Quartz boat cleaning device
By designing a quartz boat cleaning device and using the air blowing pipe and exhaust pipe assembly to achieve efficient cleaning, the problems of time-consuming and environmentally polluting traditional cleaning are solved, and a fast and environmentally friendly quartz boat cleaning effect is achieved.
Patent Information
- Application Number
- CN202422398486.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-29
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-09-29
AI Technical Summary
Traditional quartz boat cleaning methods are time-consuming, costly, and cause serious environmental pollution. In particular, the use of hydrofluoric acid results in complex wastewater treatment, which affects production efficiency and environmental costs.
A quartz boat cleaning device is designed, which includes a tank body, a fixed component, a blowing component and a dust cleaning component. The blowing pipe and the rotating part are used to achieve uniform gas blowing, and the silicon powder is removed by the exhaust pipe to reduce the use of chemical liquid.
Shorten the cleaning time to 1 hour, reduce the amount of chemical liquids used, reduce manpower consumption and environmental pollution, and improve cleanliness and production efficiency.
Smart Images
Figure CN223338008U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of quartz boat cleaning, in particular to a quartz boat cleaning device. Background Art
[0002] In the photovoltaic industry, the annealing process is one of the key steps in the production of both PERC cells and TOPCon cells, and plays an important role in improving cell performance. Whether it is a PERC cell or a TOPCon cell, the carrier required for the silicon wafer to enter the furnace tube for reaction is a quartz boat. Long-term use will leave silicon powder at the teeth of the quartz boat, affecting the yield and efficiency of the cell. Therefore, the quartz boat needs to be taken offline regularly for cleaning, with a cycle of about 15 days. There are two types of quartz boats. One is for phosphorus diffusion, boron diffusion, LPCVD (Low Pressure Chemical Vapor Deposition) and other reactive gases to participate in the reaction, which will generate reactants on the quartz boat and has strong coating ability. This type of boat must be cleaned with acid (hydrochloric acid solution + hydrofluoric acid solution) and then blown dry with nitrogen or compressed air for saturated use. The other type of boat has no reactants or very few reactants deposited on the quartz boat (the industry currently still uses acid cleaning + water washing). For example, PERC battery annealing uses oxygen, and TOPCon battery annealing process uses nitrogen. No reactants are deposited on the quartz boat. The reason for the dirty boat is that the quartz boat becomes dirty with the increase in the number of times it is used.
[0003] The traditional cleaning method involves two people working together to remove the quartz boat from the production line, transporting it to the quartz boat cleaning room via a dedicated boat and vehicle, and then using a solution of HF (hydrofluoric acid) / HCl (hydrochloric acid) mixed in a specific ratio for chemical cleaning. It is then necessary to rinse with pure water five times to wash away the residual chemical solution. The entire cleaning process takes about 10 hours. It is worth noting that hydrofluoric acid is not only expensive, but also produces wastewater containing fluoride ions during its use. The latter must undergo a complex treatment procedure - such as adding chemicals such as slaked lime and calcium chloride to the wastewater to make the fluoride ions (F-) and calcium ions (Ca2 + ) reaction to form an insoluble calcium fluoride precipitate. This is then compressed into solid waste by a filter press and shipped for disposal. This series of operations not only increases production costs but also creates an environmental burden. Therefore, a new quartz boat cleaning device is proposed to address quartz boats with non-reactive gas deposition. Utility Model Content
[0004] The purpose of the utility model is to provide a quartz boat cleaning device to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a quartz boat cleaning device, comprising a trough body and a cover body detachably assembled at the opening of the trough body, the trough body is provided with a fixing component for limiting the position of the quartz boat to be cleaned, the fixing component includes two groups of fixing parts that are relatively designed and respectively limit the two ends of the quartz boat, the interior of the trough body is provided with a blowing component for blowing out gas, the blowing component includes multiple groups of blowing pipes that do not affect the taking of the quartz boat, and the multiple groups of blowing pipes are connected to the inner wall of the trough body through a rotating part.
[0006] As a further solution of the present invention: the fixing part includes a vertical plate designed vertically along the inner wall of the tank body, a trapezoidal block is installed on the surface of the vertical plate, a support plate for supporting the quartz boat is installed at the bottom of the trapezoidal block, and a blocking block for limiting the position of the quartz boat is installed on the support plate.
