Vacuum magnet adjusting mechanism

Abstract

The utility model belongs to the field of vacuum coating machines, and particularly relates to a vacuum magnet adjusting mechanism which comprises a transparent plate, a magnet adjusting mechanism body is installed in the transparent plate and comprises a movable disc and a connecting disc, a vacuum corrugated pipe is fixedly connected between the movable disc and the connecting disc, and the movable disc and the connecting disc are fixedly connected through the vacuum corrugated pipe. A small magnetic fluid is mounted in the vacuum corrugated pipe; the push sleeve pushes the connecting sleeve to move towards the back side, the connecting sleeve pushes the connecting sleeve and the small magnetic fluid to move, the small magnetic fluid moves to drive the connecting seat and the adjusting rod to move until the adjusting rod is in contact with a magnet in the vacuum coating equipment, and then the push sleeve is rotated to enable the adjusting rod to adjust a magnet screw. The problem that the position of the magnet in the vacuum coating machine is generally adjusted by firstly dismounting an observation window and then adjusting the position of the magnet, so that the vacuum in the vacuum coating machine is broken is solved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating machines, in particular to a vacuum magnet adjustment mechanism. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. It includes many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and ion beam sputtering, etc.

[0003] The vacuum magnet adjustment mechanism is used to adjust the position of the magnet in the vacuum coating machine. As the use time increases, the magnet may be affected by factors such as wear, corrosion or weakening of magnetism, resulting in a decrease in its performance. In this case, it is necessary to adjust or replace the magnet.

[0004] Chinese patent application publication number CN219547086U discloses a vacuum coating machine with a dust collection function, comprising a vacuum coating machine body, a rotating plate mounted inside the vacuum coating machine body, a support column fixedly mounted in the middle of the rotating plate, a bracket fixedly mounted in the middle of the rotating plate away from the support column, a motor mounted at the bottom end of the vacuum coating machine body, a hollow box fixedly mounted at the rear end of the vacuum coating machine body, a storage box disposed inside the hollow box, and a vacuum cleaner fixedly mounted at the top end of the hollow box. In the present invention, the vacuum cleaner, the vacuum tube, and the vacuum head are configured so that when the vacuum coating machine body is in use, dust inside the vacuum coating machine body can be removed by the vacuum cleaner, thereby cleaning the dust inside the vacuum coating machine body, preventing dust from adhering to the surface of the material and affecting the coating of the material, and achieving a better coating effect when the material is being coated. Although this method can achieve dust removal in the vacuum coating machine, the actual application of the vacuum coating machine is to ensure the existence of a vacuum environment. The adjustment of the position of the magnet in the vacuum machine is generally carried out by removing the observation window first and then adjusting the position of the magnet. This will cause the vacuum in the vacuum coating machine to be broken, so that it takes a long time to maintain. Utility Model Content

[0005] In order to make up for the shortcomings of the existing technology, the observation window is generally removed first and then the position of the magnet is adjusted, which may cause the vacuum in the vacuum coating machine to be broken. The utility model proposes a vacuum magnet adjustment mechanism.

[0006] The technical solution adopted by the utility model to solve the technical problem is: a vacuum magnet adjustment mechanism, comprising a transparent plate, wherein the magnet adjustment mechanism is installed inside the transparent plate;

[0007] The magnet adjustment mechanism includes a movable disk and a connecting disk, a vacuum bellows is fixedly connected between the movable disk and the connecting disk, a small magnetic fluid is installed inside the vacuum bellows, the rear end of the small magnetic fluid is fixedly connected to a rear insertion rod, a connecting seat is installed on the surface of the rear insertion rod, an adjustment rod is fixedly connected to the back side of the connecting seat, the front end of the small magnetic fluid is fixedly connected to a front insertion rod, and the front insertion rod is rotatably connected to the inside of the movable disk.

