Voice coil motor driving platform

Abstract

The utility model provides a voice coil motor driving platform, and relates to the field of semiconductor manufacturing equipment. The platform comprises a base, a load plate and a voice coil motor, a magnetic steel part of the voice coil motor is fixedly arranged in an accommodating cavity of the base, and a coil part is fixedly connected with the load plate; the platform is further provided with a limiting assembly, and a first installation seat of the limiting assembly is provided with a first limiting piece which is fixedly arranged on the base and located at the end where the opening of the containing cavity is located or fixedly arranged at the end, away from the opening of the containing cavity, of the load plate. The second mounting base is provided with a second limiting piece which is fixedly arranged at the end, close to the opening of the containing cavity, of the load plate or fixedly arranged on the base and located at the end where the opening of the containing cavity is located. The platform is driven by the voice coil motor, the coil part is fixedly connected with the load plate, and no transmission part exists between the two, so that the occupied space is small; the coil part of the voice coil motor is fixedly and rigidly connected with the load plate, so that the connection rigidity is large, and the operation precision can be effectively ensured; the platform is further provided with two limiting pieces, and it can be guaranteed that the load plate runs within the set stroke through hardware.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a voice coil motor driving platform. Background Art

[0002] In the prior art, linear motion drive platforms or axis structures generally use a servo motor to drive a lead screw or a servo motor to drive a belt. Guide rails or guide rods need to be provided on the equipment to support the driven load plate, which occupies a relatively large space and affects the assembly space of the equipment.

[0003] Moreover, the drive is carried out in the form of a servo motor driving a screw rod or a servo motor driving a belt. Transmission parts such as a screw rod nut or a belt are provided between the servo motor and the load plate or the load, and the operation accuracy is relatively low. Utility Model Content

[0004] The purpose of the utility model is to provide a voice coil motor driving platform to solve the technical problems existing in the prior art that the linear motion driving platform occupies a large space and has low operating precision.

[0005] The voice coil motor driving platform provided by the utility model comprises a base, a load plate and a voice coil motor, wherein the magnetic steel portion of the voice coil motor is fixedly arranged in the accommodating cavity of the base, and the coil portion of the voice coil motor is fixedly connected to the load plate;

[0006] The voice coil motor driving platform is further provided with a limit assembly, the limit assembly comprising a first mounting seat and a first limit member provided on the first mounting seat, and a second mounting seat and a second limit member provided on the second mounting seat;

[0007] The first mounting seat is fixedly provided on the base and is located at the end where the opening of the accommodating cavity is located, or the first mounting seat is fixedly provided on the end of the load plate away from the opening of the accommodating cavity, and the first limiting member is used to prevent the load plate from continuing to move in the direction in which the coil portion extends out of the accommodating cavity;

[0008] The second mounting seat is fixedly provided at one end of the load plate close to the opening of the accommodating cavity, or the second mounting seat is fixedly provided on the base and is located at the end where the opening of the accommodating cavity is located, and the second limit member is used to prevent the load plate from continuing to move in the direction in which the coil portion is retracted into the accommodating cavity.

[0009] Furthermore, along the movement direction of the load plate, the position of the first limiting member is adjustable, and / or the position of the second limiting member is adjustable.

[0010] Furthermore, the first mounting seat is fixedly arranged on the base and is located at the end where the opening of the accommodating cavity is located; the load plate is provided with a first impact groove, and the first impact groove is provided corresponding to the first limiting member; the second mounting seat is fixedly arranged on the end of the load plate close to the opening of the accommodating cavity; the base is provided with a second impact groove, and the second impact groove is provided corresponding to the second limiting member.

[0011] Furthermore, the load plate moves along the Z-axis; a first mounting plate and a second mounting plate are arranged at intervals along the Z-axis on one side of the base; the voice coil motor drive platform also includes a balance seat, which is located between the first mounting plate and the second mounting plate and fixedly connected to one side of the load plate; a balance spring is arranged between the first mounting plate and the second mounting plate, and the balance spring is arranged along the Z-axis.

[0012] Furthermore, the balance seat is provided with a first mounting hole; the balance spring includes a mover ring and a guide rod that can move relative to each other along the Z axis, the mover ring is fixedly installed in the first mounting hole, the guide rod is inserted in the mover ring and its two ends are respectively fixedly connected to the first mounting plate and the second mounting plate.

