Automatic sliding door structure and wafer cleaning machine

Abstract

The utility model provides an automatic sliding door structure and a wafer cleaning machine, the automatic sliding door structure comprises a door body, a first driving part, a sliding assembly and a base, the door body and the base are arranged in parallel in the first direction, the door body is arranged in the vertical direction, the first driving part is installed on the base, and the driving end of the first driving part is connected with the sliding assembly; the first driving piece is configured to provide power for driving the sliding assembly to move; the sliding assembly comprises a first sliding block and a sliding rail, the first sliding block is arranged on the sliding rail, the sliding rail is installed on the base in the first direction, the door body is connected with the first sliding block through a first connecting piece, and the first driving piece drives the first sliding block to move along the sliding rail and synchronously drives the first connecting piece to move in the same direction. The door body can be quickly and automatically translated, the working efficiency is improved, the structure is simple, and the cost is saved.

Description

Technical Field

[0001] The present application relates to the field of automation equipment, and in particular to an automatic sliding door structure and a wafer cleaning machine. Background Art

[0002] With the development of automation and intelligent technologies, the application of automated equipment in the mobile transportation industry is becoming increasingly widespread, especially in the application of sliding doors. During the product processing, sliding doors are used to isolate the processing environment from the external environment to prevent the leakage of dust and pollutants. However, existing technologies generally rely on manual opening and closing of sliding doors, which not only increases investment costs but also is inefficient. Utility Model Content

[0003] The purpose of this application is to provide an automatic sliding door structure to solve the problem of high cost and low efficiency in opening and closing of sliding doors in the prior art.

[0004] To achieve this goal, this application adopts the following technical solutions:

[0005] The present application provides an automatic sliding door structure, which includes a door body, a first driving member, a sliding assembly and a base, wherein:

[0006] The door body is arranged horizontally and parallel to the base along a first direction, the door body is arranged along a vertical direction, the first driving member is installed on the base, the driving end of the first driving member is connected to the sliding assembly, and the first driving member is configured to provide power to drive the sliding assembly to move;

[0007] The sliding assembly includes a first slider and a slide rail. The first slider is arranged on the slide rail. The slide rail is installed on the base along a first direction. The door body is connected to the first slider through a first connecting member. The first connecting member is configured to drive the door body to move synchronously to achieve rapid and automatic translation of the door body.

[0008] Optionally, the first connecting member is a support rod along the first direction, the first end of the support rod is connected to the door body through a first mounting member, the first mounting member is fixed on the door body, and the second end of the support rod is connected to the slider through a second mounting member.

[0009] Optionally, the second mounting member includes a mounting block and a base plate, the mounting block is mounted above the first end of the base plate, the first slider is connected to the bottom of the second end of the base plate, and the mounting block is detachably fixedly connected to the second end of the support rod.

[0010] Optionally, the mounting block includes an upper clamping block and a lower clamping block, the upper clamping block and the lower clamping block are detachably fixedly connected, the lower clamping block is fixedly connected to the base plate, a first groove is provided at the upper end of the upper clamping block, and a second groove is provided at the lower clamping block, a clamping groove is formed between the first groove and the second groove, and the clamping groove is tightly connected to the second end of the first connecting member.

[0011] Optionally, the first driving member includes a rodless cylinder and a second slider, the driving end of the rodless cylinder is connected to the second slider, the rodless cylinder is configured to drive the second slider to slide back and forth along the first direction, and the upper end of the second slider is fixedly connected to the bottom of the second end of the base plate.

[0012] Optionally, the upper end of the door body is slidably connected to the first guide rail, and the lower end of the door body is slidably connected to the second guide rail. The first guide rail and the second guide rail are arranged parallel to each other along the first direction and are located in the same vertical plane. The door body can move within the first guide rail and the second guide rail.

[0013] Optionally, two sets of detection members are installed on the first guide rail, and the detection members are configured to detect the position of the door body.

[0014] Optionally, a notch is provided on the base, and the notch is located below the sliding track of the second slider.

[0015] A wafer cleaning machine comprises any one of the above-mentioned automatic sliding door structures.

[0016] Compared with the prior art, the automatic sliding door structure provided by this application has the following advantages:

[0017] 1) The first driving member drives the first slider to move along the slide rail, and simultaneously drives the first connecting member to move in the same direction, which not only realizes the rapid and automatic translation of the door body and improves work efficiency, but also has a simple structure and saves costs.

[0018] 2) Through the cooperation of the upper clamping block and the lower clamping block, the second end of the support rod 33 can be quickly disassembled and assembled, which is convenient for replacing the support rod and saves costs. On the other hand, it saves time and improves overall work efficiency.

