Supplementary doping tool for single crystal production

Abstract

The utility model relates to the technical field of single crystal silicon, in particular to a supplementing and doping tool for single crystal production, which comprises a hoisting piece, a clamping piece and a clamping piece, the connecting piece is connected with the hoisting piece; the doping piece is detachably connected with the other end of the connecting piece, the doping piece is provided with an opening through which the supplementary doping agent enters and a through hole which is of a layered structure and through which the supplementary doping agent flows out, and the doping piece is used for containing the supplementary doping agent; according to the utility model, the high-purity antimony which is in a solid state at normal temperature is put into the doping piece, then the lifting mechanism of the auxiliary chamber of the single crystal furnace is utilized to move, the tool is placed at a proper position, and then the doping is carried out by utilizing the principle that the solid high-purity antimony can be melted in a crucible under a high-temperature environment, so that the doping operation by using the tool is simple and efficient; and the stability of the resistivity of the crystal bar is ensured, and the production efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon, in particular to a doping tool for single crystal production. Background Art

[0002] During the single crystal pulling process, due to the need to balance resistivity, the melt in the crucible needs to be replenished with high-purity antimony after each rod pulling. The existing method of replenishing high-purity antimony is for on-site operators to place high-purity antimony on top of the defective products generated during the single crystal pulling process, and then use the auxiliary chamber elevator to place the defective products and high-purity antimony in the crucible together for remelting.

[0003] Although this method can also achieve the replenishment of high-purity antimony, the operation requires high operating skills of the operator. In order to maintain the quality of the single crystal and prevent impurities from being mixed into the melt during the doping process, high-purity antimony can only be placed directly on the top of the defective product. This causes the high-purity antimony to be at risk of falling during the doping process. Once the high-purity antimony falls, the amount of high-purity antimony in the melt will be insufficient, which will lead to the problem of unstable resistivity of the crystal rod. Utility Model Content

[0004] The purpose of the present invention is to provide a doping tool for single crystal production to solve the problems raised in the above background technology.

[0005] The technical solution adopted in this utility model is:

[0006] A doping tool for single crystal production, comprising:

[0007] A lifting component used to connect with the lifting structure;

[0008] A connecting piece connected to the lifting piece;

[0009] The doping piece is detachably connected to the other end of the connecting piece and has an opening for the supplementary dopant to enter and a through hole in a layered structure for the supplementary dopant to flow out. The doping piece is used to contain the supplementary dopant.

[0010] Optionally, the connecting piece includes:

[0011] A straight section, one end of which is connected to the hanging piece, and the other end of which is provided with a horizontal notch of a certain depth on the outer wall;

[0012] The contraction portion is integrally formed with the straight section portion. A vertical slot having a certain depth and extending along the central axis of the contraction portion and penetrating the horizontal slot is provided on the outer wall surface of the contraction portion.

[0013] Optionally, the vertical notch includes:

[0014] arc-shaped notches;

[0015] The straight notches are located at both ends of the arc-shaped notch and extend toward the central axis of the contraction portion, and are higher than the arc-shaped notch.

[0016] Optionally, the doping component has an open structure at the top, a sealed structure at the bottom, and a hollow cylindrical structure inside.

[0017] Optionally, the top opening of the doping member extends radially outwardly of the doping member to form a connecting portion, and the connecting portion moves along the direction of the straight notch, passes through the horizontal notch, and fits into the arc-shaped notch.

[0018] Optionally, the bottom of the doping element is conical.

[0019] Optionally, the through hole includes:

[0020] A first through hole is formed at the bottom of the doping element; and / or

[0021] A second through hole is provided at the bottom of the doping element and is located in the circumferential direction of the first through hole; and / or

[0022] A third through hole is formed at the bottom of the doping element and is located in the circumferential direction of the second through hole.

[0023] Optionally, the material of the hanging part is stainless steel or metal molybdenum.

[0024] Optionally, the connecting piece is made of metal molybdenum or graphite.

[0025] Optionally, the doping component is made of high-purity quartz.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] In the present invention, high-purity antimony that is solid at room temperature is placed in the doping piece, which is then moved by the lifting mechanism of the auxiliary chamber of the single crystal furnace. The tool is placed in a suitable position, and then doping is performed by utilizing the principle that solid high-purity antimony will melt under the high-temperature environment in the crucible. The use of this tool for doping is not only simple and efficient, but also ensures the stability of the resistivity of the crystal rod, thereby greatly improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0029] Figure 1This is a schematic diagram of the overall structure of this application;

[0030] Figure 2 This is a schematic diagram of the structure of the lifting parts in this application;

[0031] Figure 3 This is a schematic diagram of the structure of the connector in this application;

[0032] Figure 4 Schematic diagram of the structure of the doping element in this application;

[0033] Figure 5 for Figure 4 Schematic diagram of the structure of the doped component from another perspective.