[0013] Furthermore, an anti-fool-proof protrusion is provided at the end of the guide rod, and a second mounting hole is opened in the first mounting plate, and the anti-fool-proof protrusion protrudes from the second mounting hole; when installing the guide rod, the insertion end of the guide rod passes through the second mounting hole and the center hole of the mover ring in sequence and is fixed to the second mounting plate.

[0014] Furthermore, one end of the load plate along its movement direction is fixedly connected to the coil part through a connecting plate; the load plate is slidably connected to the base through two sets of sliding components, and the two sets of sliding components are extended along the movement direction of the load plate and are respectively located on both sides of the connecting plate.

[0015] Furthermore, the sliding assembly is a cross ball guide rail, and the cross ball guide rail includes a fixed rail and a movable rail that match each other, the fixed rail is fixedly arranged on the base, and the movable rail is fixedly arranged on the load plate.

[0016] Furthermore, the base is provided with two limiting steps, and the limiting steps include a mounting plane parallel to the load plate and a limiting plane perpendicular to the mounting plane;

[0017] The two side surfaces of the fixed rail are respectively fitted with the installation plane and the limiting plane of the same limiting step, or one side surface of the fixed rail is fitted with the installation plane, the limiting plane of the same limiting step is provided with multiple limiting top screws, and the other side surface of the fixed rail is fitted with the end faces of the multiple limiting top screws.

[0018] Furthermore, the width of the limiting plane is greater than the distance between the axis of the fixing rail and the installation plane.

[0019] Furthermore, the voice coil motor drive platform also includes a displacement detection component, which includes a reading head and a grating scale. The grating scale is arranged on the side of the load plate away from the balance seat, and the reading head is fixedly installed on the base and arranged opposite to the grating scale.

[0020] Furthermore, two limiting magnets are provided on a side of the load plate away from the balancing seat, and each of the two limiting magnets is fixed to the load plate through a fixing seat so as to be adjustably positioned along the movement direction of the load plate; when the reading head senses the limiting magnets, the load plate stops moving in the original direction or moves in the reverse direction.

[0021] The voice coil motor driving platform provided by the utility model can produce the following beneficial effects:

[0022] The voice coil motor driving platform provided by the utility model adopts the voice coil motor for driving. The coil part of the voice coil motor is fixedly connected to the load plate without any transmission parts therebetween, so the space occupied is small.

[0023] Furthermore, the coil portion of the voice coil motor is fixedly connected to the load plate, creating a rigid connection with high stiffness, effectively ensuring operational accuracy. The voice coil motor drive platform provided by the present invention also features a first limiter and a second limiter, ensuring the load plate operates within a set travel range through hardware, further enhancing the platform's operational accuracy. During operation, the two limiters restrict the travel of the balance seat, which is fixedly connected to the load plate, thereby limiting the load plate's travel. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0025] Figure 1 A schematic diagram of the structure of the voice coil motor driving platform provided in an embodiment of the present utility model;

[0026] Figure 2 A schematic diagram of the partial structure of a voice coil motor driving platform provided in an embodiment of the present utility model;

[0027] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0028] Figure 4 for Figure 2 Enlarged view of point B in the middle;

[0029] Figure 5 A schematic structural diagram of a balance spring of a voice coil motor driving platform provided in an embodiment of the present utility model;

[0030] Figure 6 A bottom view of the partial structure of the voice coil motor driving platform provided in an embodiment of the present utility model.

[0031] Description of reference numerals:

[0032] 100 - base; 110 - accommodating cavity; 120 - limiting step; 121 - mounting plane; 122 - limiting plane; 130 - first mounting plate; 131 - second mounting hole; 140 - second mounting plate; 150 - limiting top screw; 160 - second impact groove;

[0033] 200 - load plate; 210 - connection plate; 220 - first impact groove;

[0034] 300-Voice coil motor; 310-Magnetic steel part; 320-Coil part;

[0035] 410 - first mounting seat; 420 - first position-limiting member; 430 - second mounting seat; 440 - second position-limiting member;

[0036] 500-balance seat; 510-first mounting hole;

[0037] 600-Balance spring; 610-Motor ring; 620-Guide rod; 621-Anti-fouling protrusion;

[0038] 700-cross ball guide rail; 710-fixed rail; 720-movable rail;

[0039] 810-reading head; 820-grating scale; 830-limit magnet; 840-fixed seat. DETAILED DESCRIPTION