[0019] 3) Through the cooperation of the first guide rail and the second guide rail, on the one hand, the door body is supported so that the door body remains vertical; on the other hand, a guide is provided for the movement of the door body, which facilitates rapid sliding and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, a brief introduction is given below to the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the content of the embodiments of the present application and these drawings without paying any creative work.

[0021] Figure 1 This is a schematic diagram of the three-dimensional structure of the automatic sliding door structure provided in an embodiment of the present application;

[0022] Figure 2 yes Figure 1A magnified schematic diagram of point A in the middle;

[0023] Figure 3 1 is a schematic diagram of the three-dimensional structure of the second mounting member of the automatic sliding door structure provided in an embodiment of the present application;

[0024] Figure 4 It is a schematic diagram of the three-dimensional structure of the base of the automatic sliding door structure provided in an embodiment of the present application. DETAILED DESCRIPTION

[0025] To facilitate understanding of the present application, a more comprehensive description of the present application will be provided below with reference to the relevant drawings. Preferred embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to enable a more thorough and comprehensive understanding of the disclosure of the present application. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there can also be a central component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there can also be a central component. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by a person skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are for the purpose of describing specific embodiments only and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the relevant listed items.

[0026] See also Figures 1 to 4 As shown, an embodiment of the present application provides an automatic sliding door structure, which includes a door body 10, a first driving member 20, a sliding assembly 30 and a base 40, wherein:

[0027] The door body 10 and the base 40 are arranged along the first direction ( Figure 1 The first driving member 20 is mounted on the base 40 and the driving end of the first driving member 20 is connected to the sliding assembly 30. The first driving member 20 is configured to provide a driving force for the sliding assembly 30 to move;

[0028] The sliding assembly 30 includes a first slider 31 and a sliding rail 32. The first slider 31 is arranged on the sliding rail 32. The sliding rail 32 is installed on the base 40 along a first direction. The door body 10 is connected to the first slider 31 through a first connecting member 33. The first connecting member 33 is configured to drive the door body 10 to move synchronously to achieve rapid and automatic translation of the door body 10.

[0029] The first driving member 20 drives the first slider 31 to move along the slide rail 32, and simultaneously drives the first connecting member 33 to move in the same direction, which not only realizes the rapid automatic translation of the door body 10 and improves work efficiency, but also has a simple structure and saves costs.

[0030] In one embodiment, the first connecting member 33 is a support rod along the first direction, the first end of the support rod is connected to the door body 10 through the first mounting member 11, the first mounting member 11 is fixed on the door body 10, and the second end of the support rod is connected to the slider 31 through the second mounting member 50.

[0031] By arranging the support rod along the first direction, on the one hand, the first slider 31 and the door body 10 are fixedly connected so that the power of the movement of the first slider 31 is transmitted to the door body 10 to the maximum extent, and on the other hand, the overall structure is made more compact and space is saved.

[0032] In one embodiment, the second mounting member 50 includes a mounting block 51 and a base plate 52. The mounting block 51 is installed above the first end of the base plate 52. The first slider 31 is connected to the bottom of the second end of the base plate 52. The mounting block 51 is detachably fixed to the second end of the support rod 33.

[0033] Through the cooperation of the first sliding block 31 , the bottom plate 52 and the mounting block 51 , not only the second end of the support rod 33 is kept fixed during the sliding process, but also the support rod 33 is kept horizontal at all times.

[0034] In one embodiment, the mounting block 51 includes an upper clamping block 510 and a lower clamping block 511. The upper clamping block 510 and the lower clamping block 511 are detachably fixedly connected. The lower clamping block 511 is fixedly connected to the base plate 52. A first groove 512 is provided at the upper end of the upper clamping block 510, and a second groove 513 is provided at the lower clamping block. A clamping groove 514 is formed between the first groove 512 and the second groove 513, and the clamping groove 514 is tightly connected to the second end of the first connecting member 33.

[0035] Through the cooperation of the upper clamping block 510 and the lower clamping block 511, the second end of the support rod 33 can be quickly disassembled and assembled, which on the one hand facilitates the replacement of the support rod 33 and saves costs, and on the other hand saves time and improves overall work efficiency.

[0036] In one embodiment, the first driving member 20 includes a rodless cylinder 21 and a second slider 22. The driving end of the rodless cylinder 21 is connected to the second slider 22. The rodless cylinder 21 is configured to drive the second slider 22 to slide back and forth along the first direction. The upper end of the second slider 22 is fixedly connected to the bottom of the second end of the base plate 52.

[0037] Through the cooperation of the base plate 52, the rodless cylinder 21 and the second slider 22, the first slider 31 can reciprocate along the slide rail 32, which has a simple structure and is easy to operate. By setting the rodless cylinder 21, not only the overall structure is compact and space is saved, but also its response is fast, which reduces the delay caused by waiting for the door to open and close, saves time, and helps to improve overall production efficiency.

