Single crystal furnace water-cooling heat shield with multi-stage heat exchange structure

Abstract

According to the single crystal furnace water-cooled heat shield with the multi-stage heat exchange structure, the multi-stage heat exchange structure is formed by the first working cavity and the second working cavity, and the design of a heat exchange channel is optimized, so that the rapid and uniform transfer of heat is realized, the heat exchange path and efficiency are optimized, the crystal pulling speed is effectively improved, and the service life of the single crystal furnace is prolonged. The overall performance of the water-cooling heat shield is improved, and the production requirements of large-size crystal bars can be met.

Description

Technical field

[0002] The utility model relates to the technical field of single crystal furnace auxiliary equipment, in particular to a single crystal furnace water-cooled heat shield with a multi-stage heat exchange structure. [Background Technology]

[0004] As an important component of the single crystal furnace, the water-cooled heat shield is mainly used to control and regulate the temperature distribution during the growth process of single crystal silicon to ensure the growth rate and quality of single crystal silicon. However, the heat exchange efficiency of traditional water-cooled heat shields cannot meet the production requirements of large-sized crystal rods, resulting in limited crystal pulling speed and low production efficiency. [Utility Model Content]

[0006] The purpose of the utility model is to provide a water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure, so as to solve the problem that the heat exchange efficiency of the current water-cooled heat shield is unable to meet the production requirements of large-sized crystal rods, resulting in limited crystal pulling speed and low production efficiency.

[0007] The utility model is realized by the following technical solutions:

[0008] A water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure includes a working chamber and a heat exchange channel connected to the working chamber. The working chamber includes a first working chamber for heat exchange with the single crystal furnace and a second working chamber for increasing the crystal pulling speed. The second working chamber is connected to the first working chamber through the heat exchange channel.

[0009] As described above, the water-cooled heat shield of the single crystal furnace with a multi-stage heat exchange structure, the first working chamber is formed by a first annular inner shell for transferring heat, a first annular outer shell is provided on the outside of the first annular inner shell, and the first annular outer shell and the first annular inner shell form a first heat exchange space for heat exchange with the single crystal furnace.

[0010] As described above, the water-cooled heat shield of the single crystal furnace with a multi-stage heat exchange structure, the second working chamber is formed by a second annular inner shell for transferring heat, a second annular outer shell is provided on the outside of the second annular inner shell, and the second annular outer shell and the second annular inner shell form a second heat exchange space for heat exchange with the single crystal furnace.

[0011] In the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure as described above, the heat exchange channel includes a liquid inlet channel and a liquid outlet channel for communicating with the first heat exchange space.

[0012] As described above, in the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure, the liquid outlet channel includes a first channel and a second channel for communicating with the second heat exchange space.

[0013] In the water-cooled heat shield for a single crystal furnace having a multi-stage heat exchange structure as described above, the first heat exchange space is connected to the second heat exchange space through the first channel.

[0014] As described above, in the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure, a connector for fixing the second working chamber is provided between the liquid inlet channel and the second working chamber.

[0015] As described above, in the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure, the inner diameter of the first annular inner shell gradually decreases from top to bottom.

[0016] In the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure as described above, the inner diameter of the first annular shell remains unchanged from top to bottom and then gradually decreases.

[0017] In the water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure as described above, the working chamber is a cylinder with upper and lower openings, and the liquid inlet channel and the liquid outlet channel are respectively provided on both sides of the working chamber.

[0018] Compared with the prior art, the utility model has the following advantages:

[0019] First, a multi-stage heat exchange structure is formed by the first and second working chambers. The first working chamber serves as the primary heat exchange chamber, directly exchanging heat with the single crystal furnace. This efficient heat transfer ensures that heat can be quickly and effectively absorbed or released. The second working chamber then performs secondary cooling on the crystal, further increasing the crystal pulling speed and improving the efficiency and uniformity of heat exchange. Second, by optimizing the design of the heat exchange channels, the heat transfer process is optimized, achieving multi-path flow of liquid between the first and second heat exchange spaces.

