SIMS cathode component device with metal compound nanometer coating

Abstract

The utility model discloses an SIMS cathode component device with metal compound nanometer coatings, and relates to the technical field of SIMS oxygen source gun cathode components, the SIMS cathode component device comprises a cathode component and the metal compound nanometer coatings plated on the inner surface and the outer surface of the cathode component, the cathode component is of a cylindrical or tubular structure, one end of the cathode component is open, and the other end of the cathode component is open. And a column body is integrally formed at the other end of the cathode component. The defect that traditional mechanical grinding is limited by the size and depth is overcome, and the cleaning effect on the inner surface and the outer surface of the cathode component is more thorough and clean; and the cleaning mode is simpler and more convenient.

Description

Technical Field

[0001] The present application relates to the technical field of SIMS oxygen source gun cathode components, and in particular to a SIMS cathode component device having a metal compound nano-coating. Background Art

[0002] Typically, the cathode holes of the oxygen source gun inside a SIMS instrument become clogged with carbon deposits every 1.5 months, causing pressure to rise and maximum current to decrease, impacting subsequent analysis. Therefore, improvements must be made to extend service life, thereby extending maintenance cycles and increasing instrument availability.

[0003] Carbon deposition may occur on the oxygen source gun of the SIMS instrument during use. This may be caused by the following reasons:

[0004] First, residual organic matter: There may be residual organic matter on the sample surface or in the sample chamber. These organic matter will decompose during the oxygen ion bombardment process, producing carbon-based fragments. These fragments may be deposited on the oxygen source gun or the sample surface, forming carbon deposits.

[0005] Second, vacuum system pollution: pollutants in the vacuum system (such as oil vapor or other hydrocarbons) may be deposited on the oxygen source gun. These pollutants will decompose and accumulate into carbon deposits under the bombardment of high-energy ions.

[0006] Third, incomplete oxidation reaction: In some cases, oxygen ion bombardment may not be able to completely oxidize the sample surface or contaminants, resulting in some carbon-based compounds not being completely converted into carbon dioxide (CO2) and being removed from the system, thereby accumulating on the oxygen source gun.

[0007] Fourth, material selection: The choice of oxygen source gun and surrounding materials may also affect carbon deposition. If the material is prone to adsorption or chemical reaction to form carbon deposits, it will aggravate the carbon deposition problem.

[0008] Fifth, operating conditions: Inappropriate operating conditions, such as excessively high ion beam intensity or incorrect vacuum, may also lead to carbon deposition.

[0009] Typical maintenance of the source gun involves mechanical polishing to remove the carbon deposits. However, mechanical polishing is limited in volume and depth. Because the SIMS cathode component is cylindrical and hollow, its interior is difficult to completely clean using traditional machining methods. Utility Model Content

[0010] In order to improve the removal of carbon deposits by conventional mechanical grinding and polishing methods, which are often limited by volume and depth, the present application provides a SIMS cathode component device having a metal compound nano-coating.

[0011] The present application provides a SIMS cathode component device with a metal compound nano-coating, which adopts the following technical solution:

[0012] A SIMS cathode component device with a metal compound nano-coating includes a cathode component and a surface coated with the metal compound nano-coating. The cathode component is cylindrical or tubular in structure, one end of the cathode component is open, and the other end of the cathode component is integrally formed with a column.

[0013] By adopting the above technical solution, a layer of metal compound nano-coating is coated on the surface. The TiN coating has good conductivity and high temperature resistance. At the same time, it reduces carbon deposition on the cathode components under long-term use. In the event of carbon deposition, chemical solutions can be effectively used to remove it, avoiding damage to the cathode components due to grinding and polishing of the inner and outer surfaces. The method of cleaning carbon deposition is more convenient and simple, and is not affected by volume and depth restrictions.

[0014] Optionally, a thread groove is provided on the surface of the cylinder.

[0015] By adopting the above technical solution, the external thread provided on the column facilitates the installation and fastening of the SIMS oxygen source gun.

[0016] Optionally, the column is provided with a through hole along its own axial direction, the axis of the column and the axis of the cathode component are collinear, and the through hole is communicated with the cathode component.

[0017] By adopting the above technical solution, during the use of the oxygen source gun, the through hole and the cathode component are connected to maintain a stable and constant pressure.

