Flexible pressure sensor

Abstract

The utility model belongs to the technical field of pressure sensors, and particularly relates to a flexible pressure sensor, which comprises a substrate, an induction circuit layer, a reinforcing layer and a sensitive layer, the induction circuit layer is arranged between the sensitive layer and the substrate, the induction circuit layer comprises an output unit and a plurality of induction units, and the reinforcing layer is arranged on the substrate. The sensing units are arranged on the side, facing the sensitive layer, of the substrate at intervals, the sensing units are connected with the output unit, the sensitive layer comprises a plate body and a plurality of sensitive pieces, the sensitive pieces are arranged on the side, facing the substrate, of the plate body at intervals, and the sensitive pieces are connected with the output unit. Each sensitive piece is connected with the corresponding sensing unit, and the reinforcing layer is arranged on the side, away from the base plate, of the plate body. The stress deformation of the sensitive piece is reduced, and the precision of the flexible pressure sensor is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of pressure sensors, and in particular relates to a flexible pressure sensor. Background Art

[0002] A flexible pressure sensor is a sensor that can convert pressure into electrical signals. It is widely used in fields such as robotic touch, virtual reality, and wearable devices. The working principle of the flexible pressure sensor is to output corresponding electrical signals by sensing pressure changes. It has the characteristics of high sensitivity, good flexibility, and can be freely bent and folded.

[0003] An existing flexible pressure sensor includes a substrate, a sensing circuit and a sensitive layer. The sensing circuit is located between the sensitive layer and the substrate. The sensing circuit is arranged on the side of the substrate facing the sensitive layer. The sensitive layer is connected to the sensing circuit. The sensitive layer is made of pressure-sensitive material. When the flexible pressure sensor is subjected to external force, the pressure-sensitive material will deform and indirectly change the distribution and contact state of the internal conductive material, thereby causing the resistance of the conductive material to change regularly. The substrate outputs an electrical signal of the resistance change, thereby obtaining the magnitude of the external force.

[0004] However, if existing flexible pressure sensors bend beyond the measured external force, the stress generated by the bending will also be reflected in the output, that is, an output signal will be generated even without actual pressure, and the accuracy is low. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a flexible pressure sensor in view of the problem of low accuracy of existing flexible pressure sensors.

[0006] To solve the above technical problems, the present invention provides a flexible pressure sensor comprising a substrate, a sensing circuit layer, a reinforcement layer, and a sensitive layer. The sensing circuit layer is located between the sensitive layer and the substrate. The sensing circuit layer comprises an output unit and a plurality of sensing units. All the sensing units are arranged at intervals on a side of the substrate facing the sensitive layer. All the sensing units are connected to the output unit.

[0007] The sensitive layer includes a plate body and a plurality of sensitive sheets, wherein the plurality of sensitive sheets are arranged at intervals on a side of the plate body facing the substrate, each sensitive sheet is connected to a corresponding sensing unit, and the reinforcement layer is arranged on a side of the plate body away from the substrate.

[0008] Optionally, the reinforcement layer includes a reinforcement sheet, which is fixed to a side of the plate away from the base plate, and the reinforcement sheet is opposite to the sensitive sheet along a thickness direction of the plate.

[0009] Optionally, a plurality of reinforcing sheets are provided, and the plurality of reinforcing sheets are arranged at intervals on a side of the plate away from the base plate, and each reinforcing sheet is opposite to the corresponding sensitive sheet along the thickness direction of the plate.

[0010] Optionally, the sensitive sheet is circular, and the reinforcing sheet is circular.

[0011] Optionally, the reinforcement layer further includes a frame plate, the frame plate is provided with a plurality of mounting holes, a reinforcement sheet is passed through each mounting hole, and the frame plate is connected to a side of the plate body away from the base plate.

[0012] Optionally, a surface of the reinforcement plate on one side away from the plate body is flush with a surface of the frame plate on one side away from the plate body.

[0013] Optionally, the reinforcement layer further includes a covering plate, and the covering plate is connected to a side of the frame plate away from the plate body.