[0020] The utility model has a water-cooled hot screen for a single crystal furnace with a multi-stage heat exchange structure. The multi-stage heat exchange structure is formed by the first working chamber and the second working chamber. By optimizing the design of the heat exchange channel, rapid and uniform heat transfer is achieved, the heat exchange path and efficiency are optimized, and the crystal pulling speed is effectively improved. The overall performance of the water-cooled hot screen is improved, and it can meet the production needs of large-size crystal rods. It solves the problem that the heat exchange efficiency of the current water-cooled hot screen is difficult to meet the production needs of large-size crystal rods, resulting in limited crystal pulling speed and low production efficiency.

Brief Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments.

[0023] Figure 1 It is a structural diagram of the utility model;

[0024] Figure 2 It is a side view of the utility model;

[0025] Figure 3 It is a top view of the utility model;

[0026] Figure 4 for Figure 3 Cross-sectional view at AA in the middle;

[0027] Figure 5 for Figure 4 Enlarged view of point 10. [Specific implementation method]

[0029] Figure 1-5 The water-cooled heat shield of a single crystal furnace with a multi-stage heat exchange structure is shown, comprising a working chamber 1 and a heat exchange channel 2 connected to the working chamber 1. The working chamber 1 comprises a first working chamber 11 for heat exchange with the single crystal furnace and a second working chamber 12 for increasing the crystal pulling speed. The second working chamber 12 is connected to the first working chamber 11 through the heat exchange channel 2.

[0030] In this embodiment, a multi-stage heat exchange structure is formed by setting up a first working chamber and a second working chamber. The first working chamber is used as the main heat exchange chamber to directly exchange heat with the single crystal furnace. Through efficient heat transfer, it is ensured that heat can be absorbed or released quickly and effectively; the second working chamber is used to perform secondary cooling of the crystal, further increasing the crystal pulling speed, and improving the heat exchange efficiency and uniformity; and a heat exchange channel is used to connect with the first working chamber and the second working chamber to ensure the efficiency and stability of liquid circulation.

[0031] Furthermore, the first working chamber 11 is formed by a first annular inner shell 3 for transferring heat, and a first annular outer shell 4 is provided outside the first annular inner shell 3. The first annular outer shell 4 and the first annular inner shell 3 form a first heat exchange space 5 for heat exchange with the single crystal furnace.

[0032] In this embodiment, the first working chamber forms a first heat exchange space through the first annular inner shell and the first annular outer shell, which increases the heat exchange area and improves the heat exchange efficiency.

[0033] Furthermore, the second working chamber 12 is formed by a second annular inner shell 6 for transferring heat, and a second annular outer shell 7 is provided outside the second annular inner shell 6. The second annular outer shell 7 and the second annular inner shell 6 form a second heat exchange space 8 for heat exchange with the single crystal furnace.

[0034] In this embodiment, the second working chamber forms a second heat exchange space through the second annular inner shell and the second annular outer shell, further increasing the heat exchange area. At the same time, it works together with the first heat exchange space to achieve a multi-stage heat exchange effect, further improve the heat exchange efficiency, and increase the crystal pulling speed.

[0035] Furthermore, the heat exchange channel 2 includes a liquid inlet channel 21 and a liquid outlet channel 22 for communicating with the first heat exchange space 5 .

[0036] In this embodiment, the liquid circulation is achieved by setting the liquid inlet channel and the liquid outlet channel, and the stability and durability of the heat exchange are improved by continuous heat exchange.

[0037] Furthermore, the liquid outlet channel 22 includes a first channel 221 and a second channel 222 for communicating with the second heat exchange space 8 .

[0038] In this embodiment, by optimizing the liquid outlet channel, the liquid flow path is increased through the first channel and the second channel, and multi-path flow of the liquid between the first heat exchange space and the second heat exchange space is realized. This design optimizes the heat transfer process and improves the uniformity and efficiency of heat exchange.

[0039] Furthermore, the first heat exchange space 5 is connected to the second heat exchange space 8 through the first channel 221 .

[0040] In this embodiment, the first heat exchange space and the second heat exchange space are connected through the first channel, so that the liquid enters the second heat exchange space for secondary heat exchange cooling, thereby improving the overall heat exchange efficiency. The liquid that has completed the secondary heat exchange is then discharged from the water-cooled heat screen through the second channel, completing a complete heat exchange cycle.

[0041] Furthermore, a connecting piece 9 for fixing the second working chamber 12 is provided between the liquid inlet channel 21 and the second working chamber 12 .

