Evaporation crucible and evaporation device

Abstract

The utility model provides an evaporation crucible and an evaporation device, the evaporation crucible comprises a crucible body, the crucible body is an inverted cone frustum, the crucible body comprises a side wall part and a bottom part arranged at the lower end of the side wall part, and the evaporation crucible also comprises a plurality of support legs arranged at one side, far away from the side wall part, of the bottom part; the supports are used for supporting the crucible body so that the bottom of the crucible body can be suspended when the crucible body is placed, a plurality of protruding blocks are arranged on the edge of the lower end of the crucible body, and the upper edge face of the crucible body inclines inwards to form an inclined face. According to the evaporation crucible, the supporting feet and the protruding blocks are arranged on the crucible body, when the crucible body is placed on the water-cooling crucible base, the whole crucible body is suspended, heat conducted to the water-cooling crucible base in the evaporation process is reduced, energy consumed by evaporation is lower, in addition, the upper edge face of the crucible body is obliquely arranged to form the inclined face inclining inwards, and therefore the heat conduction efficiency is improved. In this way, the evaporation angle of evaporation is increased, meanwhile, accumulation of the target materials on the inclined face is reduced, the target materials are prevented from overflowing outwards, and therefore waste of the target materials is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an evaporation crucible and an evaporation device. Background Art

[0002] Evaporation is a crucial step in the manufacturing process of light-emitting diodes (LEDs). This involves heating a target material within a vacuum chamber, causing it to sublime or melt and vaporize into a vapor that is then deposited onto the substrate through apertures in a photomask. In traditional LED evaporation equipment, the crucible for depositing precious metals directly contacts a water-cooled crucible base. Cooling water flows beneath the crater. This cooling effect requires higher energy levels to heat the precious metals.

[0003] Defects or shortcomings of existing technologies:

[0004] 1. When evaporating a target material with a high melting point, if the cooling is too fast, the target material will not dissolve well, the dissolution power will increase, and the life of the electron gun will be shortened;

[0005] 2. The upper edge of the crucible is a horizontal structure, which will block part of the evaporation angle and reduce the uniformity of the deposited film. After a long period of evaporation, a thick deposited layer (such as Pt) will be produced in the blocked area, further affecting the uniformity of the film.

[0006] 3. When the Pt in the crucible barrier area is dissolved, the Pt is more likely to run to the upper edge of the crucible, resulting in Pt waste and greatly increasing the risk of the crucible getting stuck when rotating, thereby shortening the crucible life. Utility Model Content

[0007] In view of the deficiencies in the prior art, the purpose of the present invention is to provide an evaporation crucible, aiming to solve the technical problems described in the background technology.

[0008] In order to achieve the above purpose, the present invention is implemented through the following technical solutions:

[0009] A evaporation crucible includes a crucible body, which is an inverted frustum. The crucible body includes a side wall portion and a bottom portion arranged at the lower end of the side wall portion. The evaporation crucible also includes a plurality of legs arranged on the side of the bottom away from the side wall portion. The plurality of legs are used to support the crucible body so that its bottom is suspended when placed. The lower end edge of the crucible body is provided with a plurality of protrusions, and the side wall portion is provided with an inclined surface away from the bottom end, and the inclined surface is inclined toward the middle of the side wall portion.

[0010] Compared with the prior art, the beneficial effects of the present invention are: by arranging multiple legs at the bottom of the crucible body, the bottom of the crucible body is suspended in the air, thereby avoiding direct contact between the bottom and the water-cooled crucible seat, and by providing a protrusion at the lower end edge of the crucible body, the side wall of the crucible body is avoided from direct contact with the water-cooled crucible seat, thereby reducing the heat taken away by the crucible seat, reducing the dissolution power, and thus improving the service life of the electron gun; in addition, the upper edge of the crucible body is set as a slope, which increases the evaporation angle during evaporation, thereby improving the uniformity of the evaporation layer, and at the same time, the inclined slope reduces the accumulation of target material on the upper edge, thereby reducing the waste of target material, and also reduces the problem of target material overflowing to the side and causing the crucible body to be stuck.

[0011] According to one aspect of the above technical solution, the side of the support foot away from the bottom is arranged in a semicircular shape.

[0012] According to one aspect of the above technical solution, a plurality of the legs are arranged in a circular array.

[0013] According to one aspect of the above technical solution, the protrusion includes a supporting portion provided at one side of the bottom portion, and an abutting portion connected to the side wall portion.

