Positioning mold for pasting positioning angle on photomask

Abstract

The utility model discloses a positioning die for pasting a positioning angle on a photomask, and belongs to the technical field of photomask processing. The platform deck is provided with a photomask positioning groove used for placing a photomask. The photomask tuning bolt is mounted on the carrying table on the front side edge of the photomask positioning groove; a pair of tuning slide blocks capable of sliding left and right are respectively arranged at the left end and the right end of the front side edge of the photomask positioning groove; the tuning slide block is provided with an angle block positioning groove for placing the positioning angle block, and the angle block positioning groove is lower than the photomask positioning groove; wherein one side of the tuning slide block is connected with a slide block tuning bolt; and an angle block tuning screw is mounted on the carrying table on the front side edge of the photomask positioning groove. According to the utility model, the relative position of the positioning angle block and the photomask can be accurately controlled, and the accurate alignment between the positioning angle block and the photomask is ensured; the angle block positioning groove in the tuning sliding block enables the positioning angle block to be in flush contact with the bottom face of the photomask, the attaching displacement problem caused by the height difference is solved, and the photomask production efficiency and the product quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photomask processing, in particular to a positioning mold for positioning angles of a photomask. Background Art

[0002] A mask, also known as a light shield or mask, is a core tool in photolithography. In semiconductor manufacturing, it transfers the designed circuit pattern onto the photoresist-coated wafer surface through the lithography machine's light source. During the exposure process, the light passes through the transparent area of ​​the mask, projecting the pattern onto the wafer, thus completing the circuit fabrication. LED exposure masks are specifically designed for use in LED manufacturing.

[0003] During the production and use of LED exposure masks, positioning angle blocks play a crucial role. Their primary function is to ensure the mask's accurate positioning during the exposure process. Working in conjunction with the positioning device on the exposure equipment, these blocks prevent the mask from shifting or tilting during the exposure process. Besides positioning, they also secure the mask.

[0004] Due to the height difference between the positioning angle block and the photomask during the adhesion and curing process, it is easy to shift during the bonding process, and the positioning accuracy requirements cannot be met; it will also cause the adhesive between the positioning angle block and the photomask to adhere unevenly, and the positioning angle block and the photomask to adhere loosely, and easily fall off; ultimately, the LED exposure mask machine cannot recognize the positioning angle, requiring rework, and even generating waste. Utility Model Content

[0005] The purpose of the utility model is to provide a positioning mold for the positioning angle of the mask, to optimize and improve the control of the positioning angle pasting process, and to ensure the positioning accuracy of the positioning angle block and the mask.

[0006] The utility model adopts the following technical solutions: a positioning mold for positioning the angle of the mask,

[0007] include:

[0008] A carrier, wherein a mask positioning groove for placing the mask is provided on the carrier;

[0009] A mask tuning bolt is mounted on the carrier on the front side of the mask positioning groove and is used to position the mask in the front-to-back direction;

[0010] A pair of tuning sliders are respectively arranged at the left and right ends of the front side of the mask positioning groove; the tuning sliders are provided with corner block positioning grooves for placing positioning corner blocks, and the corner block positioning grooves are lower than the mask positioning grooves;

[0011] Among them, the tuning slider is installed on the carrier in a left-right sliding manner, and a slider tuning bolt for adjusting the tuning slider left-right is connected to the side of the tuning slider away from the carrier; a corner block tuning screw is installed on the carrier on the front side of the mask positioning groove, which is used to position the positioning corner block in the front and rear directions.

[0012] Preferably, the mask positioning groove passes through the carrier in the thickness direction of the carrier, and the inner wall of the mask positioning groove has a step for supporting the mask.

[0013] Preferably, the tuning slider is lower than the step of the inner wall of the mask positioning groove, so that the top surface of the positioning angle block is in flush contact with the bottom surface of the mask.

[0014] Preferably, the slider tuning bolt is fixed to the carrier through a first support; the slider tuning bolt is connected to the first support through a thread, and the inner end of the slider tuning bolt is rotatably connected to the tuning slider.

[0015] Preferably, two light mask tuning bolts are provided, and the two light mask tuning bolts are symmetrically distributed at the left and right ends of the front side of the light mask.

[0016] Preferably, the mask tuning bolt is fixed on the carrier through a second support; the mask tuning bolt is connected to the second support through a thread, and the inner end of the mask tuning bolt is opposite to the front side of the mask.

[0017] Preferably: the corner block positioning groove is a through groove that passes through the tuning slider in the front-to-back direction; the corner block tuning screw is connected to the carrier through a thread, and the inner end of the corner block tuning screw is opposite to the positioning corner block in the corner block positioning groove.

[0018] Preferably, during operation, the left and right sides of the carrier are respectively tightened and positioned by a carrier tuning screw.

