Negative pressure cleaning device for SHD type parts

Abstract

The utility model relates to the technical field of gas uniformizing disc type parts in semiconductors, in particular to a negative pressure cleaning device for SHD type parts, which comprises a tank body, a frame body is fixedly connected outside the tank body, a water storage tank is fixedly connected in the frame body, a circulating pump is mounted on the inner bottom wall of the frame body, and the top of the circulating pump extends into the water storage tank and is communicated with the water storage tank. A control cabinet is fixedly connected in the frame body, a control panel is fixedly connected to the surface of the control cabinet, a water temperature heater is fixedly connected in the water storage tank, a flow channel with a filter is fixedly connected to the side face of the water storage tank, and a stainless steel filter barrel is fixedly connected to one side of the flow channel with the filter; through reasonable design, the cleaning position of the part bears certain negative suction pressure, pollutants such as dirt and aluminum skimmings in the hole can be removed at the first time after machining of the part is finished, cleanliness in the hole is guaranteed, and in the follow-up circulation and storage process of the part, the situation that in the inner wall of the hole, a base material is corroded due to dirt, and follow-up use of the part is affected is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of gas homogenizing disk parts in semiconductors, in particular to a negative pressure cleaning device for SHD parts. Background Art

[0002] During the operation of the gas-distributing plate parts, corrosive gases will flow through the small holes to the wafer below, so the cleanliness and smoothness of the inner wall of the small hole are particularly important. In the daily processing process, we found that the small holes that have just been machined are of relatively high quality in terms of roundness, size and smoothness of the inner wall of the hole. However, due to the failure to clean up water stains and oil stains in time after the hole is processed, the inner wall of the hole often becomes seriously dirty due to corrosion after the parts are stored and circulated for a period of time. It is difficult to repair the internal state of the small hole to a qualified state by conventional cleaning processes. Therefore, we need to clean the remaining oil stains, water stains and even some fine metal particles in the hole as soon as possible after the small hole processing is completed. Utility Model Content

[0003] The purpose of the present utility model is to provide a negative pressure cleaning device for SHD parts, so as to solve the problem raised in the above background technology that due to the failure to clean water stains, oil stains and the like in time after the hole is processed, the inner wall of the hole is often seriously contaminated due to corrosion after the parts are stored and circulated for a period of time, and it is difficult to repair the internal state of the small hole to an acceptable state by conventional cleaning processes.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] A negative pressure cleaning device for SHD parts, comprising a trough body, the outside of which is fixedly connected to a frame body, a water tank being fixedly connected to the frame body, a circulation pump being installed on the inner bottom wall of the frame body, the top of the circulation pump extending into the water tank and being connected to the water tank, a control cabinet being fixedly connected to the frame body, a control panel being fixedly connected to the surface of the control cabinet, a water heater being fixedly connected to the water tank, a flow channel with a filter being fixedly connected to the side of the water tank, a stainless steel filter barrel being fixedly connected to one side of the flow channel with the filter, a water flow channel being fixedly connected to the other side of the flow channel with the filter, the bottom of the water flow channel being fixedly connected to the circulation pump, and the trough body is made of SUS304 stainless steel and a steel plate with a T=5mm diameter.

[0006] As a preferred solution of the present invention, the circulation pump and the water temperature heater are both electrically connected to the control cabinet, and the water temperature heater is fixedly connected to the circulation pump.

[0007] As a preferred solution of the present invention, the bottom of the frame is movably connected to a self-locking universal wheel, the top of the frame is rotatably connected to an outer seal, and the side of the outer seal is fixedly connected to a connection cover.

[0008] As a preferred solution of the present invention, a hinged rod is provided on the top of the frame, and both ends of the hinged rod are hinged to the connecting cover and the frame respectively.

[0009] As a preferred solution of the present invention, the frame is made of SUS304 stainless steel profile, and the outer seal is made of SUS304 stainless steel mirror panel.

[0010] As a preferred solution of the present invention, the circulating pump adopts CHL20-20 / 2.2KW southern horizontal self-priming pump, the flow channel with filter is made of SUS304, the flow rate of the flow channel with filter is 10T / H, and the accuracy of the flow channel with filter is 5um.

[0011] As a preferred solution of the present invention, the filter cartridge of the flow channel with filter is provided with a pressure display, and the flow channel with filter uses a SUS304 molded bellows.