[0008] Preferably, a reset mechanism is installed on the front side of the connecting disk, and the reset mechanism includes a guide rod. There are two guide rods fixed to the front side of the connecting disk. The surface of the guide rod is sleeved with a reset spring. The front side of the reset spring is fixedly connected to a push plate. The push plate is movably connected to the surface of the guide rod, and the front side of the push plate is movably connected to the back side of the movable disk.

[0009] Preferably, a connecting sleeve is installed on the surface of the front insertion rod, and a front socket is opened in the inner cavity of the connecting sleeve. The interior of the front socket is plug-connected to the surface of the front insertion rod, and a front positioning bolt is threadedly connected to the bottom of the inner cavity of the connecting sleeve. The front insertion rod and the front socket are locked by the front positioning bolt, and a push sleeve is fixedly connected to the front side of the connecting sleeve.

[0010] Preferably, a connecting seat is installed on the surface of the rear insertion rod, an adjustment rod is fixedly connected to the back side of the connecting seat, a rear socket is opened in the inner cavity of the connecting seat, the inner cavity of the rear socket is plug-connected to the surface of the rear insertion rod, and a rear positioning bolt is threadedly connected to the bottom of the inner cavity of the connecting seat, and the rear insertion rod and the rear socket are locked by the rear positioning bolt.

[0011] Preferably, a rear sealing ring is fixedly connected to the back side of the inner cavity of the connecting disk, and the back side of the rear sealing ring is tightly fitted with the front side of the transparent plate. The front side of the small magnetic fluid is fixedly connected to the front sealing ring, and the front side of the front sealing ring is tightly fitted with the back side of the movable disk.

[0012] Preferably, the inner cavity of the connecting disk is threadedly connected with connecting bolts, and the connecting bolts are provided in plurality and distributed in a circumferential manner inside the connecting disk. The back side of the connecting disk is connected to the front side of the transparent plate through the connecting bolts.

[0013] Preferably, circular grooves are provided on both sides of the movable disk, and the surface of the movable disk is movably connected to the surface of the guide rod through the circular grooves.

[0014] The utility model is beneficial in that:

[0015] 1. The utility model pushes the connecting sleeve to move toward the back side through the pushing sleeve, and the connecting sleeve pushes the connecting sleeve and the small magnetic fluid to move. The movement of the small magnetic fluid drives the connecting seat and the adjusting rod to move until the adjusting rod contacts the magnet in the vacuum coating equipment, and then the pushing sleeve is rotated to make the adjusting rod adjust the magnet screw, which solves the problem of adjusting the position of the magnet in the vacuum coating machine. Generally, the observation window is removed first, and then the position of the magnet is adjusted, which will cause the vacuum in the vacuum coating machine to be broken.

[0016] 2. The utility model is installed in front of the vacuum coating machine through a transparent plate. A vacuum bellows and a small magnetic fluid are set in the transparent plate to realize the function of a flexible screwdriver that can be extended and rotated in the transparent plate. On the one hand, the vacuum of the vacuum coating machine is ensured, and on the other hand, the magnet in the vacuum coating machine can be adjusted without breaking the vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 It is a structural diagram of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the movable disk and the connecting disk of the utility model;

[0020] Figure 3 It is a cross-sectional view of the movable disk and connecting disk structure of the utility model;

[0021] Figure 4 This is a schematic diagram of the exploded connection of the connecting sleeve and the front insertion rod structure of the present invention;

[0022] Figure 5 This is a schematic diagram of the exploded connection of the connecting seat and the rear insertion rod structure of the present invention;

[0023] Figure 6 This is a back view of the connecting plate structure of the present invention.

