Sealing module of rotary joint with modularized sealing structure

Abstract

The sealing module comprises a movable ring, a sealing seat and two static ring assemblies, a sealing shaft shoulder is arranged in the middle of the movable ring, and a movable end through-flow hole is formed in the sealing shaft shoulder in the radial direction; the two static ring assemblies are arranged on the movable ring in a sleeving mode and arranged on the two sides of the sealing shaft shoulder correspondingly. The static ring assembly comprises a static ring seat and a static ring, the static ring seat is arranged on the movable ring in a sliding and sleeving mode, and the static ring is installed on the side, close to the sealing shaft shoulder, of the static ring seat; by adopting the modularized sealing structure, the sealing modules can be combined on the rotating shaft according to a pre-plan of a medium channel on demand, on one hand, the manufacturability of assembly assembling is improved, meanwhile, the sealing modules serve as components, machining precision can be improved conveniently, high-precision machining and processing of key components can be conducted, the overall sealing reliability can be guaranteed, and the service life of the rotating shaft is prolonged. And the harsh working condition requirements of integrated circuit manufacturing are met.

Description

Technical Field

[0001] The utility model relates to the field of hydraulics, and in particular to a sealing module with a rotary joint having a modular sealing structure. Background Art

[0002] The integrated circuit manufacturing process, especially during the early stages of wafer processing, often requires the delivery of gases and liquids to a rotary table. Manufacturing process requirements often necessitate the transport of various working media, including specialized and even toxic gases, high-purity water, and corrosive liquids. Rotary joints are typically used to connect the static piping to the rotary table. Compared to conventional rotary joints, these require higher sealing reliability and the ability to simultaneously transport multiple types of media, due to the unique characteristics of the transported media and the extremely high cleanliness requirements of integrated circuit manufacturing.

[0003] Existing rotary joints mostly use a housing and a rotating shaft as the main components, and operations such as integrally processing sealing grooves and embedding sealing rings on the housing or the rotating shaft are performed. This type of component is mostly processed by deep hole boring, etc., which has low processing accuracy and is difficult to process. It is difficult to ensure processing accuracy in integral processing, and the assembly processability is poor. Therefore, the sealing reliability of the assembly after assembly is low. Utility Model Content

[0004] The technical problem to be solved by the present utility model is that the existing integrally processed structure of the rotary joint leads to poor processing accuracy angle of the assembly parts, assembly sealing reliability and assembly processability. The present utility model provides a rotary joint with a modular sealing structure for integrated circuit manufacturing to solve the above problems.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a rotary joint with a modular sealing structure for integrated circuit manufacturing, comprising a housing and a rotating shaft inserted into the housing, a dynamic end oil passage being provided on the rotating shaft, a static end oil passage corresponding to the position of the dynamic end oil passage being provided on the housing, a plurality of sealing modules corresponding to the static end oil passage being arranged in sequence along the axial direction on the rotating shaft, each of the sealing modules comprising a dynamic ring, a sealing seat and two static ring assemblies, a sealing shoulder being provided in the middle of the dynamic ring, a dynamic end flow hole being radially opened on the sealing shoulder; two static ring assemblies being sleeved on the dynamic ring and respectively arranged on both sides of the sealing shoulder; the static ring assembly comprising a static ring seat and a static ring, the static ring seat being slidably sleeved on the dynamic ring, and the static ring being mounted on the static ring seat near the sealing shoulder side;

[0006] The sealing seat is arranged outside the two stationary ring assemblies, and a sealing spring and a stop pin are provided on the sealing seat. The sealing spring pushes the stationary ring seat toward the sealing shaft shoulder and makes the stationary ring seal fit on the end face of the sealing shaft shoulder; the sealing seat and the housing are sealed by a first sealing ring, and the dynamic ring and the rotating shaft are sealed by a second sealing ring.

[0007] Furthermore: the stationary ring assembly also includes a sealing cover, an open mounting groove is provided on the sealing seat, the stationary ring seat and the stationary ring are installed on the dynamic ring and inserted into the mounting groove, the sealing cover is installed at the notch of the mounting groove, and a stationary end flow hole connected to the dynamic end flow hole is radially opened on the sealing seat; a third sealing ring is provided between the sealing cover and the sealing seat and the stationary ring seat respectively.

[0008] Furthermore: outside the rotating shaft, spacers are respectively arranged on both sides of the sealing module, the spacers include a spacer outer ring and a spacer inner ring, the spacer outer ring and the shell are sealed by a fourth sealing ring, and the spacer inner ring and the rotating shaft are sealed by a fifth sealing ring; a sixth sealing ring for dynamic sealing connection is provided between the spacer outer ring and the spacer inner ring.