[0007] As a further solution of the present invention: the side wall of the trough body is provided with a connecting pipe that penetrates into the interior and is connected to the rotating part. The number of the connecting pipes is the same as the number of the blowing pipes and corresponds one to one. The ends of the multiple connecting pipes away from the blowing pipes are connected to the air inlet pipe, and the surfaces of the multiple groups of the blowing pipes are installed with multiple groups of nozzles in the connecting pipes.
[0008] As a further solution of the present invention: the air blowing pipe and the connecting pipe are connected via a rotating member, and the rotating member drives the air blowing pipe to rotate.
[0009] As a further solution of the present invention: the end of the air inlet pipe away from the air blowing pipe is connected to the air blowing device.
[0010] As a further solution of the present invention: a dust cleaning assembly is provided in the tank body, and the dust cleaning assembly includes multiple exhaust pipes arranged in the tank body, wherein the outer circumferences of the multiple exhaust pipes are provided with multiple exhaust holes connected to the pipes, and one end of the multiple exhaust pipes is provided with a connecting pipe passing through the outside of the tank body, and the ends of the multiple connecting pipes away from the exhaust pipes are connected to the collecting pipe.
[0011] As a further solution of the present invention: the end of the collecting pipe away from the connecting pipe is connected to the exhaust equipment.
[0012] As a further solution of the present invention: the four corners of the inner cavity of the tank are all designed to be 1 / 4 arc-shaped.
[0013] As a further solution of the present invention: an AOI camera is also provided in the tank.
[0014] Compared with the prior art, the beneficial effects of the present invention are:
[0015] The present application uses an air blowing assembly to blow gas onto the surface of a quartz boat to be cleaned placed in a tank body through an air blowing pipe, thereby effectively removing silicon powder from the surface of the quartz boat. At the same time, the rotating part and the air blowing pipe are combined to ensure that the blown gas evenly covers the entire surface of the quartz boat, eliminating the use of HF and HCL pure water for boat washing, while ensuring the cleanliness of the quartz boat. Each time the boat is washed, approximately 18L of HF, 8L of HCL and 8 tons of pure water are used; the boat washing time is shortened from the original 10 hours to the current 1 hour, reducing the impact of quartz boat cleaning on production capacity; and at the same time, the consumption of manpower during the quartz boat cleaning process and the loss of the quartz boat during manual handling are eliminated. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a schematic diagram of the overall structure of the cleaning device of the present utility model;
[0017] Figure 2 This is a schematic diagram of the interior of the tank body of the present invention;
[0018] Figure 3 This is a schematic diagram of the fixing portion of the present utility model;
[0019] Figure 4 This is a schematic top view of the tank body of the utility model;
[0020] Figure 5 This is a schematic cross-sectional view of the tank body of the present utility model;
[0021] Figure 6 It is a schematic diagram of a trapezoidal block of the present utility model;
[0022] In the figure: 1. trough body; 2. vertical plate; 3. trapezoidal block; 4. supporting plate; 5. clamping block; 6. cover body; 7. rotating part; 8. air blowing pipe; 9. nozzle; 10. connecting pipe; 11. air inlet pipe; 12. exhaust pipe; 13. exhaust hole; 14. connecting pipe; 15. collecting pipe. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0024] See also Figure 1-6In an embodiment of the utility model, a quartz boat cleaning device includes a tank body 1 and a cover body 6 that is detachably assembled at the opening of the tank body 1. A fixing component for limiting the position of the quartz boat to be cleaned is provided in the tank body 1. The fixing component includes two groups of fixing parts that are designed to be opposite to each other and respectively limit the two ends of the quartz boat. A blowing component for blowing out gas is provided inside the tank body 1. The blowing component includes multiple groups of blowing pipes 8 that do not affect the removal of the quartz boat. The multiple groups of blowing pipes 8 are connected to the inner wall of the tank body 1 through a rotating member 7.
[0025] Specifically, the opening of the trough body 1 is adapted to the cover body 6. When the cover body 6 is closed, it can ensure that the silicon powder generated by the quartz boat inside the trough body 1 during the cleaning process will not escape from the opening of the trough body 1, which helps to maintain the cleanliness and safety of the working area. Secondly, under the action of the fixing component, the quartz boat to be cleaned can be fixed in the inner cavity of the trough body 1, wherein the blowing component is used to blow gas to the surface of the quartz boat to remove the silicon powder attached thereto. Since the quartz boat is taken vertically, the installation position of the blowing pipe 8 can not only meet the requirements of blowing the quartz boat, but also will not affect the taking of the quartz boat. The rotating part 7 can drive the blowing pipe 8 to rotate within a certain angle range, so that the blown gas can fully cover different sides of the quartz boat, thereby improving the cleaning effect.