[0024] In the figure: 1. transparent plate; 2. magnet adjustment mechanism; 21. movable disk; 22. connecting disk; 23. adjusting rod; 24. connecting bolt; 25. pushing sleeve; 26. connecting sleeve; 27. front plug rod; 28. front sealing ring; 29. ​​vacuum bellows; 210. rear sealing ring; 211. small magnetic fluid; 212. rear plug rod; 213. front plug hole; 214. rear plug hole; 215. front positioning bolt; 216. connecting seat; 217. rear positioning bolt; 3. reset mechanism; 31. guide rod; 32. reset spring; 33. pushing plate. DETAILED DESCRIPTION

[0025] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] The following is combined with Figure 1-6 To further explain this application,

[0027] The embodiment of the present application discloses a vacuum magnet adjustment mechanism. Figure 1 and Figure 6 A vacuum magnet adjustment mechanism includes a transparent plate 1, a magnet adjustment mechanism 2 is installed inside the transparent plate 1, and the magnet adjustment mechanism 2 is arranged in multiple groups, and each group of magnet adjustment mechanisms 2 corresponds to the position of the magnet in the vacuum coating machine;

[0028] Reference Figure 2 and Figure 3 The magnet adjustment mechanism 2 includes a movable disk 21 and a connecting disk 22, and a vacuum bellows 29 is fixedly connected between the movable disk 21 and the connecting disk 22. The vacuum bellows 29 can adopt an ISO63-150 flexible bellows. The movable disk 21 is located on the left side of the vacuum bellows 29, and the connecting disk 22 is located on the right side of the vacuum bellows 29. A small magnetic fluid 211 is installed inside the vacuum bellows 29, and the rear end of the small magnetic fluid 211 is fixedly connected to the rear insertion rod 212. The surface of the rear insertion rod 212 is installed with a connecting seat 216, and the back side of the connecting seat 216 is fixedly connected to the adjustment rod 23. The front end of the small magnetic fluid 211 is fixedly connected to the front insertion rod 27, and the front insertion rod 27 is rotatably connected to the inside of the movable disk 21. The vacuum bellows 29 and the small magnetic fluid 211 are provided in the transparent plate 1, so as to realize the flexible screwdriver function that can be telescopically rotated in the transparent plate 1, and then the position of the magnet can be adjusted without breaking the vacuum.

[0029] Reference Figure 2 and Figure 6The front side of the connecting plate 22 is equipped with a reset mechanism 3, which is attached Figure 2 The number shown is two groups, and they are respectively located between the movable disk 21 and the connecting disk 22, and are located on the surface of the vacuum bellows 29. The reset mechanism 3 includes a guide rod 31, and the guide rod 31 has two guide rods 31 and is fixed to the front side of the connecting disk 22. The surface of the guide rod 31 is provided with a reset spring 32, and the reset spring 32 is wound around the surface of the guide rod 31 in multiple turns. The front side of the reset spring 32 is fixedly connected to a push plate 33, which is a disc-type structure. The push plate 33 is movably connected to the surface of the guide rod 31, and the front side of the push plate 33 is movably connected to the back side of the movable disk 21. The reset spring 32 is provided on the surface of the guide rod 31. When the push plate 33 is forced to move, the reset spring 32 is compressed and deformed, and then the moving position of the movable disk 21 can be absorbed. At the same time, the deformation can be restored to restore the movable disk 21 to its original position.

[0030] Reference Figure 3 and Figure 4 The front end 213 of the front end 213 is connected to the front end of the front rod 27 by screw thread, and the front end 215 of the front end 213 is connected to the front end of the front rod 27 by screw thread.

[0031] Reference Figure 3 and Figure 5 The rear plug rod 212 is provided with a connecting seat 216 on the surface, and the adjusting rod 23 is fixedly connected to the back side of the connecting seat 216. The inner cavity of the connecting seat 216 is provided with a rear insertion hole 214. The inner cavity of the rear insertion hole 214 is plug-connected to the surface of the rear plug rod 212. The bottom of the inner cavity of the connecting seat 216 is threadedly connected with a rear positioning bolt 217, and the connecting seat 216 is also provided with a notch-shaped setting, and the rear positioning bolt 217 fits into the notch. The rear plug rod 212 and the rear insertion hole 214 are locked by the rear positioning bolt 217. The rear insertion hole 214 opened in the connecting seat 216 allows the rear plug rod 212 to be smoothly inserted into the interior of the connecting seat 216, thereby realizing the installation of the adjusting rod 23. At the same time, the setting of the rear positioning bolt 217 can firmly connect the connecting seat 216 and the rear plug rod 212.

