Reaction furnace

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a reaction furnace, and solves the problems that the processing difficulty of a furnace tube is large, and the uniformity of heat distribution in the furnace tube is poor. The reaction furnace comprises a cavity, a plurality of furnace tubes, a main heating assembly and a first auxiliary heating assembly. The cavity is provided with an annular side wall, and a cavity is defined by the annular side wall. The multiple furnace tubes are arranged in the cavity and arranged in multiple rows and multiple columns, and the furnace tubes are configured to be of a containing boat structure. The main heating assembly is connected with the cavity, surrounds the annular side wall in the surrounding direction of the annular side wall and extends in the extending direction of the annular side wall. The first auxiliary heating assembly is located between the adjacent furnace tubes and extends in the extending direction of the furnace tubes. Compared with the prior art in which a large-size furnace tube is arranged in a cavity, the furnace tube of the reaction furnace is small in size and easier to process, and the main heating assembly and the first auxiliary heating assembly are used for providing heat for the furnace tube together, so that the uniformity of heat distribution in the furnace tube is improved.

Description

Technical Field

[0001] The present disclosure relates to the fields of photovoltaics and semiconductor technology, and in particular to a reactor. Background Art

[0002] In the photovoltaic and semiconductor industries, products typically undergo a series of production processes, including texturing, diffusion, laser scanning, etching, coating, printing, sintering, and testing. Specific production processes often require specialized reactors. Currently, boat-type loading is commonly used within the industry.

[0003] Conventional reactors typically feature large furnace tubes within their chambers, housing multiple boat structures. The reactors process the products loaded into these boats simultaneously. However, large furnace tubes are difficult to manufacture and suffer from poor heat distribution uniformity within them. Utility Model Content

[0004] In view of this, an embodiment of the present disclosure provides a reaction furnace, which solves the problems of difficulty in processing furnace tubes and poor uniformity of heat distribution in the furnace tubes.

[0005] An embodiment of the present disclosure provides a reaction furnace, comprising: a cavity having an annular side wall, which encloses a chamber; a plurality of furnace tubes, which are arranged in the chamber and are spaced apart into multiple rows and columns along a first direction and a second direction, wherein the first direction intersects with an extension direction of the furnace tubes, and the second direction intersects with the extension direction of the furnace tubes and the first direction respectively, and the furnace tubes are configured to accommodate a boat structure; a main heating component, which is connected to the cavity, is arranged around the annular side wall along the circumferential direction of the annular side wall, and extends along the extension direction of the annular side wall; a first auxiliary heating component, which is located between adjacent furnace tubes and extends along the extension direction of the furnace tubes.

[0006] In some embodiments, there is a first accommodating space between the four furnace tubes located in two adjacent rows and two adjacent columns; wherein, the first auxiliary heating assembly includes: at least one first auxiliary heating element, which is arranged in the first accommodating space, and the first auxiliary heating element extends along the extension direction of the furnace tube and is detachably connected to the annular side wall.

[0007] In some embodiments, the shape of the cross section of the furnace tube includes a circular ring or a rectangular shape; wherein, when the shape of the cross section of the furnace tube is a circular ring, the shape of the cross section of the first auxiliary heating element includes a closed figure formed by four sides, and the four sides are respectively close to the four furnace tubes, and each side is bent toward the corresponding furnace tube; or, the shape of the cross section of the first auxiliary heating element includes a cross shape; wherein, when the shape of the cross section of the furnace tube is a rectangular shape, the shape of the cross section of the first auxiliary heating element includes a cross shape.

[0008] In some embodiments, the interior of the furnace tube has a plurality of second accommodating spaces, and the plurality of second accommodating spaces are arranged into multiple rows and columns along the third direction and the fourth direction, and the second accommodating spaces are configured to accommodate the boat structure, wherein the third direction is parallel to the first direction, and the fourth direction is parallel to the second direction; wherein the reaction furnace also includes: at least one second auxiliary heating component, which is vertically arranged, and the second auxiliary heating component extends along the extension direction of the furnace tube and is located between two adjacent columns of the second accommodating spaces; at least one third auxiliary heating component, which is horizontally arranged, and the third auxiliary heating component extends along the extension direction of the furnace tube and is located between two adjacent rows of the second accommodating spaces.

