Special quartz through pipe for diffusion furnace

Abstract

The utility model relates to the technical field of quartz through pipes, and discloses a special quartz through pipe for a diffusion furnace, which comprises a rotary connecting plate, and a replacement mechanism is arranged in the rotary connecting plate; the replacing mechanism comprises a quartz through pipe body, the quartz through pipe body is located in the rotating connecting plate, two rotating bearings are fixedly connected to the inner wall of the rotating connecting plate, two auxiliary rings are fixedly connected to the outer surface of the quartz through pipe body, and an inner gear is rotationally connected to the interior of each auxiliary ring; the inner wall of each auxiliary ring is rotationally connected with six transmission gears, and each set of transmission gears are engaged with the corresponding inner gear. According to the special quartz through pipe for the diffusion furnace, the capacity that the quartz through pipe is very convenient to replace when the quartz through pipe is aged or broken after being used for a long time is achieved, the function of convenient disassembly and replacement is achieved, the situation that a large amount of time needs to be consumed in the replacement process is avoided, and the effects of improving the working efficiency and improving the practicability of the special quartz through pipe for the diffusion furnace are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz through-tubes, in particular to a special quartz through-tube for a diffusion furnace. Background Art

[0002] Most quartz tubes are usually used in conjunction with diffusion furnaces and are often used for high-temperature diffusion of silicon wafers in semiconductor processing. During the high-temperature diffusion process, the silicon wafers together with the silicon wafer holders are placed in the quartz tubes for processing. When in use, some quartz tubes on the diffusion furnace need to be equipped with a rotating structure to assist in driving the quartz tubes to rotate, so as to accelerate the uniform heating of the internal materials.

[0003] The existing utility model with authorization announcement number CN217149401U discloses a quartz furnace tube dedicated to a diffusion furnace, including a quartz furnace tube main body, both ends of the quartz furnace tube main body are rotatably connected to a rotating connecting plate through bearings, the bottoms of the two rotating connecting plates are fixedly connected to a fixed connecting base plate, the inner surfaces of the two rotating connecting plates are provided with drive motors, and the output ends of the two drive motors are fixedly sleeved with drive gears.

[0004] By adopting the above technical solution, driven rotating rings are directly set at both ends of the quartz furnace tube body to reduce the number of transmission parts set on the outside, simplify the transmission, and the driven meshing teeth on the driven rotating ring prevent the driving gear from slipping when driving the quartz furnace tube body. The transmission efficiency is higher than the direct friction effect of the surface. However, the above technical solution is very troublesome when it ages or breaks after long-term use and needs to be replaced. It does not have the ability to be easily disassembled and replaced, and a lot of time is required during the disassembly process, which not only reduces work efficiency, but also reduces the practicality of the quartz tube dedicated to the diffusion furnace.

[0005] Therefore, those skilled in the art provide a special quartz through-tube for a diffusion furnace to solve the problems raised in the above background technology. Utility Model Content

[0006] The purpose of the utility model is to provide a quartz through-tube dedicated to a diffusion furnace, so as to solve the problems raised in the above background technology.

[0007] To achieve the above purpose, the present invention provides the following technical solutions:

[0008] A quartz through-tube specially used for a diffusion furnace comprises a rotating connecting plate, wherein a replacement mechanism is provided inside the rotating connecting plate;

[0009] The replacement mechanism includes a quartz tube body, which is located inside a rotating connecting plate, and the inner wall of the rotating connecting plate is fixedly connected to two rotating bearings. The outer surface of the quartz tube body is fixedly connected to two auxiliary rings, and the interior of each auxiliary ring is rotatably connected to an internal gear, and the inner wall of each auxiliary ring is rotatably connected to six transmission gears, each group of transmission gears is meshed with the internal gear, and the interior of each auxiliary ring is slidably connected to six moving tooth blocks, and each group of moving tooth blocks is meshed with the transmission gear, and each of the moving tooth blocks is fixedly connected to an anti-slip fixing block on a side away from the quartz tube body, and each of the anti-slip fixing blocks is in contact with the inner wall of the inner ring of the rotating bearing on a side away from the moving tooth block.

