Automatic high-purity gas filling device

Abstract

The utility model discloses an automatic high-purity gas filling device which comprises a gas filling pipeline provided with a connecting pipeline, the gas filling pipeline is sequentially connected with a gas inlet pipeline, a high-pressure emptying pipeline, a low-pressure emptying pipeline, a vacuumizing pipeline and an automatic analysis pipeline which are arranged in parallel, and the gas filling pipeline is connected with a flow meter and a pressure meter. The connecting pipeline is provided with an inflation valve and a stop valve, a recovery pipeline provided with a recovery valve and a pressure retaining valve are connected between the inflation valve and the stop valve, and the pressure retaining valve is connected with a helium pipeline and a nitrogen pipeline. According to the utility model, the automatic full-process treatment and filling of high-purity gas can be realized, and personnel only need to connect and disassemble the pipe, so that the manpower consumption is greatly reduced, the misoperation of the personnel is prevented, the reject ratio is reduced, residual gas in the gas filling pipeline and residual gas after the steel cylinder is used can be recovered, and the production cost is reduced. And the gas filling pipeline is automatically analyzed, so that the pollution to the filling of the high-purity gas is prevented, and the filling purity of the high-purity gas is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of gas filling, in particular to an automated high-purity gas filling device. Background Art

[0002] High-purity gases are essential raw materials for the manufacturing of ultra-large-scale integrated circuits, liquid crystal display panels, semiconductor light-emitting devices, and semiconductor materials. With the rapid development of the semiconductor industry, the use of high-purity gases such as high-purity boron trichloride, silicon tetrafluoride, nitrogen trifluoride, and boron trifluoride has increased dramatically. NF3 and CF4 gases, in particular, are widely used as cleaning agents and etchants in the semiconductor field, and the purity requirements for high-purity gases are becoming increasingly higher. High-purity gases are primarily pressurized by filling pumps or compressors and pumped into cylinders or tank trucks for external sales. The filling process of high-purity gases has a significant impact on product quality. Therefore, the requirements for high-purity gas filling are extremely high. During the filling of high-purity gases, not only must the high-purity gases not be contaminated, but the treatment of gases remaining in the filling system must also not pollute the environment.

[0003] At present, in the process of filling high-purity gas, in order to ensure safety, the filling of high-purity gas is usually carried out under high pressure and in a non-liquefied state. However, the existing high-purity gas filling device mainly adopts manual operation, which has extremely high requirements for manual operation. During the filling process of high-purity gas, improper manual operation will cause the filled high-purity gas to be contaminated, thereby causing the originally qualified high-purity gas to become unqualified after entering the cylinder or tank truck, resulting in the high-purity gas filled in the cylinder or tank truck not meeting the purity requirements, thereby affecting the normal use of the high-purity gas. Moreover, the residual gas in the filling pipeline and the residual gas left after the use of the cylinder can easily pollute the filling of the high-purity gas, resulting in the purity of the high-purity gas after filling not meeting the standards. Utility Model Content

[0004] In order to solve the technical problems in the prior art that improper manual operation may lead to contamination of the high-purity gas being filled, and that residual gas in the filling pipeline and residual gas after use of the cylinder may easily contaminate the filling of the high-purity gas, resulting in the purity of the high-purity gas after filling not meeting the standard, the present utility model provides the following technical solutions.

[0005] The utility model discloses an automated high-purity gas filling device, comprising an inflation pipeline provided with a connecting pipeline, wherein the inflation pipeline is sequentially connected to an air intake pipeline, a high-pressure exhaust pipeline, a low-pressure exhaust pipeline, a vacuum pipeline and an automatic analysis pipeline arranged in parallel, the inflation pipeline is connected to a flow meter and a pressure gauge, the connecting pipeline is provided with an inflation valve and a shut-off valve, a recovery pipeline provided with a recovery valve and a pressure maintaining valve are connected between the inflation valve and the shut-off valve, and the pressure maintaining valve is connected to a helium pipeline and a nitrogen pipeline.

[0006] As a further technical solution, the helium pipeline is connected to the automatic analysis pipeline through a purge valve.

[0007] As a further technical solution, the air intake pipeline is provided with an air intake valve, the high-pressure exhaust pipeline is provided with a high-pressure exhaust valve, the low-pressure exhaust pipeline is provided with a low-pressure exhaust valve, the vacuum pipeline is provided with a vacuum valve, and the automatic analysis pipeline is provided with an analysis valve.

[0008] As a further technical solution, the helium pipeline and the nitrogen pipeline are respectively provided with a low-pressure valve for providing low pressure and a high-pressure valve for providing high pressure, which are connected to the pressure-maintaining valve.

[0009] As a further technical solution, all valves connected to the inflation pipeline are electric or pneumatic valves controlled by a PL controller.

[0010] As a further technical solution, the connection end between the connecting pipeline and the filling container is a quick-release joint.