[0018] Optionally, the diameter of the through hole is 1 mm.

[0019] By adopting the above technical solution, the 1mm small hole meets the working requirements.

[0020] Optionally, a tapered hole is formed inside the cathode component, and the tapered hole is connected to the through hole.

[0021] By adopting the above technical solution, the tapered hole and the through hole are interconnected, which makes it easy to maintain a relatively stable pressure and avoid affecting the analysis results.

[0022] Optionally, a stepped surface is formed on the outer surface of the cathode component.

[0023] By adopting the above technical solution, the installation requirements are met while the surface maintains different roughness.

[0024] Optionally, the diameter of the tapered hole is larger than the diameter of the through hole.

[0025] By adopting the above technical solution, the diameter of the tapered hole is larger, and it is close to the open end to facilitate cleaning of carbon deposits.

[0026] Optionally, the cathode component is made of stainless steel.

[0027] By adopting the above technical solution, it has higher hardness and wear resistance.

[0028] In summary, this application includes at least one of the following beneficial technical effects:

[0029] 1. The surface of the cathode component is coated with a layer of metal compound nano-coating, which is not easy to adhere to carbon deposits. It can be removed by soaking in a specific chemical solution. During maintenance, the metal coating and carbon deposits are directly removed at the same time, restoring the inner and outer surfaces of the cathode component to their original cleanliness.

[0030] 2. Compared with the traditional mechanical grinding and polishing method to remove carbon deposits, the metal compound nano-coating deposited in this utility model is not limited by its volume and depth, and the cleaning process is more convenient and simple;

[0031] 3. After adding a coating to the surface of the cathode component, the maximum SIMS current will be significantly improved, and the anti-blocking time of the cathode through-hole during SIMS use will also be extended, thereby ensuring the accuracy of the analysis data and improving production capacity utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0033] Figure 1 This is a schematic diagram showing the overall structure of this application.

[0034] Figure 2 This is a cross-sectional view showing the overall structure of this application.

[0035] Figure 3 This is a partial cross-sectional view of the present application.

[0036] Figure numerals: 1. cathode component; 2. metal compound nano-coating; 3. cylinder; 4. through hole; 5. tapered hole; 6. stepped surface; 7. threaded groove. DETAILED DESCRIPTION

[0037] The following is combined with Figure 1 To the attached Figure 3 This application is described in further detail.

[0038] The present invention discloses a SIMS cathode component device having a metal compound nano-coating.

[0039] Reference Figure 1 and Figure 2 As shown, it includes a cathode component 1 and a metal compound nano-coating 2 coated on its inner and outer surfaces. The cathode component 1 is a cylindrical or tubular structure, one end of the cathode component 1 is open, and the other end of the cathode component 1 is integrally formed with a column 3. The outer surface of the column 3 is provided with a threaded groove 7 to facilitate installation and fastening with the oxygen source gun; the cathode component 1 is made of stainless steel, which makes it have high hardness and good wear resistance.

[0040] The embodiment primarily utilizes the principles of surface modification and an isolating sacrificial layer, uniformly coating the inner and outer surfaces of the SIMS cathode component 1 with a nanometer-thick layer of a metal compound using physical vapor deposition (PVD). The metal compound material properties make it difficult to adhere to carbon deposits and can be removed by immersion in a specific chemical solution. Therefore, the metal compound coating can be used as an isolating layer and sacrificial layer on the inner and outer surfaces of the cathode component 1. During maintenance, the metal coating and carbon deposits can be removed simultaneously by immersion in a chemical solution, restoring the inner and outer surfaces of the cathode component 1 to their original cleanliness.

[0041] Physical vapor deposition (PVD) can sputter or evaporate a variety of metal thin films composed of any combination of elements, with varying surface properties. For example, titanium nitride (TiN), due to its high hardness, wear resistance, and golden luster, is widely used for hard coatings requiring high conductivity and high temperature resistance.

[0042] The oxygen source gun is exposed to high voltage and high temperature, so the coating material must be conductive and heat-resistant. TiN is a very suitable coating material. It can also be removed by immersion in various chemical solutions, such as a mixture of hydrofluoric acid (HF) and nitric acid (HNO3) (usually in a 1:1 ratio), or a mixture of hydrofluoric acid (HF), sulfuric acid, and hydrogen peroxide (commonly in a 4:1 ratio).

