Linear motor driving device

Abstract

The utility model provides a linear motor driving device, and relates to the field of semiconductors and detection. The linear motor driving device comprises a fixed plate and a movable plate which are oppositely arranged at an interval, a linear motor is arranged between the fixed plate and the movable plate, the linear motor comprises a coil assembly and a magnetic steel assembly, the coil assembly is fixedly connected with the fixed plate, the magnetic steel assembly is fixedly connected with the movable plate, and the coil assembly can drive the magnetic steel assembly to move in the movement direction. According to the linear motor driving device, the linear motor is adopted as a driving part, so that the requirements of high acceleration and high speed can be met, the magnetic steel assembly of the linear motor is fixedly arranged on the movable plate, the coil assembly is fixedly arranged on the fixed plate, and in the working process, the magnetic steel assembly is subjected to reverse thrust and moves linearly along with the movable plate; and the coil assembly is fixed, so that a drag chain for arranging a wire harness of the coil assembly is not needed, and the linear motor driving device has the advantages of fewer integral parts, smaller integral size and smaller occupied space.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors and detection, and in particular to a linear motor drive device. Background Art

[0002] In existing technology, Z-axis motion assemblies or platforms typically utilize a servo motor drive, a lead screw transmission, and a pneumatic cylinder for gravity balance. However, due to the limitations of the lead screw, the motion speed and acceleration of existing Z-axis motion assemblies are relatively low, increasingly unable to meet the market demand for high-speed and high-acceleration motion. Furthermore, existing Z-axis motion assemblies have a large number of components, are bulky, and occupy a large space. Utility Model Content

[0003] The purpose of the utility model is to provide a linear motor drive device to solve the technical problems existing in the prior art of a large number of linear motion components, a large overall size, and a large space occupied.

[0004] The linear motor drive device provided by the present invention includes a fixed plate and a movable plate that are arranged relative to and at intervals, with a linear motor arranged between the two. The linear motor includes a coil assembly and a magnetic steel assembly. The coil assembly is fixedly connected to the fixed plate, and the magnetic steel assembly is fixedly connected to the movable plate. The coil assembly can drive the magnetic steel assembly to move along the direction of motion.

[0005] Furthermore, the linear motor drive device also includes a displacement detection component, which includes a reading head and a grating scale. The grating scale is fixedly arranged on the surface opposite to the movable plate and the fixed plate or the side of the magnetic steel component parallel to the direction of movement; the reading head is fixedly arranged on the fixed plate and opposite to the grating scale.

[0006] Furthermore, the magnetic steel assembly includes a first mounting plate and a second mounting plate that are oppositely and spaced apart, one side of the first mounting plate and the second mounting plate being fixedly connected by a connecting block, and the other side forming an insertion opening; a plurality of magnetic steels are provided on the opposite side of the first mounting plate and the second mounting plate; the coil of the coil assembly is inserted between the oppositely disposed magnetic steels through the insertion opening;

[0007] The grating scale and the insertion port are respectively located on two opposite sides of the magnetic steel component.

[0008] Furthermore, the linear motor drive device also includes two groups of photoelectric components, which are arranged parallel to the direction of movement and are respectively located on both sides of the reading head; the photoelectric components include a photoelectric switch and a photoelectric sensor sheet, the photoelectric switch is fixedly arranged on the fixed plate and close to the end of the fixed plate along the direction of movement, and the photoelectric sensor sheet is fixedly arranged on the movable plate.

[0009] Furthermore, the movement direction is the Z-axis direction.

[0010] Furthermore, the linear motor drive device also includes at least one magnetic spring, which includes an iron core and a magnetic ring movably mounted outside the iron core, the iron core extends parallel to the Z axis and is fixedly arranged on the side of the fixed plate parallel to the Z axis; the magnetic ring is fixedly arranged on the side of the movable plate parallel to the Z axis.

