gas distributor is sleeved in the first gas distributor, and a gap is provided between the first gas distributor and the second gas distributor, forming an inner and outer layer of the inner cavity;

[0013] The gas distributor is sealed on the large opening of the funnel-shaped first gas distributor support to cover at least a portion of the inner cavity; the gas supply pipe is connected to the inner cavity through the gas distributor ring block;

[0014] The air outlet is provided on the air distribution plate.

[0015] In some embodiments, at least two second gas distributors are provided, and the sizes of the second gas distributors decrease successively. The second gas distributors are spaced apart along the height direction of the gas distributor ring block, so that the first gas distributor and at least two second gas distributors form multiple layers of the inner cavity.

[0016] In some embodiments, the number of the vent holes decreases from the vent holes corresponding to the innermost layer of the inner cavity to the vent holes corresponding to the outermost layer of the inner cavity.

[0017] In some embodiments, the air dividing ring block is arranged in the small end of the funnel-shaped first air dividing disc support, and the small end of the second air dividing disc support is arranged on the air dividing ring block at intervals along the height direction of the air dividing ring block. The air dividing ring block is provided with air dividing channels corresponding one to one to the inner cavity, the air outlet of the air dividing channel is connected to the inner cavity, and the air inlet of the air dividing channel is connected to the air supply pipe.

[0018] In some embodiments, the gas distribution ring block is provided with a plurality of steps at intervals along the height direction, and the small opening end of the second gas distribution disc holder is provided on the steps.

[0019] In some embodiments, the air dividing ring block includes several sub-ring blocks, and the sub-ring blocks are stacked and connected along the height direction. The contact surfaces of adjacent sub-ring blocks are respectively provided with tenons and tenons that cooperate with each other, and the air dividing channel runs through the tenons and tenons.

[0020] In some embodiments, at least part of the gas distribution channels has a plurality of gas outlets, and the plurality of gas outlets are distributed along the circumference of the gas distribution ring block.

[0021] In some embodiments, a purge channel is provided on the side of the first gas distributor, the gas outlet direction of the purge channel is set at an angle to the direction of the gas outlet, and the purge channel is connected to one of the gas supply pipes.

[0022] A deposition preparation device is also provided, which includes a cavity and the shower head structure as described above, wherein the shower head body is located in the cavity.

[0023] Beneficial effects of the utility model:

[0024] A cooling pipe is connected to the nozzle body, and one end of the air supply pipe is inserted into the nozzle body through the cooling pipe, so that when the air is supplied, the cooling fluid can be filled into the cooling pipe through the fluid inlet pipe, thereby continuously cooling the nozzle body and reducing the temperature of the nozzle body to avoid the phenomenon that the gas has reacted on the nozzle body in advance before being transported from the air outlet to the substrate position; and the above-mentioned nozzle body has a separated inner cavity, so that the air supply volume at different positions can be adjusted according to the growth condition of the thin film material on the substrate, so that the film thickness is more uniform and the product quality is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the sprinkler head of the utility model;

[0026] Figure 2 yes Figure 1 Exploded diagram;

[0027] Figure 3 This is a schematic diagram of the sprinkler head structure of the utility model without the gas distribution plate;

[0028] Figure 4 This is a schematic diagram showing the air distribution ring block of the sprinkler head structure of the utility model;

[0029] Figure 5 It is a cross-sectional view of the cooling pipe in the shower head structure of the utility model;

[0030] Figure 6 This is a cross-sectional view of the sprinkler head body in the sprinkler head structure of the present invention;

[0031] Figure 7 This is a schematic diagram of the first gas distribution plate support in the sprinkler head structure of the present invention;

[0032] Figure 8 This is a cross-sectional view of the first gas distribution plate support in the sprinkler head structure of the utility model;

[0033] Figure 9 It is a schematic diagram of the second gas distribution plate support in the sprinkler head structure of the utility model;

[0034] Figure 10This is an exploded view of one of the perspectives of the air ring block in the sprinkler head structure of the utility model;

[0035] Figure 11 This is an exploded view of the air ring block in the sprinkler head structure of the utility model from another perspective.

