Wafer loading and unloading material box storage mechanism

Abstract

The utility model relates to the technical field of material box storage mechanisms, in particular to a wafer feeding and discharging material box storage mechanism which comprises a material bearing table, a material bearing space used for storing a material box is arranged above the material bearing table, and the material bearing space is provided with a first feeding port, a second feeding port and a discharging port. The first feeding port is arranged in the vertical direction, an opening of the first feeding port is upward, the first feeding port is used for receiving incoming materials in the vertical direction, and the second feeding port is arranged in the horizontal direction and used for receiving incoming materials in the horizontal direction. According to the storage mechanism, the two feeding ports facing different directions are formed in the material bearing table, the materials coming from the vertical direction and the materials coming from the horizontal direction are borne, and therefore the storage mechanism can adapt to various feeding modes, and the feeding requirements of modern factories are met.

Description

Technical Field

[0001] The present application relates to the technical field of material box loading and unloading, and in particular to a wafer loading and unloading material box storage mechanism. Background Art

[0002] In the process of wafer automation production, wafer loading is the first step. The wafers to be processed or assembled need to be placed in a material box, and the material box is transported to the feeding table of the production loading and unloading equipment for temporary storage. The wafers in the material box are taken out one by one through the transfer mechanism installed inside the loading and unloading equipment and transferred to various processing positions for production operations.

[0003] With the development of automated production, existing workpiece loading devices and methods are becoming increasingly diverse. Workpiece loading devices in factories primarily utilize three types of loading systems: OHT overhead crane systems, AGV (automatic guided vehicle) loading, and PGV (post-propelled vehicle) loading. The OHT overhead crane system uses a rail vehicle installed on the roof of the factory to place material boxes from top to bottom onto the feed table. This loading method reduces floor space usage within the factory, avoids interference between personnel and machinery, and improves space utilization. AGVs are transport vehicles equipped with automatic guidance devices, such as electromagnetic or optical ones, that can travel along a prescribed guide path. They offer advantages such as rapid movement, high efficiency, simple structure, strong controllability, and good safety. PGVs are transport vehicles loaded with wafer cassettes, which are pushed by staff for loading. AGVs and PGVs move to the loading side of the production equipment and transfer the cassettes horizontally to the feed table.

[0004] However, the existing loading and unloading equipment of the wafer cassette only supports the PGV trolley loading method. This single loading method can no longer meet the loading needs of modern factories. The loading and unloading equipment of the wafer cassette needs to be improved. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art.

[0006] To this end, the utility model provides a wafer loading and unloading box storage mechanism that can adapt to a variety of loading methods to meet the production needs of modern factories.

[0007] According to the wafer loading and unloading material box storage mechanism of the embodiment of the present invention, it includes a material receiving platform, and the material receiving space above the material receiving platform is provided with a material receiving space for storing the material box. The material receiving space has a first feed port, a second feed port and a discharge port. The first feed port is oriented in the vertical direction and the opening is set upward, and is used to receive materials in the vertical direction. The second feed port is oriented in the horizontal direction and is used to receive materials in the horizontal direction.

[0008] The beneficial effect of the present invention is that the present application realizes receiving incoming materials from vertical directions and horizontal directions by arranging two feeding ports with different directions on the receiving platform, so that the storage mechanism can be adapted to the loading methods of materials from different directions such as OHT overhead crane handling system, AGV trolley and PGV trolley, and adapt to the loading needs of modern factories.

[0009] According to one embodiment of the present invention, the material receiving platform is connected to a back panel located at the back and two side panels located on both sides of the back panel. The back panel, the two side panels and the upper end surface of the material receiving platform together form the material receiving space.

[0010] According to one embodiment of the present invention, the discharge port is arranged on the back plate, and the second feed port is arranged opposite to the discharge port.

[0011] According to one embodiment of the present invention, a plurality of positioning posts are connected to the upper end surface of the material receiving platform, and the positioning posts are positioned opposite to the positioning holes at the bottom of the material box.

[0012] According to one embodiment of the present invention, a positioning boss is connected to the top of the material receiving platform, and the positioning column is arranged on the positioning boss.

[0013] According to one embodiment of the present invention, sensors adapted to the loading device are provided on the top and bottom of the material receiving platform.

[0014] According to one embodiment of the present invention, two movably connected feet, two fixedly connected first pulleys and two movably connected second pulleys are installed at the bottom of the material supporting platform. The two feet or the two second pulleys can assist the two first pulleys to jointly support the material supporting platform.