[0011] Furthermore, there are two magnetic springs, the iron cores of the two magnetic springs are respectively fixed on the two side surfaces of the fixed plate parallel to the Z axis, and the magnetic rings of the two magnetic springs are respectively fixed on the two side surfaces of the movable plate parallel to the Z axis.

[0012] Furthermore, the upper end and the lower end of the iron core are fixedly connected to the side of the fixed plate parallel to the Z axis through an upper end fixing seat and a lower end fixing seat respectively; the magnetic ring is fixedly connected to the side of the movable plate parallel to the Z axis through a connecting seat; one of the upper end fixing seat and the connecting seat is provided with an upper end limit block for preventing the connecting seat from continuing to move upward; one of the lower end fixing seat and the connecting seat is provided with a lower end limit block for preventing the connecting seat from continuing to move downward.

[0013] Furthermore, the movable plate and the fixed plate are connected by at least one set of sliding components, each set of sliding components includes a guide rail and at least one slider, the guide rail is fixed to the fixed plate parallel to the direction of movement, and the slider is fixed to the movable plate and slidably connected to the guide rail.

[0014] Furthermore, the number of the sliding components is two groups, and the two groups of sliding components are respectively arranged on both sides of the linear motor along a direction perpendicular to the movement direction.

[0015] The linear motor drive device provided by the utility model can produce the following beneficial effects:

[0016] The linear motor drive device provided by the present invention adopts a linear motor as a driving component, so it can meet the requirements of high acceleration and high speed. Moreover, the magnetic steel component of the linear motor is fixedly arranged on the movable plate, and the coil component is fixedly arranged on the fixed plate. During operation, since the coil component is fixed, the magnetic steel component is subjected to a reverse thrust and moves in a straight line with the movable plate. Moreover, since the coil component is fixed, there is no need to set a drag chain for arranging the wiring harness of the coil component. Therefore, the linear motor drive device provided by the present invention has a relatively small number of overall components, a relatively small overall size, and occupies a relatively small space. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of the three-dimensional structure of a linear motor drive device provided in an embodiment of the present utility model;

[0019] Figure 2 A schematic diagram of a partial three-dimensional structure of a linear motor drive device provided in an embodiment of the present utility model;

[0020] Figure 3 This is a partial bottom view structural diagram of the linear motor drive device provided in an embodiment of the utility model.

[0021] Description of reference numerals:

[0022] 100-fixed plate; 200-movable plate;

[0023] 300- linear motor; 310- coil assembly; 311- coil; 312- base; 320- magnetic steel assembly; 321- first mounting plate; 322- second mounting plate; 323- connection block; 324- magnetic steel;

[0024] 400-magnetic spring; 410-iron core; 420-magnetic ring; 430-upper end fixing seat; 440-lower end fixing seat; 450-connecting seat; 460-upper end limit block; 470-lower end limit block;

[0025] 500-sliding assembly; 510-guide rail; 520-slider;

[0026] 600-displacement detection component; 610-reading head; 620-grating scale; 630-mounting seat;

[0027] 700-photoelectric component; 710-photoelectric switch; 720-photoelectric sensor; 730-switch seat. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following describes in detail the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0029] This embodiment provides a linear motor drive device, such as Figures 1 to 3As shown, the linear motor drive device includes a fixed plate 100 and a movable plate 200 that are relatively and spaced apart, with a linear motor 300 arranged therebetween. The linear motor 300 includes a coil assembly 310 and a magnetic steel assembly 320. The coil assembly 310 is fixedly connected to the fixed plate 100, and the magnetic steel assembly 320 is fixedly connected to the movable plate 200. The coil assembly 310 can drive the magnetic steel assembly 320 to move along the motion direction. In this embodiment, the motion direction is specifically the Z-axis direction. However, in other embodiments of the present application, the motion direction may also be a linear direction such as the X-axis direction or the Y-axis direction.