[0043] This embodiment only requires adding a layer of nanometal compound to the cathode component 1, without any structural changes or changes to the installation method. Actual test results show that after adding the coating, the SIMS maximum current is significantly increased to approximately 590nA, an increase of approximately 50nA compared to the previous one. The cathode hole blockage time during SIMS use has also been extended from 1.5 months to 2 months.

[0044] See also Figure 2 and Figure 3 As shown, the cylinder 3 is provided with a through hole 4 along its own axial direction, the axis of the cylinder 3 and the axis of the cathode component 1 are collinear, the through hole 4 is connected to the cathode component 1, the diameter of the through hole 4 is 1 mm, a tapered hole 5 is formed inside the cathode component 1, the tapered hole 5 is connected to the through hole 4, the outer surface of the cathode component 1 is formed with a stepped surface 6, the surface is formed with different roughness, the diameter of the tapered hole 5 is larger than the diameter of the through hole 4, when cleaning carbon deposits, it is convenient to leak out from the larger diameter to prevent blocking the through hole 4.

[0045] The working principle of a SIMS cathode component 1 with a metal compound nanocoating 2 according to the present embodiment is as follows: After a period of use, a SIMS cathode component 1 with a TiN metal oxide nanocoating forms carbon deposits on both its inner and outer surfaces. This carbon deposit can clog the through-holes 4 of the cathode component 1, causing a pressure increase and a decrease in maximum current, impacting analytical results. During maintenance, the metal coating and carbon deposits are removed directly by immersion. After the cathode component 1 is immersed in hydrofluoric acid (HF) for 20 minutes, the carbon deposits fall off as the TiN metal coating dissolves from its inner and outer surfaces. After immersion and rinsing, a 50nm layer of TiN is evaporated onto the cathode component 1 and the component is reinstalled in the SIMS instrument. Directly removing the metal coating and carbon deposits by immersion during maintenance allows for a more thorough cleaning of the inner and outer surfaces of the cathode component 1. Compared to traditional mechanical grinding and polishing methods, this method not only eliminates volume and depth limitations, but also extends component life and significantly improves maximum current retention. Furthermore, the immersion method simplifies and facilitates carbon deposit cleaning and component installation.

[0046] Unless otherwise defined, the technical or scientific terms used in this application shall have the usual meanings understood by persons of ordinary skill in the field to which this application belongs. The words "first", "second", "third" and similar terms used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "one" or "a" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprises" cover the elements or objects listed after "include" or "comprises" and their equivalents, and do not exclude other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0047] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A SIMS cathode component device having a metal compound nano-coating, characterized in that: The invention comprises a cathode component (1) and a metal compound nano-coating layer (2) coated on the inner and outer surfaces thereof, wherein the cathode component (1) is cylindrical or tubular in structure, one end of the cathode component (1) is open, and the other end of the cathode component (1) is integrally formed with a column (3).

2. The SIMS cathode component device having a metal compound nano-coating according to claim 1, characterized in that: A thread groove (7) is provided on the surface of the column (3).

3. The SIMS cathode component device having a metal compound nano-coating according to claim 2, characterized in that: The column (3) is provided with a through hole (4) along its own axial direction, the axis of the column (3) and the axis of the cathode component (1) are collinear, and the through hole (4) and the cathode component (1) are connected.

4. The SIMS cathode component device having a metal compound nano-coating according to claim 3, characterized in that: The diameter of the through hole (4) is 1 mm.

5. The SIMS cathode component device with a metal compound nano-coating according to claim 3, characterized in that: A tapered hole (5) is formed inside the cathode component (1), and the tapered hole (5) is connected to the through hole (4).

6. The SIMS cathode component device having a metal compound nano-coating according to claim 5, characterized in that: The outer surface of the cathode component (1) is formed with a stepped surface (6).

7. The SIMS cathode component device with a metal compound nano-coating according to claim 5, characterized in that: The diameter of the tapered hole (5) is larger than the diameter of the through hole (4).

8. The SIMS cathode component device with a metal compound nano-coating according to claim 1, characterized in that: The cathode component (1) is made of stainless steel.

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