Original furnace leading-in device
The combined structure of the bellows and the lead screw assembly solves the problem of long replacement time of the original furnace in the molecular beam epitaxy equipment and the impact on other original furnaces, and realizes convenient and stable replacement of the original furnace.
Patent Information
- Application Number
- CN202422811883.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-18
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-11-18
AI Technical Summary
Existing molecular beam epitaxy equipment requires breaking into the air to replace the original furnace, which takes a lot of time and affects other original furnaces. In addition, the existing test cavity solution that can replace the original furnace alone cannot be linked to other accessories.
The combined structure of bellows, fixed flange, angle valve, mounting plate, drive assembly and screw assembly is adopted. The mounting flange and bellows are driven by the screw assembly to move, so that the original furnace can be replaced separately, and the vacuum inside the bellows is achieved through the angle valve.
The original furnace can be easily replaced without affecting the vacuum environment of the test chamber, thus improving the operation efficiency and stability.
Smart Images
Figure CN223342867U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal growth equipment, in particular to a raw furnace introducer. Background Art
[0002] The original furnace is mainly used for spraying semiconductor materials. At present, when the molecular beam epitaxy equipment test chamber is in use, if a different original furnace is to be replaced, it is necessary to break the air and replace it, and then re-vacuum it, which takes a lot of time and may affect other original furnaces on the same test chamber.
[0003] Existing test chamber solutions that allow for independent replacement of the original furnace utilize a specialized chamber design, using multiple specialized cylindrical tubes to house the original furnace. Because this custom-shaped chamber differs significantly from the actual chamber, it cannot be linked to other accessories such as the test baffle. Utility Model Content
[0004] The technical problem to be solved by the utility model is to provide an original furnace introducer with a compact structure, convenient operation and stable operation in view of the deficiencies in the existing technology.
[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:
[0006] A raw furnace introducer comprises: a bellows, a fixed flange, an angle valve, a mounting plate, a mounting flange, a drive assembly and a screw assembly; the fixed end of the bellows is connected to the fixed flange to achieve the installation and fixation of the bellows, the telescopic end of the bellows is connected to the mounting flange, and the mounting flange is used to connect to the raw furnace; a connecting flange is provided on the side of the fixed end of the bellows, and the connecting flange is connected to the angle valve to achieve vacuuming inside the bellows; the mounting plate is located on the side of the mounting flange, the drive assembly is connected to the mounting plate, one end of the screw assembly passes through the mounting plate and is connected to the output end of the drive assembly, and the other end of the screw assembly passes through the mounting flange and is connected to the fixed flange; under the drive of the drive assembly, the screw assembly drives the mounting flange and the bellows to move to achieve replacement of the raw furnace.
[0007] As a further improvement of the present invention, it also includes guide members, and multiple groups of guide members are evenly distributed on the outer periphery of the bellows to assist the bellows in driving the original furnace to move; one end of the guide member is connected to the mounting plate, and the other end of the guide member passes through the mounting flange and is connected to the fixed flange.
[0008] As a further improvement of the present invention, photoelectric sensors are provided on both sides of the guide member along the telescopic movement direction of the bellows, and a trigger member is provided on the mounting flange; when the bellows drives the original furnace to telescopically move to a preset extreme position, the trigger member triggers the photoelectric sensor.
[0009] As a further improvement of the present invention, the guide member is a guide rod.
[0010] As a further improvement of the present invention, the guide member is a linear guide rail.
[0011] As a further improvement of the present invention, the drive assembly is a combination of a servo motor and a reducer, and the reducer is connected to the screw assembly through a coupling.
[0012] As a further improvement of the present invention, the driving assembly is a hand wheel.