[0009] In some embodiments, the second auxiliary heating component includes: a first heating element, which is vertically arranged and extends along the extension direction of the furnace tube; a first support member, which is vertically arranged and extends along the extension direction of the furnace tube, and is configured to support the first heating element; wherein, the third auxiliary heating component includes: a second heating element, which is horizontally arranged and extends along the extension direction of the furnace tube; a second support member, which is horizontally arranged and extends along the extension direction of the furnace tube, and is configured to support the second heating element.

[0010] In some embodiments, the first support member and the second support member are both plate-like structures, the first heating member is close to the surface of the first support member, and the second heating member is close to the surface of the second support member; or, the first support member includes: a plurality of first sleeves, which are vertically arranged and spaced apart along the extension direction of the furnace tube, the first sleeves are connected to the side wall of the furnace tube, and are configured to accommodate the first heating member; the second support member includes: a plurality of second sleeves, which are horizontally arranged and spaced apart along the extension direction of the furnace tube, the second sleeves are connected to the side wall of the furnace tube, and are configured to accommodate the second heating member.

[0011] In some embodiments, when the first support member includes a plurality of the first sleeves and the second support member includes a plurality of the second sleeves, the end of the first sleeve and the end of the second sleeve both have a first air inlet, and the first sleeve and the second sleeve both have a plurality of first air outlet holes, and the first air outlet holes are connected to the furnace tube.

[0012] In some embodiments, the first end of the furnace tube has a first opening; wherein, the reactor further includes: a plurality of flow equalizers, respectively connected to the first ends of the plurality of furnace tubes to cover the first opening, wherein the interior of the flow equalizer has an air flow channel, the side wall of the flow equalizer has a plurality of second air inlets, the second air inlets are connected to the air flow channel, the side of the flow equalizer close to the first end of the furnace tube has a plurality of second air outlets, the second air outlets connect the air flow channel and the furnace tube.

[0013] In some embodiments, the main heating component includes: a sleeve, which is sleeved on the annular side wall and extends along the extension direction of the annular side wall; a third heating element, which is arranged around the sleeve along the surrounding direction of the sleeve and extends along the extension direction of the sleeve; a plurality of fixing elements, all of which are connected to the inner wall of the sleeve, are arranged around the sleeve, and are arranged along the extension direction of the sleeve.

[0014] In some embodiments, the sleeve includes: a plurality of sub-sleeves, adjacent sub-sleeves are detachably connected, and the third heating element is provided on the inner wall of each sub-sleeve.

[0015] In some embodiments, the reactor further includes: a cooling medium pipeline connected to the inner wall of the sleeve, arranged around the sleeve along the circumferential direction of the sleeve, and extending along the extension direction of the sleeve, wherein the cooling medium pipeline has a medium input port and a medium output port, and the cooling medium flows in from the medium output port and flows out from the medium output port.

[0016] The reactor provided by the embodiment of the present disclosure includes a cavity, a plurality of furnace tubes, a main heating assembly, and a first auxiliary heating assembly. The chamber of the cavity accommodates a plurality of furnace tubes, and the size of the furnace tubes is relatively small, eliminating the large-sized furnace tubes of the reactor in the related art. Small-sized furnace tubes are easier to process than large-sized furnace tubes. In addition, the main heating assembly arranged along the circumferential direction of the annular side wall of the cavity and extending along the extension direction of the annular side wall, and the first auxiliary heating assembly arranged between adjacent furnace tubes and extending along the extension direction of the furnace tubes jointly provide heat to the furnace tubes, thereby improving the uniformity of heat distribution in the furnace tubes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1Shown is a schematic structural diagram of a reactor provided in one embodiment of the present disclosure.

[0018] Figure 2 Shown is a front view of a reactor and a boat structure provided by an embodiment of the present disclosure.

[0019] Figure 3 Shown is a schematic structural diagram of a cavity and a first auxiliary heating element provided in one embodiment of the present disclosure.

[0020] Figure 4 Shown is a front view of a reactor provided by another embodiment of the present disclosure.

[0021] Figure 5 Shown is a front view of a reactor provided by another embodiment of the present disclosure.

[0022] Figure 6 Shown is a front view of a furnace tube, a second auxiliary heating assembly, and a third auxiliary heating assembly provided in one embodiment of the present disclosure.