[0032] Reference Figure 3 and Figure 6 , the back side of the inner cavity of the connecting disk 22 is fixedly connected with a rear sealing ring 210, and the back side of the rear sealing ring 210 is tightly fitted with the front side of the transparent plate 1. The rear sealing ring 210 is circular and is arranged in a manner that fits the inside of the connecting disk 22. The front side of the small magnetic fluid 211 is fixedly connected with a front sealing ring 28, and the front side of the front sealing ring 28 is tightly fitted with the back side of the movable disk 21. The distance between the front sealing ring 28 is smaller than that between the rear sealing ring 210, which is used to ensure the sealing between the structures. The sealing of the connection between the connecting disk 22 and the transparent plate 1 is achieved by the setting of the rear sealing ring 210, and the sealing between the small magnetic fluid 211 and the movable disk 21 is achieved by the setting of the front sealing ring 28, thereby achieving a double sealing effect to prevent gas leakage;

[0033] Reference Figure 2 and Figure 3 The inner cavity of the connecting disk 22 is threadedly connected with a connecting bolt 24, and the length of the connecting bolt 24 is greater than the diameter of the connecting disk 22, and a washer is provided on one side of the connecting bolt 24. The number of the connecting bolts 24 is multiple and distributed around the interior of the connecting disk 22. The back side of the connecting disk 22 is connected to the front side of the transparent plate 1 through the connecting bolts 24. Through the setting of the connecting bolts 24, the connecting disk 22 can be firmly connected to the front side of the transparent plate 1, and the magnet adjustment mechanism can be installed and removed according to the actual position of the magnet in the vacuum equipment.

[0034] Reference Figure 2 and Figure 3 , both sides of the movable disk 21 are provided with circular grooves, as shown in the attached Figure 2 As shown, the opening diameter of the circular groove is larger than the diameter of the guide rod 31, and the guide rod 31 is fitted inside the circular groove, and the surface of the movable disk 21 is movably connected to the surface of the guide rod 31 through the circular groove. The circular groove is opened on the surface of the movable disk 21 to ensure that the movable disk 21 slides smoothly on the surface of the guide rod 31. At the same time, when the movable disk 21 is fine-tuned up, down, left, and right, the position of the movable disk 21 is fine-tuned to provide moving space.

[0035] Working principle: First, the connecting sleeve 26 is put on the surface of the connecting sleeve 26 through the pushing sleeve 25 until the front socket 213 is aligned with the front insertion rod 27, and then the connecting sleeve 26 and the front insertion rod 27 are firmly connected through the front positioning bolt 215. Similarly, the rear insertion rod 212 and the connecting seat 216 are firmly connected through the rear positioning bolt 217. The adjustment rod 23 is located on the vacuum side in the vacuum equipment, and the pushing sleeve 25 is located on the atmosphere side. Then, the connecting sleeve 26 is pushed to move toward the back side by the pushing sleeve 25, and the front insertion rod 27 and the movable disk 21 are moved by the pushing of the connecting sleeve 26. The vacuum bellows 29 is compressed and deformed by the movement of the movable disk 21. At the same time, the movable disk 21 slides on the surface of the guide rod 31, and the push plate 33 is driven to move by the movement of the movable disk 21, and the push plate 33 is pushed in The surface of the guide rod 31 slides, and the return spring 32 is compressed and deformed by the movement of the push plate 33. Subsequently, the small magnetic fluid 211, the connecting seat 216 and the adjustment rod 23 are driven to move by the movement of the movable disk 21 until the adjustment rod 23 contacts the magnet in the vacuum coating equipment. Then the push sleeve 25 is rotated to adjust the magnet screw by the adjustment rod 23. Here, the small magnetic fluid 211 utilizes the response characteristics of the magnetic liquid to the magnetic field. When the magnetic liquid is injected into the gap of the magnetic circuit composed of high-performance magnets, pole shoes with good magnetic conductivity, and the shaft, under the action of the magnetic field, the magnetic liquid forms several liquid O-rings in the gap. When affected by the pressure difference, the magnetic liquid moves slightly in the non-uniform magnetic field, and the magnetic force generated to counteract the pressure difference is generated, thereby achieving a new balance and playing a sealing role.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention as claimed.