[0019] The beneficial effects of the present invention are:

[0020] The relative position of the positioning angle block and the photomask can be precisely controlled through the mask positioning slots on the stage and the slidable tuning slider. The introduction of slider tuning bolts, mask tuning bolts, and angle block tuning screws provides fine-tuning capabilities in the "X" and "Y" directions, ensuring precise alignment between the positioning angle block and the photomask, achieving a positioning accuracy of ±0.1mm and significantly improving the production quality of LED exposure masks.

[0021] The corner block positioning groove on the tuning slider enables the positioning corner block to be in flush contact with the bottom surface of the mask, solving the problem of fitting displacement caused by height difference, ensuring complete contact between the positioning corner block and the mask, thereby avoiding the problem of uneven adhesive adhesion, improving the reliability of the adhesion operation, effectively reducing the rework rate and scrap rate, and improving the production efficiency and product quality of the LED exposure mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 A top view of a positioning mold for positioning the angle of a photomask provided in an embodiment of the present invention.

[0024] Figure 2 This is a front view of a positioning mold for positioning the angle of a photomask provided in an embodiment of the utility model.

[0025] Figure 3 This is a left view of a positioning mold for positioning the angle of a photomask provided in an embodiment of the present invention.

[0026] Figure 4 This is a top view of a positioning mold for positioning a photomask angle provided by an embodiment of the present invention in use.

[0027] Figure 5 This is a three-dimensional diagram of a positioning mold for positioning a photomask angle provided by an embodiment of the present invention in use.

[0028] Description of reference numerals: 1, stage; 11, mask positioning groove;

[0029] 2. Photomask;

[0030] 3. Slider tuning bolt; 31. First support;

[0031] 4. Tuning slider; 41. Corner block positioning slot;

[0032] 5. Angle block tuning screw;

[0033] 6. Mask tuning bolt; 61. Second support;

[0034] 7. Positioning corner blocks;

[0035] 8. Stage tuning screw; DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] Example 1:

[0038] like Figures 1 to 5 As shown, the utility model provides a positioning mold for positioning the angle of the mask, which mainly includes a carrier 1 and a pair of tuning sliders 4. A square mask positioning groove 11 is provided on the carrier 1 and passes through the carrier 1. The inner walls on the left and right sides of the mask positioning groove 11 have steps. The mask 2 is placed in the mask positioning groove 11 and supported on the steps. The rear side of the mask 2 contacts the inner wall of the mask positioning groove 11, and there is a gap between the front side of the mask 2 and the inner wall of the mask positioning groove 11. The front and rear sides of the mask positioning groove 11 are provided with semicircular through grooves to facilitate the removal and placement of the mask 2.

[0039] A through slot is defined at each of the left and right ends of the front edge of the mask positioning slot 11, housing a tuning slider 4. The two tuning sliders 4 are symmetrically positioned along the center of the mask positioning slot 11 and can slide left and right. Each tuning slider 4 has a corner block positioning slot 41 for receiving the corner block 7. The tuning slider 4 is positioned below the step on the inner wall of the mask positioning slot 11. The corner block 7 is placed in the corner block positioning slot 41, with its top surface flush with the bottom surface of the mask 2.

[0040] A slider tuning bolt 3 is located on the side of the tuning slider 4 facing away from the stage 1. This is used to adjust the position of the slider 4, thereby controlling the relative position of the positioning angle block 7 and the photomask. The slider tuning bolt 3 is threadedly connected to a first support 31, which is fixed to the stage 1. The inner end of the slider tuning bolt 3 is rotatably connected to the tuning slider 4. Rotating the slider tuning bolt 3 adjusts the position of the positioning angle block 7.

[0041] Example 2:

[0042] Based on the above embodiment 1, combined with Figure 1 、 Figure 4 and Figure 5As shown, in this embodiment, two mask tuning bolts 6 are mounted on the carrier 1, located in front of the mask positioning slot 11. The two mask tuning bolts 6 are symmetrically arranged along the center of the mask positioning slot 11. The mask tuning bolts 6 are threadedly connected to a second support 61, which is fixed to the carrier 1. The inner ends of the mask tuning bolts 6 face the front side of the mask 2. By rotating the mask tuning bolts 6, the inner ends of the mask tuning bolts 6 abut against the front side of the mask 2, positioning the mask 2 in the front-to-back direction. This also prevents the mask 2 from swaying from side to side, ensuring the stability of the mask 2 as a positioning reference for the positioning angle block 7.

[0043] Example 3:

[0044] Based on the above embodiment 2, combined with Figure 1 、 Figure 4 and Figure 5 As shown, in this embodiment, a corner block tuning screw 5 is provided on the front side of each tuning slider 4, and the corner block tuning screw 5 is connected to the carrier 1 via a threaded connection. A corner block positioning groove 41 extends through the stepped groove of the tuning slider 4 in the front-to-back direction, and the inner end of the corner block tuning screw 5 is located in the middle of the corner block positioning groove 41. After the positioning corner block 7 is placed in the corner block positioning groove 41, the inner end of the corner block tuning screw 5 is opposite the front side of the positioning corner block 7. By rotating the corner block tuning screw 5, the front side of the positioning corner block 7 can be tightened to achieve the positioning of the positioning corner block 7, ultimately ensuring that the positioning corner block 7 is relatively fixed to the photomask 2, facilitating subsequent adhesion operations.