[0010] As a further solution of the present invention: an auxiliary gear is fixedly connected to the outer surface of the quartz tube body, a rotating gear is provided inside the rotating connecting plate, and the auxiliary gear is meshed with the rotating gear.

[0011] As a further solution of the present invention: a rotating rod is fixedly connected to the inner wall of the rotating gear, and one end of the rotating rod away from the rotating gear passes through the rotating connecting plate and is fixedly connected to the servo motor.

[0012] As a further solution of the present invention: a reinforcement ring is fixedly connected to the outer surface of the rotating rod, and an end of the reinforcement ring close to the rotating gear is fixedly connected to an end of the rotating gear close to the rotating rod.

[0013] As a further solution of the present invention: the ends of the two transmission gears that are away from each other are fixedly connected to a rotating handle, and the ends of the two rotating handles that are away from each other pass through the auxiliary ring and extend to the outside of the auxiliary ring.

[0014] As a further solution of the present invention: the outer surface of each rotating handle is sleeved with an auxiliary bearing, and each auxiliary bearing is embedded in the interior of the auxiliary ring.

[0015] As a further solution of the present invention: the outer surface of each movable tooth block is fixedly connected to a stabilizing block, and each stabilizing block is slidably connected to the inside of the auxiliary ring.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] The utility model is provided with a rotating connecting plate, a quartz tube body, a rotating bearing, an auxiliary ring, an internal gear, a transmission gear, a movable tooth block and an anti-slip fixing block. It can rely on rotating one of the transmission gears to drive the internal gear to rotate, and then utilize the internal gear to drive the remaining multiple transmission gears to rotate at the same time, and make the movable tooth block drive the anti-slip fixing block to start moving, rely on the multiple anti-slip fixing blocks to change the current diameter of the quartz tube body, and then make the anti-slip fixing block contact or separate from the rotating bearing, so as to disassemble or fix it, so that it is very convenient to achieve the function of replacing the quartz tube when it ages or breaks after long-term use. It has the function of convenient disassembly and replacement, avoids the situation that a lot of time is needed during the replacement process, plays a role in improving work efficiency and increasing the practicality of the quartz tube dedicated to the diffusion furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a structural diagram of a quartz tube dedicated to a diffusion furnace;

[0019] Figure 2 This is a schematic diagram of the cross-sectional three-dimensional structure of a rotating bearing in a quartz through tube dedicated to a diffusion furnace;

[0020] Figure 3 This is a schematic diagram of the cross-sectional three-dimensional structure of an auxiliary ring in a quartz through tube dedicated to a diffusion furnace;

[0021] Figure 4 This is a schematic diagram of the cross-sectional three-dimensional structure of a rotating connecting plate in a quartz through tube specially used for a diffusion furnace.

[0022] In the figure: 1. Rotating connecting plate; 2. Replacement mechanism; 201. Quartz tube body; 202. Rotating bearing; 203. Auxiliary ring; 204. Internal gear; 205. Transmission gear; 206. Moving tooth block; 207. Anti-slip fixing block; 3. Auxiliary gear; 4. Rotating gear; 5. Rotating rod; 6. Servo motor; 7. Reinforcement ring; 8. Rotating handle; 9. Auxiliary bearing; 10. Stabilizing block. DETAILED DESCRIPTION

[0023] See also Figure 1-4 A quartz through tube for a diffusion furnace comprises a rotating connecting plate 1, wherein a replacement mechanism 2 is provided inside the rotating connecting plate 1;

[0024] The replacement mechanism 2 includes a quartz tube body 201, which is located inside the rotating connecting plate 1. Two rotating bearings 202 are fixedly connected to the inner wall of the rotating connecting plate 1. The outer surface of the quartz tube body 201 is fixedly connected to an auxiliary gear 3. A rotating gear 4 is provided inside the rotating connecting plate 1. The auxiliary gear 3 is engaged with the rotating gear 4. By providing the auxiliary gear 3 and the rotating gear 4, the rotation of the auxiliary gear 3 can drive the quartz tube body 201 to rotate at the same time, and the rotating gear 4 provides a force-bearing position for the auxiliary gear 3, thereby increasing the convenience during rotation.

