Crystal taking cylinder for single crystal silicon rod

Abstract

The utility model discloses a crystal taking barrel for a silicon single crystal rod. The crystal taking barrel comprises a crystal taking barrel body and a base arranged at the lower end of the crystal taking barrel body, when the single crystal silicon rod crystal taking barrel is used, a single crystal silicon rod can be guided into the crystal taking barrel body in the lifting process, when the single crystal silicon rod makes contact with a protection pad at the upper end of a buffering soft pad, a threaded rod is limited to rotate, an extrusion plate is made to move towards the inner side, and therefore the single crystal silicon rod is taken out. According to the crystal taking barrel for the silicon single crystal rod, the silicon single crystal rod is arranged in the crystal taking barrel body, so that the extrusion pad and the extrusion ball on the inner side of the extrusion plate limit the silicon single crystal rod, the silicon single crystal rod begins to be cooled when being placed in the crystal taking barrel body, and the silicon single crystal rod is taken out after being cooled to a certain degree for subsequent processing treatment, and the limiting threaded rod, the extrusion plate, the extrusion pad, the extrusion ball, a buffer cushion and a protective cushion are arranged; the single crystal silicon rod can be limited, buffered and protected, and the situation that the single crystal silicon rod collides with the inner wall of the crystal taking barrel body in the cooling process, the temperature difference is too large, and consequently the single crystal silicon rod cracks is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field related to material science and semiconductor manufacturing, and particularly relates to a single crystal silicon rod crystal extraction cylinder. Background Art

[0002] The single crystal silicon rod crystal retrieval tube is a special equipment used to store and retrieve single crystal silicon rods in the semiconductor manufacturing process. Its main function is to safely remove the silicon rod from the growth environment after the single crystal silicon growth is completed, and to cool and store it when necessary to prevent the silicon rod from rapidly cooling down at room temperature and generating thermal stress or cracks. The existing single crystal silicon rod crystal retrieval tube is mainly composed of a crystal retrieval tube body, a limiting threaded rod, a limiting threaded hole, an extrusion bena, a base, a placement groove, a connecting pipe, a piston, an external thread, an internal thread and other components. When the existing single crystal silicon rod crystal retrieval tube is in use, the single crystal silicon rod will hit the inner wall of the crystal retrieval tube body during the cooling process, which will cause excessive temperature difference, thereby causing cracks in the single crystal silicon rod, so a single crystal silicon rod crystal retrieval tube is indispensable. Utility Model Content

[0003] The purpose of the present utility model is to provide a single crystal silicon rod crystal retrieval tube to solve the problem in the above background technology that when the existing single crystal silicon rod crystal retrieval tube is in use, the single crystal silicon rod hits the inner wall of the crystal retrieval tube body during the cooling process, resulting in excessive temperature difference, thereby causing cracks in the single crystal silicon rod.

[0004] To achieve the above purpose, the present invention provides the following technical solutions: a single crystal silicon rod extraction tube, comprising

[0005] A crystal retrieval cylinder body and a base arranged at the lower end of the crystal retrieval cylinder body;

[0006] A placement groove is provided at the inner side of the crystal taking barrel body;

[0007] A cushioning pad is provided at the bottom end of the placement groove, and a protective pad is installed at the upper end of the cushioning pad inside the placement groove;

[0008] Limiting threaded rods are installed on the left and right sides of the crystal retrieval barrel body and at the inner side of the crystal retrieval barrel body, and the inner side of the limiting threaded rods is connected to the extrusion plate;

[0009] A squeezing pad is installed at the inner side of the squeezing plate, and a squeezing ball is provided at the inner side of the squeezing pad;

[0010] The arrangement of the limiting threaded rod, the extrusion plate, the extrusion pad, the extrusion ball, the buffer pad and the protective pad can not only limit the single crystal silicon rod but also provide a buffer and protection for the single crystal silicon rod.

[0011] Preferably, the buffer pad is made of sponge material, and the protective pad, squeeze pad and squeeze ball are made of rubber material.