[0014] Optionally, the sensitive sheet is a pressure-sensitive material sheet.

[0015] Optionally, the sensitive sheet is a resistive film.

[0016] Optionally, the sensitive sheet is an elastic dielectric sheet.

[0017] According to the flexible pressure sensor of the embodiment of the utility model, compared with the prior art, the reinforcement layer is arranged on the side of the plate body of the sensitive layer facing away from the substrate. The arrangement of the reinforcement layer can increase the strength of the flexible pressure sensor, making the sensitive sheet inside the flexible pressure sensor less likely to be bent, thereby reducing the stress deformation of the sensitive sheet and improving the accuracy of the flexible pressure sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a flexible pressure sensor provided in one embodiment of the present utility model;

[0019] Figure 2 for Figure 1 Schematic diagram of the decomposition;

[0020] Figure 3 for Figure 1 Schematic diagram of the structure of the middle sensitive layer.

[0021] The figure numbers in the specification are as follows: 1. reinforcement layer; 2. cover plate; 3. reinforcement sheet; 4. frame plate; 5. mounting hole; 6. sensitive layer; 7. board body; 8. sensitive sheet; 9. substrate; 10. sensing circuit layer; 11. sensing unit; 12. output unit; 13. first extension plate; 14. second extension plate. DETAILED DESCRIPTION

[0022] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0023] like Figures 1 to 3 As shown, an embodiment of the present invention provides a flexible pressure sensor, including a substrate 9, a sensing circuit layer 10, a reinforcement layer 1 and a sensitive layer 6, wherein the sensing circuit layer 10 is located between the sensitive layer 6 and the substrate 9, and the sensing circuit layer 10 includes an output unit 12 and a plurality of sensing units 11, all of the sensing units 11 are arranged at intervals on the side of the substrate 9 facing the sensitive layer 6, and all of the sensing units 11 are connected to the output unit 12.

[0024] The sensitive layer 6 includes a plate body 7 and multiple sensitive sheets 8. The multiple sensitive sheets 8 are arranged at intervals on the side of the plate body 7 facing the substrate 9. Each sensitive sheet 8 is connected to the corresponding sensing unit 11. The reinforcement layer 1 is arranged on the side of the plate body 7 away from the substrate 9.

[0025] Specifically, multiple sensing units 11 are arranged at intervals on the substrate 9, and multiple sensitive sheets 8 correspond one-to-one to the multiple sensing units 11. The sensitive sheets 8 are arranged on the side of the plate body 7 facing the substrate 9, and the side of the sensitive sheets 8 facing the substrate 9 contacts the sensing units 11 to achieve the connection between the sensing units 11 and the sensitive sheets 8. The reinforcing layer 1 is arranged on the side of the plate body 7 facing away from the substrate 9. When the substrate 9 is subjected to a force, the substrate 9 will deform, so that the sensing units 11 press the sensitive sheets 8 toward the plate body 7, so that the resistance or capacitance between the sensitive sheets 8 and the sensing units 11 changes, and the output unit 12 outputs the change to a monitoring device connected to the output unit 12. The monitoring device calculates the magnitude of the stress on the substrate 9 through the change in resistance or capacitance.

[0026] The provision of the reinforcement layer 1 can increase the overall strength of the flexible pressure sensor, making the sensitive piece 8 inside the flexible pressure sensor less likely to be bent, thereby reducing the stress deformation of the sensitive piece 8 and improving the accuracy of the flexible pressure sensor.

[0027] In one embodiment, a first extension plate 13 is provided on the substrate 9 , and the output unit 12 of the sensing circuit layer 10 is disposed on the first extension plate 13 . The first extension plate 13 provides an installation space for the output unit 12 and is used to support the output unit 12 .

[0028] A second extension plate 14 is provided on the plate body 7 of the sensitive layer 6 . The second extension plate 14 is used to cover a portion of the output unit 12 to protect the output unit 12 .