[0013] Compared with the prior art, the advantages of the present invention are:
[0014] The original furnace introducer of the present invention fixes the fixed end of the bellows by a fixing flange, connects the telescopic end of the bellows to the mounting flange, and connects the original furnace by utilizing the mounting flange, thereby realizing the connection between the bellows and the original furnace; at the same time, a connecting flange is provided on the side of the fixed end of the bellows, and the connecting flange is connected to the angle valve, which can realize vacuuming inside the bellows and meet the vacuum degree requirement of the original furnace replacement; further, a mounting plate is provided on the side of the mounting flange, and the drive assembly is connected to the mounting plate, and one end of the screw assembly passes through the mounting plate and is connected to the output end of the drive assembly, and the other end of the screw assembly passes through the mounting flange and is connected to the fixing flange; under the drive of the drive assembly, the screw assembly drives the mounting flange and the fixing flange to move, thereby realizing the replacement of a single original furnace without affecting the vacuum environment of the test chamber. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a schematic diagram of the three-dimensional structure principle of the original furnace introducer in a specific embodiment of the present utility model;
[0016] Figure 2 This is a schematic diagram of the main structural principle of the original furnace introducer in a specific embodiment of the present utility model;
[0017] Legend: 1. Bellows; 2. Fixing flange; 3. Angle valve; 4. Guide; 5. Mounting plate; 6. Mounting flange; 7. Drive assembly; 8. Coupling; 9. Photoelectric sensor; 10. Screw assembly; 11. Connecting flange; 12. Trigger. DETAILED DESCRIPTION
[0018] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby.
[0019] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.
[0020] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, "multiple" means two or more, unless otherwise clearly and specifically defined.
[0021] Example
[0022] like Figure 1 and Figure 2 As shown, the original furnace introducer of the present invention includes: a bellows 1, a fixed flange 2, an angle valve 3, a mounting plate 5, a mounting flange 6, a drive assembly 7 and a screw assembly 10. The fixed end of the bellows 1 is connected to the fixed flange 2 to achieve the installation and fixation of the bellows 1, and the telescopic end of the bellows 1 is connected to the mounting flange 6, and the mounting flange 6 is used to connect to the original furnace. It can be understood that in this embodiment, a movable plate valve (not shown in the figure) is provided in the fixed flange 2 to control the internal partition or end opening of the bellows 1. A connecting flange 11 is provided on the side of the fixed end of the bellows 11, and the connecting flange 11 is connected to the angle valve 3 to achieve vacuuming inside the bellows 1. The mounting plate 5 is located on the side of the mounting flange 6, and the drive assembly 7 is connected to the mounting plate 5. One end of the screw assembly 10 passes through the mounting plate 5 and is connected to the output end of the drive assembly 7. The other end of the screw assembly 10 passes through the mounting flange 6 and is connected to the fixed flange 2. The screw assembly 10 is arranged on the side of the bellows 1 along the telescopic movement direction of the bellows 1. Driven by the driving assembly 7, the screw assembly 1 drives the mounting flange 6 and the bellows 1 to move, so as to realize the replacement of the original furnace.
[0023] In this embodiment, the fixed end of the bellows 1 is fixed by the fixed flange 2, the telescopic end of the bellows 1 is connected to the mounting flange 6, and the mounting flange 6 is used to connect the original furnace, thereby realizing the connection between the bellows 1 and the original furnace; at the same time, a connecting flange 11 is provided on the side of the fixed end of the bellows 1, and the connecting flange 11 is connected to the angle valve 3, and the angle valve 3 is connected to the vacuum pumping device. The angle valve 11 can realize the vacuum pumping inside the bellows 1, thereby meeting the vacuum degree requirement for the replacement of the original furnace. Furthermore, a mounting plate 5 is provided on the side of the mounting flange 6, the drive assembly 7 is connected to the mounting plate 5, one end of the screw assembly 10 passes through the mounting plate 5 and is connected to the output end of the drive assembly 7, and the other end of the screw assembly 10 passes through the mounting flange 6 and is connected to the fixed flange 2; under the drive of the drive assembly 7, the screw assembly drives the mounting flange 6 and the bellows 1 to move, thereby realizing the replacement of a single original furnace without affecting the vacuum environment of the test chamber.
[0024] like Figure 1 As shown, the bellows 1 also includes four sets of guide members 4, evenly distributed around its periphery. These guide members 4 assist the bellows 1 in moving the original furnace. One end of each guide member 4 is connected to the mounting plate 5, while the other end extends through the mounting flange 6 and connects to the fixed flange 2. The guide members 4 cooperate with the lead screw assembly 10 to achieve smooth telescopic movement of the bellows 1, thereby enabling smooth replacement of the original furnace.
[0025] Furthermore, along the direction of the bellows 1's telescopic movement, photoelectric sensors 9 are provided on either side of the guide member 4, and a trigger member 12 is provided on the mounting flange 6. When the bellows 1 drives the original furnace to telescope to a predetermined limit position, the trigger member 12 triggers the photoelectric sensors 9, thereby accurately determining the original furnace's position.
[0026] In this embodiment, the guide member 4 is a guide rod, which has the characteristics of simple structure and high guiding stability. In other embodiments, the guide member 4 can also be in the form of a linear guide rail.
