Target gun head assembly and magnetic control target gun

Abstract

The utility model discloses a target gun head assembly and magnetron target gun relates to magnetron sputtering technical field, wherein the target gun head assembly includes base, cooling piece and at least three magnetic body, the cooling piece is provided on the base, the top of cooling piece forms a plurality of cooling part, at least three magnetic body is provided on cooling piece or base, and the cooling part is provided with a plurality of cooling part. The at least three magnetic bodies are sequentially sleeved in the radial direction of the magnetic bodies, and the magnetic bodies and the cooling parts are arranged in a staggered mode in the radial direction of the magnetic bodies. According to the target gun head assembly and the magnetic control target gun, even if the size of the target gun head assembly is increased, the magnetic field intensity can be ensured, the interaction between a magnetic field and an electric field can be ensured, the sputtering effect of a target material is prevented from being reduced, and in addition, the cooling effect on a magnetic body and the target material can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a target gun head assembly and a magnetron target gun. Background Art

[0002] In related technologies, the target gun head of a magnetron target gun primarily consists of a base, two magnetic bodies nested within each other, and a cooling structure. The two magnetic bodies cooperate to generate a magnetic field. During operation, electrons spiral under the interaction of the magnetic and electric fields, striking argon gas to generate ions. These ions strike the target surface, sputtering atoms or molecules from the target. The cooling structure adheres to the bottom surface of the magnetic body to cool the magnetic body and the target material above it, preventing demagnetization due to overheating of the magnetic body and damage to the target material due to overheating.

[0003] In existing magnetron target guns, when the target diameter increases, leading to a larger target gun head, the distance between the two magnetic bodies increases, which in turn reduces the magnetic field strength, diminishing the interaction between the magnetic and electric fields, and reducing the electron confinement. This reduces the probability of electrons striking the argon gas, resulting in a decrease in the target's sputtering efficiency. Furthermore, existing cooling methods are ineffective for cooling the magnetic bodies and target. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a target gun head assembly that, even if the size of the target gun head assembly is increased, can maintain the magnetic field strength and the interaction between the magnetic field and the electric field, thereby preventing the sputtering effect of the target material from being reduced. In addition, it can improve the cooling effect of the magnetic body and the target material.

[0005] The utility model also provides a magnetic control target gun having the target gun head assembly.

[0006] According to the target gun head assembly of the embodiment of the first aspect of the present utility model, it includes a base, a cooling member and at least three magnetic bodies, the cooling member is arranged on the base, a plurality of cooling parts are formed on the top of the cooling member, at least three magnetic bodies are arranged on the cooling member or the base, at least three magnetic bodies are sequentially arranged along the radial direction of the magnetic body, and the magnetic body and the cooling parts are staggered along the radial direction of the magnetic body.

[0007] The target gun head assembly according to the embodiment of the utility model has at least the following beneficial effects:

[0008] In the present invention, the number of magnetic bodies is at least three, and even if the size of the target gun head assembly increases, the distance between two adjacent magnetic bodies will not be too large due to the increase in the number of magnetic bodies, thereby ensuring the strength of the generated magnetic field, ensuring the interaction between the magnetic field and the electric field, ensuring the binding effect on electrons, and thus ensuring the probability of electrons colliding with argon gas, preventing the sputtering effect of the target material from decreasing. In addition, the cooling member is formed with multiple cooling parts, and the magnetic bodies and the cooling parts are staggered along the radial direction of the magnetic body. In addition to absorbing heat from the bottom surface of the magnetic body, heat can also be absorbed from the side walls of the magnetic body, resulting in a better cooling effect on the magnetic body. Moreover, the cooling part can be closer to the target material above the magnetic body, which also has a better cooling effect on the target material.

[0009] According to some embodiments of the present invention, there are three magnetic bodies, and there are two cooling parts, and the two cooling parts are respectively located between two adjacent groups of magnetic bodies.

[0010] According to some embodiments of the present invention, the cooling portion is annular and extends along the circumference of the magnetic body. The cooling portion is formed with a cooling channel, which extends along the circumference of the cooling portion. The cooling channel is used to transport a cooling medium.

[0011] According to some embodiments of the present invention, the cooling member is provided with a medium inlet and a medium outlet, the outermost cooling channel is connected to one of the medium inlet and the medium outlet, the innermost cooling channel is connected to the other, and the cooling member is provided with a connecting channel between two adjacent cooling channels.

[0012] According to some embodiments of the present invention, an input end and an output end are respectively formed at both ends of the cooling channel in the longitudinal direction, and the input end and the output end are spaced apart on the side close to each other. In two adjacent cooling channels, the output end of one cooling channel is connected to the input end of the other cooling channel through the connecting channel.