[0014] According to one aspect of the above technical solution, a plurality of the protrusions are arranged in an array, and each of the protrusions is arranged alternately with each of the legs.

[0015] According to one aspect of the above technical solution, the lowest point of the support portion on a side away from the bottom and the lowest point of the support leg on a side away from the bottom are located in the same plane.

[0016] According to one aspect of the above technical solution, the inclined surface forms an angle of 30 degrees with the highest plane of the crucible body.

[0017] The utility model also provides an evaporation device, comprising the above-mentioned evaporation crucible and a water-cooled crucible seat for storing the evaporation crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of an evaporation crucible in one embodiment of the present invention;

[0019] Figure 2 This is a bottom view of an evaporation crucible in one embodiment of the present invention;

[0020] Figure 3 This is a cross-sectional view of a crucible body in one embodiment of the present invention;

[0021] Figure 4 This is a partial cross-sectional view of an evaporation crucible device in one embodiment of the present invention;

[0022] Explanation of the main component symbols: 1-evaporation crucible, 11-crucible body, 111-inclined surface, 112-side wall, 113-bottom, 12-support leg, 13-bump, 131-support portion, 132-abutting portion, 2-water-cooled crucible seat;

[0023] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0024] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The drawings illustrate several embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0025] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0027] See Figures 1 to 2 An evaporation crucible provided by an embodiment of the present invention includes a crucible body 11, wherein the crucible body 11 is an inverted frustum, the crucible body 11 includes a side wall portion 112, and a bottom 113 arranged at the lower end of the side wall portion 112, the evaporation crucible 1 also includes a plurality of legs 12 arranged on the side of the bottom 113 away from the side wall portion 112, the plurality of legs 12 are used to support the crucible body 11 so that the bottom 113 is suspended when it is placed, the lower end edge of the crucible body 11 is provided with a plurality of protrusions, the side wall portion 112 is provided with an inclined surface 111 at the end away from the bottom 113, and the inclined surface is inclined toward the middle of the side wall portion 112.

[0028] See Figure 2, multiple legs 12 can be connected end to end to form an integral annular leg 12, or multiple legs 12 can be arranged in a circular array at the bottom 113 of the crucible body 11. In order to ensure the stability of the crucible body 11 when placed and reduce the contact area between the legs 12 and the water-cooled crucible seat 2, in this embodiment, multiple legs 12 are selected to be arranged in a circular array at the bottom 113 of the crucible body 11, and the number of legs 12 is three; preferably, multiple legs 12 are arranged in a circular array. It should be noted that, in order to further reduce the contact area between the legs 12 and the water-cooled crucible seat 2, the legs 12 are arranged in a semicircular shape on the side away from the bottom 113, and one circular end is in contact with the water-cooled crucible seat 2.

[0029] See Figure 4 Usually, the crucible body 11 is placed in the middle of the water-cooled crucible seat 2. In order to prevent the side wall 112 of the crucible body 11 from contacting the water-cooled crucible seat 2 after the crucible body 11 is placed in the water-cooled crucible seat 2, resulting in heat loss, a plurality of protrusions 13 are provided on the lower end edge of the crucible body 11. By arranging the protrusions 13 on the side of the crucible body 11, the side wall 112 of the crucible body 11 is separated from the water-cooled crucible seat 2; the protrusions 13 are arranged in a ring array, so that the crucible body 11 and the water-cooled crucible seat 2 are evenly spaced, ensuring uniform internal heating during evaporation, and at the same time eliminating the trouble of adjusting the spacing when the crucible body 11 is placed in the water-cooled crucible seat 2.

[0030] See Figure 2 The protrusions 13 may be entirely disposed on the sidewalls 112 of the crucible body 11, or may be disposed at the lower edge of the crucible body 11. Specifically, half of the protrusions 13 are connected to the sidewalls 112, and the other half are connected to the bottom 113. In this embodiment, in order to increase the structural strength and stability of the support provided by the bottom 113 of the crucible body 11, the protrusions 13 are fixed to the lower edge of the crucible body 11. Preferably, the protrusions 13 include a support portion 131 disposed on one side of the bottom 113, and a support portion 132 connected to the sidewalls 112. It should be noted that, in order to reduce the contact area between the protrusions 13 and the water-cooled crucible seat 2, the protrusions 13 are thermally insulated in the same manner as the legs 12, and are also provided in three numbers, arranged in a circular array at the lower edge of the crucible body 11. Specifically, a plurality of the legs 12 are arranged in a circular array.