[0012] As a preferred solution of the present invention, the heating power of the water temperature heater is a 6KW flange heating pipe.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. In the utility model, through the coordinated use of the tank body, the circulation pump, the flow channel with the filter, the water temperature heater and the control cabinet, and through reasonable design, the cleaning method of the parts cleaning position is subjected to a certain negative suction pressure, so that the dirt, aluminum chips and other pollutants in the hole can be removed immediately after the machining of the parts is completed, ensuring the cleanliness of the hole, so that during the subsequent circulation and storage of the parts, the inner wall of the hole will not be corroded by the base material due to dirt, which will affect the subsequent use of the parts.

[0015] 2. In the present invention, the control cabinet has adjustment and monitoring functions, which makes it more convenient and intuitive to use. The water heater is connected to the control cabinet to control the temperature and circuit on-off, making the entire device more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a structural diagram showing the position of the control cabinet and the water temperature heating pipe of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the circulation pump of the utility model;

[0019] Figure 4 This is a schematic structural diagram of the circulation pump and water storage tank of the utility model.

[0020] In the figure: 1. Trough body; 1-1. Water storage tank; 1-2. Frame; 2. Circulation pump; 3. Flow channel with filter; 3-1. Water flow channel; 3-2. Stainless steel filter barrel; 4. Water temperature heater; 5. Control cabinet; 6. Control panel; 7. Self-locking universal wheel; 8. Outer seal; 9. Connecting cover; 10. Articulated rod. DETAILED DESCRIPTION

[0021] The following will combine the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] For examples, see Figure 1-Figure 4 , the utility model provides a technical solution:

[0023] A negative pressure cleaning device for SHD parts includes a tank body 1, which can store an appropriate amount of water. The outside of the tank body 1 is fixedly connected to a frame body 1-2, and a water storage tank 1-1 is fixedly connected to the frame body 1-2. A circulation pump 2 is installed on the inner bottom wall of the frame body 1-2. The circulation pump 2 has a frequency conversion function and supports air suction in a short time. The top of the circulation pump 2 extends into the water storage tank 1-1 and is connected to the water storage tank 1-1. A control cabinet 5 is fixedly connected to the frame body 1-2, and a control panel 6 is fixedly connected to the surface of the control cabinet 5. A water temperature heater 4 is fixedly connected to the water storage tank 1-1. The side of 1 is fixedly connected to a flow channel 3 with a filter, one side of the flow channel 3 with a filter is fixedly connected to a stainless steel filter barrel 3-2, and the other side of the flow channel 3 with a filter is fixedly connected to a water flow channel 3-1. A customized negative pressure cleaning device is used to allow water to flow through the small holes at high speed through the bottom suction, ensuring that water flows through each uniform air hole at high speed and the water pressure generated by back suction is evenly distributed on each hole. The water pressure and flow rate can be adjusted and monitored by the control cabinet. The bottom of the water flow channel 3-1 is fixedly connected to the circulation pump 2. The tank body 1 is made of SUS304 stainless steel and is made of T=5mm steel plate.

[0024] In this embodiment, Figure 1 and Figure 2As shown, the circulation pump 2 and the water temperature heater 4 are both electrically connected to the control cabinet 5, the water temperature heater 4 is fixedly connected to the circulation pump 2, the water temperature heater 4 can frequency-control the circulation pump 2, and control the on and off of the circuit. The bottom of the frame 1-2 is movably connected with a self-locking universal wheel 7, the top of the frame 1-2 is rotatably connected with an outer seal 8, and the side of the outer seal 8 is fixedly connected with a connecting cover 9. A hinged rod 10 is provided on the top of the frame 1-2, and the two ends of the hinged rod 10 are hinged to the connecting cover 9 and the frame 1-2 respectively.

[0025] Among them, through reasonable design, a cleaning method is used to make the part cleaning position withstand a certain negative suction pressure, so that dirt, aluminum chips and other pollutants in the hole can be removed as soon as the part machining is completed, ensuring the cleanliness of the hole. During the subsequent circulation and storage of the parts, the inner wall of the hole will not be corroded by dirt, causing the base material to be affected, thereby affecting the subsequent use of the parts.