[0030] The linear motor drive device provided in this embodiment adopts a linear motor 300 as a driving component, so it can meet the requirements of high acceleration and high speed. Moreover, the magnetic steel component 320 of the linear motor 300 is fixedly arranged on the movable plate 200, and the coil component 310 is fixedly arranged on the fixed plate 100. During operation, since the coil component 310 is fixed, the magnetic steel component 320 is subjected to a reverse thrust and moves linearly along the Z-axis with the movable plate 200. Since the coil component 310 is fixed, there is no need to set a drag chain for arranging the wiring harness of the coil component 310. Therefore, the linear motor drive device provided in this embodiment has a relatively small number of overall components, a relatively small overall size, and occupies a relatively small space.

[0031] Specifically, in this embodiment, Figure 3 As shown, the magnetic steel assembly 320 includes a first mounting plate 321 and a second mounting plate 322 that are arranged opposite and spaced apart. One side of the first mounting plate 321 and the second mounting plate 322 are fixedly connected by a connecting block 323, and the other side forms an insertion port. A plurality of magnetic steels 324 are provided on the opposing sides of the first mounting plate 321 and the second mounting plate 322. The coil 311 of the coil assembly 310 is inserted between the opposing magnetic steels 324 through the insertion port. The second mounting plate 322 is fixedly connected to the movable plate 200, and a predetermined gap is defined between the first mounting plate 321 and the fixed plate 100. The coil 311 of the coil assembly 310 is fixed to the fixed plate 100 via a base 312. The base 312 serves to connect the coil 311 to the fixed plate 100 and also acts as a carrier for the coil 311, ensuring that the coil 311 is positioned correctly.

[0032] Specifically, in this embodiment, Figure 2As shown, the linear motor drive device further includes a displacement detection assembly 600, which includes a reading head 610 and a grating scale 620. The grating scale 620 is fixedly mounted parallel to the Z-axis on the surface of the movable plate 200 opposite the fixed plate 100 or on the side of the magnetic steel assembly 320. The reading head 610 is fixedly mounted on the fixed plate 100 and opposite the grating scale 620. The grating scale 620 occupies relatively little space in a dynamic state or during operation. Therefore, compared to an arrangement in which the reading head 610 moves and the grating scale 620 is stationary, the linear motor drive device requires less working space under this arrangement.

[0033] More specifically, in this embodiment, Figure 2 As shown, the reading head 610 is mounted on the fixed plate 100 via a mounting base 630, and the reading head 610 can be positioned at a target position via the mounting base 630. Of course, in other embodiments of the present application, the reading head 610 can also be directly mounted on the fixed plate 100, or the mounting position of the reading head 610 can be adjusted by providing protrusions or grooves on the fixed plate 100.

[0034] Specifically, in this embodiment, Figure 2 As shown, the grating ruler 620 and the insertion port are respectively located on opposite sides of the magnetic steel assembly 320. In this arrangement, the grating ruler 620 and the reading head 610 are arranged relative to each other in a direction perpendicular to the Z axis and perpendicular to the fixed plate 100 and the movable plate 200. The distance between the movable plate 200 and the fixed plate 100 can be relatively small, that is, the thickness of the linear motor drive device can be relatively small, so that the overall size of the linear motor drive device is relatively small and the space occupied is also relatively small. Of course, in other embodiments of the present application, if the size of the reading head 610 along the direction in which the grating ruler 620 is arranged is relatively small, the grating ruler 620 can also be set on the surface opposite to the movable plate 200 and the fixed plate 100. In this way, the overall size of the linear motor drive device can still be relatively small.

[0035] Specifically, in this embodiment, continue as Figure 2As shown, the linear motor drive device also includes two groups of photoelectric components 700, which are arranged parallel to the Z axis and are respectively located on both sides of the reading head 610; the photoelectric components 700 include a photoelectric switch 710 and a photoelectric sensor sheet 720, the photoelectric switch 710 is fixedly arranged on the fixed plate 100 and close to the end of the fixed plate 100 along the Z axis, and the photoelectric sensor sheet 720 is fixedly arranged on the movable plate 200. Under this setting, along the Z-axis direction, the upper group of the two groups of photoelectric components 700 is used to limit the linear motor 300 from continuing to move upward, and the lower group is used to limit the linear motor 300 from continuing to move downward, that is, when the photoelectric sensor piece 720 in the upper photoelectric component 700 moves upward with the magnetic steel component 320 of the linear motor 300 to the matching position with the corresponding photoelectric switch 710, the linear motor 300 stops moving upward; when the photoelectric sensor piece 720 in the lower photoelectric component 700 moves downward with the magnetic steel component 320 of the linear motor 300 to the matching position with the corresponding photoelectric switch 710, the linear motor 300 stops moving downward.