[0012] Preferably, the extrusion pad is connected to the extrusion plate by gluing, and a connecting pipe is installed on the outside of the extrusion plate and at an external position of the restricted threaded rod.

[0013] Preferably, a socket is provided at an inner position of the connecting pipe, and a piston is connected to the inner side of the socket and located at an inner position of the limiting threaded rod.

[0014] Preferably, limiting threaded holes are provided on the left and right sides of the crystal retrieval barrel body and at the outer sides of the limiting threaded rod, and the limiting threaded holes pass through the left and right walls of the crystal retrieval barrel body.

[0015] Preferably, an external thread is provided at an outer wall of the limiting threaded rod, and an internal thread is provided at an inner wall of the limiting threaded hole.

[0016] Preferably, there are four limiting threaded rods in total, and the four limiting threaded rods are made of stainless steel.

[0017] Preferably, the limiting threaded rod is connected to the internal thread of the inner wall of the limiting threaded hole through the external thread of the outer wall, so that the extrusion plate moves inward, thereby allowing the extrusion plate to restrict the single crystal silicon rod.

[0018] Compared with the prior art, the present invention provides a single crystal silicon rod extraction tube, which has the following beneficial effects:

[0019] The utility model improves a crystal retrieval tube for a single crystal silicon rod. When the crystal retrieval tube for a single crystal silicon rod is used, the crystal retrieval tube body is placed in an appropriate position before the growth of the single crystal silicon rod is completed. After the growth of the single crystal silicon rod is completed, it will be slowly lifted up from the heated crucible. During the lifting process, the single crystal silicon rod will be guided into the interior of the crystal retrieval tube body. When the single crystal silicon rod contacts the protective pad at the upper end of the buffer pad, the threaded rod will be restricted from rotating, so that the extrusion plate will move inward, thereby causing the extrusion pad and the extrusion ball inside the extrusion plate to restrict the single crystal silicon rod. The single crystal silicon rod will begin to cool when placed in the crystal retrieval tube body. After the single crystal silicon rod has cooled to a certain degree, it will be taken out for subsequent processing. By setting the restriction threaded rod, extrusion plate, extrusion pad, extrusion ball, buffer pad and protective pad, not only can the single crystal silicon rod be restricted, but also the single crystal silicon rod can be buffered and protected, so as to avoid the single crystal silicon rod from hitting the inner wall of the crystal retrieval tube body during the cooling process, resulting in excessive temperature difference, thereby avoiding cracks in the single crystal silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1This is a schematic diagram of the overall structure of the single crystal silicon rod extraction cylinder of the utility model.

[0021] Figure 2 This is an enlarged structural diagram of the squeezing pad and squeezing ball of the single crystal silicon rod extraction tube of the utility model.

[0022] Figure 3 This is a schematic diagram of the enlarged structure of the interior of the single crystal silicon rod extraction tube connecting tube of the utility model.

[0023] In the figure: 1. Connecting tube; 2. Restricting threaded rod; 3. External thread; 4. Extrusion pad; 5. Placement groove; 6. Base; 7. Crystal removal tube body; 8. Buffer pad; 9. Protective pad; 10. Extrusion plate; 11. Internal thread; 12. Restricting threaded hole; 13. Extrusion ball; 14. Jack; 15. Piston. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] The utility model provides Figure 1-3 The single crystal silicon rod retrieval tube shown is a single crystal silicon rod retrieval tube, comprising a crystal retrieval tube body 7 and a base 6 arranged at the lower end of the crystal retrieval tube body 7; a placement groove 5 is provided at the inner side of the crystal retrieval tube body 7; a buffer pad 8 is provided at the inner bottom end of the placement groove 5, and a protective pad 9 is installed inside the placement groove 5 and at the upper end of the buffer pad 8; limiting threaded rods 2 are installed on the left and right sides of the crystal retrieval tube body 7 and at the inner side of the crystal retrieval tube body 7, and an extrusion plate 10 is connected to the inner side of the limiting threaded rod 2; a squeezing pad 4 is installed at the inner side of the squeezing plate 10, and a squeezing ball 13 is provided at the inner side of the squeezing pad 4; through the arrangement of the limiting threaded rod 2, squeezing plate 10, squeezing pad 4, squeezing ball 13, buffer pad 8 and protective pad 9, not only can the single crystal silicon rod be restricted, but also the single crystal silicon rod can be buffered and protected.