[0011] The beneficial effects of the present invention are as follows: the filling device of the present invention controls all valves by a PLC controller, thereby controlling the automatic opening or closing of all pipelines. After the personnel connect the filling connector of the connecting pipeline to the container to be filled, they start the automatic filling program with one click. The program automatically controls the valves through the PLC to realize automatic process operation, realizing the whole process of replacement before filling, automatic analysis, pressure maintenance before filling, filling, re-analysis, pressure maintenance after filling, and replacement after filling. The time or number of times can be set for each step to ensure qualified replacement. The automatic filling volume can be interlocked with the weight or pressure of the container to be filled as needed, and each step is operated according to the set program. It can realize the automated full-process processing and filling of high-purity gas. The personnel only need to take over and remove the pipes, which greatly reduces manpower consumption, prevents improper operation of personnel, ensures the filling purity of high-purity gas, and reduces the occurrence of defective rate. The recovery pipeline can recycle the residual gas in the filling pipeline and the residual gas after the cylinder is used, and automatically analyze the filling pipeline after recovery to prevent contamination of the high-purity gas filling and ensure the purity of the high-purity gas filling. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic structural diagram of the utility model's automated high-purity gas filling device;

[0013] In the figure: 1-charging pipeline; 101-connecting pipeline; 2-inlet pipeline; 3-high-pressure exhaust pipeline; 4-low-pressure exhaust pipeline; 5-vacuum pipeline; 6-automatic analysis pipeline; 7-helium pipeline; 8-nitrogen pipeline; 9-flow meter; 10-pressure gauge; 11-recovery pipeline; a-inlet valve; b-high-pressure exhaust valve; c-low-pressure exhaust valve; d-vacuum valve; e-analysis valve; f-purge valve; g-low-pressure valve; h-high-pressure valve; i-pressure maintaining valve; j-stop valve; k-inflating valve; m-recovery valve. DETAILED DESCRIPTION

[0014] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the present invention and are not intended to limit the present invention. It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other unless there is a conflict.

[0015] In the description of this utility model, it should be understood that the terms "upper" and "lower" are based on the orientation or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc. are used solely for descriptive purposes and should not be construed to indicate or imply relative importance or implicitly specify the quantity of the technical features referred to. In the description of this utility model, unless otherwise specified, "plurality" means two or more.

[0016] like Figure 1 As shown, the present invention provides an automated high-purity gas filling device, comprising a gas filling line 1 provided with a connecting line 101. The connecting line 101 is used to connect to a container to be filled, such as a cylinder or tank truck, so that the high-purity gas in the gas filling line 1 is filled into the filling container through the connecting line 101. The connecting end of the connecting line 101 and the filling container is a quick-release connector, which facilitates the rapid disassembly and assembly of the connecting line 101 and the filling container by operators.

[0017] In a preferred embodiment, the gas filling pipeline 1 is sequentially connected to an air intake pipeline 2, a high-pressure exhaust pipeline 3, a low-pressure exhaust pipeline 4, a vacuum pumping pipeline 5, and an automatic analysis pipeline 6, which are arranged in parallel. The air intake pipeline 2 is provided with an air intake valve a, which is connected to a high-purity gas source and a compressor, and is used to fill the high-purity gas into the gas filling pipeline 1 and fill it into the filling container. The high-pressure exhaust pipeline 3 is provided with a high-pressure exhaust valve b, the low-pressure exhaust pipeline 4 is provided with a low-pressure exhaust valve c, and the vacuum pumping pipeline 5 is provided with a vacuum pumping valve d. The high-pressure exhaust pipeline 3 and the low-pressure exhaust pipeline 4 are respectively used to relieve the pressure in the gas filling pipeline 1 and cooperate with the vacuum pumping pipeline 5 to aspirate residual gas or impurities in the gas filling pipeline 1 to prevent the residual gas in the gas filling pipeline 1 from affecting the purity of the high-purity gas.

[0018] In a preferred embodiment, the inflation pipeline 1 is also connected to a helium pipeline 7 and a nitrogen pipeline 8. The nitrogen entering the inflation pipeline 1 through the nitrogen pipeline 8 can purge the residual gas in the inflation pipeline 1 and then be extracted by the vacuum pipeline 5.

[0019] In a preferred embodiment, the automatic analysis line 6 is equipped with an analysis valve e, which is connected to the inflation line 1. This allows the automatic analysis line 6 to perform online monitoring of the gas within the inflation line 1 and monitor its purity. The automatic analysis line 6 is connected to an online analysis system that utilizes common gas analyzers, including but not limited to thermal conductivity gas analyzers, electrochemical gas analyzers, and infrared absorption analyzers. The helium line 7 is connected to the automatic analysis line 6 via a purge valve f, which purges the analyzed gas within the automatic analysis line 6 to prevent it from adversely affecting the next gas analysis.