[0036] Furthermore, in this configuration, because the photoelectric sensor sheet 720 itself is relatively small, and the wiring harness of the photoelectric assembly 700 connected to the photoelectric switch 710 does not move with the photoelectric sensor sheet 720, the photoelectric sensor sheet 720 occupies relatively little space in a dynamic state, or during operation, and is less likely to interfere with the movement of other components. Therefore, compared to a configuration in which the photoelectric switch 710 moves while the photoelectric sensor sheet 720 is stationary, the configuration of this embodiment requires less working space for the linear motor drive device. Furthermore, the two sets of photoelectric assemblies 700 are located on either side of the read head 610 along the Z-axis, namely, above and below the read head 610. This fully utilizes the space above and below the read head 610, making the various structures more compact and conducive to further reducing the overall size and occupied space of the linear motor drive device.

[0037] More specifically, in this embodiment, the photoelectric switch 710 is mounted on the fixed plate 100 via the switch base 730, and the photoelectric switch 710 can be positioned at a target position via the switch base 730. Of course, in other embodiments of the present application, the photoelectric switch 710 can also be directly mounted on the fixed plate 100, or the mounting position of the photoelectric switch 710 can be adjusted by providing a protrusion or groove on the fixed plate 100.

[0038] Specifically, in this embodiment, Figures 1 to 3As shown, the linear motor drive device further includes at least one magnetic spring 400, which comprises an iron core 410 and a magnetic ring 420 that is movably mounted on the outer surface of the iron core 410. The iron core 410 extends parallel to the Z-axis and is fixed to the side of the fixed plate 100 parallel to the Z-axis; the magnetic ring 420 is fixed to the side of the movable plate 200 parallel to the Z-axis. Compared to using a cylinder to balance weight, the use of magnetic spring 400 in this embodiment significantly reduces the size of the linear motor drive device, or motion platform. In addition, compared with setting the iron core 410 and the magnetic ring 420 of the magnetic spring 400 between the fixed plate 100 and the movable plate 200, this embodiment sets the iron core 410 and the magnetic ring 420 of the magnetic spring 400 on the sides of the fixed plate 100 and the movable plate 200 respectively, which effectively avoids the influence of the setting of the magnetic spring 400 on the thickness of the entire linear motor drive device, or effectively avoids the situation where the setting of the magnetic spring 400 causes the thickness of the linear motor drive device to increase and the idle space between the fixed plate 100 and the movable plate 200 to increase. Therefore, the setting of this embodiment can further effectively control the size and occupied space of the entire linear motor drive device.

[0039] More specifically, in this embodiment, there are two magnetic springs 400. The iron cores 410 of the two magnetic springs 400 are fixedly mounted on two sides of the fixed plate 100 parallel to the Z-axis, and the magnetic rings 420 of the two magnetic springs 400 are fixedly mounted on two sides of the movable plate 200 parallel to the Z-axis. By providing a magnetic spring 400 on opposite sides, the linear motor drive device is better balanced, thereby ensuring smoothness and precision during movement.