[0009] Furthermore: a leakage groove is provided on the housing and located between two adjacent sealing modules; and a leakage oil channel communicating with each leakage groove is provided on the housing.

[0010] Furthermore: a bearing is provided on the rotating shaft on the outside of the spacer, the outer ring of the bearing is fixedly connected to the housing, and the inner ring of the bearing is fixedly connected to the rotating shaft; a tightening thread is provided at the end of the rotating shaft, and a tightening nut is installed on the tightening thread.

[0011] The beneficial effect of the present invention is that the rotary joint with a modular sealing structure for integrated circuit manufacturing can realize the on-demand combination of sealing modules on the rotating shaft according to the pre-planned medium channel by adopting the modular sealing structure, which improves the processability of the assembly on the one hand, and at the same time, the sealing module as a component facilitates the improvement of processing accuracy, and can perform high-precision processing and treatment of key components, which is conducive to ensuring the overall sealing reliability and is suitable for the harsh working conditions requirements of integrated circuit manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0013] Figure 1 This is a schematic diagram of the structure of a rotary joint with a modular sealing structure for integrated circuit manufacturing according to the utility model;

[0014] Figure 2 It is a structural diagram of the sealing module;

[0015] Figure 3 yes Figure 2 A magnified view of the structure at point A;

[0016] Figure 4 yes Figure 1 A magnified view of the structure at point B in FIG;

[0017] Figure 5 It is a schematic diagram of the installation structure of the static ring and the static ring seat.

[0018] In the figure, 1 is the housing, 2 is the rotating shaft, 3 is the moving end oil channel, 4 is the static end oil channel, 5 is the sealing module, 6 is the moving ring, 7 is the sealing seat, 8 is the sealing shoulder, 9 is the moving end flow hole, 10 is the static ring seat, 11 is the static ring, 12 is the sealing spring, 13 is the stop pin, 14 is the first sealing ring, 15 is the second sealing ring, 16 is the sealing cover, 17 is the mounting groove, 18 is the static end flow hole, 19 is the third sealing ring, 20 is the spacer, 21 is the spacer outer ring, 22 is the spacer inner ring, 23 is the fourth sealing ring, 24 is the fifth sealing ring, 25 is the sixth sealing ring, 26 is the leakage groove, 27 is the leakage oil channel, 28 is the bearing, 29 is the fastening thread, and 30 is the fastening nut. DETAILED DESCRIPTION

[0019] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention. On the contrary, the embodiments of the present invention include all variations, modifications, and equivalents that fall within the spirit and scope of the appended claims.

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0021] In addition, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to the specific circumstances. In addition, in the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0022] Any process or method description in a flowchart or otherwise described herein may be understood to represent a module, segment or portion of code comprising one or more executable instructions for implementing the steps of a specific logical function or process, and the scope of the preferred embodiments of the present invention includes alternative implementations in which functions may be performed out of the order shown or discussed, including performing functions in a substantially simultaneous manner or in the reverse order depending on the functions involved, which should be understood by those skilled in the art to which the embodiments of the present invention pertain.

[0023] like Figures 1 to 5 As shown, the utility model provides a rotary joint with a modular sealing structure for integrated circuit manufacturing, comprising a shell 1 and a rotating shaft 2 inserted into the shell 1, a dynamic end oil passage 3 is provided on the rotating shaft 2, and a static end oil passage 4 corresponding to the position of the dynamic end oil passage 3 is provided on the shell 1, and a plurality of sealing modules 5 corresponding to the static end oil passage 4 are arranged in sequence along the axial direction on the rotating shaft 2, each of the sealing modules 5 includes a dynamic ring 6, a sealing seat 7 and two static ring assemblies, a sealing shoulder 8 is provided in the middle of the dynamic ring 6, and a dynamic end flow hole 9 is radially opened on the sealing shoulder 8; the two static ring assemblies are sleeved on the dynamic ring 6 and are respectively arranged on both sides of the sealing shoulder 8; the static ring assembly includes a static ring seat 10 and a static ring 11, the static ring seat 10 is slidably sleeved on the dynamic ring 6, and the static ring 11 is installed on the static ring seat 10 near the sealing shoulder 8 side.