[0036] In the picture:

[0037] 1. Nozzle body; 11. Air outlet; 12. Air distributor; 13. First air distributor support; 131. Blocking portion; 14. Inner cavity; 15. Air distributor ring block; 151. Air distributor channel; 152. Step; 153. Tenon; 154. Tenon groove; 155. Air outlet; 156. Groove; 16. Purge channel; 17. Second air distributor support;

[0038] 2. Cooling pipe; 21. Fluid outlet; 22. Pipe body; 23. Blocking baffle; 24. Fluid inlet pipe;

[0039] 3. Air supply pipe. DETAILED DESCRIPTION

[0040] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0041] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0042] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0043] In the description of this embodiment, the terms "upper," "lower," "left," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0044] like Figures 1 to 11 As shown, the utility model provides a sprinkler head structure, which includes a sprinkler head body 1, a cooling pipe 2 and a plurality of air supply pipes 3. The sprinkler head body 1 is provided with a plurality of inner cavities 14 isolated from each other, and the sprinkler head body 1 is provided with a plurality of air outlet holes 11 connected to the inner cavities 14, and each inner cavity 14 corresponds to an air outlet hole 11; one end of the cooling pipe 2 is connected to the sprinkler head body 1, and the cooling pipe 2 is provided with a fluid inlet pipe 24, which is used to connect to a supply device for supplying cooling fluid, and a fluid outlet 21 is also provided on the cooling pipe 2; the air supply pipe 3 is arranged in a one-to-one correspondence with the inner cavity 14, and one end of the air supply pipe 3 is passed through the cooling pipe 2 into the sprinkler head body 1 and connected to the inner cavity 14.

[0045] A cooling tube 2 is connected to the nozzle body 1, and one end of the air supply tube 3 is inserted into the nozzle body 1 through the cooling tube 2, so that when the air is supplied, the cooling fluid can be filled into the cooling tube 2 through the fluid inlet tube 24, thereby continuously cooling the nozzle body 1 and reducing the temperature of the nozzle body 1 to avoid the phenomenon that the gas has not yet been transported from the air outlet 11 to the substrate position but has already reacted on the nozzle body 1 in advance; and the above-mentioned nozzle body 1 has a separated inner cavity 14, so that the air supply at different positions can be adjusted according to the growth condition of the thin film material on the substrate, so that the film thickness is more uniform and the product quality is improved.

[0046] like Figure 2 and Figure 5As shown, in some embodiments, the cooling tube 2 includes a tube body 22, and the opposite ends of the tube body 22 are closed by blocking baffles 23. The connection method between the blocking baffles 23 and the tube body 22 is not limited. The nozzle body 1 can be set on one of the blocking baffles 23. In the current embodiment, for the convenience of connection, the nozzle body 1 is connected to the tube body 22, so that the blocking baffle 23 abuts against the nozzle body 1, which can increase the contact area between the cooling tube 2 and the nozzle body 1 and improve the heat dissipation efficiency. Of course, it is understandable that the nozzle body 1 can be connected to the blocking baffle 23 or the tube body 22 alone. The air supply pipe 3 passes through the blocking baffles 23 at both axial ends of the tube body 22, so that the air supply pipe 3 is extended as far as possible in the cooling tube 2 to improve the heat exchange efficiency; at the same time, the fluid outlet 21 provided on the cooling tube 2 is provided at one end of the tube body 22 close to the nozzle body 1, and the fluid inlet pipe 24 penetrates into the tube body 22 from the end of the tube body 22 away from the nozzle body 1, thereby filling the tube body 22 with cooling fluid.

[0047] In order to set a plurality of mutually isolated inner cavities 14 in the nozzle body 1, such as Figure 2 and Figure 3 As shown, for example, the nozzle body 1 includes a gas distribution plate 12, a first gas distribution plate support 13 and a second gas distribution plate support 17; the size of the second gas distribution plate support 17 is smaller than that of the first gas distribution plate support 13, and both are funnel-shaped. It can be understood that the first gas distribution plate support 13 and the second gas distribution plate support 17 have a large mouth and a small mouth, and the small mouth end of the first gas distribution plate support 13 is connected to the cooling pipe to fix the nozzle body 1; the first gas distribution plate support 13 is provided with the above-mentioned gas distribution ring block 15, and the small mouth end of the second gas distribution plate support 17 It is arranged on the air dividing ring block 15, so that the second air dividing plate support 17 is sleeved in the first air dividing plate support 13, and there is a gap between the first air dividing plate support 13 and the second air dividing plate support 17, forming a two-layer inner cavity 14 of an inner and outer ring shape; and the air dividing plate 12 is sealed on the large mouth end of the funnel-shaped first air dividing plate support 13 to cover at least part of the inner cavity 14, and the air outlet 11 is opened on the air dividing plate 12, so that the air outlet holes 11 on the air dividing plate 12 correspond to different inner cavities 14, and the air supply pipe 3 is connected to the inner cavity 14 through the air dividing ring block 15.

