Split type vapor deposition gas inlet tool
Through the modular design of the split vapor deposition intake tooling and the ventilation pipe deceleration measures, the high cost and deposition unevenness problems caused by the traditional intake system are solved, and the product surface quality is improved and cost savings are achieved.
Patent Information
- Application Number
- CN202422998804.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-10-03
- Estimated Expiration
- 2034-12-05
AI Technical Summary
In the traditional vapor deposition process, the high cost and abnormal imprints on the product surface caused by the fixed multiple air inlet systems, as well as the problem of uneven deposition when the gas flow rate is too high.
A split-type vapor deposition air intake tooling is used, including a first-stage air intake head, a second-stage air intake head and a connecting head. The air intake system can be quickly replaced through a modular design, and turbulence is reduced through a ventilation pipe to ensure uniform gas coverage.
It reduces the number and cost of tooling, improves the surface quality of the product, prevents surface roughness and cracks, and achieves uniformity and an abnormal-free state of the deposited layer.
Smart Images
Figure CN223409721U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical vapor deposition, in particular to a split-type vapor deposition air intake tool. Background Art
[0002] In the vapor deposition process, the quality of the product surface is of vital importance. However, due to differences in placement posture, product shape and air intake system, abnormal marks that are difficult to remove often appear on the product surface. In order to solve this problem, the split vapor deposition air intake tooling came into being. The split vapor deposition air intake tooling can be flexibly adjusted according to the product shape and placement posture, effectively reducing the surface abnormalities caused by the influence of the air intake system. The design concept of this tooling is modularization and customization, so that enterprises can quickly replace and adjust the air intake system when dealing with different products, greatly reducing the number and cost of tooling. The use of split vapor deposition air intake tooling can not only ensure the surface quality of the product, but also save a lot of money for the enterprise and improve production efficiency. This is why the split vapor deposition air intake tooling came into being.
[0003] First, the traditional approach is to fix multiple air intake systems and develop a large number of tooling, but this method is costly and not conducive to the long-term development of the enterprise. Second, when the gas flow rate is too high, the deposited material cannot be evenly covered on the product surface, causing local overheating or uneven deposition, resulting in surface roughness, cracks or other defects. Utility Model Content
[0004] The purpose of the present invention is to provide a split-type vapor deposition air intake tooling to solve the problems raised in the above-mentioned background technology.
[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a split-type vapor deposition air intake tooling, comprising a first-stage air intake head, a second-stage air intake head, a connecting head and a vent pipe, a second-stage air intake head is arranged behind the first-stage air intake head, and a connecting head is arranged on the outside of the first-stage air intake head.
[0006] Preferably, the second-stage air inlet head is tightly fitted with the first-stage air inlet head, the connecting head is snap-connected with the first-stage air inlet head, and the second-stage air inlet head is connected to the first-stage air inlet head via the connecting head.
[0007] Preferably, a vent pipe is provided inside the first stage air intake head, and multiple groups of the vent pipes are provided, and the positions of the vent pipes correspond to those of the second stage air intake head.
[0008] Compared with the prior art, the beneficial effects of the present invention are:
[0009] The utility model is provided with a first-stage air intake head, a second-stage air intake head and a connector. The first-stage air intake head can be quickly connected to the second-stage air intake head through the connector. The modular and customized air intake head enables enterprises to quickly replace and adjust the air intake system when dealing with different products, greatly reducing the number of tooling and costs.
[0010] The utility model provides a vent pipe, which can play a decelerating role, reduce the generation of turbulence and eddy currents, ensure that the gas is evenly covered on the surface of the product, improve the uniformity and quality of the deposited layer, prevent the occurrence of surface roughness, cracks or other defects, and ultimately achieve an ideal state of no abnormalities on the product surface. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic diagram of the appearance structure of the utility model.
[0012] Figure 2 This is a schematic diagram of the coordination of the first-stage air intake head and the second-stage air intake head of the present invention.
[0013] Figure 3 This is a schematic diagram of the cooperation between an air intake head and a vent pipe of the present invention.
[0014] Figure 4 It is a perspective view of the present utility model.
[0015] In the figure: 1. First stage air intake head; 2. Second stage air intake head; 3. Connecting head; 4. Ventilation pipe. DETAILED DESCRIPTION
[0016] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.
[0017] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," "the other end," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0018] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc. should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0020] See also Figure 1-4 The utility model provides an embodiment: a split-type vapor deposition air intake tooling, including a first-stage air intake head 1, a second-stage air intake head 2, a connecting head 3 and a vent pipe 4. The second-stage air intake head 2 is arranged behind the first-stage air intake head 1, and the connecting head 3 is arranged on the outside of the first-stage air intake head 1.
[0021] Specifically, the two-stage air intake head 2 fits tightly with the one-stage air intake head 1, the connecting head 3 is snap-connected with the one-stage air intake head 1, and the two-stage air intake head 2 is connected with the one-stage air intake head 1 through the connecting head 3. The one-stage air intake head 1 can be quickly connected to the two-stage air intake head 2 through the connecting head 3. The modular and customized air intake head enables enterprises to quickly replace and adjust the air intake system when dealing with different products, greatly reducing the number and cost of tooling.
[0022] Specifically, a vent pipe 4 is opened inside the first-stage air inlet head 1, and multiple groups of vent pipes 4 are arranged. The vent pipes 4 correspond to the positions of the second-stage air inlet head 2. The vent pipes 4 can play a decelerating role, reduce the generation of turbulence and eddy currents, ensure that the gas is evenly covered on the surface of the product, improve the uniformity and quality of the deposition layer, prevent the occurrence of surface roughness, cracks or other defects, and ultimately achieve an ideal state of no abnormalities on the product surface.
[0023] Working principle: When producing different products, the first-stage air intake head 1 can be quickly connected to the second-stage air intake head 2 through the connecting head 3. The modular and customized air intake head enables the company to quickly replace and adjust the air intake system when dealing with different products, greatly reducing the number and cost of tooling. The gas enters the first-stage air intake head 1 from the second-stage air intake head 2 through the vent pipe 4. The vent pipe 4 can play a decelerating role, reduce the generation of turbulence and eddy currents, and ensure that the gas is evenly covered on the product surface, which can improve the uniformity and quality of the deposition layer, prevent surface roughness, cracks or other defects, and ultimately achieve an ideal state of no abnormalities on the product surface.
[0024] The above is only an embodiment of the present invention, and common knowledge such as the specific structure and characteristics of the scheme are not described in detail here. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claim involved.
Claims
1. A split-type gas phase deposition air intake tool, comprising a first-stage air intake head (1), a second-stage air intake head (2), a connecting head (3) and a vent pipe (4), characterized in that: A second-stage air intake head (2) is provided behind the first-stage air intake head (1), and a connecting head (3) is provided outside the first-stage air intake head (1).
2. The split-type vapor deposition air intake tooling according to claim 1, characterized in that: The second-stage air intake head (2) is tightly fitted with the first-stage air intake head (1), the connecting head (3) is snap-connected with the first-stage air intake head (1), and the second-stage air intake head (2) is connected to the first-stage air intake head (1) via the connecting head (3).
3. The split-type vapor deposition air intake tool according to claim 1, characterized in that: A vent pipe (4) is provided inside the first-stage air intake head (1), and multiple groups of the vent pipes (4) are provided. The positions of the vent pipes (4) correspond to those of the second-stage air intake head (2).