[0040] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following describes in detail the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0041] This embodiment provides a voice coil motor driving platform, such as Figure 1 and Figure 2 As shown, the voice coil motor driving platform includes a base 100, a load plate 200 and a voice coil motor 300. The magnetic steel portion 310 of the voice coil motor 300 is fixedly arranged in the accommodating cavity 110 of the base 100, and the coil portion 320 of the voice coil motor 300 is fixedly connected to the load plate 200. The voice coil motor driving platform is also provided with a limiting assembly, which includes a first mounting seat 410 and a first limiting member 420 arranged on the first mounting seat 410, and a second mounting seat 430 and a second limiting member 440 arranged on the second mounting seat 430. The first mounting seat 410 is fixedly arranged on the base 100 and is located in the accommodating cavity. 110, or the first mounting seat 410 is fixedly provided on the end of the load plate 200 away from the opening of the accommodating cavity 110, and the first limiting member 420 is used to prevent the load plate 200 from continuing to move in the direction in which the coil portion 320 extends out of the accommodating cavity 110; the second mounting seat 430 is fixedly provided on the end of the load plate 200 close to the opening of the accommodating cavity 110, or the second mounting seat 430 is fixedly provided on the base 100 and is located at the end in which the opening of the accommodating cavity 110 is located, and the second limiting member 440 is used to prevent the load plate 200 from continuing to move in the direction in which the coil portion 320 retracts into the accommodating cavity 110.

[0042] The voice coil motor driving platform provided in this embodiment is driven by a voice coil motor 300 . The coil portion 320 of the voice coil motor 300 is fixedly connected to the load plate 200 , and there is no transmission component between the two, so the space occupied is small.

[0043] Furthermore, the coil portion 320 of the voice coil motor 300 is fixedly connected to the load plate 200, creating a rigid connection with high stiffness, effectively ensuring operational accuracy. The voice coil motor drive platform provided in this embodiment also includes a first limiter 420 and a second limiter 440. These hardware components ensure that the load plate 200 operates within a set travel range, further enhancing the operating accuracy of the drive platform. During operation, the two limiters restrict the travel of the balance base 500, which is fixedly connected to the load plate 200, thereby limiting the travel of the load plate 200.

[0044] Specifically, in this embodiment, Figure 1 and Figure 2As shown, the position of the first stopper 420 and the position of the second stopper 440 are adjustable along the direction of movement of the load plate 200. In this arrangement, by adjusting the positions of the first stopper 420 and the second stopper 440 along the direction of movement of the load plate 200, the travel of the load plate 200 can be adjusted, thereby meeting driving requirements of different travel distances.

[0045] Specifically, in this embodiment, the first mounting seat 410 is fixedly disposed on the base 100 and is located at the end where the opening of the accommodating cavity 110 is located; the load plate 200 is provided with a first impact groove 220, and the first impact groove 220 is correspondingly disposed with the first limiter 420; the second mounting seat 430 is fixedly disposed at the end of the load plate 200 near the opening of the accommodating cavity 110; the base 100 is provided with a second impact groove 160, and the second impact groove 160 is correspondingly disposed with the second limiter 440. In this arrangement, the limiter assembly is located on the same side of the base 100 and the load plate 200, which reduces the size of the entire drive platform along the direction of movement of the load plate 200, making the structure more compact and reducing space occupation. The provision of an impact groove corresponding to the limiter enables the limiter groove and the limiter to jointly define the movement range of the load plate 200, thereby reducing the space occupied by the limiter and the mounting seat, further reducing the size of the drive platform and reducing space occupation. Of course, in other embodiments of the present application, only the first impact groove 220 or the second impact groove 160 may be provided, or even neither of them may be provided, according to the travel limitation requirement of the load plate 200 .

[0046] Specifically, in this embodiment, the first limiting member 420 is a first limiting pin, and the second limiting member 440 is a second limiting pin, which facilitates position adjustment, thereby facilitating adjustment of the travel of the load plate 200. However, in other embodiments of the present application, the first limiting member 420 and the second limiting member 440 are not limited to the structure of limiting pins. For example, the first limiting member 420 and the second limiting member 440 can also adopt the structure of a striker, as long as they can achieve the desired blocking and limiting effect on the load plate 200.