[0023] Figure 7 Shown is a structural schematic diagram of a furnace tube, a second auxiliary heating assembly, a third auxiliary heating assembly and a connecting piece provided in one embodiment of the present disclosure.

[0024] Figure 8 Shown is a front view of a furnace tube, a second auxiliary heating assembly, and a third auxiliary heating assembly provided in another embodiment of the present disclosure.

[0025] Figure 9 Shown is a schematic structural diagram of a furnace tube, a second auxiliary heating assembly, and a third auxiliary heating assembly provided in another embodiment of the present disclosure.

[0026] Figure 10 Shown is a schematic structural diagram of a furnace tube, a second auxiliary heating assembly, and a third auxiliary heating assembly provided in another embodiment of the present disclosure.

[0027] Figure 11 Shown is a schematic structural diagram of a first sleeve provided in an embodiment of the present disclosure.

[0028] Figure 12 Shown is a schematic structural diagram of a flow uniforming member provided in one embodiment of the present disclosure.

[0029] Figure 13 Shown is a cross-sectional view of a flow uniforming member provided in one embodiment of the present disclosure.

[0030] Figure 14 Shown is a schematic structural diagram of a main heating assembly and a cooling medium pipeline provided in one embodiment of the present disclosure.

[0031] Figure 15 Shown is a schematic structural diagram of a sleeve provided in one embodiment of the present disclosure.

[0032] Reference numerals:

[0033] 10. Reactor; 100. Cavity; 101. Annular sidewall; 1001. Chamber; 1002. First accommodating space; 200. Furnace tube; 201. Sidewall of furnace tube; 210. First end of furnace tube; 2101. First opening; 2001. Second accommodating space; 300. Main heating assembly; 310. Sleeve; 3101. Inner wall of sleeve; 3110. Sub-sleeve; 320. Third heating element; 330. Fixing member; 400. First auxiliary heating assembly; 410. First auxiliary heating element; 500. Second auxiliary heating assembly; 510. First heating element; 520. First supporting member; 5210. First sleeve; 600. Third auxiliary heating assembly;

[0034] 610, second heating element; 620, second supporting element; 6210, second sleeve; 1003, first air inlet; 1004, first air outlet; 700, flow equalizer; 710, side wall of flow equalizer; 701, air flow channel; 702, second air inlet; 703, second air outlet; 800, cooling medium pipeline; 801, medium input port; 802, medium output port; 2, boat structure; 900, connecting element. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0036] Figure 1 Shown is a schematic structural diagram of a reactor provided in one embodiment of the present disclosure. Figure 2 The figure shows a front view of the reactor and boat structure provided by one embodiment of the present disclosure. Figure 1 and Figure 2As shown, the reactor 10 includes a chamber 100, a plurality of furnace tubes 200, a main heating assembly 300, and a first auxiliary heating assembly 400. The chamber 100 has an annular sidewall 101, which encloses a chamber 1001. The plurality of furnace tubes 200 are disposed within the chamber 1001 and are arranged in a plurality of rows and columns along a first direction X1 and a second direction X2. The first direction X1 intersects the extension direction of the furnace tubes 200, and the second direction X2 intersects the extension direction of the furnace tubes 200 and the first direction X1, respectively. The furnace tubes 200 are configured to accommodate a boat structure 2. The main heating assembly 300 is connected to the chamber 100 and is disposed around the annular sidewall 101 along a circumferential direction thereof, extending in the direction of extension of the annular sidewall 101. The first auxiliary heating assembly 400 is located between adjacent furnace tubes 200 and extends in the direction of extension of the furnace tubes 200.

[0037] The chamber 1001 of the reactor 100 provided in the embodiment of the present disclosure accommodates a plurality of furnace tubes 200, and the furnace tubes 200 are relatively small in size, eliminating the large-sized furnace tubes of the reactor 100 in the related art. The small-sized furnace tubes 200 are easier to process than the large-sized furnace tubes. In addition, the main heating assembly 300, which is arranged along the circumferential direction of the annular side wall 101 of the chamber 100 and extends along the extension direction of the annular side wall 101, and the first auxiliary heating assembly 400, which is arranged between adjacent furnace tubes 200 and extends along the extension direction of the furnace tubes 200, jointly provide heat to the furnace tubes 200, thereby improving the uniformity of heat distribution within the furnace tubes 200.