[0042] Furthermore, the inner diameter of the first annular inner shell 3 gradually decreases from top to bottom.

[0043] Furthermore, the inner diameter of the first annular housing 4 first remains constant and then gradually decreases from top to bottom.

[0044] Furthermore, the working chamber 1 is a cylindrical body with upper and lower openings, and the liquid inlet channel 21 and the liquid outlet channel 22 are respectively provided on both sides of the working chamber 1 .

[0045] Furthermore, the liquid inlet channel 21 is provided with a liquid inlet 211 , and the liquid outlet channel 22 is provided with a liquid outlet 223 .

[0046] When using this utility model:

[0047] First, the liquid enters the liquid inlet channel 21 from the liquid inlet 211, and flows into the first heat exchange space 5 through the liquid inlet channel 21. Then, the liquid that has undergone the first heat exchange flows from the first heat exchange space 5 into the second heat exchange space 8 through the first channel 221. The liquid that has undergone the second heat exchange flows out of the second heat exchange space through the second channel 222, transferring the absorbed heat to the outside.

[0048] The utility model has a water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure. The multi-stage heat exchange structure is formed by the first working chamber and the second working chamber. By optimizing the design of the heat exchange channel, rapid and uniform heat transfer is achieved, the heat exchange path and efficiency are optimized, and the crystal pulling speed is effectively increased. The overall performance of the water-cooled heat shield is improved, and it can meet the production needs of large-size crystal rods.

[0049] The above descriptions are provided in conjunction with specific content, and do not necessarily limit the specific implementation of this utility model to these descriptions. Furthermore, due to differences in industry nomenclature, this description does not limit the specific implementation of this utility model to the above nomenclature, nor does it limit the specific implementation of this utility model to English nomenclature. Any similarity or similarity to the methods, structures, etc. of this utility model, or any technical deduction or substitution based on the concept of this utility model, shall be considered within the scope of protection of this utility model.

Claims

1. A water-cooled heat shield for a single crystal furnace having a multi-stage heat exchange structure, comprising a working chamber (1) and a heat exchange channel (2) connected to the working chamber (1), characterized in that: The working chamber (1) comprises a first working chamber (11) for performing heat exchange with a single crystal furnace and a second working chamber (12) for increasing a crystal pulling speed, wherein the second working chamber (12) is connected to the first working chamber (11) via the heat exchange channel (2).

2. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 1, characterized in that: The first working chamber (11) is formed by a first annular inner shell (3) for transferring heat, a first annular outer shell (4) is provided outside the first annular inner shell (3), and the first annular outer shell (4) and the first annular inner shell (3) form a first heat exchange space (5) for performing heat exchange with the single crystal furnace.

3. The single crystal furnace water cooling heat shield with a multi-stage heat exchange structure according to claim 2, characterized in that: The second working chamber (12) is formed by a second annular inner shell (6) for transferring heat, a second annular outer shell (7) is provided outside the second annular inner shell (6), and the second annular outer shell (7) and the second annular inner shell (6) form a second heat exchange space (8) for heat exchange with the single crystal furnace.

4. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 3, characterized in that: The heat exchange channel (2) comprises a liquid inlet channel (21) and a liquid outlet channel (22) for communicating with the first heat exchange space (5).

5. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 4, characterized in that: The liquid outlet channel (22) comprises a first channel (221) and a second channel (222) for communicating with the second heat exchange space (8).

6. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 5, characterized in that: The first heat exchange space (5) is in communication with the second heat exchange space (8) via the first channel (221).

7. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 4, characterized in that: A connecting piece (9) for fixing the second working chamber (12) is provided between the liquid inlet channel (21) and the second working chamber (12).

8. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 2, characterized in that: The inner diameter of the first annular inner shell (3) gradually decreases from top to bottom.

9. The water-cooled heat shield for a single crystal furnace with a multi-stage heat exchange structure according to claim 2, characterized in that: The inner diameter of the first annular housing (4) remains constant from top to bottom and then gradually decreases.

10. The single crystal furnace water cooling heat shield with a multi-stage heat exchange structure according to claim 4, characterized in that: The working chamber (1) is a cylindrical body with upper and lower openings, and the liquid inlet channel (21) and the liquid outlet channel (22) are respectively provided on both sides of the working chamber (1).

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