[0047] Specifically, in this embodiment, the load plate 200 moves along the Z-axis. A first mounting plate 130 and a second mounting plate 140 are spaced apart along the Z-axis on one side of the base 100. The voice coil motor drive platform also includes a balance seat 500, located between the first and second mounting plates 130, 140 and fixedly connected to one side of the load plate 200. A balance spring 600 is disposed between the first and second mounting plates 130, 140, and arranged along the Z-axis. Furthermore, there are two balance springs 600, spaced apart along the direction of motion of the load plate 200. The balance springs 600 can withstand the weight of the load plate 200 and its load in the event of a power outage, thereby providing protection. The two balance springs 600 provide more stable support for the balance seat 500, improving the stability of the load plate 200 and its load, and thus, the stability of the entire drive platform.

[0048] Specifically, in this embodiment, Figure 2 As shown, the balancing seat 500 defines a first mounting hole 510. The balancing spring 600 includes a movable ring 610 and a guide rod 620, which are movable relative to each other along the Z-axis. The movable ring 610 is fixedly mounted within the first mounting hole 510. The guide rod 620 is inserted into the movable ring 610 and its ends are respectively fixedly connected to the first mounting plate 130 and the second mounting plate 140. Furthermore, in this embodiment, the movable ring 610 is fixedly mounted within the first mounting hole 510 through an interference fit.

[0049] Specifically, in this embodiment, Figure 5 As shown, the end of the guide rod 620 is provided with an anti-mock protrusion 621. The first mounting plate 130 defines a second mounting hole 131, and the anti-mock protrusion 621 protrudes from the second mounting hole 131. When installing the guide rod 620, the inserted end of the guide rod 620 passes through the second mounting hole 131 and the center hole of the movable ring 610 in sequence before being secured to the second mounting plate 140. More specifically, in this embodiment, the diameter of the end of the guide rod 620 is enlarged to be larger than the second mounting hole 131, thereby forming the anti-mock protrusion 621 to guide the installation direction of the guide rod 620. This prevents the inserted end and the end of the guide rod 620 from being inverted during assembly, thereby ensuring the effectiveness of the balancing spring 600.

[0050] More specifically, in this embodiment, the balance spring 600 is a magnetic constant-force spring, which has strong anti-fluctuation performance, a large constant-force range, and higher precision and faster feedback than ordinary springs.

[0051] Specifically, in this embodiment, Figure 1As shown, one end of the load plate 200, along its direction of motion, is fixedly connected to the coil portion 320 via a connecting plate 210. The load plate 200 is slidably connected to the base 100 via two sets of sliding assemblies, both extending along the direction of motion of the load plate 200 and located on either side of the connecting plate 210. This arrangement provides effective positioning and support for both sides of the load plate 200, significantly enhancing the stability of the load plate 200 and the load thereon, thereby improving the smoothness and precision of the operation of the load plate 200 and its load.

[0052] Specifically, in this embodiment, Figure 2 、 Figure 3 and Figure 6 As shown, the sliding assembly is a cross-ball guide 700, which includes a fixed rail 710 and a movable rail 720 that match each other. The fixed rail 710 is fixed to the base 100, and the movable rail 720 is fixed to the load plate 200. Of course, balls (not shown) are also disposed between the fixed rail 710 and the movable rail 720 of each cross-ball guide 700. In this embodiment, a retaining cage (not shown) is also disposed between the fixed rail 710 and the movable rail 720 of each cross-ball guide 700. This effectively ensures that the load plate 200 maintains high-precision operation.

[0053] Specifically, in this embodiment, Figure 3 As shown, combined with Figure 2 and Figure 6 As shown, the base 100 is provided with two limiting steps 120, and the limiting steps 120 include a mounting plane 121 parallel to the load plate 200 and a limiting plane 122 perpendicular to the mounting plane 121. In this embodiment, the two side surfaces of the fixed rail 710 of a cross ball guide 700 are respectively fitted with the mounting plane 121 and the limiting plane 122 of the same limiting step 120. With such an arrangement, the two planes of the limiting step 120 jointly form a good limit for the fixed rail 710. One side surface of the fixed rail 710 of another cross ball guide 700 is fitted with the mounting plane 121, and the limiting plane 122 of the same limiting step 120 is provided with a plurality of limiting top screws 150, and the other side surface of the fixed rail 710 is fitted with the end faces of the plurality of limiting top screws 150, as shown in FIG. Figure 3As shown, with such an arrangement, the mounting plane 121 of the limiting step 120 and the end faces of the plurality of limiting top screws 150 jointly form a good limit for the fixed rail 710. Moreover, by reducing the protruding length of the limiting top screws 150 extending out of the limiting plane 122, the assembly of the load plate 200 equipped with the movable rail 720 can be facilitated, thereby improving the feasibility and convenience of assembly. After the load plate 200 is assembled in place, increasing the protruding length of the limiting top screws 150 can form a good limit for the corresponding fixed rail 710 and improve its rigidity, thereby ensuring the operating accuracy of the load plate 200.