[0029] In one embodiment, the reinforcement layer 1 includes a reinforcement sheet 3 , which is fixed to a side of the plate 7 away from the base plate 9 . The reinforcement sheet 3 is opposite to the sensitive sheet 8 along the thickness direction of the plate 7 .

[0030] Specifically, the reinforcing sheet 3 is made of plastic or metal, is connected to the side of the plate 7 facing away from the substrate 9, and the reinforcing sheet 3 and the sensitive sheet 8 are correspondingly arranged on both sides of the plate 7. The reinforcing sheet 3 is used to increase the overall strength of the flexible pressure sensor.

[0031] In one embodiment, a plurality of reinforcing sheets 3 are provided, and the plurality of reinforcing sheets 3 are arranged at intervals on the side of the plate body 7 away from the substrate 9. Each reinforcing sheet 3 is opposite to the corresponding sensitive sheet 8 along the thickness direction of the plate body 7. The sensitive sheet 8 is circular, and the reinforcing sheet 3 is circular.

[0032] Specifically, there are multiple circular reinforcing sheets 3 and multiple circular sensitive sheets 8. The multiple reinforcing sheets 3 are arranged in one-to-one correspondence with the multiple sensitive sheets 8, and the multiple reinforcing sheets 3 are arranged at intervals, which can prevent the stress interference caused by deformation of the sensitive sheet 8 without sacrificing the overall flexibility of the flexible pressure sensor.

[0033] In one embodiment, the reinforcement layer 1 further includes a frame plate 4 , which is provided with a plurality of mounting holes 5 , each of which is penetrated by a reinforcement sheet 3 , and the frame plate 4 is connected to the side of the plate body 7 away from the base plate 9 .

[0034] Specifically, the reinforcing layer 1 also includes a frame plate 4, which is connected to the side of the plate body 7 facing the substrate 9 and the side of the frame plate 4 facing away from the substrate 9. A plurality of circular mounting holes 5 are provided on the frame plate 4. The axes of the mounting holes 5, the sensitive sheet 8 and the sensing unit 11 coincide with each other. The reinforcing sheet 3 is passed through the mounting holes 5. The frame plate 4 can position the reinforcing sheet 3, thereby facilitating the installation of the reinforcing sheet 3.

[0035] In one embodiment, the surface of the reinforcing sheet 3 away from the plate body 7 is flush with the surface of the frame plate 4 away from the plate body 7. Specifically, the surface of the reinforcing sheet 3 facing away from the plate body 7 is flush with the surface of the frame plate 4 facing away from the plate body 7, which is more aesthetically pleasing and easier to manufacture.

[0036] In one embodiment, the reinforcement layer 1 further includes a cover plate 2 , and the cover plate 2 is connected to a side of the frame plate 4 away from the plate body 7 .

[0037] Specifically, the side of the covering plate 2 facing the plate body 7 is connected to the side of the frame plate 4 facing away from the plate body 7, which can limit the reinforcing plate 3 in the mounting hole 5, and can prevent the reinforcing plate 3 from flying out when the flexible pressure sensor is subjected to a large impact force, causing a safety risk.

[0038] In one embodiment, the sensitive sheet 8 is a pressure-sensitive material sheet. After the flexible pressure sensor is pressurized, the sensitive sheet 8 is deformed, and the resistivity between the sensing unit 11 and the sensitive sheet 8 changes. The monitoring device obtains the magnitude of the pressure applied to the flexible pressure sensor through the change in resistivity.

[0039] The flexible pressure sensor of the embodiment of the utility model works as follows:

[0040] When the flexible pressure sensor is under pressure and the substrate 9 is subjected to the force, the substrate 9 will deform, causing the sensing unit 11 to press the sensitive piece 8 toward the plate body 7, causing the resistivity inside the sensitive piece 8 to change, and the output unit 12 outputs the output to the monitoring device connected to the output unit 12. The monitoring device calculates the magnitude of the stress on the substrate 9 based on the change in resistivity.