[0034] Reference numerals:

[0035] 1. Lifting piece; 11. Square hole; 12. Connector;

[0036] 2. Connector; 21. Straight section; 211. Connecting hole; 212. Horizontal notch; 22. Constriction; 221. Vertical notch; 2211. Arc-shaped notch; 2212. Straight notch;

[0037] 3. Doping element; 31. Connecting portion; 32. Through hole; 321. First through hole; 322. Second through hole; 323. Third through hole. DETAILED DESCRIPTION

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the products of the present invention are conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0040] Given that there is a risk of high-purity antimony falling during the doping process, which in turn leads to unstable resistivity of the crystal rod.

[0041] like Figure 1-5 As shown, an embodiment of the present invention provides a doping tool for single crystal production, comprising: a hanging part 1, a connecting part 2 connected to the hanging part 1, and a doping part 3 detachably connected to the connecting part 2 and having a through hole 32 at its bottom.

[0042] The hoisting fixture 1 is connected to a seed crystal rope (not shown) used for lifting. This allows the fixture to be suspended below the single crystal furnace's auxiliary chamber via the seed crystal rope, allowing the fixture to rise and fall synchronously with the auxiliary chamber under the action of the lifting mechanism. Connecting member 2 connects the hoisting fixture 1 to the doping element 3. The doping element 3 serves as the primary carrier of high-purity antimony, which is then doped into the melt in the crucible.

[0043] like Figure 2 As shown, specifically, the hanging part 1 can be a hook-shaped structure so that the hanging part 1 is connected to the seed crystal rope, or the hanging part 1 has a hole connected to the seed crystal rope so that the hanging part 1 can be connected to the seed crystal rope. The structure of the hanging part 1 can be selected according to actual needs and no specific requirements are made here. As a preferred embodiment, the hanging part 1 is a rod-shaped structure, one end of which is provided with a square hole 11 connected to the seed crystal rope. The seed crystal rope passes through the square hole 11, so that the tooling is suspended below the single crystal furnace sub-chamber. The other end of the hanging part 1 is provided with a connector 12 for connecting to the connector 2, and the connector 12 is provided with an external thread.

[0044] Furthermore, the material of the hanging component 1 can be stainless steel, metal molybdenum, or other high-temperature resistant materials, which can be selected according to actual needs and no specific requirements are made here.

[0045] like Figure 3 As shown, the connecting member 2 is mainly composed of a straight section 21 and a contraction section 22 integrally formed with the straight section 21 .

[0046] Among them, a connecting hole 211 is provided at one end of the straight section 21 to match the connector 12. The connecting hole 211 is provided with an internal thread. The connector 12 is inserted into the connecting hole 211, thereby realizing a threaded connection between the straight section 21 and the hanging component 1. A horizontal slot 212 of a certain depth is provided on the outer wall surface of the other end of the straight section 21. A vertical slot 221 of a certain depth is provided on the outer wall surface of the contraction section 22, extending along the central axis of the contraction section 22 and penetrating the horizontal slot 212. Furthermore, the vertical slot 221 includes an arcuate slot 2211 and straight slots 2212 located at both ends of the arcuate slot 2211 and extending toward the central axis of the contraction section 22, wherein the height of the arcuate slot 2211 is lower than that of the straight slot 2212.

[0047] Furthermore, since the connector 2 is relatively close to the melt during the high-purity antimony doping process, in order to ensure that the connector 2 does not deform or melt under high temperature conditions, the connector 2 can be made of molybdenum or graphite. In a preferred embodiment, the connector 2 is made of molybdenum.

[0048] like Figure 4 As shown, the doping element 3 has an open top, a sealed bottom, and a hollow cylindrical interior. High-purity antimony enters the doping element 3 from the top opening.

[0049] Among them, the top opening extends radially outward along the doping member 3 to form a connecting portion 31. The connecting portion 31 moves along the direction of the straight slot 2212, then passes through the horizontal slot 212 into the interior of the connecting member 2, and fits with the top of the arc-shaped slot 2211, thereby realizing a detachable connection between the doping member 3 and the connecting member 2. This connection method facilitates the installation and removal of the doping member 3.

[0050] like Figure 5 As shown, a through hole 32 is provided at the bottom seal for high-purity antimony that is liquid after being melted at high temperature to pass through. The through hole 32 mainly consists of a first through hole 321, a second through hole 322 and a third through hole 323 in a layered structure from the inside to the outside.

