Sintering tool for ceramic sand finishing sheet

By designing a sintering fixture for ceramic sanding sheets and using slide grooves and arc-shaped locking positions to fix the ceramic sanding sheets, the problems of warping and cracking of ceramic sanding sheets during high-temperature sintering are solved, achieving more efficient production efficiency and stable sintering quality.

CN223412497UActive Publication Date: 2025-10-03JIANGSU SANJING SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202422907462.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-27
Publication Date
2025-10-03
Estimated Expiration
2034-11-27

AI Technical Summary

Technical Problem

Ceramic sanding sheets are prone to warping, cracking and difficulty in fixing during high-temperature sintering, resulting in unstable sintering quality.

Method used

A sintering tooling for ceramic sanding sheets was designed, including a base, a fixing block, a pressing plate and a latch. The ceramic sanding sheets were fixed by slide grooves and arc-shaped locking positions, controlling their shrinkage direction and avoiding direct contact, ensuring uniform heating and air circulation.

Benefits of technology

It effectively prevents ceramic sanding discs from warping and cracking, improving production efficiency and sintering quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a sintering tool for a ceramic sand finishing sheet, and relates to the field of ceramic sintering auxiliary jigs, the sintering tool for the ceramic sand finishing sheet comprises a base, the surface of the base is provided with at least two slide rail grooves in opposite directions; the bottom of the fixing block is arranged in the sliding rail groove, a through hole is formed in the fixing block, and a clamping area is defined by the fixing block; the plurality of pressing plates are positioned in the clamping area; and the plug pin is inserted into the through hole and extends into the sliding rail groove. The sintering tool for the ceramic sand finishing sheet is simple in structure, stable, reliable and wide in application range, the ceramic sand finishing sheet can be subjected to retention sintering, the shrinkage direction of the ceramic sand finishing sheet can be controlled, and the production efficiency is improved.
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Description

Technical Field

[0001] The utility model relates to the field of ceramic sintering auxiliary jigs, in particular to a sintering tool for ceramic sanding sheets. Background Art

[0002] Ceramic trimming pads, due to their excellent grinding properties and stability, are suitable for trimming and sharpening thinning grinding wheels in the semiconductor industry. New grinding wheels need to be corrected for parallelism after being installed on the machine, and they must be kept sharp regularly when grinding wafers. Therefore, the shape and size of the ceramic trimming pads must be precise. Ultra-thin ceramic trimming pads require dimensions of φ120-200mm and a thickness of 1.5-3mm during molding. If these large, ultra-thin trimming pads are placed directly into the sintering furnace, the uneven natural shrinkage of the surface during high-temperature sintering due to their special structure will cause the product to warp, deform, or even crack. Furthermore, the ceramic trimming pads will contact the base over a large area, making them prone to bonding and difficult to separate. Furthermore, since the sintering position is not fixed, the product will shift during turnover, resulting in unstable sintering quality. Utility Model Content

[0003] The purpose of the utility model is to overcome the defect of unstable sintering quality of ceramic sand repairing sheets in the prior art, and to provide a sintering tool for ceramic sand repairing sheets, which can fix and sinter the ceramic sand repairing sheets and control their shrinkage direction, thereby improving production efficiency.

[0004] In order to achieve the above and other purposes, the present invention is implemented by including the following technical solutions: The present invention provides a sintering tool for ceramic sanding sheets, the sintering tool for ceramic sanding sheets comprising: a base, the surface of the base being provided with at least two slide rail grooves in opposite directions;

[0005] A fixed block, the bottom of which is disposed in the slide rail groove, the fixed block being provided with a through hole, and the fixed block enclosing a clamping area;

[0006] a plurality of pressure plates, the plurality of pressure plates being located in the clamping area;

[0007] A latch is inserted into the through hole and extends into the slide rail groove.

[0008] In some embodiments, the slide rail grooves are two slide rail grooves, the two slide rail grooves form a cross shape, and a plurality of arc-shaped locking positions are provided on the two slide rail grooves.

[0009] In some embodiments, a raised step and a limit block are provided at the bottom of the fixing block, and the raised step is located on a side close to the clamping area.