[0027] In this embodiment, the driving assembly 7 is a combination of a servo motor and a reducer, and the reducer is connected to the screw assembly 10 through a coupling 8.
[0028] In other embodiments, the driving assembly 7 may also adopt a hand wheel, and the operation of the lead screw assembly 10 is controlled by rotating the hand wheel, thereby driving the bellows 1 and the original furnace to move smoothly.
[0029] When in use, the fixed flange 2 at the fixed end of the bellows 1 is connected to one side of the plate valve (not shown in the figure), and the other side of the plate valve is connected to a test cavity with a higher vacuum degree. This test cavity is used for the original furnace test, that is, the bellows 1 is arranged between the test cavity and the original furnace, and the original furnace is connected by the mounting flange 6 at the telescopic end of the bellows 1. Before conducting the test, the plate valve is closed to isolate the bellows 1 from the test cavity, and then the test cavity is evacuated. When the interior of the original furnace test cavity is a vacuum environment, the drive assembly 7 drives the screw assembly 10 to run in the forward direction to drive the bellows 1 to stretch, move the mounting flange 6 to the forward limit position, install the original furnace, and seal one end of the original furnace with the mounting flange 6, and the other end of the original furnace passes through the interior of the bellows 1. Afterwards, the angle valve 3 is used to partially evacuate the interior of the bellows 1. After the partial vacuum is completed, the plate valve is opened to connect the bellows 1 with the test chamber. The drive assembly 7 drives the screw assembly 10 to run in the reverse direction to shorten the bellows 1 and move the mounting flange 6 to the reverse limit position. During this process, one end of the original furnace is passed through the fixed flange 2 and extended into the test chamber, and moved to a suitable position for testing.
[0030] After the test is completed, move the mounting flange 6 to the positive limit position again, close the plate valve, open the angle valve 3 to break the air, and replace the original furnace. Repeat the above steps to test the next original furnace.
[0031] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, certain improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.
Claims
1. A raw furnace introducer, characterized in that: include: A bellows (1), a fixed flange (2), an angle valve (3), a mounting plate (5), a mounting flange (6), a drive assembly (7) and a screw assembly (10); the fixed end of the bellows (1) is connected to the fixed flange (2) to achieve the installation and fixation of the bellows (1); the telescopic end of the bellows (1) is connected to the mounting flange (6), and the mounting flange (6) is used to connect to the original furnace; a connecting flange (11) is provided on the side of the fixed end of the bellows (1), and the connecting flange (11) is connected to the angle valve (3) to achieve the installation and fixation of the bellows (1). The interior of the bellows (1) is vacuumed; the mounting plate (5) is located on the side of the mounting flange (6); the drive assembly (7) is connected to the mounting plate (5); one end of the screw assembly (10) passes through the mounting plate (5) and is connected to the output end of the drive assembly (7); the other end of the screw assembly (10) passes through the mounting flange (6) and is connected to the fixed flange (2); under the drive of the drive assembly (7), the screw assembly (10) drives the mounting flange (6) and the bellows (1) to move, so as to realize the replacement of the original furnace.
2. The raw furnace introducer according to claim 1, characterized in that: It also includes a guide member (4), and multiple groups of guide members (4) are evenly distributed on the outer periphery of the bellows (1) to assist the bellows (1) in driving the original furnace to move; one end of the guide member (4) is connected to the mounting plate (5), and the other end of the guide member (4) passes through the mounting flange (6) and is connected to the fixed flange (2).
3. The raw furnace introducer according to claim 2, characterized in that: Along the telescopic movement direction of the bellows (1), photoelectric sensors (9) are respectively provided on both sides of the guide member (4), and a trigger member (12) is provided on the mounting flange (6); when the bellows (1) drives the original furnace to telescopically move to a preset limit position, the trigger member (12) triggers the photoelectric sensor (9).
4. The raw furnace introducer according to claim 2 or 3, characterized in that: The guide member (4) is a guide rod.
5. The raw furnace introducer according to claim 2 or 3, characterized in that: The guide member (4) is a linear guide rail.
6. The raw furnace introducer according to any one of claims 1 to 3, characterized in that: The driving assembly (7) is a combination of a servo motor and a reducer, and the reducer is connected to the screw assembly (10) via a coupling (8).
7. The raw furnace introducer according to any one of claims 1 to 3, characterized in that: The driving component (7) is a hand wheel.