[0038] For example, the cross-section of the annular sidewall 101 may be in the shape of a circular ring, a rectangular ring, a polygonal ring, or the like.

[0039] For example, the cross-section of the furnace tube 200 may be in the shape of a circular ring, a rectangular ring, a polygonal ring, or the like.

[0040] For example, the main heating component 300 may be a heating wire, a heating plate, or the like.

[0041] Illustratively, the main heating assembly 300 may be disposed in the chamber 1001 or outside the cavity 100 . Figure 1 and Figure 2 The primary heating assembly 300 is shown disposed outside the annular side wall 101 .

[0042] Illustratively, the first auxiliary heating assembly 400 may be connected to the furnace tube 200 , the first auxiliary heating assembly 400 may be placed on the furnace tube 200 below the first auxiliary heating assembly 400 , or the first auxiliary heating assembly 400 may be connected to the annular sidewall 101 .

[0043] Figure 1 and Figure 2The cross-section of the annular sidewall 101 is shown as a circular ring, and the cross-section of the furnace tube 200 is also a circular ring. The furnace tube 200 extends in the same direction as the chamber 100. A first direction X1 is perpendicular to the extension direction of the furnace tube 200, and a second direction X2 is perpendicular to the extension direction of the furnace tube 200 and the first direction X1, respectively. This maximizes the space utilization of the chamber 1001 and maintains the neat arrangement of the furnace tubes 200.

[0044] Illustratively, the furnace tube 200 accommodates one boat structure 2 or a plurality of boat structures 2 .

[0045] In some embodiments, a first accommodation space 1002 is defined between each of the four furnace tubes 200 located in two adjacent rows and two adjacent columns. The first auxiliary heating assembly 400 includes at least one first auxiliary heating element 410 disposed in the first accommodation space 1002. The first auxiliary heating element 410 extends along the extension direction of the furnace tube 200 and is detachably connected to the annular sidewall 101.

[0046] The detachable connection between the first auxiliary heating element 410 and the annular side wall 101 improves the stability of the first auxiliary heating element 410 in the first accommodating space 1002 and facilitates the replacement of the first auxiliary heating element 410.

[0047] For example, Figures 1 to 4 As shown, four furnace tubes 200 are arranged in two rows and two columns along the first direction X1 and the second direction X2, the number of the first accommodating space 1002 is one, and the first auxiliary heating assembly 400 includes a first auxiliary heating element 410 .

[0048] For example, Figure 5 As shown, the cross-section of the annular sidewall 101 is in the shape of a rectangular ring, the cross-section of the furnace tube 200 is in the shape of a rectangular ring, four or more furnace tubes 200 are arranged in multiple rows and columns along the first direction X1 and the second direction X2, there are multiple first accommodating spaces 1002, and the first auxiliary heating assembly 400 includes multiple first auxiliary heating elements 410, which are respectively located in the multiple first accommodating spaces 1002. For example, adjacent first auxiliary heating elements 410 are connected to each other.

[0049] Figure 4 and Figure 5 The main heating assembly 300 is shown disposed in the chamber 1001 and connected to the annular sidewall 101. When the main heating assembly 300 is disposed in the chamber 1001, the heating effect of the main heating assembly 300 is improved. For example, the main heating assembly 300 is detachably connected to the annular sidewall 101 to facilitate replacement of the main heating assembly 300.

[0050] In some embodiments, as Figure 1 and Figure 2 As shown, when the cross-section of the furnace tube 200 is in the shape of a circular ring, the cross-section of the first auxiliary heating member 410 is in the shape of a cross.

[0051] In some embodiments, as Figure 4 As shown, when the cross-section of the furnace tube 200 is in the shape of a circular ring, the cross-section of the first auxiliary heating element 410 includes a closed figure formed by four side edges 4101, and the four side edges 4101 are respectively close to the four furnace tubes 200, and each side edge 4101 is bent toward the corresponding furnace tube 200 to ensure that the four side edges of the first auxiliary heating element 410 are as close to the furnace tube 200 as possible, thereby further improving the uniformity of heat distribution in the furnace tube 200.

[0052] In some embodiments, as Figure 5 As shown, when the cross-section of the furnace tube 200 is rectangular, the cross-section of the first auxiliary heating element 410 includes a cross shape to ensure that the first auxiliary heating element 410 is as close to the furnace tube as possible, thereby further improving the uniformity of heat distribution in the furnace tube 200.