[0013] According to some embodiments of the present invention, the outermost cooling channel is connected to the medium inlet, the innermost cooling channel is connected to the medium outlet, and in two adjacent cooling channels, the output end of the outer cooling channel and the input end of the inner cooling channel are connected through the connecting channel.

[0014] According to some embodiments of the present invention, the cooling member includes a first cooling block and a second cooling block, the cooling portion and the connecting channel are arranged on the first cooling block, the bottom end of the cooling channel and the bottom end of the connecting channel pass through the bottom surface of the first cooling block, the second cooling block is connected to the first cooling block and covers the bottom end of the cooling channel and the bottom end of the connecting channel, and the medium inlet and the medium outlet are arranged on the second cooling block.

[0015] According to some embodiments of the present invention, the top end of the cooling portion protrudes from the top end of the magnetic body, and the top end of the cooling portion is used for placing a target material.

[0016] According to some embodiments of the present invention, the target gun head assembly further includes a flange and an annular insulating plate, the flange is provided at the top of the base, the annular insulating plate is mounted on the top of the flange, and the cooling element is mounted on the top of the annular insulating plate.

[0017] The magnetic control target gun according to the second embodiment of the present invention includes the target gun head assembly described in the first embodiment.

[0018] The magnetic control target gun according to the embodiment of the present invention has at least the following beneficial effects:

[0019] In the target gun head assembly of the first embodiment of the present invention, the number of magnetic bodies is at least three. Therefore, even if the size of the target gun head assembly increases, the spacing between two adjacent magnetic bodies will not be too large due to the increase in the number of magnetic bodies. This ensures the strength of the generated magnetic field, the interaction between the magnetic field and the electric field, and the binding effect on electrons, thereby ensuring the probability of electrons colliding with argon gas and preventing the sputtering effect of the target material from decreasing. In addition, the cooling member is formed with multiple cooling parts, and the magnetic bodies and cooling parts are arranged in an interlaced manner along the radial direction of the magnetic body. In addition to absorbing heat from the bottom surface of the magnetic body, heat can also be absorbed from the side walls of the magnetic body, resulting in a better cooling effect on the magnetic body. Moreover, the cooling part can be closer to the target material above the magnetic body, which also improves the cooling effect on the target material.

[0020] Additional aspects and advantages of the present invention will be partially given in the following description, and some of the additional aspects and advantages will become apparent from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0022] Figure 1 This is a schematic structural diagram of the magnetic control target gun of the present invention;

[0023] Figure 2 for Figure 1Schematic diagram of the structure after the cathode cover and target are removed;

[0024] Figure 3 for Figure 1 A cross-sectional view of the target gun head assembly in FIG.

[0025] Figure 4 Schematic diagram of the flow direction of the cooling medium.

[0026] Figure Number:

[0027] base 100;

[0028] Cooling element 200; cooling portion 201; cooling channel 202; medium inlet 203; medium outlet 204; connecting channel 205; input end 206; output end 207; first cooling block 208; second cooling block 209; first joint 210;

[0029] Magnetic body 300;

[0030] Target 400;

[0031] Flange 500;

[0032] annular insulating plate 600;

[0033] cathode cover 700;

[0034] Base 800. DETAILED DESCRIPTION

[0035] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0036] In the description of the present invention, it should be understood that descriptions involving orientation, such as the orientation or positional relationship indicated by up, down, etc., are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0037] In the description of this utility model, "a plurality" refers to two or more. The use of "first" or "second" is solely for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features indicated, or implicitly indicating the order of the technical features indicated.

[0038] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0039] Reference below Figures 1 to 4 The target gun head assembly and the magnetic control target gun according to the embodiments of the present invention are described.

[0040] According to the target gun head assembly of the first embodiment of the utility model, Figures 1 to 4 As shown, it includes a base 100 , a cooling member 200 and at least three magnetic bodies 300 .

[0041] The base 100 is used to be mounted on the base 800 of the magnetron target gun. The cooling element 200 is provided on the base 100. For example, the cooling element 200 can be connected to the base 100 by fasteners, clamping, or welding. The top of the cooling element 200 is formed with multiple cooling portions 201. The cooling portions 201 can be two, three, or any other suitable number, for example, two, which is determined according to actual needs. The cooling portion 201 can be annular or in any other suitable shape. The cooling portion 201 can be made of a material with good thermal conductivity. The cooling portion 201 can be connected to a cold source.