[0048] In some embodiments, at least two second gas dividing plate supports 17 are provided, and the sizes of the second gas dividing plate supports 17 decrease successively. The second gas dividing plate supports 17 are spaced apart along the height direction of the gas dividing ring block 15, so that the multiple second gas dividing plate supports 17 are sequentially connected, so that the first gas dividing plate support 13 and at least two second gas dividing plate supports 17 are sequentially distributed in a ring shape from the inside to the outside to form multiple layers of the inner cavity 14.

[0049] It should be noted here that the number of partitions of the inner cavity 14 may not be specifically limited, and it may be set according to the requirements of different substrates and gas phase processes. In the current embodiment, one first gas distribution plate holder is set, and two second gas distribution plate holders 17 are set, which are sequentially connected to form three inner cavities 14 of a central layer, a sub-outer layer, and an outer layer.

[0050] Because the entire substrate rotates at a constant speed during the vapor phase process, centrifugal force will cause the gas in the center of the substrate to be thrown to the surrounding areas, resulting in the film formed on the substrate being thinner in the center and thicker at the edges. To avoid this phenomenon, in the current embodiment, the number of gas outlets 11 corresponding to the innermost inner cavity 14 decreases from that corresponding to the outermost inner cavity 14, thereby increasing the inlet gas velocity corresponding to the center of the substrate and slowing the inlet gas velocity corresponding to the periphery of the substrate, thereby achieving a more uniform film thickness. Furthermore, the reaction progress at different locations can be controlled by controlling the inlet gas flow of different gas supply pipes 3.

[0051] Specifically, if Figures 6 to 8 As shown, the first gas distributor tray 13 has a blocking portion 131, which is located within the small end of the first gas distributor tray 13. Thus, the cooling pipe 2 is connected to the small end of the first gas distributor tray 13, so that the blocking baffle 23 abuts the blocking portion 131. For example, for convenient fixing, the first gas distributor tray 13 and the cooling pipe 2 can be fixed by screwing. The air distribution ring block 15 is disposed within the small end of the first air distribution disc 13 and is fixedly connected to the sealing portion 131. The second air distribution disc 17 is sequentially disposed on the air distribution ring block 15 along its height direction. The second air distribution disc 17 is then supported and fixed by the air distribution ring block 15 to ensure its stability and form multiple inner cavities 14. The air distribution ring block 15 is provided with air distribution channels 151 corresponding to the inner cavities 14 one by one. The air outlets 155 of the air distribution channels 151 are connected to the inner cavities 14, while the air inlets of the air distribution channels 151 are connected to the air supply pipe 3, so that the gas in the air supply pipe 3 is introduced into different inner cavities 14 through the air distribution channels 151. Furthermore, in order to uniformly guide the gas in the air distribution channels 151 into the inner cavities 14, at least some of the air distribution channels 151 have multiple air outlets 155, which are distributed along the circumference of the air distribution ring block 15, thereby achieving uniform guidance. In the current embodiment, at least the inner cavity 14 corresponding to the outer layer and the inner cavity 14 corresponding to the sub-outer layer are provided with a plurality of air outlets 155 , and the inner cavity 14 corresponding to the inner layer can be reduced in number relative to the other two layers due to its smaller area.

[0052] More specifically, if Figure 10 and Figure 11As shown, the air dividing ring block 15 is provided with a plurality of steps 152 at intervals along its height direction, and the outer peripheral size of the steps 152 gradually decreases from the bottom to the top of the air dividing ring block 15, so that the second air dividing disc support 17 can be sleeved on the air dividing ring block 15 and pressed against the steps 152 to limit the position, thereby fixing the second air dividing disc support 17; it can be understood that the number of steps 152 is determined by the number of the second air dividing disc support 17.