[0045] Working process:

[0046] Before operation, the carrier 1 is placed on a workbench with a pair of carrier tuning screws 8. The carrier tuning screws 8 tighten the two ends of the carrier 1 to ensure the position of the carrier 1 on the workbench.

[0047] After the operation starts, the positioning angle block 7 is placed in the angle block positioning groove 41 on the tuning slider 4, and the mask 2 is placed in the mask positioning groove 11 on the carrier 1; by rotating the mask tuning bolt 6, the inner end of the mask tuning bolt 6 is against the front side of the mask 2 to achieve the positioning of the mask 2; by adjusting the slider tuning bolts 3 on both sides, the tuning slider 4 and the positioning angle block 7 thereon are driven to adjust the relative position of the positioning angle block 7 and the mask 2, and then the front side of the positioning angle block 7 is tightened by rotating the angle block tuning screw 5 to achieve the positioning of the positioning angle block 7; after completing the positioning, confirm under a microscope that the position accuracy of the positioning angle block 7 and the mask 2 meets the standard before curing and adhering.

[0048] The utility model provides a positioning mold for the positioning angle of a photomask. The positioning angle block part is designed with a recess on the mold, and a height difference is designed according to the height of the positioning angle block and the photomask, so that the positioning angle block and the glass surface of the photomask are in contact, thereby solving the problem of uneven adhesion of the adhesive between the positioning angle block and the photomask; the positioning part of the mold is made adjustable in the "X" and "Y" directions, thereby solving the problem of position deviation of the positioning angle block and the photomask; carrier tuning screws are provided at the left and right ends of the mold to increase the positioning accuracy; after confirming that the position accuracy of the positioning angle block and the photomask meets the standard under a microscope, they are cured and adhered, thereby avoiding the problem of loose adhesion and easy falling off of the positioning angle block and the photomask.

[0049] Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A positioning mold for the positioning angle of the mask sticker, It is characterized in that include: A carrier (1), wherein the carrier (1) is provided with a mask positioning groove (11) for placing the mask (2); A mask tuning bolt (6) is mounted on the carrier (1) at the front side of the mask positioning groove (11) and is used to position the mask (2) in the front-back direction; A pair of tuning sliders (4) are respectively disposed at the left and right ends of the front side of the mask positioning groove (11); a corner block positioning groove (41) for accommodating a positioning corner block (7) is provided on the tuning slider (4), and the corner block positioning groove (41) is lower than the mask positioning groove (11); The tuning slider (4) is mounted on the carrier (1) in a manner of sliding left and right, and a slider tuning bolt (3) for adjusting the tuning slider (4) left and right is connected to the side of the tuning slider (4) away from the carrier (1); a corner block tuning screw (5) is mounted on the carrier (1) on the front side of the mask positioning groove (11) for positioning the positioning corner block (7) in the front and rear directions.

2. A positioning mold for positioning a photomask according to claim 1, characterized in that: The photomask positioning groove (11) passes through the carrier (1) in the thickness direction of the carrier (1), and the inner wall of the photomask positioning groove (11) has a step for supporting the photomask (2).

3. A positioning mold for positioning a photomask according to claim 2, characterized in that: The tuning slider (4) is lower than the step of the inner wall of the mask positioning groove (11), so that the top surface of the positioning corner block (7) is in flush contact with the bottom surface of the mask (2).

4. The positioning mold for positioning the angle of the photomask according to claim 1, characterized in that: The slider tuning bolt (3) is fixed to the carrier (1) via a first support (31); the slider tuning bolt (3) is connected to the first support (31) via a thread, and the inner end of the slider tuning bolt (3) is rotatably connected to the tuning slider (4).

5. The positioning mold for positioning the angle of the photomask according to claim 1, characterized in that: Two light mask tuning bolts (6) are provided, and the two light mask tuning bolts (6) are symmetrically distributed at the left and right ends of the front side of the light mask (2).

6. The positioning mold for positioning the angle of the photomask according to claim 1, characterized in that: The mask tuning bolt (6) is fixed on the carrier (1) via a second support (61); the mask tuning bolt (6) is connected to the second support (61) via a thread, and the inner end of the mask tuning bolt (6) is opposite to the front side of the mask (2).

7. The positioning mold for positioning the angle of the photomask according to claim 1, characterized in that: The corner block positioning groove (41) is a through groove that penetrates the tuning slider (4) in the front-to-back direction; the corner block tuning screw (5) is connected to the carrier (1) through a thread, and the inner end of the corner block tuning screw (5) is opposite to the positioning corner block (7) in the corner block positioning groove (41).

8. The positioning mold for positioning the angle of the photomask according to claim 1, characterized in that: During operation, the left and right sides of the carrier (1) are respectively tightened and positioned by a carrier tuning screw (8).

Images