[0031] Furthermore, a plurality of the protrusions 13 are arranged in an array, and each of the protrusions 13 is staggered with each of the legs 12. By staggering the protrusions 13, they cooperate with the support so that the crucible body 11 is more stable when placed. Furthermore, the lowest point of the support portion 131 away from the bottom 113 and the lowest point of the leg 12 away from the bottom 113 are located in the same plane.

[0032] See Figure 3 In this embodiment, the upper open end surface of the crucible body 11 is tilted inward to form a bevel 111. This design increases the evaporation angle of the crucible body 11 during vapor deposition, thereby making the evaporated film layer more uniform; and the inclined setting prevents the target material from accumulating on the bevel 111 after vapor deposition, causing waste of target material. At the same time, the accumulated target material will affect the uniformity of the next vapor deposition. It should be noted that the inclination angle of the bevel 111 can be 15° to 45°, among which 30° is the best effect; preferably, the bevel 111 forms an angle of 30 degrees with the highest plane of the crucible body 11. In addition, the bevel 111 prevents the target material from accumulating and then melting again and overflowing to the edge of the side wall 112 of the crucible body 11, causing the crucible body 11 to get stuck when rotating.

[0033] See Figure 4 The present invention also provides an evaporation device, comprising the above-mentioned evaporation crucible 1, and also comprising a water-cooled crucible seat 2 for storing the evaporation crucible 1. The crucible body 11 is separated from the water-cooled crucible seat 2 by providing support legs 12 and protrusions 13, so as to prevent the heat used to melt the target material from being transferred to the water-cooled crucible seat 2 through the evaporation crucible 1 during evaporation, so that the target material in the evaporation crucible 1 is easier to melt, the energy consumption of the evaporation process is lower, and the service life of the electron gun is improved.

[0034] In summary, the evaporation crucible in the above-mentioned embodiment of the present invention includes a crucible body and support legs and protrusions arranged on the crucible body. The bottom of the crucible body is suspended in the air by arranging a bracket, so that when it is placed on the water-cooled crucible seat in the evaporation device, the bottom of the crucible body can be separated from the water-cooled crucible seat. In addition, by arranging the protrusions, the side wall of the crucible body is prevented from contacting the water-cooled crucible seat. Through the spacing effect of the support legs and the protrusions, when the crucible body is placed on the water-cooled crucible seat, the whole is suspended in the air. In this way, during the evaporation process, the heat used to melt the evaporation target material will not be conducted to the water-cooled crucible seat in large quantities, reducing heat waste and making evaporation energy consumption lower; in addition, the upper edge surface of the crucible body is inclined to form an inclined surface, which increases the evaporation angle and improves the uniformity of the evaporation film layer. Moreover, the inclined inclined surface reduces the accumulation and overflow of the target material, thereby reducing the waste of the target material.

[0035] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0036] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the spirit of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A evaporation crucible, comprising a crucible body, characterized in that: The crucible body is an inverted frustum, comprising a side wall portion and a bottom portion arranged at the lower end of the side wall portion. The evaporation crucible further comprises a plurality of legs arranged on the side of the bottom portion away from the side wall portion. The plurality of legs are used to support the crucible body so that its bottom is suspended in the air when placed. The lower end edge of the crucible body is provided with a plurality of protrusions, and the side wall portion is provided with an inclined surface away from the bottom end, and the inclined surface is inclined toward the middle of the side wall portion.

2. The evaporation crucible according to claim 1, characterized in that The side of the support foot away from the bottom is arranged in a semicircular shape.

3. The evaporation crucible according to claim 1, characterized in that A plurality of the legs are arranged in a circular array.

4. The evaporation crucible according to claim 1, characterized in that The protrusion includes a supporting portion arranged at one side of the bottom portion, and a supporting portion connected to the side wall portion.

5. The evaporation crucible according to claim 4, characterized in that: A plurality of the protrusions are arranged in an array, and each of the protrusions is arranged alternately with each of the legs.

6. The evaporation crucible according to claim 5, characterized in that The lowest point of the support portion on a side away from the bottom and the lowest point of the support leg on a side away from the bottom are located in the same plane.

7. The evaporation crucible according to claim 1, characterized in that The inclined surface forms an angle of 30 degrees with the highest plane of the crucible body.

8. An evaporation device, comprising the evaporation crucible according to any one of claims 1 to 7, characterized in that: It also includes a water-cooled crucible seat for storing the evaporation crucible.

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