[0015] According to one embodiment of the present invention, the two side panels are arranged opposite to each other, and a light curtain assembly is connected to the side wall facing the material receiving space. The light curtain assembly cooperates with the loading device to control the start or stop of the loading operation.

[0016] According to one embodiment of the present invention, the light curtain assembly includes a first grating module and a second grating module. The first grating module and the second grating module are respectively arranged on the side walls of the two side plates facing the material receiving space, and a light curtain is formed between the first grating module and the second grating module.

[0017] According to one embodiment of the present invention, a sensor is connected to the side of the back plate away from the material receiving space, and the sensor is used to detect whether a material box passes through the discharge port.

[0018] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The objectives and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Figure 1 It is a structural diagram of the wafer loading and unloading box storage mechanism in the utility model.

[0022] Figure 2 It is a schematic diagram of the first feed port and the second feed port and their feeding directions in the present invention.

[0023] Figure 3 It is a structural schematic diagram of the positioning boss in the utility model.

[0024] Figure 4 It is a structural schematic diagram between the window panel and the back panel of the utility model.

[0025] Figure 5 This is a schematic diagram of the material box storage mechanism in the present invention, in which the base and the first pulley jointly support it.

[0026] In the figure: 1. Material receiving platform; 2. Back panel; 3. Side panel; 4. First material inlet; 5. Second material inlet; 6. Material outlet; 7. Positioning column; 8. Positioning boss; 9. Light curtain assembly; 10. Foot; 11. First pulley; 12. Window panel; 13. Guide groove; 14. Second pulley. DETAILED DESCRIPTION

[0027] The present invention will now be described in further detail with reference to the accompanying drawings, which are simplified schematic diagrams that illustrate the basic structure of the present invention in a schematic manner.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0029] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] A wafer loading and unloading box storage mechanism includes a material receiving platform 1, a back plate 2 and side plates 3. Two side plates 3 are provided. The back plate 2 and the two side plates 3 are respectively connected to the three side walls of the material receiving platform 1. The two side plates 3 are parallel to each other. The back plate 2 is located between the two side plates 3. The back plate 2 and the two side plates 3 and the top surface of the material receiving platform 1 together form a material receiving space. The material receiving space has two openings, and the two openings are perpendicular to each other. For details, refer to Figure 2 One opening is vertically set as the first feed port 4, so that the material box can be placed vertically on the material receiving platform 1 from directly above the material receiving platform 1, which is the first feed direction A; the other opening is opposite to the direction of the back plate 2 as the second feed port 5, so that the material box can be placed on the material receiving platform 1 from the side toward the back plate 2 in the horizontal direction, which is the second feed direction B.

[0031] The bottom of the material receiving platform 1 is provided with two feet 10, two fixedly connected first pulleys 11, and two movably connected second pulleys 14, wherein the first pulley 11 is arranged near the discharge port 6, and the second pulley 14 is arranged near the second feed port 5. The two feet 10 are threadedly connected to the material receiving platform 1 and can move up and down, and the two second pulleys 14 are installed on the material receiving platform 1 through a sliding mechanism. When the material box storage mechanism needs to be moved, the two feet 10 are in a retracted state, and the two first pulleys 11 and the two second pulleys 14 jointly support the material box storage mechanism and move it. When the material box storage mechanism moves to the target position, the two second pulleys 14 are in a retracted state, and the two feet 10 and the two first pulleys 11 jointly support the material box storage mechanism. The two feet 10 can fix the placement position of the material box storage mechanism and restrict its movement. The two feet 10 or the two second pulleys 14 assist the two first pulleys 11 in jointly supporting the material box storage mechanism.

[0032] A positioning boss 8 is provided on the top of the material receiving platform 1 , and a plurality of positioning posts 7 are connected to the positioning boss 8 . The positioning posts 7 are opposite to the positioning holes at the bottom of the material box.

[0033] The back panel 2 is provided with a discharge port 6, to which a window panel 12 for shielding the discharge port 6 is slidably connected. A guide slot 13 is provided vertically on the back panel 2. A lifting mechanism is provided within the loading platform 1. The window panel 12 is connected to the lifting mechanism via a connecting plate. The output end of the lifting mechanism passes through the guide slot 13 and is connected to the connecting plate. The lifting mechanism controls the raising and lowering of the window panel 12 to shield or expose the discharge port 6. A sensor is connected to the side of the back panel 2 away from the loading space. The sensor is used to detect whether a material box passes through the discharge port 6.