[0024] The sealing seat 7 is sleeved on the outside of the two stationary ring assemblies. A sealing spring 12 and a stop pin 13 are provided on the sealing seat 7. The sealing spring 12 pushes the stationary ring seat 10 toward the sealing shoulder 8 and makes the stationary ring 11 sealably fit on the end surface of the sealing shoulder 8; the sealing seat 7 and the housing 1 are sealed by a first sealing ring 14, and the dynamic ring 6 and the rotating shaft 2 are sealed by a second sealing ring 15.

[0025] The stationary ring assembly also includes a sealing cover 16, an open mounting groove 17 is provided on the sealing seat 7, the stationary ring seat 10 and the stationary ring 11 are installed on the dynamic ring 6 and inserted into the mounting groove 17, the sealing cover 16 is installed at the notch of the mounting groove 17, and a stationary end flow hole 18 connected to the dynamic end flow hole 9 is radially opened on the sealing seat 7; a third sealing ring 19 is provided between the sealing cover 16 and the sealing seat 7 and the stationary ring seat 10 respectively.

[0026] The rotary joint of the present application is used to connect the pipelines between the rotating part and the stationary part in the equipment. During normal use, the housing 1 is installed in the stationary part, the rotating shaft 2 is installed in the rotating part, the pipeline in the stationary part is connected to the static end oil channel 4, and the pipeline in the rotating part is connected to the dynamic end oil channel 3. According to the existing technical knowledge, it can be known that the static end oil channel 4 and the dynamic end oil channel 3 are connected one by one and do not interfere with each other. Since the rotary joint connects multiple pipelines, the multiple static end oil channels 4 and the multiple dynamic end oil channels 3 need to be sealed and isolated to avoid cross-cavity and leakage. The role of the sealing module 5 is to seal and isolate between the oil channels to ensure that the various channels of the rotary joint do not interfere with each other.

[0027] The specific operating process is as follows: in each sealing module 5, the rotating shaft 2 rotates within the housing 1, driving the dynamic ring 6 in rotation. The static ring assembly remains stationary along with the housing 1. A sealing spring 12 pushes the static ring seat 10 toward the sealing shoulder 8, forcing the static ring 11 to seal against the end face of the sealing shoulder 8. This creates a dynamic seal on both sides of the sealing shoulder 8 on the dynamic ring 6. Furthermore, because the dynamic end through-hole 9 requires dynamic sealing on both the left and right axial sides, static ring assemblies are installed on both sides of the sealing shoulder 8 to ensure reliable sealing of both sides of the dynamic end through-hole 9.

[0028] The medium in the stationary pipeline is connected to the static end oil passage 4 and then introduced into the seal seat 7 through the static end flow hole 18. Due to the dynamic seal formed by the dynamic ring 6 and the static ring 11 inside the seal seat 7, the medium inside the seal seat 7 is prevented from leaking out. The dynamic end flow hole 9 on the dynamic ring 6 then introduces the medium in the seal seat 7 into the connected dynamic end oil passage 3, thus realizing the pipeline medium transportation during the rotation of the shaft 2.

[0029] The first sealing ring 14 and the second sealing ring 15 play a sealing role when the sealing module 5 is installed with the housing 1 and the rotating shaft 2 of the rotary joint, facilitating the formation of a closed sealed cavity on each oil channel. The third sealing ring 19 forms a sealed connection between the sealing cover 16 and the sealing seat 7, facilitating the formation of a closed cavity inside the sealing seat 7. These are all to ensure the independence of each oil channel and avoid interference between each other. At the same time, the parts sealed by the first sealing ring 14, the second sealing ring 15 and the third sealing ring 19 are all static sealing connections, and there is no relative movement between them. Therefore, these parts can be implemented with contact sealing of elastic materials. Such sealing can achieve zero leakage and has high sealing reliability.

[0030] The sealing seat 7 is provided with an open mounting groove 17. After the stationary ring seat 10 and the stationary ring 11 are mounted on the dynamic ring 6 and then installed into the mounting groove 17, a sealing cover 16 is finally used to cover the notch of the mounting groove 17. This installation makes the entire sealing module 5 detachable, which is convenient for installation and disassembly and maintenance. When assembling the sealing module 5, the usual steps are to install the stationary ring seat 10 and the stationary ring 11 on both sides of the sealing shaft shoulder 8, and then insert the entire assembly into the mounting groove 17. Finally, the sealing cover 16 is closed over the notch of the mounting groove 17 to complete the installation. The role of the sealing spring 12 is to provide a reliable positive sealing pressure to the stationary ring 11, ensuring a reliable fit and contact between the dynamic ring 6 and the stationary ring 11. Since the stationary ring seat 10 needs to move in the axial direction, the sealing seat 7 and the stationary ring seat 10 are movably installed. The stationary ring 11 on the stationary ring seat 10 has a tendency to rotate due to friction when the dynamic ring 6 rotates. The stop pin 13 prevents the stationary ring seat 10 from rotating relative to the sealing seat 7, thereby playing a role in limiting the rotation direction.