[0051] Specifically, a first through-hole 321 is located at the center of the bottom of the doping element 3. A plurality of second through-holes 322 are spaced apart circumferentially around the first through-hole 321, and a plurality of third through-holes 323 are spaced apart circumferentially around the first through-hole 321. The layered arrangement of the first, second, and third through-holes 321, 322, and 323 optimizes the flow path of the fluid formed by melting high-purity antimony in a high-temperature environment, reducing flow resistance and thereby improving transmission efficiency.

[0052] In this embodiment, the shape of the through hole 32 can be circular, square, diamond, elliptical, a rounded rectangle with a certain length, or other shapes, which can be selected according to actual needs and no specific requirements are made here.

[0053] Furthermore, during the high-purity antimony doping process, since the doping component 3 containing high-purity antimony is closest to the melt, the doping component 3 is made of quartz, preferably high-purity quartz, and the high-purity quartz can withstand high temperatures above 1400°C, so that no new impurities will be introduced during the high-purity antimony doping process, and the tooling can be reused, thereby reducing production costs.

[0054] Furthermore, in order to effectively guide the melted high-purity antimony to flow in a predetermined direction, the bottom of the doping member 3 is set to a cone shape. The melted high-purity antimony will be subjected to a more uniform guidance effect when passing through the cone bottom, thereby reducing turbulence and eddy currents in the flow process, and further improving the stability and transmission efficiency of the melted high-purity antimony.

[0055] Furthermore, in order to prevent the doping member 3 from shaking left and right inside the connecting member 2, in this embodiment, Figure 1 As shown, the size of the doping element 3 is adapted to the size of the horizontal notch 212 and the vertical notch 221 .

[0056] When in use, first take out the doping piece 3 from the inside of the connecting piece 2 along the direction of the vertical slot 221 and the horizontal slot 212, then load the solid high-purity antimony into the inside of the doping piece 3 from the top opening of the doping piece 3, and then load the doping piece 3 into the inside of the connecting piece 2 along the direction of the horizontal slot 212 and the vertical slot 221, then the doping piece 3 is vertically downward until the connecting portion 31 of the doping piece 3 is completely in contact with the top of the arc slot 2211, and then start the lifting mechanism, which drives the auxiliary chamber, seed crystal rope and tooling to move synchronously to the appropriate position, and then descends, and the tooling enters the crucible until the doping piece 3 is close to the melt, and the solid high-purity antimony in the doping piece 3 melts into liquid under high temperature environment, and then flows out into the melt through the first through hole 321, the second through hole 322 and the third through hole 323 for doping.

[0057] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A doping tool for single crystal production, characterized in that: include: A lifting component used to connect with the lifting structure; A connecting piece connected to the lifting piece; The doping piece is detachably connected to the other end of the connecting piece and has an opening for the supplementary dopant to enter and a through hole in a layered structure for the supplementary dopant to flow out. The doping piece is used to contain the supplementary dopant.

2. The doping tool for single crystal production according to claim 1, characterized in that: The connecting part includes: a straight section, one end of which is connected to the lifting part, and a horizontal slot with a certain depth is opened on the outer wall surface of the other end; a contraction part, which is integrally formed with the straight section, and a vertical slot with a certain depth is opened on the outer wall surface of the contraction part, extending along the central axis direction of the contraction part and penetrating the horizontal slot.

3. The doping tool for single crystal production according to claim 2, characterized in that: The vertical notch includes: an arc-shaped notch; and a straight notch located at both ends of the arc-shaped notch and extending toward the central axis of the contraction portion, and having a height higher than the arc-shaped notch.

4. The doping tool for single crystal production according to claim 3, characterized in that: The doping component has an open top, a sealed bottom, and a hollow cylindrical interior.

5. The doping tool for single crystal production according to claim 4, characterized in that: The top opening of the doping member extends outwardly along the radial direction of the doping member to form a connecting portion. The connecting portion moves along the direction of the straight notch, passes through the horizontal notch, and fits into the arc-shaped notch.

6. The doping tool for single crystal production according to claim 1 or 4, characterized in that: The bottom of the doping element is in a cone shape.

7. The doping tool for single crystal production according to claim 1, characterized in that: The through holes include: a first through hole, opened at the bottom of the doping member; and / or a second through hole, opened at the bottom of the doping member and located in the circumferential direction of the first through hole; and / or a third through hole, opened at the bottom of the doping member and located in the circumferential direction of the second through hole.

8. The doping tool for single crystal production according to claim 1, characterized in that: The material of the hanging parts is stainless steel or metal molybdenum.

9. The doping tool for single crystal production according to claim 1, characterized in that: The connecting piece is made of metal molybdenum or graphite.

10. The doping tool for single crystal production according to claim 1, characterized in that: The doping element is made of high-purity quartz.

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