Auxiliary device for replacing probe card

Abstract

The utility model provides an auxiliary device for replacing a probe card. The auxiliary device comprises a rack and a movement mechanism, the rack comprises a rack body and rollers arranged at the bottom of the rack body; the movement mechanism is arranged on the frame body and comprises a first movement mechanism body and a second movement mechanism body which are connected with each other, at least part of the structure of the first movement mechanism body can move in the vertical direction relative to the frame body, the second movement mechanism body can rotate relative to the frame body, and the rotation axis of the second movement mechanism body extends in the first horizontal direction. When the auxiliary device works, the movement mechanism is connected with the probe card, the auxiliary device is moved through the roller, so that the probe card can be conveniently moved to a probe table, and after the probe card is driven by the first movement mechanism to move upwards for a certain distance, the probe card is turned over through the rotation of the second movement mechanism. Therefore, the labor intensity of an operator is greatly reduced, the occurrence of a probe card falling event is effectively reduced, and the property loss caused by the damage of the probe card due to falling can be reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor device production equipment, and particularly relates to an auxiliary device for a better probe card. Background Art

[0002] A probe card is a connection component used to connect a device under test (DUT) to a test machine. CP-type probe cards are a type of probe card that has been mass-produced in the prior art and are relatively large in size and weight.

[0003] Currently, the operation of installing a CP probe card on a probe station of a test machine is mainly performed manually, including the following steps:

[0004] First, the operator manually removes the CP probe card from the needle card box;

[0005] Next, the operator holds the CP probe card and turns it over so that the front side of the CP probe card faces upward.

[0006] Next, remove the probe protection cover of the CP type probe card;

[0007] Next, the operator holds the CP probe card again and turns it over so that the front side of the CP probe card faces downward.

[0008] Next, the operator holds the CP type probe card, carries it to the probe station, and installs the CP type probe card into the installation position of the probe station.

[0009] In the above process, since the CP type probe card is large in size and weight, the operator has high labor intensity and there is a safety hazard of the probe card falling. Utility Model Content

[0010] The purpose of the utility model is to provide an auxiliary device for replacing a probe card, so as to reduce the labor intensity of an operator during the probe card replacement process and reduce the possibility of the probe card falling during the probe card replacement process.

[0011] To achieve the above-mentioned objectives, the utility model provides an auxiliary device for replacing a probe card, comprising a frame and a motion mechanism; the frame comprises a frame body and a roller arranged at the bottom of the frame body; the motion mechanism is arranged on the frame body and comprises a first motion mechanism and a second motion mechanism connected to each other, the first motion mechanism is configured to be able to move at least partially in a vertical direction relative to the frame body, the second motion mechanism is configured to be able to rotate relative to the frame body, and the rotation axis of the second motion mechanism extends along a horizontal first direction.

[0012] Optionally, the frame is provided with a guide portion extending in a vertical direction;

[0013] The first motion mechanism includes a slider, which is slidably disposed on the guide portion and can slide along the guide portion; the second motion mechanism includes a clamping member, which is rotatably connected to the slider.

[0014] Optionally, the guide portion is a slide groove;

[0015] The frame is further provided with a limiting groove extending in a vertical direction. The limiting groove is arranged at the lower end of the sliding groove and is connected with the sliding groove. The width of the limiting groove decreases in a direction away from the sliding groove.

[0016] Optionally, there are two guide portions, and the two guide portions are spaced apart along the first direction;

[0017] The first motion mechanism includes two sliders, and the two sliders are respectively arranged on the two guide parts;

[0018] The second movement mechanism includes two clamping members, each of which is provided on one of the sliders, and the two clamping members are arranged opposite to each other.

[0019] Optionally, a clamping groove is provided on the clamping member, the clamping groove is arc-shaped, and the central angle corresponding to the clamping groove is less than or equal to 180 degrees.

[0020] Optionally, the clamping member includes a first chuck, a second chuck and a threaded connector; the first chuck is rotatably connected to the slider, the second chuck is arranged above the first chuck, and the clamping groove is formed between the second chuck and the first chuck; the threaded connector is used to connect the first chuck and the second chuck.

[0021] Optionally, it further includes a first driving part and a second driving part, wherein the first driving part is connected to the slider and is configured to drive the slider to move along the guide part; the second driving part is connected to the second motion mechanism and is configured to drive the clamping member to rotate.