[0040] Specifically, in this embodiment, Figure 2 As shown, the upper and lower ends of the iron core 410 are fixedly connected to the side of the fixed plate 100 parallel to the Z axis via an upper fixing seat 430 and a lower fixing seat 440, respectively. The magnetic ring 420 is fixedly connected to the side of the movable plate 200 parallel to the Z axis via a connecting seat 450. The connecting seat 450 is provided with an upper limit block 460 and a lower limit block 470. The upper limit block 460 is used to prevent the connecting seat 450 from continuing to move upward, and the lower limit block 470 is used to prevent the connecting seat 450 from continuing to move downward. Furthermore, the upper limit block 460 is provided on the side of the connecting seat 450 opposite to the upper fixing seat 430, that is, on the upper side of the connecting seat 450, and the lower limit block 470 is provided on the side of the connecting seat 450 opposite to the lower fixing seat 440, that is, on the lower side of the connecting seat 450. It should be noted here that in other embodiments of the present application, the upper limit block 460 and the lower limit block 470 are not limited to being set on the connecting seat 450. For example, the upper limit block 460 can also be set on the upper fixed seat 430, and the lower limit block 470 can also be set on the lower fixed seat 440, as long as they can play the corresponding limiting role.

[0041] In this embodiment, the upper limit block 460 and the photoelectric assembly 700 located above cooperate to provide an upper limit for the movement of the linear motor 300, while the lower limit block 470 and the photoelectric assembly 700 located below cooperate to provide a lower limit for the movement of the linear motor 300. In other words, this embodiment employs a combination of mechanical and software limit limiting.

[0042] Specifically, in this embodiment, Figures 1 to 3 As shown, the movable plate 200 and the fixed plate 100 are connected by two sets of sliding assemblies 500. The two sets of sliding assemblies 500 are respectively arranged on either side of the linear motor 300 in a direction perpendicular to the Z-axis. Each set of sliding assemblies 500 includes a guide rail 510 and two sliders 520. The guide rail 510 is fixed to the fixed plate 100 parallel to the Z-axis, and the sliders 520 are fixed to the movable plate 200 and slidably connected to the guide rail 510. In this arrangement, the guide rails 510 of the two sets of sliding assemblies 500, through the corresponding sliders 520, support and guide the movable plate 200 and the magnetic steel assembly 320 thereon, thereby enabling more stable movement of the movable plate 200 and the magnetic steel assembly 320 thereon.

[0043] It should be noted here that, regarding the number of sliding assemblies 500, in other embodiments of the present application, it is not limited to two groups, and each group of sliding assemblies 500 is not limited to having two sliders 520. For example, there can be only one group of sliding assemblies 500, and each guide rail 510 can be slidably connected to only one slider 520, as long as it can ensure that the linear motor 300 and the movable plate 200 can move smoothly and accurately.

[0044] In summary, the linear motor drive device provided in this embodiment uses a linear motor 300 as the main drive, which can meet the market demand for high-speed and high-acceleration motion. To control the overall size, this embodiment makes the motor's magnetic steel assembly 320 move and the coil assembly 310 stationary, eliminating the need for a cable drag chain. A magnetic spring 400 is used to balance the weight. For the grating feedback system, i.e., the displacement detection assembly 600, the reading head 610 is stationary and the grating scale 620 is moving. For the photoelectric assembly 700, the photoelectric switch 710 is fixed to the fixed plate 100. The software limit and mechanical limit are cleverly placed in the free space, so that the photoelectric assembly 700, which performs the software limit function, is distributed above and below the reading head 610, and the limit block, which performs the mechanical limit function, is set on the connection seat 450 of the magnetic ring 420. The above configuration makes the overall size of the linear motor drive device, or motion platform, of this embodiment very compact, and the deployment of various accessories and functions is very compact.

[0045] Finally, it should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0046] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A linear motor drive device, characterized in that: The invention comprises a fixed plate (100) and a movable plate (200) which are arranged relative to each other and spaced apart, and a linear motor (300) is arranged between the two. The linear motor (300) comprises a coil assembly (310) and a magnetic steel assembly (320). The coil assembly (310) is fixedly connected to the fixed plate (100), and the magnetic steel assembly (320) is fixedly connected to the movable plate (200). The coil assembly (310) can drive the magnetic steel assembly (320) to move along a motion direction.