[0053] In addition, if Figure 6 、 Figure 10 and Figure 11 As shown, in order to facilitate the production and installation of the gas dividing ring block 15, the gas dividing ring block 15 is assembled from a number of sub-ring blocks, and the sub-ring blocks are stacked and connected in the height direction. In order to fix the gas dividing ring block 15 on the first gas dividing plate 13, the side of the sub-ring block located at the bottom facing the sealing portion 131 and the side of the sealing portion 131 facing the sub-ring block are respectively provided with mutually matching tenons 153 and tenons 154, and the two are connected by mortise and tenon through the matching tenons 153 and tenons 154, and the gas dividing channel 151 passes through the above-mentioned tenons 153 and tenons 154, so that the gas supply pipe 3 can be plugged into the gas dividing channel 151 to transport gas. The above-mentioned mortise and tenon connection method can prevent the gas from flowing to other places and ensure directional gas transportation. It can be understood that the contact surfaces of adjacent sub-ring blocks are also provided with mutually matching tenons 153 and tenons 154, so as to ensure the stable and sealed connection between adjacent sub-ring blocks.

[0054] In the current embodiment, in order to cooperate with the above-mentioned first gas distribution plate support 13 and the two second gas distribution plate supports 17, the gas distribution ring block 15 is composed of two sub-ring blocks. The sub-ring block located at the lower layer has an air distribution channel 151, which is connected to the inner cavity 14 of the outermost layer; and the sub-ring block located at the upper layer is provided with two steps 152, which support the two second gas distribution plates, and have two air distribution channels 151, which are connected to the inner cavity 14 of the sub-outer layer and the inner cavity 14 of the inner layer respectively; for the convenience of description, the two steps 152 provided on the upper sub-ring block are defined as the first step and the second step from high to low. The air outlet 155 of the air distribution channel 151 connected to the inner cavity of the inner layer is located in the middle of the top surface of the sub-ring block, and a plurality of grooves 156 are also provided in the circumference of the upper sub-ring block. The notch of the groove 156 is located on the side of the sub-ring block, and one end of the groove 156 passes through the step surface of the first step. The air outlet 155 of the air distribution channel 151 connected to the inner cavity 14 of the sub-outer layer is located in the groove 156. When the second air distribution plate 17 is placed on the second step, it can block part of the notch of the groove 156, at least so that the groove 156 passes through the step surface of the first step to be exposed to connect to the inner cavity 14 of the sub-outer layer. Therefore, the above-mentioned groove 156 structure facilitates the opening of the air distribution channel 151 inside the air distribution ring block 15, facilitating its molding. It can be understood that when any sub-ring block is provided with multiple steps 152, the above-mentioned groove 156 can be opened.

[0055] like Figure 6 As shown, in some embodiments, a purge channel 16 is provided on the side of the first gas distribution plate support 13, and the purge channel 16 passes through the contact surface between the sealing portion 131 and the sealing baffle 23, and does not pass through the side of the sealing portion 131 facing the sub-ring block, wherein an air supply pipe 3 is provided to connect the above-mentioned purge channel 16, and the gas outlet direction of the purge channel 16 is set at an angle to the direction of the gas outlet hole 11, so that when the gas phase reaction process is completed, the entire cavity can be purged through the purge channel 16 or the gas can be purged during the gas phase reaction process to avoid gas accumulation in the cavity.

[0056] The present invention also provides a deposition preparation device, which includes a cavity and the above-mentioned shower head structure. The shower head body 1 is arranged in the cavity to supply reaction gas into the cavity, so that when supplying gas, cooling fluid can be filled into the cooling tube 2, thereby continuously cooling the shower head body 1 and reducing the temperature of the shower head body 1 to avoid the phenomenon that the gas has not yet been transported from the gas outlet 11 to the substrate position and has already reacted on the shower head body 1 in advance; and the above-mentioned shower head body 1 has a separated inner cavity 14, so that the gas supply at different positions can be adjusted according to the growth condition of the thin film material on the substrate, so that the film thickness is more uniform and the product quality is improved.

[0057] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Sprinkler head structure, characterized in that: include: A nozzle body (1), wherein a plurality of mutually isolated inner cavities (14) are provided in the nozzle body (1), a plurality of air outlet holes (11) communicating with the inner cavities (14) are opened on the nozzle body (1), and each of the inner cavities (14) corresponds to the air outlet hole (11); A cooling pipe (2), one end of the cooling pipe (2) is connected to the nozzle body (1), the cooling pipe (2) is provided with a fluid inlet pipe (24), the fluid inlet pipe (24) is used to connect to a supply device for supplying cooling fluid, and the cooling pipe (2) is also provided with a fluid outlet (21); A plurality of air supply pipes (3) are provided, wherein the air supply pipes (3) are arranged in a one-to-one correspondence with the inner cavity (14); one end of the air supply pipe (3) is passed through the cooling pipe (2) into the nozzle body (1) and communicated with the inner cavity (14).