[0025] A rotating rod 5 is fixedly connected to the inner wall of the rotating gear 4. The end of the rotating rod 5 away from the rotating gear 4 passes through the rotating connecting plate 1 and is fixedly connected to the servo motor 6. By providing the servo motor 6 and the rotating rod 5, the force point of the rotating gear 4 can be extended by relying on the rotating rod 5, and the power generated by the servo motor 6 can drive the rotating rod 5 to rotate, thereby causing the rotating gear 4 to rotate at the same time, thereby causing the auxiliary gear 3 and the quartz tube body 201 to rotate.

[0026] A reinforcement ring 7 is fixedly connected to the outer surface of the rotating rod 5. The end of the reinforcement ring 7 close to the rotating gear 4 is fixedly connected to the end of the rotating gear 4 close to the rotating rod 5. The reinforcement ring 7 can increase the fixed connection area between the rotating rod 5 and the rotating gear 4, increase the firmness of the connection between the two parties, prevent the possibility of cracking at the connection after long-term use, and increase the durability of the device.

[0027] Two auxiliary rings 203 are fixedly connected to the outer surface of the quartz tube body 201, and the interior of each auxiliary ring 203 is rotatably connected to an internal gear 204. The inner wall of each auxiliary ring 203 is rotatably connected to six transmission gears 205, and each group of transmission gears 205 is engaged with the internal gear 204. The ends of the two transmission gears 205 away from each other are fixedly connected to a rotating handle 8, and the ends of the two rotating handles 8 away from each other pass through the auxiliary ring 203 and extend to the outside of the auxiliary ring 203. By providing the rotating handle 8, the rotating handle 8 can provide a good force point for the transmission gear 205, increase the convenience when rotating the transmission gear 205, and increase the convenience of the device.

[0028] The outer surface of each rotating handle 8 is provided with an auxiliary bearing 9, and each auxiliary bearing 9 is embedded in the inside of the auxiliary ring 203. The auxiliary bearing 9 can reduce the friction generated by the rotating handle 8 during rotation, making the rotating handle 8 more sensitive during rotation. At the same time, it can also reduce the wear of the rotating handle 8 and increase the service life of the rotating handle 8.

[0029] The interior of each auxiliary ring 203 is slidably connected to six moving tooth blocks 206, and each group of moving tooth blocks 206 is meshed with the transmission gear 205. The side of each moving tooth block 206 away from the quartz tube body 201 is fixedly connected to an anti-slip fixed block 207, and the side of each anti-slip fixed block 207 away from the moving tooth block 206 is in contact with the inner wall of the inner ring of the rotating bearing 202. The outer surface of the moving tooth block 206 is fixedly connected to a stabilizing block 10, and each stabilizing block 10 is slidably connected to the interior of the auxiliary ring 203. The stabilizing block 10 can move simultaneously with the moving tooth block 206 and use its body to limit the moving distance of the moving tooth block 206 to prevent it from moving too much and slipping out of the auxiliary ring 203, thereby increasing the protectiveness of the device.