[0053] In some embodiments, the interior of the furnace tube 200 has a plurality of second accommodating spaces 2001, and the plurality of second accommodating spaces 2001 are arranged in multiple rows and columns along the third direction X3 and the fourth direction X4. The second accommodating spaces 2001 are configured to accommodate the boat structure 2. The third direction X3 is parallel to the first direction X1, and the fourth direction X4 is parallel to the second direction X2. The reactor 10 further includes at least one second auxiliary heating assembly 500 and at least one third auxiliary heating assembly 600. The second auxiliary heating assembly 500 is vertically arranged, extending along the direction of extension of the furnace tube 200 and positioned between two adjacent columns of the second accommodating spaces 2001. The third auxiliary heating assembly 600 is horizontally arranged, extending along the direction of extension of the furnace tube 200 and positioned between two adjacent rows of the second accommodating spaces 2001.

[0054] The second auxiliary heating assembly 500 and the third auxiliary heating assembly 600 provide heat to the furnace tube 200 in the vertical direction and the horizontal direction respectively along the extension direction of the furnace tube 200 , thereby further improving the uniformity of heat distribution in the furnace tube 200 .

[0055] For example, Figure 6 、 Figure 8 、 Figure 9 and Figure 10As shown, the interior of the furnace tube 200 has four second accommodating spaces 2001 arranged in two rows and two columns along the third direction X3 and the fourth direction X4. Each second accommodating space 2001 accommodates a boat structure 2. The reactor 10 includes a second auxiliary heating assembly 500 and a third auxiliary heating assembly 600, which are arranged in a cross shape.

[0056] Illustratively, the second auxiliary heating assembly 500 and the third auxiliary heating assembly 600 are respectively connected to the furnace tube 200. Illustratively, the second auxiliary heating assembly 500 and the third auxiliary heating assembly 600 are connected and placed in the furnace tube 200 as an integral structure.

[0057] In some embodiments, as Figure 7 and Figure 8 As shown, the second auxiliary heating assembly 500 includes a first heating element 510 and a first support member 520. The first heating element 510 is vertically arranged and extends along the extension direction of the furnace tube 200. The first support member 520 is vertically arranged and extends along the extension direction of the furnace tube 200, and is configured to support the first heating element 510. The third auxiliary heating assembly 600 includes a second heating element 610 and a second support member 620. The second heating element 610 is horizontally arranged and extends along the extension direction of the furnace tube 200. The second support member 620 is horizontally arranged and extends along the extension direction of the furnace tube 200, and is configured to support the second heating element 610.

[0058] The first support member 520 supports the first heating member 510 , and the second support member 620 supports the second heating member 610 , thereby improving the stability of the first heating member 510 and the second heating member 610 when placed in the furnace tube 200 .

[0059] For example, the first heating element 510 may be a heating wire, a heating plate, a heating tube, or the like.

[0060] For example, the second heating element 610 may be a heating wire, a heating plate, a heating tube, or the like.

[0061] In some embodiments, as Figure 7 and Figure 8 As shown, the first support member 520 and the second support member 620 are both plate-shaped structures, the first heating member 510 is close to the surface of the first support member 520 , and the second heating member 610 is close to the surface of the second support member 620 .

[0062] Exemplarily, the first support member 520 is made of graphite, silicon carbide, quartz, or plastic, etc. When the first support member 520 is made of graphite or silicon carbide, the first support member 520 can generate heat when powered, thereby providing heat to the furnace tube 200 .

[0063] Exemplarily, the second support member 620 is made of graphite, silicon carbide, quartz, or plastic, etc. When the second support member 620 is made of graphite or silicon carbide, the second support member 620 can generate heat when powered, thereby providing heat to the furnace tube 200 .

[0064] For example, Figure 7 As shown, the reaction furnace 10 further includes a connecting member 900 , which connects the first supporting member 520 and the second supporting member 620 , and the connecting member 900 can open or close one end of the furnace tube 200 .

[0065] Figure 7 and Figure 8 The first heating element 510 shown is a heating wire, and the second heating element 610 is a heating wire. There are four first heating elements 510 and four second heating elements 610, and the four first heating elements 510 are arranged vertically and are located on the sides of the four second accommodating spaces 2001. The four second heating elements 610 are arranged horizontally and are located above or below the four second accommodating spaces 2001.