[0042] The number of magnetic bodies 300 can be three, four or other suitable numbers, for example, it can be three, and the magnetic body 300 can be arranged on the cooling member 200, for example, the magnetic body 300 can be connected or clamped to the cooling member 200 by fasteners. Of course, the magnetic body 300 can also be arranged on the base 100, and all the magnetic bodies 300 are sequentially arranged along the radial direction of the magnetic body 300. For example, the innermost magnetic body 300 can be cylindrical, and the other magnetic bodies 300 can be annular. All the magnetic bodies 300 can be concentric and sequentially arranged. The magnetic body 300 and the cooling part 201 are staggered along the radial direction of the magnetic body 300, that is, the cooling part 201 is between two adjacent magnetic bodies 300, and the magnetic body 300 is between two adjacent cooling parts 201.

[0043] The target gun head assembly may further include a cathode cover 700 . During operation, the target material 400 is placed above the magnetic body 300 , and then the cathode cover 700 covers the target material 400 , the cooling element 200 and the magnetic body 300 .

[0044] In the present invention, the number of magnetic bodies 300 is at least three. Therefore, even if the size of the target gun head assembly increases, the spacing between two adjacent magnetic bodies 300 will not be too large due to the increased number of magnetic bodies 300. This ensures the strength of the generated magnetic field, the interaction between the magnetic field and the electric field, and the electron confinement effect, thereby ensuring the probability of electrons striking the argon gas and preventing a decrease in the sputtering effect of the target material 400. Furthermore, the cooling element 200 is formed with a plurality of cooling portions 201. The magnetic bodies 300 and the cooling portions 201 are arranged in an alternating manner along the radial direction of the magnetic body 300. This allows the magnetic body 300 to absorb heat from its bottom surface as well as its sidewalls, resulting in a better heat absorption and cooling effect on the magnetic body 300. Furthermore, the cooling portions 201 can be closer to the target material 400 above the magnetic body 300, further improving the cooling effect on the target material 400.

[0045] refer to Figure 2 and Figure 3 As shown, in some embodiments of the present invention, there are three magnetic bodies 300 and two cooling units 201. The two cooling units 201 are respectively located between two adjacent magnetic bodies 300 in two groups, that is, one cooling unit 201 is located between one group of two adjacent magnetic bodies 300, and the other cooling unit 201 is located between the other group of two adjacent magnetic bodies 300. In this embodiment, the provision of three magnetic bodies 300 not only ensures the strength of the generated magnetic field, ensures the interaction between the magnetic field and the electric field, ensures the electron confinement effect, thereby ensuring the probability of electrons colliding with the argon gas and preventing the sputtering effect of the target 400 from decreasing, but also avoids the structural complexity, installation troubles and excessive economic costs caused by too many magnetic bodies 300. The provision of two cooling units 201 and their respective locations between two adjacent magnetic bodies 300 not only ensures the cooling effect on the magnetic bodies 300 and the target 400, but also avoids the structural complexity, processing troubles and excessive economic costs caused by too many cooling units 201.

[0046] refer to Figure 3 and Figure 4 As shown, in some embodiments of the present invention, the cooling portion 201 is annular and extends along the circumference of the magnetic body 300. The cooling portion 201 is formed with a cooling channel 202, which extends along the circumference of the cooling portion 201. The cooling channel 202 is used to transport a cooling medium. For example, the cooling medium can be cooling water, cold air, Freon, or other suitable cooling medium. The cooling channel 202 is connected to an external cooling medium conveying device, and the external cooling medium conveying device inputs the cooling medium into the cooling channel 202. The cooling medium can move along the circumference of the cooling portion 201, that is, along the circumference of the magnetic body 300. During the movement, the cooling medium can absorb heat from the circumference of the magnetic body 300 and the target material 400, thereby achieving a better cooling effect on the magnetic body 300 and the target material 400.

[0047] refer to Figure 3 and Figure 4 As shown, in some embodiments of the present invention, the cooling element 200 is provided with a medium inlet 203 and a medium outlet 204. The outermost cooling channel 202 is connected to one of the medium inlet 203 and the medium outlet 204, and the innermost cooling channel 202 is connected to the other. The cooling element 200 is provided with a connecting channel 205 between two adjacent cooling channels 202. For example, the outermost cooling channel 202 can be connected to the medium inlet 203, and the innermost cooling channel 202 can be connected to the medium outlet 204. The medium inlet 203 is connected to a first joint 210, and the medium outlet 204 is connected to a second joint. The cooling medium, such as cooling water, enters the outermost cooling channel 202 through the first joint 210, then passes through the other cooling channels 202 in sequence, and finally exits through the second joint connected to the innermost cooling channel 202. In this embodiment, such a configuration only requires one first joint 210 and one second joint to allow the cooling medium to flow through all cooling channels 202, resulting in a simpler structure and better cooling effect.