[0041] According to the flexible pressure sensor of the embodiment of the present invention, compared with the prior art, the reinforcing layer 1 is arranged on the side of the plate body 7 of the sensitive layer 6 facing away from the substrate 9. The arrangement of the reinforcing layer 1 can increase the strength of the flexible pressure sensor, making the sensitive piece 8 inside the flexible pressure sensor less likely to be bent, thereby reducing the stress deformation of the sensitive piece 8 and improving the accuracy of the flexible pressure sensor.

[0042] In other embodiments, the sensitive sheet 8 is a resistive film. When the flexible pressure sensor is pressurized, the contact resistance between the resistive film and the sensing unit 11 changes. The monitoring device obtains the magnitude of the pressure applied to the flexible pressure sensor through the change in contact resistance.

[0043] In other embodiments, the sensitive sheet 8 is an elastic dielectric sheet. When the flexible pressure sensor is pressurized, the sensitive sheet 8 deforms and changes in thickness, causing the capacitance between the sensing unit 11 and the sensitive sheet 8 to change. The monitoring device obtains the magnitude of the pressure applied to the flexible pressure sensor through the change in capacitance.

[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A flexible pressure sensor, characterized in that: The invention comprises a substrate (9), a sensing circuit layer (10), a reinforcement layer (1) and a sensitive layer (6), wherein the sensing circuit layer (10) is located between the sensitive layer (6) and the substrate (9), the sensing circuit layer (10) comprises an output unit (12) and a plurality of sensing units (11), all of the sensing units (11) are arranged at intervals on a side of the substrate (9) facing the sensitive layer (6), and all of the sensing units (11) are connected to the output unit (12); The sensitive layer (6) comprises a plate body (7) and a plurality of sensitive sheets (8), wherein the plurality of sensitive sheets (8) are arranged at intervals on a side of the plate body (7) facing the substrate (9), and each of the sensitive sheets (8) is connected to a corresponding sensing unit (11). The reinforcing layer (1) is arranged on a side of the plate body (7) away from the substrate (9).

2. The flexible pressure sensor according to claim 1, characterized in that The reinforcing layer (1) comprises a reinforcing sheet (3), the reinforcing sheet (3) being fixed to a side of the plate body (7) away from the base plate (9), and the reinforcing sheet (3) and the sensitive sheet (8) being opposite to each other along the thickness direction of the plate body (7).

3. The flexible pressure sensor according to claim 2, characterized in that: A plurality of reinforcing sheets (3) are provided, and the plurality of reinforcing sheets (3) are arranged at intervals on a side of the plate body (7) away from the base plate (9), and each reinforcing sheet (3) is opposite to the corresponding sensitive sheet (8) along the thickness direction of the plate body (7).

4. The flexible pressure sensor according to claim 3, characterized in that: The sensitive piece (8) is circular, and the reinforcing piece (3) is circular.

5. The flexible pressure sensor according to claim 3, characterized in that: The reinforcement layer (1) further comprises a frame plate (4), wherein a plurality of mounting holes (5) are provided on the frame plate (4), and a reinforcement sheet (3) is passed through each mounting hole (5). The frame plate (4) is connected to a side of the plate body (7) away from the base plate (9).

6. The flexible pressure sensor according to claim 5, characterized in that: The surface of one side of the reinforcing plate (3) away from the plate body (7) is flush with the surface of one side of the frame plate (4) away from the plate body (7).

7. The flexible pressure sensor according to claim 6, characterized in that: The reinforcement layer (1) further comprises a covering plate (2), wherein the covering plate (2) is connected to a side of the frame plate (4) away from the plate body (7).

8. The flexible pressure sensor according to any one of claims 1 to 7, characterized in that: The sensitive sheet (8) is a pressure-sensitive material sheet.

9. The flexible pressure sensor according to any one of claims 1 to 7, characterized in that: The sensitive sheet (8) is a resistive film.

10. The flexible pressure sensor according to any one of claims 1 to 7, characterized in that: The sensitive sheet (8) is an elastic dielectric sheet.

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