[0010] In some embodiments, a side of the fixing block facing the clamping area is an arc-shaped clamping area.

[0011] In some embodiments, a fine sand layer is provided between the plurality of pressing plates.

[0012] In some embodiments, the diameter of the through hole is consistent with the diameter of the latch, and the diameter of the arc-shaped locking portion is consistent with the diameter of the latch.

[0013] In some embodiments, the base, the fixing block, the pressure plate and the latch are all made of ceramic.

[0014] The utility model provides a sintering tool for ceramic sand repairing sheets. Compared with the existing technology, the utility model has the following beneficial effects: the ceramic sand repairing sheets are fixed and sintered to control the shrinkage direction of the ceramic sand repairing sheets, while avoiding direct contact between the ceramic sand repairing sheets and the pressing plate, maintaining uniform heating and air circulation, improving the warping and cracking of the ceramic sand repairing sheets, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 Shown is a schematic diagram of the overall structure of the sintering tooling of the ceramic sanding sheet of the utility model;

[0017] Figure 2 Shown is a schematic diagram of the sintering tooling base of the ceramic sanding sheet of the present invention;

[0018] Figure 3 Shown is a schematic diagram of a sintering fixture fixing seat for a ceramic sanding sheet of the present invention;

[0019] Figure 4 Shown is a cross-sectional view of the sintering fixture clamping area of ​​the ceramic sanding sheet of the present invention;

[0020] Figure 5 Shown is a schematic diagram of the sintering fixture clamping area of ​​the ceramic sanding sheet of the present invention.

[0021] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0022] 1. Base; 11. Slide rail groove; 12. Arc-shaped locking position; 2. Fixing block; 21. Through hole; 22. Raised step; 23. Arc-shaped clamping area; 24. Limit block; 3. Clamping area; 4. Press plate; 5. Fine sand layer; 6. Latch; 7. Ceramic sanding disc. DETAILED DESCRIPTION

[0023] In order to help those skilled in the art better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of this application.

[0024] like Figure 1 and Figure 2 As shown, the utility model provides a sintering tool for a ceramic sanding sheet 7, and the sintering tool for the ceramic sanding sheet includes a base 1, and two slide rail grooves 11 in opposite directions are provided on the surface of the base 1. The two slide rail grooves 11 form a cross shape, and the cross shape forms the four sides of the slide rail groove 11. A plurality of arc-shaped locking positions 12 are provided on the two slide rail grooves 11.

[0025] like Figure 3 and Figure 5 As shown, the sintering fixture for the ceramic sanding sheet includes a fixed block 2, the bottom of which is arranged within the four sides of the cross-shaped slide groove 11 and can move on the slide groove 11. A through hole 21 is opened on the fixed block 2. The four opposing fixed blocks 2 surround a clamping area 3, and the side of the fixed block 2 facing the clamping area 3 is an arc-shaped clamping area 23. A raised step 22 and a limit block 24 are provided at the bottom of the fixed block 2. The raised step 22 is located on the side close to the clamping area 3. The raised step 22 is embedded in the slide groove 11 and can move along the slide groove 11.

[0026] like Figure 1 and Figure 4 As shown, the sintering fixture for the ceramic sanding sheet includes a plurality of pressing plates 4, which are located in the clamping area 3 and are used to carry the ceramic sanding sheet 7. The diameter of the pressing plates 4 is consistent with the diameter of the ceramic sanding sheet 7. A fine sand layer 5 is provided between the plurality of pressing plates 4. Specifically, the fine sand layer 5 is provided between the pressing plates 4 and the ceramic sanding sheet 7 to prevent the ceramic sanding sheet 7 from directly contacting the pressing plates 4. The fixed block 2 can move on the base 1 through the slide rail groove 11. The arc-shaped clamping area 23 clamps the pressing plate 4 and the ceramic sanding sheet 7, fixes and sinters the ceramic sanding sheet 7 and controls its shrinkage direction, thereby improving production efficiency.