[0026] See also Figure 2-3 In one embodiment, in this embodiment, preferably, the fixing portion includes a vertical plate 2 designed vertically along the inner wall of the trough body 1, a trapezoidal block 3 is installed on the surface of the vertical plate 2, and a supporting plate 4 for supporting the quartz boat is installed at the bottom of the trapezoidal block 3. A card block 5 for limiting the position of the quartz boat is installed on the supporting plate 4. Furthermore, the design of the trapezoidal block 3 can limit the end of the quartz boat, and secondly, the design of the supporting plate 4 can limit the bottom of the quartz boat, and the design of the card block 5 is adapted to the notch of the quartz boat, which can limit the horizontal movement of the quartz boat. After integration, the position of the quartz boat can be quickly fixed to ensure that the position of the quartz boat will not change during the cleaning process.
[0027] See also Figure 5 In one embodiment, in this embodiment, preferably, the side wall of the trough body 1 is provided with a connecting pipe 10 that penetrates into the interior and is connected to the rotating member 7. The number of the connecting pipes 10 is the same as the number of the blowing pipes 8 and corresponds one to one. The ends of the multiple connecting pipes 10 away from the blowing pipes 8 are all connected to the air inlet pipe 11. The surfaces of the multiple groups of blowing pipes 8 are equipped with multiple groups of nozzles 9 in the connecting pipes. The blowing pipes 8 and the connecting pipes 10 are connected by the rotating member 7. The rotating member 7 drives the blowing pipe 8 to rotate. The end of the air inlet pipe 11 away from the blowing pipe 8 is connected to the blowing equipment. The blowing equipment is existing technology and will not be described in detail here.
[0028] During use, the blowing device is turned on to allow the gas to enter the interior of the air inlet pipe 11, and then enter the interior of the connecting pipe 10 through the air inlet pipe 11. At the same time, the rotating part 7 can drive the blowing pipe 8 to rotate at a predetermined angle. The structure of the rotating part 7 is not limited, and it only needs to drive the blowing pipe 8 to rotate. The rotating part 7 is a prior art and will not be described in detail here. The gas passing through the connecting pipe 10 can enter the interior of the blowing pipe 8 through the rotating part 7, and finally be ejected through the nozzle 9. After the ejected gas comes into contact with the silicon powder on the surface of the quartz boat, it can flush it off the surface of the quartz boat.
[0029] See also Figure 2-5 In one embodiment, in this embodiment, preferably, a dust cleaning assembly is provided in the tank body 1, and the dust cleaning assembly includes a plurality of exhaust pipes 12 provided in the tank body 1, wherein the outer circumferential surfaces of the plurality of exhaust pipes 12 are provided with a plurality of exhaust holes 13 connected to the tubes, and one end of the plurality of exhaust pipes 12 is provided with a connecting pipe 14 passing through the outside of the tank body 1, and the ends of the plurality of connecting pipes 14 away from the exhaust pipes 12 are connected to the collecting pipe 15, and the ends of the collecting pipe 15 away from the connecting pipe 14 are connected to the exhaust equipment. Further, when the silicon powder on the quartz boat is purged, suction is generated by the exhaust equipment, and at this time, the suction acts on the collecting pipe 15 and the connecting pipe 14 in turn, and then the silicon powder is drawn into the interior of the exhaust pipe 12 through the exhaust holes 13 on the exhaust pipe 12, and then discharged through the connecting pipe 14 and the collecting pipe 15 in turn.
[0030] See also Figure 2-3 In one embodiment, in this embodiment, preferably, the four corners of the inner cavity of the tank body 1 are set to 1 / 4 arc shape, which can prevent impurities from remaining at the corners of the tank body 1 after purging.
[0031] See also Figure 1-6 In one embodiment, in this embodiment, preferably, an AOI camera is also provided in the tank body 1 to check whether the quartz boat is cleaned. At the same time, a silicon wafer sensing device is also provided in the tank body 1 to prevent the silicon wafers from being purged and generating batch debris because they are not unloaded from the quartz boat. The above-mentioned AOI camera and silicon wafer sensing device are both existing technologies and will not be described in detail here. They are not shown in the figure. The quartz boat cleaning device is installed above the storage position of the main machine.