[0066] In some embodiments, as Figure 9 As shown, the first support member 520 includes a plurality of first sleeves 5210, which are vertically arranged and spaced apart along the extension direction of the furnace tube 200. The first sleeves 5210 are connected to the side wall 201 of the furnace tube and are configured to accommodate the first heating element 510. The second support member 620 includes a plurality of second sleeves 6210, which are horizontally arranged and spaced apart along the extension direction of the furnace tube 200. The second sleeves 6210 are connected to the side wall 201 of the furnace tube and are configured to accommodate the second heating element 610.

[0067] For example, Figure 9 As shown, a plurality of first sleeve tubes 5210 and a plurality of second sleeve tubes 6210 are sequentially arranged along the extension direction of the furnace tube 200 .

[0068] Illustratively, the first sleeve 5210 is detachably connected to the side wall 201 of the furnace tube to facilitate replacement of the first sleeve 5210 and the first heating element 510. Illustratively, the second sleeve 6210 is detachably connected to the side wall 201 of the furnace tube to facilitate replacement of the second sleeve 6210 and the second heating element 610.

[0069] For example, Figure 10As shown, to further improve the uniformity of heat distribution within the furnace tube 200, a plurality of first sleeves 5210 and a plurality of second sleeves 6210 are disposed on one side of each of the plurality of second accommodating spaces 2001 near the side wall 201 of the furnace tube, near the side wall 201 of the furnace tube. The plurality of first sleeves 5210 are disposed vertically and spaced apart along the extension direction of the furnace tube 200, while the plurality of second sleeves 6210 are disposed horizontally and spaced apart along the extension direction of the furnace tube 200, thereby forming a "field"-shaped arrangement of the second auxiliary heating assembly 500 and the third auxiliary heating assembly 600.

[0070] In some embodiments, when the first support member 520 includes multiple first sleeves 5210 and the second support member 620 includes multiple second sleeves 6210, the end of the first sleeve 5210 and the end of the second sleeve 6210 both have a first air inlet 1003, and the first sleeve 5210 and the second sleeve 6210 both have multiple first air outlet holes 1004, and the first air outlet holes 1004 are connected to the furnace tube 200.

[0071] The furnace tube 200 is supplied with process gas through the multiple first gas inlets 1003 of the multiple first sleeve tubes 5210 and the multiple second sleeve tubes 6210 spaced apart along the extending direction of the furnace tube 200 , thereby improving the gas intake uniformity of the furnace tube 200 .

[0072] For example, the cross-section of the first sleeve 5210 may be in the shape of a rectangular ring, a circular ring, a polygonal ring, etc. For example, Figure 11 As shown, both ends of the first sleeve 5210 have a first air inlet 1003 to improve the air intake efficiency.

[0073] Illustratively, the plurality of first air outlet holes 1004 are spaced apart along the extending direction of the first sleeve 5210. Illustratively, the plurality of first air outlet holes 1004 are spaced apart along the circumferential direction of the first sleeve 5210 and spaced apart along the extending direction of the first sleeve 5210.

[0074] For example, the cross-section of the second sleeve 6210 may be in the shape of a rectangular ring, a circular ring, a polygonal ring, etc. For example, both ends of the second sleeve 6210 have a first air inlet 1003 to improve air intake efficiency.

[0075] Illustratively, the plurality of first air outlet holes 1004 are spaced apart along the extension direction of the second sleeve 6210. Illustratively, the plurality of first air outlet holes 1004 are spaced apart along the circumferential direction of the second sleeve 6210 and spaced apart along the extension direction of the second sleeve 6210.

[0076] In some embodiments, as Figure 9 、 Figure 10 、 Figure 12 and Figure 13As shown, the first end 210 of the furnace tube has a first opening 2101. The reactor 10 also includes a plurality of flow equalizers 700, each connected to the first end 210 of the plurality of furnace tubes to cover the first opening 2101. The flow equalizers 700 have an airflow channel 701 therein. The sidewalls 710 of the flow equalizers have a plurality of second air inlets 702, which communicate with the airflow channel 701. The side of the flow equalizer 700 near the first end 210 of the furnace tube has a plurality of second air outlets 703, which communicate with the airflow channel 701 and the furnace tube 200.

[0077] For example, the shape of the flow uniforming member 700 may be rectangular, circular, polygonal, etc.