[0022] Optionally, the second motion mechanism includes a rotating shaft, and the rotating shaft is rotatably connected to the frame;

[0023] The first movement mechanism includes a winding wheel and a pulling wire, and the winding wheel is rotatably arranged on the rotating shaft; the pulling wire is partially wound around the outer circumference of the winding wheel, and the pulling wire also has a free end, and the free end of the pulling wire moves in the vertical direction as the winding wheel rotates.

[0024] Optionally, the first motion mechanism further includes a first fixed pulley and a second fixed pulley, wherein the first fixed pulley and the second fixed pulley are both connected to the rotating shaft and symmetrically distributed on opposite sides of the winding wheel;

[0025] There are two pulling wires, namely a first pulling wire and a second pulling wire. The first pulling wire is partially wound around the outer circumference of the first fixed pulley, and the second pulling wire is partially wound around the outer circumference of the second fixed pulley; the free ends of the first pulling wire and the second pulling wire move synchronously in the vertical direction with the rotation of the winding wheel.

[0026] Optionally, the auxiliary device further comprises a locking member, wherein the locking member is used to prevent the free end of the pull wire from moving in a vertical direction; and / or,

[0027] The first movement mechanism further includes a connecting member, which is arranged at the free end of the pulling rope.

[0028] Compared with the prior art, the auxiliary device for replacing the probe card of the present invention has the following advantages:

[0029] The aforementioned auxiliary device for replacing the probe card includes a frame and a motion mechanism; the frame includes a frame body and a roller arranged at the bottom of the frame body; the motion mechanism is arranged on the frame body and includes a first motion mechanism and a second motion mechanism connected to each other, at least part of the structure of the first motion mechanism can move in a vertical direction relative to the frame body, the second motion mechanism can rotate relative to the frame body, and the rotation axis of the second motion mechanism extends along a horizontal first direction. When working, the motion mechanism is connected to the probe card, and the auxiliary device can carry the probe card to the probe station conveniently through the roller. After the probe card is driven to move upward a certain distance by the first motion mechanism, the probe card is flipped by the rotation of the second motion mechanism. Such an operation greatly reduces the labor intensity of the operator and can also effectively reduce the occurrence of probe card falling events, thereby reducing the property loss caused by damage to the probe card caused by falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The accompanying drawings are provided to facilitate a better understanding of the present invention and do not constitute an undue limitation of the present invention.

[0031] Figure 1 This is a schematic structural diagram of an auxiliary device for replacing a probe card provided by the first embodiment of the present invention;

[0032] Figure 2 This is a partial structural diagram of an auxiliary device for replacing a probe card provided by the first embodiment of the present invention;

[0033] Figure 3 This is another partial structural diagram of the auxiliary device for replacing the probe card provided by the first embodiment of the present invention;

[0034] Figure 4 This is a structural schematic diagram of an auxiliary device for replacing a probe card provided by the second embodiment of the present invention;

[0035] Figure 5 A schematic diagram of the partial structure of the auxiliary device for replacing the probe card provided by the second embodiment of the present invention;

[0036] Figure 6 This is another partial structural diagram of the auxiliary device for replacing the probe card provided by the second embodiment of the present invention.

[0037] [Description of reference numerals is as follows]:

[0038] 100-frame, 110-frame, 111-support rod, 120-roller, 130-guide part, 140-limiting groove, 200-moving mechanism, 210-first moving mechanism, 211-winding wheel, 212-pulling wire, 213-connecting piece, 214-first handwheel, 215-fixed pulley, 220-second moving mechanism, 221-clamping groove, 222-first chuck, 223-second chuck, 224-threaded connecting piece, 225-rotating shaft, 226-second handwheel, 20-probe card, 21-printed circuit board, 22-probe, 23-probe protection cover, 24-handle. DETAILED DESCRIPTION

[0039] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation methods. The details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. The type, quantity and proportion of each component in actual implementation can be changed arbitrarily, and the component layout type may also be more complicated.

[0040] In addition, each embodiment described below has one or more technical features. However, this does not mean that users of the present invention must implement all technical features in any embodiment at the same time, or that they can only implement some or all technical features in different embodiments separately. In other words, as long as implementation is possible, those skilled in the art can, based on the disclosure of the present invention and depending on design specifications or implementation requirements, selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, thereby increasing the flexibility of the implementation of the present invention.