[0026] like Figure 1 、 Figure 2 and Figure 3As shown, in order to limit, buffer and protect the single crystal silicon rod, when using the single crystal silicon rod crystal taking cylinder, before the single crystal silicon rod is grown, the crystal taking cylinder body 7 is placed in an appropriate position. After the single crystal silicon rod is grown, it will be slowly lifted from the heated crucible. During the lifting process, the single crystal silicon rod will be guided into the interior of the crystal taking cylinder body 7. When the single crystal silicon rod contacts the protective pad 9 at the upper end of the buffer pad 8, the threaded rod will be restricted from rotating, causing the extrusion plate 10 to move inward, thereby causing the extrusion pad 4 and the extrusion plate 10 to move inward. The pressure ball 13 restricts the single crystal silicon rod. When the single crystal silicon rod is placed inside the crystal retrieval tube body 7, it will begin to cool. When the single crystal silicon rod is cooled to a certain degree, it will be taken out for subsequent processing. By limiting the setting of the threaded rod, extrusion plate 10, extrusion pad 4, extrusion ball 13, buffer pad 8 and protective pad 9, it can not only restrict the single crystal silicon rod, but also buffer and protect the single crystal silicon rod, thereby preventing the single crystal silicon rod from hitting the inner wall of the crystal retrieval tube body 7 during the cooling process, resulting in excessive temperature difference, thereby avoiding cracks in the single crystal silicon rod.

[0027] The buffer pad 8 is made of sponge material, the protective pad 9, the squeeze pad 4 and the squeeze ball 13 are made of rubber material, the squeeze pad 4 is connected to the squeeze plate 10 by gluing, and a connecting pipe 1 is installed on the outside of the squeeze plate 10 and at the external position of the limiting threaded rod 2. A socket 14 is provided at the internal position of the connecting pipe 1, and a piston 15 is connected to the inside of the socket 14 and at the internal position of the limiting threaded rod 2.

[0028] like Figure 1 As shown, in order to facilitate the connection between the extrusion plate 10 and the limiting threaded rod 2, when using a single crystal silicon rod to take a crystal barrel, the limiting threaded rod 2 is first connected to the piston 15, and then the piston 15 is inserted into the inside of the socket 14, so that the connecting tube 1 is installed on the inner side of the limiting threaded rod 2, and then the extrusion plate 10 is installed on the inner side of the limiting threaded rod 2. The arrangement of the connecting tube 1, the piston 15 and the socket 14 facilitates the connection between the extrusion plate 10 and the limiting threaded rod 2, thereby making the connection between the extrusion plate 10 and the limiting threaded rod 2 more convenient.

[0029] Restriction threaded holes 12 are provided on the left and right sides of the crystal taking barrel body 7 and at the outer side of the restriction threaded rod 2. The restriction threaded hole 12 passes through the left and right walls of the crystal taking barrel body 7. An external thread 3 is provided at the outer wall position of the restriction threaded rod 2, and an internal thread 11 is provided at the inner wall position of the restriction threaded hole 12. There are four restriction threaded rods 2 in total, and the four restriction threaded rods 2 are made of stainless steel. The restriction threaded rod 2 is connected to the internal thread 11 on the inner wall of the restriction threaded hole 12 through the external thread 3 on the outer wall, so that the extrusion plate 10 moves inward, and then the extrusion plate 10 restricts the single crystal silicon rod.