[0031] Outside the rotating shaft 2, spacers 20 are respectively provided on both sides of the sealing module 5, and the spacers 20 include a spacer outer ring 21 and a spacer inner ring 22. The spacer outer ring 21 and the shell 1 are sealed by a fourth sealing ring 23, and the spacer inner ring 22 and the rotating shaft 2 are sealed by a fifth sealing ring 24; a sixth sealing ring 25 with a dynamic sealing connection is provided between the spacer outer ring 21 and the spacer inner ring 22.

[0032] The spacer 20 is provided to isolate the two sides of the sealing module 5. Since the sealing module 5 forms a sealed area for medium transport, the spacers 20 on both sides prevent the leakage of the internal medium from the outside. They also prevent dust, moisture, and other substances from entering the sealed area and even the oil passages. The spacer inner ring 22 and outer ring 21 rotate with the corresponding housing 1 or shaft 2. Therefore, the fourth and fifth sealing rings 23 and 24 are both static seals, providing high sealing reliability. The sixth sealing ring 25 seals between the spacer inner ring 22 and outer ring 21, providing a dynamic seal connection. Common dynamic seals such as rotary seals and universal seals can be used.

[0033] Leakage grooves 26 are provided on the housing 1 between two adjacent sealing modules 5. Leakage oil passages 27 are provided on the housing 1 to connect the leakage grooves 26. Since internal leakage is inevitable at the dynamic seal between the dynamic ring 6 and the static ring 11 during the sealing process, leakage from the corresponding dynamic seal can be promptly collected through the leakage grooves 26 and discharged through the leakage oil passages 27 for centralized external treatment, preventing leakage of the medium.

[0034] On the rotating shaft 2, a bearing 28 is provided on the outside of the spacer 20. The outer ring of the bearing 28 is fixedly connected to the housing 1, and the inner ring of the bearing 28 is fixedly connected to the rotating shaft 2. A tightening thread 29 is provided at the end of the rotating shaft 2, and a tightening nut 30 is installed on the tightening thread 29.

[0035] Bearing 28 ensures stable rotation of shaft 2 within housing 1, providing high support and centering properties, ensuring a stable seal even at high-speed rotation. A tightening nut 30 axially tightens bearing 28 and the sealing modules 5, preventing axial movement of the sealing modules 5. This ensures precise alignment of the sealing modules 5 with the dynamic and static oil passages 3 and 4, ensuring sealing reliability.

[0036] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0037] Based on the above-mentioned ideal embodiment of the present invention, and in accordance with the above description, relevant personnel can make various changes and modifications without departing from the technical scope of the present invention. The technical scope of the present invention is not limited to the content of the specification, but must be determined according to the scope of the claims.

Claims

1. A sealing module of a rotary joint with a modular sealing structure, wherein the sealing module (5) comprises a dynamic ring (6), a sealing seat (7) and two static ring assemblies, A sealing shoulder (8) is provided in the middle of the dynamic ring (6), and a dynamic end through-flow hole (9) is radially opened on the sealing shoulder (8); The two stationary ring assemblies are sleeved on the dynamic ring (6) and are respectively arranged on both sides of the sealing shoulder (8); the stationary ring assembly includes a stationary ring seat (10) and a stationary ring (11), the stationary ring seat (10) is slidably sleeved on the dynamic ring (6), and the stationary ring (11) is installed on the stationary ring seat (10) near the sealing shoulder (8); The sealing seat (7) is sleeved outside the two stationary ring assemblies. A sealing spring (12) and a stop pin (13) are provided on the sealing seat (7). The sealing spring (12) pushes the stationary ring seat (10) toward the sealing shoulder (8) and enables the stationary ring (11) to be sealed and fitted on the end face of the sealing shoulder (8).

2. The sealing module of the rotary joint with a modular sealing structure according to claim 1, characterized in that: The stationary ring assembly further includes a sealing cover (16), an open mounting groove (17) is provided on the sealing seat (7), the stationary ring seat (10) and the stationary ring (11) are mounted on the dynamic ring (6) and inserted into the mounting groove (17), and the sealing cover (16) is mounted at the notch of the mounting groove (17).

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