[0041] As used in this specification, the singular forms "a", "an", and "the" include plural objects, and the plural form "a plurality" includes more than two objects, unless the content clearly indicates otherwise. As used in this specification, the term "or" is generally used in a sense that includes "and / or", unless the content clearly indicates otherwise, and the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium, and it can be internal communication between two elements or an interactive relationship between two elements. Relational terms such as "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly indicate the number of technical features indicated. It should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like, indicating positions or location relationships, are based on the positions or location relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0042] To make the objectives, advantages, and features of the present invention more clearly apparent, the present invention is further described below in detail with reference to the accompanying drawings. It should be noted that the drawings are greatly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention. Identical or similar reference numerals in the drawings represent identical or similar components.

[0043] like Figures 1 to 6 As shown, the auxiliary device for replacing the probe card provided by the present invention includes a frame 100 and a motion mechanism 200. The frame 100 includes a frame body 110 and a roller 120, and the roller 120 is arranged at the bottom of the frame body 110. The motion mechanism 200 is arranged on the frame body 110 and includes a first motion mechanism 210 and a second motion mechanism 220 that are connected to each other. The first motion mechanism 210 is configured to be able to move at least partially in a vertical direction relative to the frame body 110. The second motion mechanism 220 is configured to be able to rotate relative to the frame body 110, and the rotation axis of the second motion mechanism 220 extends along a horizontal first direction. Figure 1 and Figure 4 The double-headed arrow X in FIG. 1 indicates the extension direction of the rotation axis of the second motion mechanism 220 .

[0044] The auxiliary device can be used to replace the probe card 20, where the probe card 20 is, for example, a CP type probe card. An optional operation of replacing the probe card 20 using the auxiliary device includes at least the following steps:

[0045] Step S10: Connect the probe card 20 to the motion mechanism 200, with the front of the probe card 20 facing downward. Those skilled in the art will appreciate that the probe card 20 includes a printed circuit board 21, probes 22, and a probe protection cover 23. The probes 22 are disposed on the printed circuit board 21, and the probe protection cover 23 is also disposed on the printed circuit board 21 and covers the probes 22. The front of the probe card 20 refers to the side of the probe card 20 where the probe protection cover 23 is disposed.

[0046] Step S20 : ​​Using the first motion mechanism 210 to move the probe card 20 upward to a preset position.

[0047] Step S30 : Using the second motion mechanism 220 to rotate the probe card 20 so that the front side of the probe card 20 faces upward.

[0048] Step S40 , disassembling the probe protection cover 23 .

[0049] Step S50 : Utilize the second motion mechanism 220 to rotate the probe card 20 so that the front side of the probe card 20 faces downward.

[0050] Step S60 : Move the rack 100 horizontally to carry the probe card 20 to the probe station.

[0051] Step S70 : Using the first motion mechanism 210 to drive the probe card 20 to move downward, so that the probe card 20 reaches the installation position on the probe table.

[0052] Step S80 , disconnecting the motion mechanism 200 from the probe card 20 .

[0053] That is, in the auxiliary device provided by the embodiment of the present invention, the horizontal movement of the rack 100 replaces the manual horizontal movement of the probe card 20, the up and down movement of the probe card 20 by the first motion mechanism 210 replaces the manual up and down movement of the probe card 20, and the flipping of the probe card 20 by the second motion mechanism 220 replaces the manual flipping of the probe card 20. This greatly reduces the labor intensity of the operator, improves work efficiency, and avoids the risk of the probe card 20 falling due to operator fatigue, failure to firmly hold the probe card 20, etc., further reducing property losses caused by damage due to the falling of the probe card 20.

[0054] The roller 120 is preferably a universal wheel with a brake, so that the auxiliary device can turn during movement and be locked after the auxiliary device reaches the probe station.

[0055] Next, the optional structure of the auxiliary device will be further introduced through specific embodiments.

[0056] <Example 1>

[0057] Figures 1 to 4 FIG. 1 is a schematic diagram showing the structure of the auxiliary device provided in this embodiment. Figures 1 to 4 As shown, in this embodiment, a guide portion 130 extending in a vertical direction is provided on the frame 110. The first movement mechanism 210 includes a slider slidably disposed on and able to slide along the guide portion 130. The second movement mechanism 220 includes a clamping member rotatably connected to the slider.