[0032] The working principle and use process of the utility model are as follows: first, the main machine program selects the quartz boat whose service life needs to be cleaned, and the main machine slide sends the quartz boat to the automation, and sends it back to the slide after the automatic unloading is completed. The main machine opens the cover 6 after receiving the empty boat information from the slide, and sends a signal to the robot after the cover 6 is opened to carry the quartz boat to be cleaned; after the quartz boat is carried into the tank 1, it is limited by the fixing part, and then the silicon wafer sensing device senses that there is no silicon wafer on the quartz boat and starts to close the cover 6 signal to start the cleaning program. During the cleaning process, multiple groups of blowers are used to blow the quartz boat. The air pipe 8 carries the nozzle 9 to purge the entire quartz boat. Secondly, the rotating part 7 drives the air pipe 8 to rotate, so that the purge coverage is wider. At the same time, the dust cleaning component is used to extract the silicon powder in the tank body 1. After the cleaning is completed, the cover body 6 automatically opens (three lenses are set inside to take AOI photos of the teeth position of the quartz boat. After identifying foreign matter, the program is inspired again to clean it again. If there is no foreign matter, a signal is sent). The robot sends the cleaned quartz boat to the automatic loading and put it back into use on the production line. The control system used above is existing technology and will not be described in detail here.
[0033] Although this specification is described according to implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.
[0034] Therefore, the above description is only a preferred embodiment of the present application and is not intended to limit the scope of implementation of the present application; that is, all equivalent modifications made according to the scope of the claims of the present application are within the scope of protection of the claims of the present application.
Claims
1. A quartz boat cleaning device, comprising a tank body (1) and a cover body (6) detachably assembled at the opening of the tank body (1), characterized in that: The tank body (1) is provided with a fixing assembly for limiting the position of the quartz boat to be cleaned, and the fixing assembly includes two sets of fixing parts designed relative to each other and respectively limiting the two ends of the quartz boat. The tank body (1) is provided with a blowing assembly for blowing out gas, and the blowing assembly includes multiple sets of blowing pipes (8) that do not affect the taking of the quartz boat, and the multiple sets of blowing pipes (8) are connected to the inner wall of the tank body (1) through a rotating member (7).
2. The quartz boat cleaning device according to claim 1, characterized in that: The fixing portion comprises a vertical plate (2) designed vertically along the inner wall of the trough body (1); a trapezoidal block (3) is installed on the surface of the vertical plate (2); a supporting plate (4) for supporting the quartz boat is installed at the bottom of the trapezoidal block (3); and a clamping block (5) for limiting the position of the quartz boat is installed on the supporting plate (4).
3. The quartz boat cleaning device according to claim 1, characterized in that: The side wall of the tank body (1) is provided with a connecting pipe (10) which penetrates into the inside and is connected to the rotating member (7). The number of the connecting pipes (10) is the same as the number of the blowing pipes (8) and corresponds to each other. The ends of the multiple connecting pipes (10) away from the blowing pipes (8) are connected to the air inlet pipe (11). The surfaces of the multiple groups of blowing pipes (8) are equipped with multiple groups of nozzles (9) in the connecting pipes.
4. The quartz boat cleaning device according to claim 3, characterized in that: The air blowing pipe (8) and the connecting pipe (10) are connected via a rotating member (7), and the rotating member (7) drives the air blowing pipe (8) to rotate.
5. The quartz boat cleaning device according to claim 3, characterized in that: The end of the air inlet pipe (11) away from the air blowing pipe (8) is connected to the air blowing device.
6. The quartz boat cleaning device according to claim 1, characterized in that: The trough body (1) is provided with a dust cleaning assembly, and the dust cleaning assembly includes a plurality of exhaust pipes (12) provided in the trough body (1), wherein the outer peripheral surfaces of the plurality of exhaust pipes (12) are provided with a plurality of exhaust holes (13) connected to the pipes, and one end of the plurality of exhaust pipes (12) is provided with a connecting pipe (14) passing through the outside of the trough body (1), and the ends of the plurality of connecting pipes (14) away from the exhaust pipes (12) are connected to the collecting pipe (15).
7. The quartz boat cleaning device according to claim 6, characterized in that: The end of the collecting pipe (15) away from the connecting pipe (14) is connected to the air extraction equipment.
8. The quartz boat cleaning device according to claim 1, characterized in that: The four corners of the inner cavity of the tank body (1) are all designed to be 1 / 4 arc-shaped.
9. The quartz boat cleaning device according to claim 1, characterized in that: An AOI camera is also provided in the tank body (1).