[0054] Preferably, in this embodiment, Figure 6 As shown, the width of the limiting plane 122 is greater than the distance between the axis of the fixed rail 710 and the mounting plane 121. This configuration greatly increases the rigidity of the fixed rail 710, thereby enhancing the support, limiting, and guiding functions of the cross-ball guide 700 for the load plate 200 and the load thereon, thereby ensuring the smooth and precise operation of the load plate 200 and the load thereon.

[0055] Specifically, in this embodiment, Figure 1 、 Figure 2 as well as Figure 6 As shown, the voice coil motor drive platform also includes a displacement detection assembly, which includes a readhead 810 and a scale 820. The scale 820 is located on the side of the load plate 200 away from the balance base 500. The readhead 810 is fixedly mounted on the base 100 and is positioned opposite the scale 820. In this arrangement, the readhead 810 and the balance base 500 are located on either side of the load plate 200, making the entire device more compact and more rationally arranged, thereby reducing the overall size and space occupied by the device.

[0056] Specifically, in this embodiment, Figure 4 and Figure 6 As shown, two limiting magnets 830 are also installed on the side of the load plate 200 away from the balance base 500. Each limiting magnet 830 is fixed to the load plate 200 via a fixing base 840 so that its position can be adjusted along the direction of movement of the load plate 200. When the reading head 810 senses the limiting magnets 830, the load plate 200 stops moving in its original direction or moves in the opposite direction. For the entire drive platform, the two limiting magnets 830 and the reading head 810 form a software limit, which cooperates with the hardware limit formed by the impact block to ensure the operational reliability of the entire drive platform.

[0057] More specifically, in this embodiment, Figure 2 and Figure 4As shown, the fixing seat 840 is provided with a waist-shaped hole along the direction of movement of the load plate 200. Therefore, by adjusting its position along the direction of movement of the load plate 200, the travel of the load plate 200 can be changed as needed. Of course, when the positions of the two fixing seats 840 and the distance between them are changed, the travel defined by the two impact blocks needs to be adaptively adjusted. For example, the travel of the load plate 200 defined by the two impact blocks can be adjusted by replacing the impact blocks with different heights.

[0058] Finally, it should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0059] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A voice coil motor driving platform, characterized in that: The invention comprises a base (100), a load plate (200) and a voice coil motor (300), wherein a magnetic steel portion (310) of the voice coil motor (300) is fixedly arranged in a receiving cavity (110) of the base (100), and a coil portion (320) of the voice coil motor (300) is fixedly connected to the load plate (200); The voice coil motor driving platform is further provided with a limiting assembly, the limiting assembly comprising a first mounting seat (410) and a first limiting member (420) provided on the first mounting seat (410), and a second mounting seat (430) and a second limiting member (440) provided on the second mounting seat (430); The first mounting seat (410) is fixedly arranged on the base (100) and is located at an end where the opening of the accommodating cavity (110) is located, or the first mounting seat (410) is fixedly arranged on an end of the load plate (200) away from the opening of the accommodating cavity (110), and the first limiting member (420) is used to prevent the load plate (200) from continuing to move in the direction in which the coil portion (320) extends out of the accommodating cavity (110); The second mounting seat (430) is fixedly arranged on an end of the load plate (200) close to the opening of the accommodating cavity (110), or the second mounting seat (430) is fixedly arranged on the base (100) and is located at the end where the opening of the accommodating cavity (110) is located, and the second limiting member (440) is used to prevent the load plate (200) from continuing to move in the direction in which the coil portion (320) is retracted into the accommodating cavity (110).

2. The voice coil motor driving platform according to claim 1, characterized in that: Along the movement direction of the load plate (200), the position of the first limiting member (420) is adjustable, and / or the position of the second limiting member (440) is adjustable.