[0038] In one embodiment, the upper end of the door body 10 is slidably connected to the first guide rail 12, and the lower end of the door body is slidably connected to the second guide rail 13. The first guide rail 12 and the second guide rail 13 are arranged parallel to each other along the first direction and are located in the same vertical plane. The door body 10 can move within the first guide rail 12 and the second guide rail 13.

[0039] Through the cooperation of the first guide rail 12 and the second guide rail 13, on the one hand, the door body 10 is supported so that the door body 10 remains vertical, and on the other hand, a guide is provided for the movement of the door body 10, which facilitates rapid sliding and improves production efficiency.

[0040] In one embodiment, two sets of detection members are adjustably mounted on the first guide rail 12 , and the detection members are configured to detect the position of the door body 10 .

[0041] Through the mutual cooperation of the two sets of detection parts, it is convenient to monitor the moving position of the door body 10 and make timely adjustments to ensure that the door body 10 can be accurately and safely moved to the predetermined position; through the adjustable positions of the two sets of detection parts, it is convenient to detect different translation distances of the door body 10, thereby improving the compatibility of the equipment.

[0042] In one embodiment, a notch 41 is formed on the base 40 , and the notch 41 is located below the sliding track of the second slider 22 .

[0043] By providing the notch 41 on the base 40 , on the one hand, the weight of the base 40 is reduced, saving investment costs; on the other hand, it is convenient to observe the operation process of the second slider 22 through the notch 41 , which is convenient for maintenance and timely adjustment.

[0044] A wafer cleaning machine comprises any one of the above-mentioned automatic sliding door structures.

[0045] The above embodiments merely illustrate the basic principles and features of the present application. The present application is not limited by the above examples. Various changes and modifications may be made to the present application without departing from the spirit and scope of the present application. Such changes and modifications are intended to fall within the scope of the present application. The scope of protection claimed in the present application is defined by the appended claims and their equivalents.

Claims

1. An automatic sliding door structure, characterized in that: The automatic sliding door structure includes a door body, a first driving member, a sliding assembly and a base, wherein: The door body is arranged horizontally and parallel to the base along a first direction, and the door body is arranged along a vertical direction. The first driving member is installed on the base, and the driving end of the first driving member is connected to the sliding assembly. The first driving member is configured to provide power to drive the sliding assembly to move; The sliding assembly includes a first slider and a slide rail, the first slider is arranged on the slide rail, and the slide rail is installed on the base along the first direction. The door body is connected to the first slider through a first connecting member, and the first connecting member is configured to drive the door body to move synchronously to achieve rapid and automatic translation of the door body.

2. The automatic sliding door structure according to claim 1, characterized in that: The first connecting member is a support rod along the first direction, the first end of the support rod is connected to the door body through a first mounting member, the first mounting member is fixed on the door body, and the second end of the support rod is connected to the slider through a second mounting member.

3. The automatic sliding door structure according to claim 2, characterized in that: The second mounting member includes a mounting block and a base plate, the mounting block is mounted above the first end of the base plate, the first slider is connected to the lower side of the second end of the base plate, and the mounting block is detachably fixedly connected to the second end of the support rod.

4. The automatic sliding door structure according to claim 3, characterized in that: The mounting block includes an upper clamping block and a lower clamping block, the upper clamping block is detachably fixedly connected to the lower clamping block, the lower clamping block is fixedly connected to the base plate, a first groove is provided at the upper end of the upper clamping block, and a second groove is provided at the lower clamping block, a clamping groove is formed between the first groove and the second groove, and the clamping groove is tightly connected to the second end of the first connecting member.

5. The automatic sliding door structure according to claim 3, characterized in that: The first driving member includes a rodless cylinder and a second slider, the driving end of the rodless cylinder is connected to the second slider, the rodless cylinder is configured to drive the second slider to slide back and forth along the first direction, and the upper end of the second slider is fixedly connected to the lower side of the second end of the base plate.

6. The automatic sliding door structure according to claim 1, characterized in that: The upper end of the door body is slidably connected to the first guide rail, and the lower end of the door body is slidably connected to the second guide rail. The first guide rail and the second guide rail are arranged parallel to each other along the first direction and are located in the same vertical plane. The door body can move within the first guide rail and the second guide rail.

7. The automatic sliding door structure according to claim 5, characterized in that: A notch is provided on the base, and the notch is located below the sliding track of the second sliding block.

8. A wafer cleaning machine, characterized in that: The wafer cleaning machine includes the automatic sliding door structure as described in any one of claims 1-7.

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