Wafer edge shape detection device

Abstract

The utility model relates to the technical field of detection devices, in particular to a wafer edge shape detection device, which comprises a base and a rotating frame, the rotating frame is rotatably mounted on the base, a plate to be detected is placed on the rotating frame, a detection frame is fixedly mounted on the base, and two detectors are arranged on the detection frame; the cleaning assembly comprises a cleaning frame arranged on the base, an air outlet pipe is arranged on the cleaning frame, air outlet frames are arranged at the two ends of the air outlet pipe, and brushes are arranged on the air outlet frames; and the driving assembly is used for driving the rotating frame to rotate, a mounting frame is arranged on one side of the cleaning frame, a piston pipe is arranged on the mounting frame, and when the rotating frame rotates, air in the piston pipe flows into the air outlet pipe. When the to-be-detected plate is driven by the driving assembly to rotate, the piston rod is driven to slide in a reciprocating manner, so that the air pressure in the piston pipe is changed, air is always discharged from the air outlet pipe, the edge of the wafer is cleaned in cooperation with the brush, and detection is performed after cleaning is completed, so that the detection precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection devices, in particular to a wafer edge morphology detection device. Background Art

[0002] A wafer is a silicon wafer used to make silicon semiconductor circuits. The starting material is silicon. High-purity polysilicon is dissolved, mixed with silicon crystal seeds, and then slowly pulled out to form a cylindrical single crystal of silicon.

[0003] Existing wafer edge status detection equipment does not have a device to clean the edge before detection, which causes impurities to adhere to the edge of the wafer and affect the detection results. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a wafer edge morphology detection device, which can effectively solve the problem in the prior art that the detection results are affected by the lack of cleaning measures.

[0005] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] The utility model provides a wafer edge morphology detection device, comprising a base and further comprising:

[0007] A rotating frame is rotatably mounted on the base, and a plate to be tested is placed on the rotating frame. A detection frame is fixedly mounted on the base, and two detectors are provided on the detection frame;

[0008] The cleaning component comprises a cleaning frame arranged on a base, an air outlet pipe being provided on the cleaning frame, air outlet frames being provided at both ends of the air outlet pipe, and brushes being provided on the air outlet frames;

[0009] The driving assembly is used to drive the rotating frame to rotate. A mounting frame is provided on one side of the cleaning frame. A piston tube is provided on the mounting frame. When the rotating frame rotates, air in the piston tube flows into the air outlet pipe.

[0010] Furthermore, a bracket is fixedly mounted on the base, an electric push rod is provided on the bracket, and a fixing plate is rotatably mounted on the output shaft at the bottom end of the electric push rod.

[0011] Furthermore, the driving assembly further comprises a motor arranged on the base, a driving roller is provided on the output shaft of the motor, and friction rings are provided on the side walls of the rotating frame and the outer wall of the driving roller.

[0012] Furthermore, a piston rod is movably inserted into the piston tube, a transmission plate is fixedly installed on one end of the piston rod away from the piston tube, a cam is fixedly sleeved on the output shaft of the motor, and the cam and the transmission plate are slidably connected.

[0013] Furthermore, the piston tube is respectively provided with a first air outlet pipe and a second air outlet pipe, the first air outlet pipe and the second air outlet pipe are commonly connected to a connecting pipe, the connecting pipe is connected to the air outlet pipe, and the piston tube is provided with a first air inlet pipe and a second air inlet pipe on one side.

[0014] Furthermore, a first sliding frame is provided on the detection frame, and the two detectors are fixedly mounted on the first sliding frame.

[0015] Furthermore, a second sliding frame is provided on the cleaning frame, and the air outlet pipe is fixedly mounted on the second sliding frame.

[0016] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0017] When the drive assembly drives the plate to be tested to rotate, the piston rod will slide back and forth, thereby changing the air pressure in the piston tube, so that air is always discharged from the air outlet pipe. The edge of the wafer is cleaned with a brush, and the test is carried out after cleaning to improve the accuracy of the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be derived from these drawings without inventive effort.

[0019] Figure 1 It is an overall schematic diagram of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the cleaning component part of the utility model;

[0021] Figure 3 for Figure 1 Front view of .

[0022] The numbers in the figure represent: 1. base; 2. rotating frame; 3. bracket; 4. electric push rod; 5. fixed plate; 6. plate to be tested; 7. testing frame; 8. detector; 9. motor; 10. driving roller; 11. piston tube; 12. piston rod; 13. transmission plate; 14. cam; 15. first air inlet pipe; 16. second air inlet pipe; 17. first air outlet pipe; 18. second air outlet pipe; 19. connecting pipe; 20. air outlet pipe; 21. air outlet frame; 22. brush; 23. cleaning frame; 24. mounting frame. DETAILED DESCRIPTION

[0023] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0024] The present invention will be further described below with reference to the embodiments.