Claims

1. A vacuum magnet adjustment mechanism, characterized in that: It comprises a transparent plate (1), wherein a magnet adjustment mechanism (2) is installed inside the transparent plate (1); The magnet adjustment mechanism (2) comprises a movable disk (21) and a connecting disk (22); a vacuum bellows (29) is fixedly connected between the movable disk (21) and the connecting disk (22); a small magnetic fluid (211) is installed inside the vacuum bellows (29); a rear end of the small magnetic fluid (211) is fixedly connected to a rear insertion rod (212); a connecting seat (216) is installed on the surface of the rear insertion rod (212); an adjustment rod (23) is fixedly connected to the back side of the connecting seat (216); a front end of the small magnetic fluid (211) is fixedly connected to a front insertion rod (27); and the front insertion rod (27) is rotatably connected to the inside of the movable disk (21).

2. A vacuum magnet adjustment mechanism according to claim 1, characterized in that: A reset mechanism (3) is installed on the front side of the connecting disk (22), and the reset mechanism (3) includes two guide rods (31). The guide rods (31) are fixed to the front side of the connecting disk (22). A reset spring (32) is sleeved on the surface of the guide rod (31). The front side of the reset spring (32) is fixedly connected to a push plate (33). The push plate (33) is movably connected to the surface of the guide rod (31), and the front side of the push plate (33) is movably connected to the back side of the movable disk (21).

3. The vacuum magnet adjustment mechanism according to claim 1, characterized in that: A connecting sleeve (26) is installed on the surface of the front insertion rod (27), and a front insertion hole (213) is opened in the inner cavity of the connecting sleeve (26). The interior of the front insertion hole (213) is plug-connected with the surface of the front insertion rod (27). The bottom of the inner cavity of the connecting sleeve (26) is threadedly connected with a front positioning bolt (215). The front insertion rod (27) and the front insertion hole (213) are locked by the front positioning bolt (215). The front side of the connecting sleeve (26) is fixedly connected with a pushing sleeve (25).

4. The vacuum magnet adjustment mechanism according to claim 1, characterized in that: A connecting seat (216) is installed on the surface of the rear insertion rod (212), and an adjusting rod (23) is fixedly connected to the back side of the connecting seat (216). A rear insertion hole (214) is opened in the inner cavity of the connecting seat (216), and the inner cavity of the rear insertion hole (214) is plug-connected with the surface of the rear insertion rod (212). A rear positioning bolt (217) is threadedly connected to the bottom of the inner cavity of the connecting seat (216), and the rear insertion rod (212) and the rear insertion hole (214) are locked by the rear positioning bolt (217).

5. The vacuum magnet adjustment mechanism according to claim 1, characterized in that: The back side of the inner cavity of the connecting disk (22) is fixedly connected to a rear sealing ring (210), and the back side of the rear sealing ring (210) is tightly fitted with the front side of the transparent plate (1). The front side of the small magnetic fluid (211) is fixedly connected to a front sealing ring (28), and the front side of the front sealing ring (28) is tightly fitted with the back side of the movable disk (21).

6. The vacuum magnet adjustment mechanism according to claim 1, characterized in that: The inner cavity of the connecting disk (22) is threadedly connected with a connecting bolt (24), and the connecting bolts (24) are arranged in a plurality and distributed in a circumferential manner inside the connecting disk (22). The back side of the connecting disk (22) is connected to the front side of the transparent plate (1) through the connecting bolts (24).

7. The vacuum magnet adjustment mechanism according to claim 1, characterized in that: Circular grooves are provided on both sides of the movable disk (21), and the surface of the movable disk (21) is movably connected to the surface of the guide rod (31) through the circular grooves.

Images