[0058] When the auxiliary device of this embodiment is used to replace the probe card 20, step S10 refers to connecting the probe card 20 to the clamping member. In step S20, an electrically driven first driving portion (not shown in the figure) can be used to drive the slider to move upward to drive the probe card 20 to move upward until the slider reaches the top of the guide portion 130. In step S70, the first driving portion is used to drive the slider to move downward to drive the probe card 20 to move downward. In steps S30 and S50, an electrically driven second driving portion (not shown in the figure) is used to drive the clamping member to rotate to drive the probe card 20 to rotate. The auxiliary device may include the first driving portion and the second driving portion. The first driving portion and the second driving portion may both be motors. In other examples, the first driving portion may also be any one of a cylinder, a hydraulic cylinder, or an electric push rod.

[0059] In an optional embodiment, the frame 110 is provided with two guide portions 130, and the two guide portions 130 are spaced apart along the first direction. In a specific example, the frame 110 includes two support rods 111, each support rod 111 is spaced apart, and a guide portion 130 is provided on a surface of each support rod 111 facing the other support rod 111, thereby making the two guide portions 130 arranged opposite to each other.

[0060] The first motion mechanism 210 includes two sliders. The second motion mechanism 220 includes two clamps. Each slider is disposed on the guide portion 130 on one of the support rods 111, and each slider is provided with a clamp. Thus, the two clamps are arranged relative to each other.

[0061] When the motion mechanism 200 is connected to the probe card 20 via the two clamping members, the connection positions of the two clamping members and the probe card 20 are symmetrical, thereby improving the force balance of the probe card 20 .

[0062] Alternatively, as Figure 1 As shown, the probe 22 is located at the center of the printed circuit board 21, and the probe protection cover 23 is provided in the area where the probe 22 is located. Therefore, there is a certain distance between the edge of the printed circuit board 21 and the probe protection cover 23. Figure 3 As shown, an arc-shaped clamping groove 221 is formed on the clamping member, and the clamping groove 221 is used to accommodate at least a portion of the printed circuit board 21 located outside the probe protection cover 23, so as to enable the clamping member to clamp the probe card 20.

[0063] The central angle α of the clamping groove 221 is not greater than 180°, preferably 180°. In this way, the clamping grooves 221 of the two clamping members are combined into a ring shape, so that the second motion mechanism 220 clamps the probe card 20 along the entire circumference of the probe card 20.

[0064] Preferably, if Figure 4 As shown, the clamping member includes a first chuck 222, a second chuck 223, and a threaded connector 224. The first chuck 222 and the second chuck 223 are spaced apart in the vertical direction and connected by the threaded connector 224, so that the clamping groove 221 is formed between the first chuck 222 and the second chuck 223. The provision of the threaded connector 224 makes the distance between the first chuck 222 and the second chuck 223 adjustable, thereby making the height of the clamping groove 221 adjustable to accommodate probe cards 20 of different thicknesses. The height of the clamping groove 221 refers to the dimension of the clamping groove 221 in the vertical direction. The threaded connector 224 can specifically be a bolt.

[0065] In an optional embodiment, the first chuck 222 is located below the second chuck 223 and is directly and rotatably connected to the slider. Thus, the operation of clamping the probe card 20 using the clamping member is as follows: after the first chuck 222 and the second chuck 223 are disconnected, the probe card 20 is manually moved to the first chuck 222 of the two clamping members, and then the second chuck 223 is placed on the probe card 20. Finally, the first chuck 222 and the corresponding second chuck 223 are connected using the threaded connector 224.

[0066] Optionally, the guide portion 130 is a slide groove. Preferably, a limiting groove 140 is further provided on the frame 110, and the limiting groove 140 also extends in the vertical direction, is located below the slide groove, and is also connected to the slide groove. The width of the limiting groove 140 decreases in the direction away from the slide groove. In some examples, for example, when the two guide portions 130 are arranged relative to each other, the width of the limiting groove 140 refers to the size of the limiting groove 140 in a second horizontal direction perpendicular to the first direction. By providing the limiting groove 140, when the first driving portion fails or other unexpected circumstances cause the slider to fall downward, the falling distance of the slider can be limited to prevent the probe card 200 connected to the motion mechanism 200 from falling to the surface supporting the frame 100 and causing damage to the probe card 200. It can be understood that when the rack 100 is placed on the ground, the "surface supporting the rack 100" refers to the ground; when the rack 100 is placed on the surface of a device, the "surface supporting the rack 100" refers to the upper surface of the device.