2. The shower head structure according to claim 1, wherein: The cooling pipe (2) includes a pipe body (22), the air supply pipe (3) passes through the pipe body (22) along both axial ends of the pipe body (22), the fluid outlet (21) is arranged at one end of the pipe body (22) close to the nozzle body (1), and the fluid inlet pipe (24) passes into the pipe body (22) from one end of the pipe body (22) away from the nozzle body (1), and the fluid inlet pipe (24) is used to provide the pipe body (22) with fluid that circulates through the pipe body (22) and flows out from the fluid outlet (21).

3. The shower head structure according to claim 1 or 2, characterized in that: The nozzle body (1) comprises a gas distribution plate (12), a first gas distribution plate support (13) and a second gas distribution plate support (17), wherein the size of the second gas distribution plate support (17) is smaller than that of the first gas distribution plate support (13), and both the first gas distribution plate support (13) and the second gas distribution plate support (17) are funnel-shaped; The small-mouth end of the first gas distribution tray (13) is connected to the cooling pipe (2), and a gas distribution ring block (15) is provided in the first gas distribution tray (13). The small-mouth end of the second gas distribution tray (17) is provided on the gas distribution ring block (15), so that the second gas distribution tray (17) is sleeved in the first gas distribution tray (13), and a gap is provided between the first gas distribution tray (13) and the second gas distribution tray (17), forming two inner and outer layers of the inner cavity (14); The gas distribution plate (12) is sealed on the large end of the funnel-shaped first gas distribution plate holder (13) to cover at least a portion of the inner cavity (14); the gas supply pipe (3) is connected to the inner cavity (14) through the gas distribution ring block (15); The air outlet (11) is provided on the air distribution plate (12).

4. The shower head structure according to claim 3, characterized in that: At least two second gas distribution trays (17) are provided, and the sizes of the second gas distribution trays (17) are successively reduced. The second gas distribution trays (17) are spaced apart along the height direction of the gas distribution ring block (15), so that the first gas distribution tray (13) and at least two second gas distribution trays (17) form multiple layers of the inner cavity (14).

5. The shower head structure according to claim 4, characterized in that: The number of the air outlet holes (11) decreases from the air outlet holes (11) corresponding to the innermost layer of the inner cavity (14) to the air outlet holes (11) corresponding to the outermost layer of the inner cavity (14).

6. The shower head structure according to claim 4, characterized in that: The air dividing ring block (15) is arranged in the small end of the funnel-shaped first air dividing disc (13), and the small end of the second air dividing disc (17) is arranged on the air dividing ring block (15) in sequence and at intervals along the height direction of the air dividing ring block (15). The air dividing ring block (15) is provided with an air dividing channel (151) corresponding to the inner cavity (14) one by one, the air outlet (155) of the air dividing channel (151) is connected to the inner cavity (14), and the air inlet of the air dividing channel (151) is connected to the air supply pipe (3).

7. The shower head structure according to claim 6, characterized in that: The gas distribution ring block (15) is provided with a plurality of steps (152) at intervals along the height direction, and the small opening end of the second gas distribution disc support (17) is provided on the steps (152).

8. The shower head structure according to claim 6, wherein: The gas separation ring block (15) comprises a plurality of sub-ring blocks, which are stacked and connected in the height direction, and the contact surfaces of adjacent sub-ring blocks are respectively provided with tenons (153) and tenons (154) that match each other, and the gas separation channel (151) passes through the tenons (153) and the tenons (154).

9. The shower head structure according to claim 6, wherein: At least part of the gas separation channel (151) has a plurality of gas outlets (155), and the plurality of gas outlets (155) are distributed along the circumference of the gas separation ring block (15).

10. The shower head structure according to claim 3, wherein: A purge channel (16) is provided on the side of the first gas distribution tray (13), the gas outlet direction of the purge channel (16) is set at an angle with the direction of the gas outlet hole (11), and the purge channel (16) is connected to one of the gas supply pipes (3).

11. A deposition preparation device comprising a chamber, characterized in that: It also comprises the shower head structure according to any one of claims 1 to 10, wherein the shower head body (1) is located in the cavity.

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