[0020] In a preferred embodiment, connecting pipeline 101 is equipped with a charging valve k and a shutoff valve j. A recovery line 11 equipped with a recovery valve m and a pressure-maintaining valve i are connected between charging valve k and shutoff valve j. Helium pipeline 7 and nitrogen pipeline 8 are respectively equipped with a low-pressure valve g, which provides low pressure, and a high-pressure valve h, which provides high pressure, connected to pressure-maintaining valve i. Before high-purity gas filling, residual gas in the container to be filled is first recovered by recovery line 11. After this gas is recovered, helium in helium pipeline 7 is used to purge the container to be filled. After that, shutoff valve j is opened, and the gas in the container to be filled is evacuated using vacuum line 5.

[0021] In a preferred embodiment, the inflation pipeline 1 is connected to a flow meter 9 and a pressure gauge 10, and all valves connected to the inflation pipeline 1 are electric or pneumatic valves controlled by a PLC controller. In addition, the flow meter 9 is used to calculate the volume of high-purity gas filled in the inflation pipeline 1, and can monitor the filling weight of the high-purity gas during the filling process. The inflation valve k and the air inlet valve a are automatically closed by setting the filling weight, and the filling process is interlocked and controlled by the existing PLC controller.

[0022] The working process of the present invention is as follows: after the personnel connect the filling connector of the connecting pipeline 101 with the container to be filled, the automatic filling program is started with one button. First, the PLC automatically controls the shut-off valve j to close, the pressure-maintaining valve i to close, the inflation valve k to open, the recovery valve m to open, and the recovery pipeline 11 to recover the residual gas in the filling container; the recovery valve m is closed, the shut-off valve j, the low-pressure valve g and the pressure-maintaining valve i are opened, and helium is filled in to purge the inflation pipeline 1 and the filling container, and then the vacuum pipeline 5 is evacuated to extract the helium and residual gas in the inflation pipeline 1; then the analysis valve e is opened, and the automatic analysis pipeline 6 analyzes the inflation pipeline 1. If the analysis is qualified, filling begins. If the analysis is unqualified, helium is filled in again for cleaning; after the analysis is qualified, the low-pressure valve g is closed , open the high-pressure valve h, and perform a pressure test on the inflation pipeline 1 and the filling container. After the pressure test is normal, the high-pressure emptying pipeline 3, the low-pressure emptying pipeline 4 and the vacuum pipeline 5 cooperate to empty the gas in the inflation pipeline 1; then open the air inlet valve a, and the air inlet pipeline 2 fills the high-purity gas from the inflation pipeline 1 into the filling container; after filling is completed, open the automatic analysis pipeline 6 again for analysis. If the gas purity is unqualified, open the recovery pipeline 11 for recovery. If the gas purity is qualified, close the inflation valve k and the air inlet valve a, maintain the pressure of the inflation pipeline 1, and recover the residual high-purity gas in the inflation pipeline 1 from the recovery pipeline 11, and fill helium into the inflation pipeline 1 for replacement, then remove the joint of the connecting pipeline 101 to complete the gas filling.

[0023] The preferred specific implementation methods and embodiments of the present invention are described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the above implementation methods and embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes or equivalent substitutions can be made without departing from the concept of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments that fall within the scope of the claims of this application belong to the scope of protection of the present invention.

Claims

1. An automated high-purity gas filling device, characterized by: The invention comprises an inflation pipeline (1) provided with a connecting pipeline (101), wherein the inflation pipeline (1) is sequentially connected to an air intake pipeline (2), a high-pressure exhaust pipeline (3), a low-pressure exhaust pipeline (4), a vacuum pipeline (5), and an automatic analysis pipeline (6) arranged in parallel, wherein the inflation pipeline (1) is connected to a flow meter (9) and a pressure gauge (10), wherein the connecting pipeline (101) is provided with an inflation valve (k) and a stop valve (j), wherein a recovery pipeline (11) provided with a recovery valve (m) and a pressure maintaining valve (i) are connected between the inflation valve (k) and the stop valve (j), wherein the pressure maintaining valve (i) is connected to a helium pipeline (7) and a nitrogen pipeline (8).

2. The automated high-purity gas filling device according to claim 1, characterized in that: The helium pipeline (7) is connected to the automatic analysis pipeline (6) via a purge valve (f).

3. The automated high-purity gas filling device according to claim 1, characterized in that: The air intake pipeline (2) is provided with an air intake valve (a), the high-pressure exhaust pipeline (3) is provided with a high-pressure exhaust valve (b), the low-pressure exhaust pipeline (4) is provided with a low-pressure exhaust valve (c), the vacuum pumping pipeline (5) is provided with a vacuum pumping valve (d), and the automatic analysis pipeline (6) is provided with an analysis valve (e).

4. The automated high-purity gas filling device according to claim 1, characterized in that: The helium pipeline (7) and the nitrogen pipeline (8) are respectively provided with a low-pressure valve (g) for providing low pressure and a high-pressure valve (h) for providing high pressure, which are connected to the pressure-maintaining valve (i).

5. The automated high-purity gas filling device according to claim 1, characterized in that: All valves connected to the inflation pipeline (1) are electric or pneumatic valves controlled by a PLC controller.

6. The automated high-purity gas filling device according to claim 1, characterized in that: The connection end between the connecting pipeline (101) and the filling container is a quick-release joint.

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