3. The voice coil motor driving platform according to claim 2, characterized in that: The first mounting seat (410) is fixedly arranged on the base (100) and is located at one end where the opening of the accommodating cavity (110) is located; the load plate (200) is provided with a first impact groove (220), and the first impact groove (220) is correspondingly arranged with the first limiting member (420); The second mounting seat (430) is fixedly arranged at one end of the load plate (200) close to the opening of the accommodating cavity (110); the base (100) is provided with a second impact groove (160), and the second impact groove (160) is correspondingly arranged with the second limiting member (440).

4. The voice coil motor driving platform according to any one of claims 1 to 3, characterized in that: The load plate (200) moves along the Z axis; a first mounting plate (130) and a second mounting plate (140) are provided on one side of the base (100) at intervals along the Z axis; The voice coil motor driving platform further includes a balancing seat (500), the balancing seat (500) being located between the first mounting plate (130) and the second mounting plate (140) and fixedly connected to one side of the load plate (200), and a balancing spring (600) being arranged between the first mounting plate (130) and the second mounting plate (140), and the balancing spring (600) being arranged along the Z axis.

5. The voice coil motor driving platform according to claim 4, characterized in that: The balancing seat (500) is provided with a first mounting hole (510); the balancing spring (600) comprises a movable ring (610) and a guide rod (620) capable of relative movement along the Z axis, the movable ring (610) being fixedly mounted in the first mounting hole (510), the guide rod (620) being inserted in the movable ring (610) and having two ends fixedly connected to the first mounting plate (130) and the second mounting plate (140), respectively.

6. The voice coil motor driving platform according to claim 5, characterized in that: The end of the guide rod (620) is provided with an anti-mistake protrusion (621), the first mounting plate (130) is provided with a second mounting hole (131), and the anti-mistake protrusion (621) protrudes from the second mounting hole (131); when installing the guide rod (620), the insertion end of the guide rod (620) passes through the second mounting hole (131) and the center hole of the movable ring (610) in sequence and is then fixed to the second mounting plate (140).

7. The voice coil motor driving platform according to any one of claims 1 to 3, characterized in that: One end of the load plate (200) along its movement direction is fixedly connected to the coil portion (320) via a connecting plate (210); the load plate (200) is slidably connected to the base (100) via two sets of sliding assemblies, both of which are extended along the movement direction of the load plate (200) and are respectively located on both sides of the connecting plate (210).

8. The voice coil motor driving platform according to claim 7, characterized in that: The sliding assembly is a cross ball guide rail (700), and the cross ball guide rail (700) includes a fixed rail (710) and a movable rail (720) that match each other. The fixed rail (710) is fixedly arranged on the base (100), and the movable rail (720) is fixedly arranged on the load plate (200).

9. The voice coil motor driving platform according to claim 8, characterized in that: The base (100) is provided with two limiting steps (120), and the limiting steps (120) include a mounting plane (121) parallel to the load plate (200) and a limiting plane (122) perpendicular to the mounting plane (121); The two side surfaces of the fixed rail (710) are respectively fitted with the installation plane (121) and the limiting plane (122) of the same limiting step (120); or, one side surface of the fixed rail (710) is fitted with the installation plane (121), the limiting plane (122) of the same limiting step (120) is provided with a plurality of limiting top screws (150), and the other side surface of the fixed rail (710) is fitted with the end faces of the plurality of limiting top screws (150).

10. The voice coil motor driving platform according to claim 9, characterized in that: The width of the limiting plane (122) is greater than the distance between the axis of the fixing rail (710) and the installation plane (121).

11. The voice coil motor driving platform according to claim 4, characterized in that: The voice coil motor driving platform further includes a displacement detection component, the displacement detection component including a reading head (810) and a grating ruler (820), the grating ruler (820) being arranged on a side of the load plate (200) away from the balancing seat (500), and the reading head (810) being fixedly mounted on the base (100) and arranged opposite to the grating ruler (820).

12. The voice coil motor driving platform according to claim 11, characterized in that: Two limiting magnets (830) are further provided on a side of the load plate (200) away from the balancing seat (500), and the two limiting magnets (830) are each fixedly arranged on the load plate (200) via a fixing seat (840) in an adjustable manner along the movement direction of the load plate (200); when the reading head (810) senses the limiting magnets (830), the load plate (200) stops moving in the original direction or moves in the reverse direction.

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