[0067] <Example 2>

[0068] Figures 4 to 6 FIG. 1 is a schematic diagram showing the structure of the auxiliary device provided in this embodiment. Figures 4 to 6 As shown, in this embodiment, the second motion mechanism 220 includes a rotating shaft 225, and the rotating shaft 225 is rotatably disposed on the frame 110. The first motion mechanism 210 includes a winding wheel 211 and a pulling wire 212. The winding wheel 211 is rotatably disposed on the rotating shaft 225, and the pulling wire 212 is partially wound around the outer circumference of the winding wheel 211. The pulling wire 212 has a free end, and the free end of the pulling wire 212 moves in the vertical direction as the winding wheel 211 rotates.

[0069] The rotation axis of the reel 211 preferably extends in the horizontal direction. In some examples, the rotation axis of the reel 211 intersects the rotation axis of the second motion mechanism 220, for example, vertically (e.g., Figure 4 As shown), in other examples, the rotation axis of the winding wheel 211 is parallel to the rotation axis of the second motion mechanism 220.

[0070] When the auxiliary device provided in this embodiment is working, step S10 refers to connecting the free end of the pulling wire 212 to the probe card 20 .

[0071] The probe card 20 further includes a handle 24 . The handle 23 is connected to the printed circuit board 21 , and the handle 24 and the probes 22 are located on two opposite surfaces of the printed circuit board 21 . In other words, the handle 24 is located on the reverse side of the probe card 20 .

[0072] In an optional example, “connecting the free end of the pull wire 212 to the probe card 20” refers to tying the free end of the pull wire 212 to the handle 23 of the probe card 20. In another example, the free end of the pull wire 212 is provided with a connector 213. In this case, “connecting the free end of the pull wire 212 to the probe card 20” refers to connecting the connector 213 to the handle 23. The connector 213 can have any suitable form, such as a hook that can hook the handle 23, or a buckle for easy buckle connection with the handle 23, or a clamping portion for clamping the handle 23. This embodiment does not limit this.

[0073] Optionally, the winding wheel 211 may be connected to a first hand wheel 214 , and the operator controls the rotation of the winding wheel 211 by turning the first hand wheel 214 , thereby driving the free end of the pulling wire 212 to move in a vertical direction.

[0074] When the free end of the pulling wire 212 moves to the point where the probe card 20 abuts against the rotating shaft 225, any suitable method, such as a locking member (not shown), can be used to lock the relative position of the probe card 20 and the rotating shaft 225, so that the probe card 20 and the rotating shaft 225 remain relatively stationary. At this time, the first hand wheel 214 cannot rotate, and the free end of the pulling wire 212 cannot move in the vertical direction. The locking member can be, for example, a snap-fit ​​structure that securely connects the probe card 20 to the rotating shaft 225 through a snap-fit ​​connection, or the locking member can be a rope that ties the probe card 20 to the rotating shaft 225. Then, step S30 and subsequent steps can be performed.

[0075] Optionally, the rotating shaft 225 is connected to an electric drive unit, such as a motor, so that the electric drive unit drives the rotating shaft to rotate, thereby driving the probe card 20 to rotate. Alternatively, a second hand wheel 226 is provided on the rotating shaft 225, and the operator rotates the second hand wheel 226 to drive the rotating shaft 225 to rotate.

[0076] In the prior art, the probe card 20 includes two handles 23, and the two handles 23 are arranged at equal intervals around the axis of the probe card 20. In this regard, the first motion mechanism 210 also includes a fixed pulley 215, which is connected to the rotating shaft 225. There are two or more fixed pulleys 215, which are symmetrically distributed on opposite sides of the winding wheel 211. The fixed pulley 215 on one side of the winding wheel 211 is referred to as the first fixed pulley, and the fixed pulley 215 on the other side of the winding wheel 211 is referred to as the second fixed pulley. There are two pulling wires 212, one of which is the first pulling wire and the other is the second pulling wire. The first puller wire is partially wound around the outer circumference of the first fixed pulley, and the second puller wire is partially wound around the outer circumference of the second fixed pulley. The free ends of the first and second puller wires move vertically in sync with the rotation of the winding wheel 211. During operation, the free end of the first puller wire is connected to one handle 23 of the probe card 20, and the free end of the second puller wire is connected to the other handle 23 of the probe card 20, thereby improving the force balance of the probe card 20.