[0078] Illustratively, the plurality of second air outlet holes 703 are arranged at intervals along the circumferential direction of the side wall 710 of the flow uniforming member to improve the uniformity of gas distribution in the air flow channel 701 .

[0079] In some embodiments, the primary heating assembly 300 includes a sleeve 310, a third heating element 320, and a plurality of fixing elements 330. The sleeve 310 is sleeved onto the annular sidewall 101 and extends along the extension direction of the annular sidewall 101. The third heating element 320 is disposed around the sleeve 310 along the circumferential direction of the sleeve 310 and extends along the extension direction of the sleeve 310. The plurality of fixing elements 330 are each connected to the inner wall 3101 of the sleeve, disposed around the sleeve 310, and arranged along the extension direction of the sleeve 310.

[0080] For example, the cross-section of the sleeve 310 may be in the shape of a circular ring, a rectangular ring, a polygonal ring, or the like.

[0081] For example, the third heating element 320 may be a heating wire, a heating plate, a heating tube, etc. For example, the fixing element 330 may be a fixing seat, a fixing ring, a fixing rod, etc. Figure 14 Shown is a schematic structural diagram of a main heating assembly and a cooling medium pipeline provided in one embodiment of the present disclosure. Figure 14 The fixing member shown is a fixing ring, the third heating member 320 is a heating wire, and the cross-section of the sleeve 310 is in the shape of a circular ring.

[0082] In some embodiments, the sleeve 310 includes a plurality of sub-sleeves 3110 , adjacent sub-sleeves 3110 are detachably connected, and a third heating element 320 is provided on the inner wall of each sub-sleeve 3110 .

[0083] The multiple sub-sleeves 3110 of the sleeve 310 are detachably connected to each other to facilitate the disassembly, assembly and maintenance of the sub-sleeves 3110.

[0084] Exemplarily, the number of sub-sleeves 3110 may be two, three, four or more. Figure 15Shown is a schematic structural diagram of a sleeve provided in one embodiment of the present disclosure. Figure 15 The number of sub-sleeves 3110 shown is four, and the cross-section of each sub-sleeve 3110 is in the shape of a quarter of a circular ring.

[0085] In some embodiments, as Figure 3 and Figure 14 As shown, the reactor 10 further includes a cooling medium pipe 800, which is connected to the inner wall 3101 of the sleeve, is disposed around the sleeve 310 in a circumferential direction of the sleeve 310, and extends in an extending direction of the sleeve 310. The cooling medium pipe 800 has a medium input port 801 and a medium output port 802. The cooling medium flows into the medium output port 801 and flows out of the medium output port 802.

[0086] The cooling medium flowing through the cooling medium pipe 800 is used to remove the heat of the reaction furnace 10 , so as to achieve rapid cooling of the reaction furnace 10 .

[0087] For example, the cooling medium may be water, salt water, trinitrile aqueous solution or other fluid liquids having a cooling effect.

[0088] Exemplarily, the cooling medium pipe 800 is detachably connected to the inner wall 3101 of the sleeve to facilitate replacement of the cooling medium pipe 800 .

[0089] In the various embodiments of the present disclosure, unless otherwise specified, the connection may be in the form of a detachable connection using bolts and nuts, screws, snaps, magnets, etc. In some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.

[0090] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0091] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0092] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0093] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0094] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A reactor, characterized in that: include: a cavity having an annular sidewall, wherein the annular sidewall encloses a chamber; a plurality of furnace tubes disposed in the chamber and spaced apart in a plurality of rows and columns along a first direction and a second direction, wherein the first direction intersects an extension direction of the furnace tubes, and the second direction intersects the extension direction of the furnace tubes and the first direction, respectively, and the furnace tubes are configured to accommodate a boat structure; a main heating assembly connected to the cavity, disposed around the annular side wall along a surrounding direction of the annular side wall, and extending along an extending direction of the annular side wall; The first auxiliary heating assembly is located between adjacent furnace tubes and extends along the extension direction of the furnace tubes.

2. The reactor according to claim 1, characterized in that There is a first accommodation space between the four furnace tubes located in two adjacent rows and two adjacent columns; Wherein, the first auxiliary heating component comprises: At least one first auxiliary heating element is disposed in the first accommodating space. The first auxiliary heating element extends along an extension direction of the furnace tube and is detachably connected to the annular side wall.