[0027] like Figure 1 and Figure 3As shown, the sintering tooling for the ceramic sanding sheet includes a latch 6, which can be inserted into the through hole 21. The diameter of the through hole 21 is consistent with the diameter of the latch 6. The limit block 24 and the latch 6 cooperate to fix the position of the fixed block 2. The position of the fixed block 2 can be fixed by inserting the latch 6 into one of the arc-shaped locking positions 12. The diameter of the arc-shaped locking position 12 is consistent with the diameter of the latch 6. The latch 6 is used to connect the fixed block 2 and the base 1, and fix the fixed block 2, the pressing plate 4 and the ceramic sanding sheet 7 to be sintered on the base 1 as a whole. The base 1, the fixed block 2, the pressing plate 4 and the latch 6 are all made of ceramic.

[0028] The working principle of this utility model:

[0029] 1. First, insert the fixing block 2 into the slide rail groove 11 through the raised step 22, with the arc-shaped clamping area 23 of the fixing block 2 facing the clamping area 3. Repeat this step to insert two fixing blocks 2 in each of the two slide rail grooves 11.

[0030] 2. Take one of the pressing plates 4 and place it in the center of the clamping area 3.

[0031] 3. Lay the fine sand layer 5 on the pressing plate 4, place the ceramic sanding sheet 7 on the fine sand layer 5, and then lay the fine sand layer 5 on the surface of the ceramic sanding sheet 7 and cover it with the second pressing plate 4. Repeat this step to form a multi-layer stack of the pressing plate 4, fine sand layer 5, and ceramic sanding sheet 7.

[0032] 4. Move the fixed blocks 2 around the clamping area 3 along the slide rail groove 11 so that the arc-shaped clamping area 23 of the fixed blocks 2 are in close contact with the pressing plate 4 and the ceramic sanding disc 7.

[0033] 5. After the whole is coordinated to the appropriate position, the latch 6 is inserted into the through hole 21 and into the arc-shaped locking position 12.

[0034] 6. After sintering is completed, pull out the latch 6 and remove the surrounding fixing blocks 2 along the slide rail groove 11. Remove the pressing plate 4, clean the fine sand layer 5, and then take out the ceramic sanding sheet 7.

[0035] In the description of the present invention, it should be noted that when an element is referred to as being "fixed on" or "set on" another element, it can be directly on the other element or indirectly set on the other element; when an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0036] It should be understood that the terms "height", "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0038] Throughout this specification, reference to terms such as "one embodiment," "certain embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with an embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative descriptions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0039] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.

[0040] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A sintering tool for ceramic sanding sheets, characterized by: The sintering tooling comprises: A base, wherein the surface of the base is provided with at least two slide rail grooves in opposite directions; A fixed block, the bottom of which is disposed in the slide rail groove, the fixed block being provided with a through hole, and the fixed block enclosing a clamping area; a plurality of pressure plates, the plurality of pressure plates being located in the clamping area; and a latch, wherein the latch is inserted into the through hole and extends into the slide rail groove.

2. The sintering tool for ceramic sanding sheets according to claim 1, characterized in that: The slide rail grooves are two slide rail grooves, the two slide rail grooves form a cross shape, and a plurality of arc-shaped locking positions are provided on the two slide rail grooves.

3. The sintering tool for ceramic sanding sheets according to claim 1, characterized in that: A raised step and a limiting block are provided at the bottom of the fixing block, and the raised step is located on a side close to the clamping area.

4. The sintering tool for ceramic sanding sheets according to claim 1, characterized in that: One side of the fixing block facing the clamping area is an arc-shaped clamping area.

5. The sintering tool for ceramic sanding sheets according to claim 1, characterized in that: A fine sand layer is arranged between the multiple pressing plates.

6. The sintering tool for ceramic sanding sheets according to claim 2, characterized in that: The diameter of the through hole is consistent with the diameter of the latch pin, and the diameter of the arc-shaped locking portion is consistent with the diameter of the latch pin.

7. The sintering tool for ceramic sanding sheets according to claim 1, characterized in that: The base, the fixing block, the pressing plate and the latch are all made of ceramics.