[0026] In this embodiment, Figure 3 and Figure 4 As shown, the frame 1-2 is made of SUS304 stainless steel profile, the outer seal 8 is made of SUS304 stainless steel mirror panel, the circulating pump 2 is CHL20-20 / 2.2KW southern horizontal self-priming pump, the flow channel 3 with filter is made of SUS304, the flow rate of the flow channel 3 with filter is 10T / H, the accuracy of the flow channel 3 with filter is 5um, the filter cartridge of the flow channel 3 with filter is with pressure display, the flow channel 3 with filter uses SUS304 molded bellows, and the heating power of the water temperature heater 4 is 6KW flange heating tube.

[0027] Among them, the control cabinet 5 has adjustment and monitoring functions, which is more convenient and intuitive when used. The water temperature heater 4 is connected to the control cabinet 5 to control the temperature and circuit on and off, making the entire device more convenient when used.

[0028] The working process of this utility model: When the negative pressure cleaning device designed by this scheme is used for SHD parts, a customized negative pressure cleaning device is used. The water flows through the small holes at high speed through the bottom suction to ensure that water flows through each uniform air hole at high speed and the water pressure generated by the back suction is evenly distributed on each hole. The water pressure and flow rate can be adjusted and monitored by the control cabinet. The dirt, metal particles and some processing burrs in the hole are taken away by the flow rate and water pressure. The water flows through the filter in the flow channel and circulates into the tank body. Through the above operation, the small holes of the parts can be efficiently cleaned as soon as possible after machining, avoiding the subsequent corrosion of the inner wall of the hole due to circulation, storage and other aging, which affects the quality of the parts.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A negative pressure cleaning device for SHD parts, comprising a tank (1), characterized in that: The outside of the tank body (1) is fixedly connected to a frame body (1-2), the inside of the frame body (1-2) is fixedly connected to a water storage tank (1-1), the inner bottom wall of the frame body (1-2) is installed with a circulation pump (2), the top of the circulation pump (2) extends into the water storage tank (1-1) and is in communication with the water storage tank (1-1), the inside of the frame body (1-2) is fixedly connected to a control cabinet (5), the surface of the control cabinet (5) is fixedly connected to a control panel (6), the inside of the water storage tank (1-1) is fixedly connected to a control cabinet (5), and the inside of the water storage tank (1-1) is fixedly connected to a control cabinet (6). A water temperature heater (4) is fixedly connected to the side of the water storage tank (1-1), a flow channel (3) with a filter is fixedly connected to one side of the flow channel (3) with the filter, a stainless steel filter barrel (3-2) is fixedly connected to one side of the flow channel (3) with the filter, a water flow channel (3-1) is fixedly connected to the other side of the flow channel (3) with the filter, and the bottom of the water flow channel (3-1) is fixedly connected to the circulation pump (2). The tank body (1) is made of SUS304 stainless steel and is made of a steel plate with a thickness of T=5mm.

2. A negative pressure cleaning device for SHD parts according to claim 1, characterized in that: The circulating pump (2) and the water temperature heater (4) are both electrically connected to the control cabinet (5), and the water temperature heater (4) is fixedly connected to the circulating pump (2).

3. The negative pressure cleaning device for SHD parts according to claim 1, characterized in that: The bottom of the frame (1-2) is movably connected to a self-locking universal wheel (7), the top of the frame (1-2) is rotatably connected to an outer seal (8), and the side of the outer seal (8) is fixedly connected to a connection cover (9).

4. The negative pressure cleaning device for SHD parts according to claim 1, characterized in that: A hinged rod (10) is provided on the top of the frame (1-2), and two ends of the hinged rod (10) are hinged to the connecting cover (9) and the frame (1-2) respectively.

5. The negative pressure cleaning device for SHD parts according to claim 3, characterized in that: The frame (1-2) is made of SUS304 stainless steel profile, and the outer seal (8) is made of SUS304 stainless steel mirror plate.

6. The negative pressure cleaning device for SHD parts according to claim 1, characterized in that: The circulation pump (2) adopts a CHL20-20 / 2.2KW southern horizontal self-priming pump, the flow channel with filter (3) is made of SUS304, the flow rate of the flow channel with filter (3) is 10T / H, and the precision of the flow channel with filter (3) is 5um.

7. The negative pressure cleaning device for SHD parts according to claim 1, characterized in that: The filter cartridge of the flow channel (3) with a filter is provided with a pressure display, and the flow channel (3) with a filter uses a SUS304 molded bellows.

8. The negative pressure cleaning device for SHD parts according to claim 1, characterized in that: The heating power of the water temperature heater (4) is 6KW flange heating pipe.

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