[0048] refer to Figure 4 As shown, in some embodiments of the present invention, the two ends of the cooling channel 202 in the longitudinal direction respectively form an input end 206 and an output end 207, and the input end 206 and the output end 207 are spaced apart on the side close to each other. In two adjacent cooling channels 202, the output end 207 of one cooling channel 202 is connected to the input end 206 of the other cooling channel 202 through a connecting channel 205. In this embodiment, although the cooling channel 202 extends along the circumference of the cooling portion 201, the cooling channel 202 is not an annular channel connected at the end, but a long strip structure with closed ends. The input end 206 and the output end 207 of the cooling channel 202 are close to each other, and the input end 206 and the output end 207 are spaced apart on the side close to each other. In this way, the cooling medium needs to flow through the entire cooling channel 202 along the longitudinal direction of the cooling channel 202 before leaving. The cooling medium flows through a wider range and has a better cooling effect.

[0049] refer to Figure 4As shown, in some embodiments of the present invention, the outermost cooling channel 202 is connected to the medium inlet 203, and the innermost cooling channel 202 is connected to the medium outlet 204. Of the two adjacent cooling channels 202, the output end 207 of the outer cooling channel 202 is connected to the input end 206 of the inner cooling channel 202 via a connecting channel 205. Generally, the outer ring of the outermost magnetic body 300 and the target 400 has the highest temperature. In this embodiment, the cooling medium first passes through the outermost cooling channel 202, then passes through the other cooling channels 202 from the outside to the inside, and finally exits from the innermost cooling channel 202. In this way, the outer ring of the outermost magnetic body 300 and the target 400 with the highest temperature can be cooled first, and then the middle portion of the other magnetic bodies 300 and the target 400 can be cooled, resulting in a better cooling effect.

[0050] refer to Figure 3 As shown, in some embodiments of the present invention, the cooling member 200 includes a first cooling block 208 and a second cooling block 209, the cooling portion 201 and the connecting channel 205 are provided on the first cooling block 208, the bottom end of the cooling channel 202 and the bottom end of the connecting channel 205 pass through the bottom surface of the first cooling block 208, the second cooling block 209 is connected to the first cooling block 208 and covers the bottom end of the cooling channel 202 and the bottom end of the connecting channel 205, and the medium inlet 203 and the medium outlet 204 are provided on the second cooling block 209. In this embodiment, during processing, the cooling channel 202 and the connecting channel 205 that pass through the bottom end can be first processed on the first cooling block 208, and then the second cooling block 209 can be connected to the first cooling block 208, and the second cooling block 209 covers the bottom end of the cooling channel 202 and the bottom end of the connecting channel 205, so that the cooling channel 202 and the connecting channel 205 can be sealed, making the processing simpler and more convenient.

[0051] It should be noted that the first cooling block 208 and the second cooling block 209 can be welded or connected by fasteners.

[0052] refer to Figure 2 and Figure 3 As shown, in some embodiments of the present invention, the top of the cooling portion 201 protrudes from the top of the magnetic body 300, and the top of the cooling portion 201 is used to place the target 400. In this embodiment, the top of the cooling portion 201 protrudes from the top of the magnetic body 300, which not only facilitates the placement of the target 400, but also allows the cooling portion 201 to fit the bottom surface of the target 400, thereby improving the cooling effect on the target 400. In addition, a certain distance can be created between the target 400 and the magnetic body 300, thereby making it easier for electrons to collide with argon gas to generate ions, thereby improving the sputtering effect of the target 400.

[0053] refer to Figure 3As shown, in some embodiments of the present invention, the target gun head assembly further includes a flange 500 and an annular insulating plate 600. The flange 500 is disposed at the top of the base 100, the annular insulating plate 600 is mounted at the top of the flange 500, and the cooling element 200 is mounted at the top of the annular insulating plate 600. For example, the annular insulating plate 600 can be mounted to the top of the flange 500 via fasteners, and the cooling element 200 can be mounted to the top of the annular insulating plate 600 via fasteners. The annular insulating plate 600 can be made of an electrically insulating material. In this embodiment, the provision of the annular insulating plate 600 can insulate the magnetic body 300 from the outside, reducing the impact of the external electric field on the electric field on the target gun head assembly, thereby achieving a better sputtering effect on the target material 400. Moreover, the annular insulating plate 600 and the flange 500 are both annular in shape, which facilitates the passage of the medium delivery pipe.