[0030] like Figure 1 and Figure 3 As shown, in order to facilitate the movement of the extrusion plate 10, when using the single crystal silicon rod crystal retrieval tube, before the single crystal silicon rod is grown, the crystal retrieval tube body 7 is placed in an appropriate position. After the single crystal silicon rod is grown, it will be slowly lifted from the heated crucible. During the lifting process, the single crystal silicon rod will be guided into the interior of the crystal retrieval tube body 7. When the single crystal silicon rod contacts the protective pad 9 at the upper end of the buffer pad 8, the limiting threaded rod 2 is connected with the internal thread 11 on the inner wall of the limiting threaded hole 12 through the external thread 3 on the outer wall, and then the limiting threaded rod 2 is rotated to make the extrusion plate 10 move inward, thereby making the extrusion pad 4 and the extrusion ball 13 on the inner side of the extrusion plate 10 restrict the single crystal silicon rod. By setting the limiting threaded rod 2, the limiting threaded hole 12, the internal thread 11 and the external thread 3, the movement of the extrusion plate 10 is facilitated, thereby making the movement of the extrusion plate 10 more convenient, thereby making the single crystal silicon rod crystal retrieval tube better able to pick up the single crystal silicon rod.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A single crystal silicon rod extraction cylinder, characterized by: include A crystal retrieval barrel body (7) and a base (6) arranged at the lower end of the crystal retrieval barrel body (7); A placement groove (5) is provided at the inner side of the crystal taking barrel body (7); A cushioning pad (8) is provided at the bottom end of the placement groove (5), and a protective pad (9) is installed inside the placement groove (5) and at the upper end of the cushioning pad (8); Limiting threaded rods (2) are installed on the left and right sides of the crystal retrieval barrel body (7) and at the inner side of the crystal retrieval barrel body (7), and an extrusion plate (10) is connected to the inner side of the limiting threaded rod (2); A squeezing pad (4) is installed at the inner side of the squeezing plate (10), and a squeezing ball (13) is provided at the inner side of the squeezing pad (4); The arrangement of the limiting threaded rod (2), the extrusion plate (10), the extrusion pad (4), the extrusion ball (13), the buffer pad (8) and the protective pad (9) can not only limit the single crystal silicon rod but also provide a buffering and protective effect on the single crystal silicon rod.

2. The single crystal silicon rod extraction barrel according to claim 1, characterized in that: The buffer cushion (8) is made of sponge material, and the protective pad (9), the squeezing pad (4) and the squeezing ball (13) are made of rubber material.

3. The single crystal silicon rod extraction barrel according to claim 2, characterized in that: The extrusion pad (4) is connected to the extrusion plate (10) by gluing, and a connecting pipe (1) is installed on the outside of the extrusion plate (10) and at a position outside the limiting threaded rod (2).

4. The single crystal silicon rod extraction barrel according to claim 3, characterized in that: A socket (14) is provided at an internal position of the connecting pipe (1), and a piston (15) is connected inside the socket (14) and at a position inside the limiting threaded rod (2).

5. The single crystal silicon rod extraction barrel according to claim 1, characterized in that: Restriction threaded holes (12) are provided on the left and right sides of the crystal retrieval barrel body (7) and at the outer sides of the restriction threaded rod (2). The restriction threaded holes (12) penetrate the left and right walls of the crystal retrieval barrel body (7).

6. The single crystal silicon rod extraction barrel according to claim 5, characterized in that: An external thread (3) is provided at the outer wall of the limiting threaded rod (2), and an internal thread (11) is provided at the inner wall of the limiting threaded hole (12).

7. The single crystal silicon rod extraction barrel according to claim 6, characterized in that: There are four limiting threaded rods (2) in total, and the four limiting threaded rods (2) are made of stainless steel.

8. The single crystal silicon rod extraction barrel according to claim 7, characterized in that: The limiting threaded rod (2) is connected to the internal thread (11) on the inner wall of the limiting threaded hole (12) via the external thread (3) on the outer wall, thereby causing the extrusion plate (10) to move inward, thereby causing the extrusion plate (10) to restrict the single crystal silicon rod.

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