[0034] A light curtain assembly 9 is connected to the side wall of the side panel 3 facing the material receiving space. The light curtain assembly 9 is arranged near the second feed port 5. The light curtain assembly 9 includes a first grating module and a second grating module. The first grating module and the second grating module are respectively arranged on the side walls of the two side panels 3 facing the material receiving space. A light curtain is formed between the first grating module and the second grating module. When the material box is fed from the first feed port 4, if the operator reaches through the light curtain into the material receiving space and destroys the integrity of the light curtain, the light curtain module controls the feeding action from the first feed port 4 to be stopped to improve operation safety.

[0035] In this embodiment, sensors adapted to an external loading device are provided on the top and bottom of the loading platform 1. The external loading device is an OHT overhead crane handling system, an AGV trolley or a PGV trolley.

[0036] During use, when the OHT overhead crane handling system moves the material box to the top of the material receiving space, the sensor senses the sensing point on the overhead crane, and the OHT overhead crane handling system automatically plans the moving path through the sensor, moves toward the material receiving space, and places the material box in the material receiving space from the first feed port 4 along the vertical direction.

[0037] If an AGV or PGV cart is used to load materials, the AGV or PGV cart carries the material box toward the material receiving table 1 and places the material box horizontally from the second feed port 5 into the material receiving space above the material receiving table 1. The sensing block at the bottom of the cart senses the sensor, and the AGV cart automatically plans the moving path through the sensor, moves to the loading position of the material receiving table 1 and automatically places the carried material box into the material receiving space.

[0038] This application sets up two feeding ports in different directions to adapt to three loading methods: OHT overhead crane handling system loading, AGV trolley loading and PGV loading, thereby improving the applicability of the material box storage mechanism to meet the loading needs of modern factories.

[0039] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0040] Based on the above-described preferred embodiments of the present invention, and in accordance with the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of the present invention. The technical scope of the present invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A wafer loading and unloading box storage mechanism, characterized in that: The invention comprises a material receiving platform (1), wherein the upper portion of the material receiving platform (1) is provided with a material receiving space for storing a material box, wherein the material receiving space has a first material feed port (4), a second material feed port (5) and a material discharge port (6), wherein the first material feed port (4) is oriented in a vertical direction and is opened upwards, and is used for receiving materials in a vertical direction, and the second material feed port (5) is oriented in a horizontal direction and is used for receiving materials in a horizontal direction.

2. The wafer loading and unloading box storage mechanism according to claim 1, characterized in that: The material receiving platform (1) is connected to a back panel (2) located at the back and two side panels (3) located on both sides of the back panel (2), and the back panel (2), the two side panels (3) and the upper end surface of the material receiving platform (1) together form the material receiving space.

3. The wafer loading and unloading box storage mechanism according to claim 2, characterized in that: The discharge port (6) is arranged on the back plate (2), the second feed port (5) is arranged opposite to the discharge port (6), and a window plate (12) for shielding the discharge port (6) is movably provided on the back plate (2).

4. The wafer loading and unloading box storage mechanism according to claim 1, characterized in that: The upper end surface of the material receiving platform (1) is connected to a plurality of positioning columns (7), and the positioning columns (7) are positioned opposite to the positioning holes at the bottom of the material box.

5. The wafer loading and unloading box storage mechanism according to claim 4, characterized in that: The top of the material receiving platform (1) is connected to a positioning boss (8), and the positioning column (7) is arranged on the positioning boss (8).

6. The wafer loading and unloading box storage mechanism according to claim 1, characterized in that: The top and bottom of the material receiving platform (1) are both provided with sensors adapted to the loading device.

7. The wafer loading and unloading box storage mechanism according to claim 1, characterized in that: The bottom of the material support platform (1) is equipped with two movably connected feet (10), two fixedly connected first pulleys (11) and two movably connected second pulleys (14). The two feet (10) or the two second pulleys (14) can assist the two first pulleys (11) to jointly support the material support platform (1).

8. The wafer loading and unloading box storage mechanism according to claim 3, characterized in that: The two side panels (3) are arranged opposite to each other, and a light curtain assembly (9) is connected to the side wall facing the material receiving space.

9. The wafer loading and unloading box storage mechanism according to claim 8, characterized in that: The light curtain assembly (9) comprises a first grating module and a second grating module. The first grating module and the second grating module are respectively arranged on the side walls of the two side plates (3) facing the material receiving space, and a light curtain is formed between the first grating module and the second grating module.

10. The wafer loading and unloading box storage mechanism according to claim 3, characterized in that: A sensor is connected to the side of the back plate (2) away from the material receiving space, and the sensor is used to detect whether a material box passes through the discharge port (6).

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