[0077] While the present invention is disclosed above, it is not limited thereto. Persons skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims and their equivalents, the present invention is intended to encompass such modifications and variations.

Claims

1. An auxiliary device for replacing a probe card, characterized in that: It includes a frame and a motion mechanism; the frame includes a frame body and rollers arranged at the bottom of the frame body; the motion mechanism is arranged on the frame body and includes a first motion mechanism and a second motion mechanism connected to each other, the first motion mechanism is configured to be able to move at least partially in a vertical direction relative to the frame body, the second motion mechanism is configured to be able to rotate relative to the frame body, and the rotation axis of the second motion mechanism extends along a horizontal first direction.

2. The auxiliary device for replacing a probe card according to claim 1, wherein: The frame is provided with a guide portion extending in a vertical direction; The first motion mechanism includes a slider, which is slidably disposed on the guide portion and can slide along the guide portion; the second motion mechanism includes a clamping member, which is rotatably connected to the slider.

3. The auxiliary device for replacing a probe card according to claim 2, wherein: The guide portion is a slide groove; The frame is further provided with a limiting groove extending in a vertical direction. The limiting groove is arranged at the lower end of the sliding groove and is connected with the sliding groove. The width of the limiting groove decreases in a direction away from the sliding groove.

4. The auxiliary device for replacing a probe card according to claim 2, wherein: There are two guide portions, and the two guide portions are arranged at intervals along the first direction; The first motion mechanism includes two sliders, and the two sliders are respectively arranged on the two guide parts; The second movement mechanism includes two clamping members, each of which is provided on one of the sliders, and the two clamping members are arranged opposite to each other.

5. The auxiliary device for replacing a probe card according to claim 2, wherein: The clamping member is provided with a clamping groove, which is arc-shaped, and the central angle corresponding to the clamping groove is less than or equal to 180 degrees.

6. The auxiliary device for replacing a probe card according to claim 5, wherein: The clamping member includes a first chuck, a second chuck and a threaded connector; the first chuck is rotatably connected to the slider, the second chuck is arranged above the first chuck, and the clamping groove is formed between the second chuck and the first chuck; the threaded connector is used to connect the first chuck and the second chuck.

7. The auxiliary device for replacing a probe card according to claim 2, wherein: It also includes a first driving part and a second driving part, the first driving part is connected to the slider and is configured to drive the slider to move along the guide part; the second driving part is connected to the second motion mechanism and is configured to drive the clamping member to rotate.

8. The auxiliary device for replacing a probe card according to claim 1, wherein: The second motion mechanism includes a rotating shaft, and the rotating shaft is rotatably connected to the frame; The first movement mechanism includes a winding wheel and a pulling wire, and the winding wheel is rotatably arranged on the rotating shaft; the pulling wire is partially wound around the outer circumference of the winding wheel, and the pulling wire also has a free end, and the free end of the pulling wire moves in the vertical direction as the winding wheel rotates.

9. The auxiliary device for replacing a probe card according to claim 8, wherein: The first motion mechanism further includes a first fixed pulley and a second fixed pulley, wherein the first fixed pulley and the second fixed pulley are both connected to the rotating shaft and symmetrically distributed on opposite sides of the winding wheel; There are two pulling wires, namely a first pulling wire and a second pulling wire. The first pulling wire is partially wound around the outer circumference of the first fixed pulley, and the second pulling wire is partially wound around the outer circumference of the second fixed pulley; the free ends of the first pulling wire and the second pulling wire move synchronously in the vertical direction with the rotation of the winding wheel.

10. The auxiliary device for replacing a probe card according to claim 8 or 9, characterized in that: The auxiliary device further includes a locking member, the locking member being used to prevent the free end of the pull wire from moving in a vertical direction; and / or, The first movement mechanism further includes a connecting member, which is arranged at the free end of the pulling wire.

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