3. The reactor according to claim 2, characterized in that The cross-section of the furnace tube includes a circular ring or a rectangular shape; Wherein, when the cross-section of the furnace tube is annular, the cross-section of the first auxiliary heating element comprises a closed figure formed by four sides, the four sides are respectively close to the four furnace tubes, and each side is bent toward the corresponding furnace tube; or, the cross-section of the first auxiliary heating element comprises a cross; Wherein, when the cross-section of the furnace tube is rectangular, the cross-section of the first auxiliary heating element includes a cross shape.

4. The reactor according to any one of claims 1 to 3, characterized in that: The furnace tube has a plurality of second accommodating spaces inside, and the plurality of second accommodating spaces are arranged in a plurality of rows and columns along a third direction and a fourth direction, and the second accommodating spaces are configured to accommodate the boat structure, wherein the third direction is parallel to the first direction, and the fourth direction is parallel to the second direction; Wherein, the reactor further comprises: at least one second auxiliary heating assembly, vertically arranged, extending along the extension direction of the furnace tube and located between two adjacent rows of the second accommodating spaces; At least one third auxiliary heating assembly is horizontally arranged, and the third auxiliary heating assembly extends along the extension direction of the furnace tube and is located between two adjacent rows of the second accommodating spaces.

5. The reactor according to claim 4, characterized in that: The second auxiliary heating component comprises: a first heating element, arranged vertically and extending along an extension direction of the furnace tube; a first support member, disposed vertically and extending along an extension direction of the furnace tube, configured to support the first heating member; Wherein, the third auxiliary heating component includes: a second heating element, arranged horizontally and extending along the extension direction of the furnace tube; The second supporting member is horizontally arranged and extends along the extension direction of the furnace tube, and is configured to support the second heating member.

6. The reactor according to claim 5, characterized in that The first support member and the second support member are both plate-shaped structures, the first heating member is close to the surface of the first support member, and the second heating member is close to the surface of the second support member; or, The first support member comprises: a plurality of first sleeves, vertically arranged and spaced apart along the extension direction of the furnace tube, the first sleeves being connected to the side wall of the furnace tube and configured to accommodate the first heating element; The second support member comprises: A plurality of second sleeves are horizontally arranged and spaced apart along the extension direction of the furnace tube. The second sleeves are connected to the side wall of the furnace tube and are configured to accommodate the second heating element.

7. The reactor according to claim 6, characterized in that When the first support member includes a plurality of the first sleeves and the second support member includes a plurality of the second sleeves, the end of the first sleeve and the end of the second sleeve both have a first air inlet, and the first sleeve and the second sleeve both have a plurality of first air outlets, and the first air outlets are connected to the furnace tube.

8. The reactor according to any one of claims 5 to 7, characterized in that: The first end of the furnace tube has a first opening; Wherein, the reactor further comprises: Multiple flow equalizers are respectively connected to the first ends of the multiple furnace tubes to cover the first opening, wherein the interior of the flow equalizer has an air flow channel, the side wall of the flow equalizer has multiple second air inlets, the second air inlets are connected to the air flow channel, and the side of the flow equalizer close to the first end of the furnace tube has multiple second air outlets, the second air outlets connect the air flow channel and the furnace tube.

9. The reactor according to any one of claims 1 to 3, characterized in that: The main heating assembly comprises: a sleeve, sleeved on the annular side wall and extending along the extension direction of the annular side wall; a third heating element, disposed around the sleeve along a circumferential direction of the sleeve and extending along an extending direction of the sleeve; A plurality of fixing members are connected to the inner wall of the sleeve, are arranged around the sleeve, and are arranged along the extension direction of the sleeve.

10. The reaction furnace according to claim 9, characterized in that: The sleeve comprises: A plurality of sub-sleeves are provided, and adjacent sub-sleeves are detachably connected, and the inner wall of each sub-sleeve is provided with the third heating element.

11. The reactor according to claim 9, characterized in that Also includes: A cooling medium pipeline is connected to the inner wall of the sleeve, is arranged around the sleeve along the circumferential direction of the sleeve, and extends along the extension direction of the sleeve, wherein the cooling medium pipeline has a medium input port and a medium output port, and the cooling medium flows in from the medium output port and flows out from the medium output port.

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