2. The linear motor drive device according to claim 1, characterized in that: The linear motor drive device further comprises a displacement detection assembly (600), wherein the displacement detection assembly (600) comprises a reading head (610) and a grating ruler (620), wherein the grating ruler (620) is fixedly arranged on a surface of the movable plate (200) opposite to the fixed plate (100) or on a side surface of the magnetic steel assembly (320) in parallel with the direction of movement; and the reading head (610) is fixedly arranged on the fixed plate (100) and opposite to the grating ruler (620).

3. The linear motor drive device according to claim 2, characterized in that: The magnetic steel assembly (320) comprises a first mounting plate (321) and a second mounting plate (322) that are arranged opposite to each other and spaced apart, one side of the first mounting plate (321) and the second mounting plate (322) being fixedly connected via a connecting block (323), and the other side forming an insertion port; a plurality of magnetic steels (324) are provided on the opposite side of each of the first mounting plate (321) and the second mounting plate (322); the coil (311) of the coil assembly (310) is inserted between the oppositely arranged magnetic steels (324) through the insertion port; The grating ruler (620) and the insertion port are respectively located on two opposite sides of the magnetic steel component (320).

4. The linear motor drive device according to claim 2 or 3, characterized in that: The linear motor drive device further comprises two groups of photoelectric components (700), the two groups of photoelectric components (700) being arranged parallel to the direction of motion and respectively located on both sides of the reading head (610); The photoelectric component (700) comprises a photoelectric switch (710) and a photoelectric sensing sheet (720); the photoelectric switch (710) is fixedly arranged on the fixed plate (100) and close to the end of the fixed plate (100) along the movement direction; and the photoelectric sensing sheet (720) is fixedly arranged on the movable plate (200).

5. The linear motor drive device according to any one of claims 1 to 3, characterized in that: The movement direction is the Z-axis direction.

6. The linear motor drive device according to claim 5, characterized in that: The linear motor drive device further includes at least one magnetic spring (400), the magnetic spring (400) including an iron core (410) and a magnetic ring (420) movably sleeved outside the iron core (410), the iron core (410) extending parallel to the Z axis and fixedly arranged on the side of the fixed plate (100) parallel to the Z axis; the magnetic ring (420) is fixedly arranged on the side of the movable plate (200) parallel to the Z axis.

7. The linear motor drive device according to claim 6, characterized in that: There are two magnetic springs (400), the iron cores (410) of the two magnetic springs (400) are respectively fixedly arranged on the two side surfaces of the fixed plate (100) parallel to the Z axis, and the magnetic rings (420) of the two magnetic springs (400) are respectively fixedly arranged on the two side surfaces of the movable plate (200) parallel to the Z axis.

8. The linear motor drive device according to claim 6, characterized in that: The upper end and the lower end of the iron core (410) are fixedly connected to the side of the fixed plate (100) parallel to the Z axis via an upper end fixing seat (430) and a lower end fixing seat (440), respectively; the magnetic ring (420) is fixedly connected to the side of the movable plate (200) parallel to the Z axis via a connecting seat (450); One of the upper end fixing seat (430) and the connecting seat (450) is provided with an upper end limit block (460) for preventing the connecting seat (450) from continuing to move upward; and one of the lower end fixing seat (440) and the connecting seat (450) is provided with a lower end limit block (470) for preventing the connecting seat (450) from continuing to move downward.

9. The linear motor drive device according to any one of claims 1 to 3, characterized in that: The movable plate (200) and the fixed plate (100) are connected via at least one set of sliding assemblies (500), each set of sliding assemblies (500) comprising a guide rail (510) and at least one slider (520), the guide rail (510) being fixedly arranged on the fixed plate (100) parallel to the direction of movement, and the slider (520) being fixedly arranged on the movable plate (200) and being slidably connected to the guide rail (510).

10. The linear motor drive device according to claim 9, characterized in that: The number of the sliding components (500) is two groups, and the two groups of sliding components (500) are respectively arranged on both sides of the linear motor (300) along a direction perpendicular to the movement direction.

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