[0025] Example: Reference Figure 1-Figure 3 A wafer edge morphology detection device includes a base 1 and a rotating frame 2, which is rotatably mounted on the base 1, and a plate to be detected 6 is placed on the rotating frame 2. A bracket 3 is fixedly mounted on the base 1, and an electric push rod 4 is provided on the bracket 3. A fixed plate 5 is rotatably mounted on the output shaft at the bottom end of the electric push rod 4. A detection frame 7 is fixedly mounted on the base 1, and two detectors 8 are provided on the detection frame 7. A first sliding frame is provided on the detection frame 7, and the two detectors 8 are fixedly mounted on the first sliding frame; a driving component is used to drive the rotating frame 2 to rotate, and a cleaning frame 23 is provided on one side. There is a mounting frame 24, on which a piston tube 11 is provided. When the rotating frame 2 rotates, the air in the piston tube 11 flows into the air outlet 20. The driving assembly also includes a motor 9 arranged on the base 1. A driving roller 10 is provided on the output shaft of the motor 9. Friction rings are provided on the side walls of the rotating frame 2 and the outer walls of the driving roller 10. A piston rod 12 is movably inserted into the piston tube 11. A transmission plate 13 is fixedly installed at one end of the piston rod 12 away from the piston tube 11. A cam 14 is fixedly sleeved on the output shaft of the motor 9, and the cam 14 and the transmission plate 13 are slidably connected.

[0026] The cleaning assembly includes a cleaning frame 23 arranged on the base 1, a second sliding frame is provided on the cleaning frame 23, the air outlet pipe 20 is fixedly installed on the second sliding frame, the cleaning frame 23 is provided with an air outlet pipe 20, both ends of the air outlet pipe 20 are provided with air outlet frames 21, and the air outlet frames 21 are provided with a brush 22, the piston tube 11 is respectively provided with a first air outlet pipe 17 and a second air outlet pipe 18, the first air outlet pipe 17 and the second air outlet pipe 18 are commonly connected to a connecting pipe 19, the connecting pipe 19 and the air outlet pipe 20 are connected, and a first air inlet pipe 15 and a second air inlet pipe 16 are provided on one side of the piston tube 11.

[0027] Place the plate to be tested 6 on the rotating frame 2, use the electric push rod 4 to push the fixed plate 5 down to clamp the plate to be tested 6, use the motor 9 to drive the driving roller 10 to rotate, and the driving roller 10 uses friction to drive the rotating frame 2 to rotate, thereby driving the plate to be tested 6 to rotate slowly.

[0028] The motor 9 simultaneously drives the cam 14 to rotate. During the rotation of the cam 14, it reciprocates with the transmission plate 13. The transmission plate 13 drives the piston rod 12 to slide back and forth in the piston tube 11, causing the air pressure in the piston tube 11 to change. When the piston rod 12 moves into the piston tube 11, the air in the piston tube 11 enters the connecting tube 19 from the first outlet pipe 17, and then enters the air outlet pipe 20 from the connecting tube 19. The second air inlet pipe 16 draws in external air. When the piston rod 12 moves outside the piston tube 11, the air in the piston tube 11 enters the connecting tube 19 from the second outlet pipe 18, and the first air inlet pipe 15 draws in external air. The air outlet frame 21 is provided with multiple air outlet holes, so that the edge of the test plate 6 can be cleaned with a brush 22 while blowing air.

[0029] The detector 8 may be a distance meter. The two detectors 8 are symmetrically arranged, and the data of the two distance meters are compared to complete the detection of the edge of the plate to be detected 6 .

[0030] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A wafer edge morphology detection device, comprising a base (1), characterized in that: Also includes: A rotating frame (2) is rotatably mounted on the base (1), and a plate to be detected (6) is placed on the rotating frame (2). A detection frame (7) is fixedly mounted on the base (1), and two detectors (8) are provided on the detection frame (7); A cleaning component comprises a cleaning frame (23) arranged on a base (1), an air outlet pipe (20) being provided on the cleaning frame (23), air outlet frames (21) being provided at both ends of the air outlet pipe (20), and a brush (22) being provided on the air outlet frame (21); A driving assembly is used to drive the rotating frame (2) to rotate. A mounting frame (24) is provided on one side of the cleaning frame (23). A piston tube (11) is provided on the mounting frame (24). When the rotating frame (2) rotates, air in the piston tube (11) flows into the air outlet pipe (20).

2. The wafer edge morphology detection device according to claim 1, characterized in that: A bracket (3) is fixedly mounted on the base (1), an electric push rod (4) is provided on the bracket (3), and a fixed plate (5) is rotatably mounted on the output shaft at the bottom end of the electric push rod (4).

3. The wafer edge morphology detection device according to claim 1, characterized in that: The driving assembly further comprises a motor (9) arranged on the base (1); a driving roller (10) is provided on the output shaft of the motor (9); and friction rings are provided on the side wall of the rotating frame (2) and the outer wall of the driving roller (10).

4. The wafer edge morphology detection device according to claim 3, characterized in that: A piston rod (12) is movably inserted into the piston tube (11), and a transmission plate (13) is fixedly installed on one end of the piston rod (12) away from the piston tube (11). A cam (14) is fixedly sleeved on the output shaft of the motor (9), and the cam (14) and the transmission plate (13) are slidably connected.

5. The wafer edge morphology detection device according to claim 4, characterized in that: The piston tube (11) is provided with a first air outlet pipe (17) and a second air outlet pipe (18), respectively. The first air outlet pipe (17) and the second air outlet pipe (18) are connected to a connecting pipe (19), and the connecting pipe (19) is connected to the air outlet pipe (20). One side of the piston tube (11) is provided with a first air inlet pipe (15) and a second air inlet pipe (16).

6. The wafer edge morphology detection device according to claim 1, characterized in that: A first sliding frame is provided on the detection frame (7), and the two detectors (8) are fixedly mounted on the first sliding frame.

7. The wafer edge morphology detection device according to claim 1, characterized in that: A second sliding frame is provided on the cleaning frame (23), and the air outlet pipe (20) is fixedly mounted on the second sliding frame.

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