[0030] The working principle of the present invention is as follows: when in use, first connect the servo motor 6 to the power supply. When the quartz tube body 201 needs to be installed, the quartz tube body 201 is placed in the rotating connecting plate 1, and then the two rotating handles 8 are rotated respectively. The auxiliary bearing 9 can increase the sensitivity of the rotating handle 8 during rotation, thereby driving the two transmission gears 205 to rotate. At the same time, the transmission gear 205 can respectively drive the two internal gears 204 to rotate during rotation, thereby causing all two sets of transmission gears 205 to start rotating. At this time, the multiple moving tooth blocks 206 can start to move due to the engagement with the transmission gear 205, and at the same time drive the multiple anti-slip fixed blocks 207 to extend outward. The stabilizing block 10 can limit the moving distance of the anti-slip fixed block 207 to prevent it from moving too much and falling off, thereby causing the anti-slip fixed block 207 to be aligned with the inner ring of the rotating bearing 202. When the quartz tube body 201 needs to be rotated, the servo motor 6 is started, and the power generated by the servo motor 6 drives the rotating rod 5 to rotate, and then drives the rotating gear 4 to rotate at the same time. At this time, the quartz tube body 201 can be rotated by relying on the meshing relationship between the rotating gear 4 and the auxiliary gear 3. When the quartz tube body 201 needs to be replaced after long-term use, the rotating handle 8 is rotated in the opposite direction, thereby reversing the transmission gear 205 and the internal gear 204, and causing the movable tooth block 206 to drive the anti-slip fixing block 207 to retract inward, thereby reducing the diameter of the quartz tube body 201, so that it can be removed and replaced, thereby realizing the ability to conveniently replace the quartz tube body 201, effectively increasing work efficiency, and also improving the practicality of the quartz tube dedicated to the diffusion furnace.

[0031] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A quartz through-tube for a diffusion furnace, comprising a rotating connecting plate (1), characterized in that: A replacement mechanism (2) is provided inside the rotating connecting plate (1); The replacement mechanism (2) comprises a quartz tube body (201), the quartz tube body (201) is located inside the rotating connecting plate (1), the inner wall of the rotating connecting plate (1) is fixedly connected to two rotating bearings (202), the outer surface of the quartz tube body (201) is fixedly connected to two auxiliary rings (203), the interior of each auxiliary ring (203) is rotatably connected to an internal gear (204), the inner wall of each auxiliary ring (203) is rotatably connected to six transmission gears (205), and each group of the transmission gears (205) is fixedly connected to the inner wall of each auxiliary ring (203). The movable gears (205) are all meshed with the internal gears (204); six movable tooth blocks (206) are slidably connected to the interior of each auxiliary ring (203); each group of movable tooth blocks (206) is meshed with the transmission gear (205); a side of each movable tooth block (206) away from the quartz tube body (201) is fixedly connected to an anti-slip fixed block (207); and a side of each anti-slip fixed block (207) away from the movable tooth block (206) is in contact with the inner wall of the inner ring of the rotating bearing (202).

2. The quartz tube for diffusion furnace according to claim 1, characterized in that: An auxiliary gear (3) is fixedly connected to the outer surface of the quartz through-tube body (201), a rotating gear (4) is provided inside the rotating connecting plate (1), and the auxiliary gear (3) is meshed with the rotating gear (4).

3. The quartz tube for diffusion furnace according to claim 2, characterized in that: The inner wall of the rotating gear (4) is fixedly connected to a rotating rod (5), and one end of the rotating rod (5) away from the rotating gear (4) passes through the rotating connecting plate (1) and is fixedly connected to a servo motor (6).

4. The quartz tube for diffusion furnace according to claim 3, characterized in that: A reinforcement ring (7) is fixedly connected to the outer surface of the rotating rod (5), and one end of the reinforcement ring (7) close to the rotating gear (4) is fixedly connected to one end of the rotating gear (4) close to the rotating rod (5).

5. The quartz tube for diffusion furnace according to claim 1, characterized in that: The ends of the two transmission gears (205) that are away from each other are fixedly connected to a rotating handle (8), and the ends of the two rotating handles (8) that are away from each other pass through the auxiliary ring (203) and extend to the outside of the auxiliary ring (203).

6. The quartz tube for diffusion furnace according to claim 5, characterized in that: The outer surface of each rotating handle (8) is sleeved with an auxiliary bearing (9), and each auxiliary bearing (9) is embedded in the interior of the auxiliary ring (203).

7. The quartz tube for diffusion furnace according to claim 1, characterized in that: The outer surface of each movable tooth block (206) is fixedly connected to a stabilizing block (10), and each stabilizing block (10) is slidably connected to the interior of the auxiliary ring (203).

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