[0054] It should be noted that a seal may be provided between the annular insulating plate 600 and the flange 500 , and a seal may also be provided between the annular insulating plate 600 and the cooling element 200 .

[0055] The magnetic control target gun according to the second embodiment of the present invention includes the target gun head assembly according to the first embodiment.

[0056] According to the magnetron target gun of the embodiment of the present invention, by adopting the target gun head assembly of the embodiment of the first aspect of the present invention, the number of magnetic bodies 300 is at least three. Therefore, even if the size of the target gun head assembly is increased, the spacing between two adjacent magnetic bodies 300 will not be too large due to the increase in the number of magnetic bodies 300. This ensures the strength of the generated magnetic field, the interaction between the magnetic field and the electric field, the electron confinement effect, and thus the probability of electrons striking the argon gas, thereby preventing a decrease in the sputtering effect of the target material 400. In addition, the cooling element 200 is formed with a plurality of cooling portions 201. The magnetic bodies 300 and the cooling portions 201 are arranged in an alternating manner along the radial direction of the magnetic body 300. Therefore, in addition to absorbing heat from the bottom surface of the magnetic body 300, heat can also be absorbed from the side walls of the magnetic body 300, thereby achieving a better cooling effect on the magnetic body 300. Moreover, the cooling portions 201 can be closer to the target material 400 above the magnetic body 300, thereby achieving a better cooling effect on the target material 400.

[0057] It should be noted that, since the magnetic control target gun can adopt all the technical solutions of the target gun head assembly of the first embodiment, it at least has all the beneficial effects brought by the technical solutions of the first embodiment. These additional beneficial effects will not be repeated here.

[0058] It is understandable that other structures and operations of the magnetic control target gun according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0059] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A target gun head assembly, characterized in that: include: base; A cooling member is provided on the base, and a plurality of cooling parts are formed on the top of the cooling member; At least three magnetic bodies are provided on the cooling member or the base, and at least three magnetic bodies are sequentially sleeved along the radial direction of the magnetic body, and the magnetic body and the cooling part are staggered along the radial direction of the magnetic body.

2. The target gun head assembly according to claim 1, characterized in that There are three magnetic bodies and two cooling parts, and the two cooling parts are respectively located between two adjacent magnetic bodies in two groups.

3. The target gun head assembly according to claim 1 or 2, characterized in that: The cooling portion is annular and extends along the circumference of the magnetic body. A cooling channel is formed on the cooling portion. The cooling channel extends along the circumference of the cooling portion. The cooling channel is used to transport a cooling medium.

4. The target gun head assembly according to claim 3, characterized in that: The cooling member is provided with a medium inlet and a medium outlet, the outermost cooling channel is connected to one of the medium inlet and the medium outlet, the innermost cooling channel is connected to the other, and the cooling member is provided with a connecting channel between two adjacent cooling channels.

5. The target gun head assembly according to claim 4, characterized in that: The two ends of the cooling channel in the length direction form an input end and an output end respectively, and the input end and the output end are spaced apart on the side close to each other. In two adjacent cooling channels, the output end of one cooling channel is connected to the input end of the other cooling channel through the connecting channel.

6. The target gun head assembly according to claim 5, characterized in that: The outermost cooling channel is connected to the medium inlet, the innermost cooling channel is connected to the medium outlet, and in two adjacent cooling channels, the output end of the outer cooling channel and the input end of the inner cooling channel are connected through the connecting channel.

7. The target gun head assembly according to claim 4, characterized in that: The cooling element comprises: a first cooling block, wherein the cooling portion and the connecting channel are provided on the first cooling block, and the bottom ends of the cooling channel and the connecting channel pass through the bottom surface of the first cooling block; The second cooling block is connected to the first cooling block and covers the bottom end of the cooling channel and the bottom end of the connecting channel. The medium inlet and the medium outlet are arranged on the second cooling block.

8. The target gun head assembly according to claim 1 or 2, characterized in that: The top end of the cooling portion protrudes from the top end of the magnetic body, and the top end of the cooling portion is used for placing a target material.

9. The target gun head assembly according to claim 1 or 2, characterized in that: The target gun head assembly also includes: A flange is provided on the top of the base; An annular insulating plate is installed on the top of the flange, and the cooling element is installed on the top of the annular insulating plate.

10. A magnetic control target gun, characterized in that: The target gun head assembly comprises the target gun head assembly according to any one of claims 1 to 9.

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