Gas-liquid separation device and processing equipment

Abstract

The utility model discloses a gas-liquid separation device and processing equipment, the gas-liquid separation device comprises a separator, a collector and a connecting seat, the separator is internally provided with a containing cavity, the side part of the separator is provided with a gas inlet hole communicated with the containing cavity, and the containing cavity is also internally provided with a baffle assembly; the collector is arranged at the lower end of the separator, is communicated with the accommodating cavity and is used for collecting liquid; the connecting base is arranged at the upper end of the separator, a mounting part and an annular baffle are arranged on the side, away from the separator, of the connecting base, and the annular baffle is arranged on the periphery of the mounting part. An air outlet communicated with the accommodating cavity is formed in the mounting part, and a seepage hole communicated with the accommodating cavity is further formed between the mounting part and the annular baffle. Gas enters the containing cavity from the gas inlet and collides with the baffle assembly to separate liquid drops, the liquid drops are condensed and fall into the collector, the gas is output through the gas outlet of the installation part, the installation part is used for installing an external pipeline, the liquid drops condensed on the inner wall of the external pipeline can also leak to the collector through the seepage holes, and the annular baffle can prevent the liquid drops from overflowing.

Description

Technical Field

[0001] The present application relates to the field of wafer processing equipment, and in particular to a gas-liquid separation device and processing equipment. Background Art

[0002] With the rapid development of integrated circuit manufacturing technology, integrated circuit structures are becoming increasingly complex, and the requirements for wafers are constantly increasing. In the cleaning process of semiconductor wafers, various liquid chemicals are usually required, such as acids (nitric acid, hydrofluoric acid), alkalis (sodium hydroxide, ammonia water), and other cleaning liquids. A certain amount of exhaust gas is generated during the cleaning process, and the exhaust gas will carry some droplets of the above-mentioned cleaning liquid. In related technologies, negative pressure fans are generally used to discharge the exhaust gas from the cleaning station area to a designated area. The residual droplets in the exhaust gas cause pollution to the fan or pipeline. Utility Model Content

[0003] The present application proposes a gas-liquid separation device and processing equipment, which can separate the cleaning liquid mist in the equipment.

[0004] This application proposes a gas-liquid separation device, comprising:

[0005] The separator has an accommodating cavity inside and an air inlet hole in communication with the accommodating cavity on its side, and a baffle assembly is also provided in the accommodating cavity;

[0006] a collector, disposed at the lower end of the separator and in communication with the accommodating cavity, for collecting liquid;

[0007] A connecting seat is provided at the upper end of the separator. A mounting portion and an annular baffle are provided on the side of the connecting seat away from the separator. The annular baffle is provided on the outer periphery of the mounting portion. An air outlet hole connected to the accommodating cavity is provided on the mounting portion, and a seepage hole connected to the accommodating cavity is also provided between the mounting portion and the annular baffle.

[0008] In some embodiments, the baffle assembly includes a first mounting plate arranged on the upper side of the air inlet, and a first baffle arranged on the first mounting plate; the first mounting plate is arranged along the air inlet direction, the first baffle is arranged opposite the air inlet, and the lower end faces the collector; the first baffle separates the accommodating cavity into a first chamber close to the air inlet, and a second chamber away from the air inlet.

[0009] In some embodiments, the first baffle assembly also includes a second baffle disposed above the first mounting plate, the second baffle facing the second chamber; one end of the second baffle is connected to the side wall of the accommodating chamber away from the air inlet hole, and the other end is spaced apart from the side wall of the accommodating chamber where the air inlet hole is provided.

[0010] In some embodiments, a side wall of the separator adjacent to the air inlet is provided with an inspection port, the inspection port is provided with a sealing plate, and the second baffle is provided on the sealing plate.

[0011] In some embodiments, the baffle assembly also includes a third baffle with one end disposed on the connecting seat, the third baffle is spaced apart from the second baffle and faces the air outlet, and the other end of the third baffle is spaced apart from the side wall of the accommodating cavity away from the air inlet.

[0012] In some embodiments, the baffle assembly also includes a fourth baffle located below the connecting seat and facing the air outlet, and a fifth baffle located on the side of the fourth baffle away from the air outlet, wherein the fourth baffle is provided with a first through hole and the fifth baffle is provided with a second through hole.

[0013] In some embodiments, an inner diameter of the first through hole is larger than an inner diameter of the second through hole.

[0014] In some embodiments, a drainage interface is provided at the lower end of the collector.

[0015] In some embodiments, the collector includes a liquid collecting box connected to the accommodating cavity, and an observation window is further provided on a side of the liquid collecting box that interfaces with the separator.

[0016] The present application also proposes a processing equipment, comprising the above-mentioned gas-liquid separation device and a frame for installing the gas-liquid separation device.

[0017] The gas-liquid separation device and processing equipment in the present application include a separator, a collector and a connecting seat. The separator is provided with a accommodating chamber inside, an air inlet connected to the accommodating chamber is provided on the side, and a baffle assembly is also provided in the accommodating chamber; the collector is provided at the lower end of the separator and is connected to the accommodating chamber for collecting liquid; the connecting seat is provided at the upper end of the separator, and a mounting portion and an annular baffle are provided on the side of the connecting seat away from the separator, and the annular baffle is provided on the outer periphery of the mounting portion; the mounting portion is provided with an air outlet connected to the accommodating chamber, and a seepage hole connected to the accommodating chamber is further provided between the mounting portion and the annular baffle. Gas enters the accommodating chamber from the air inlet, collides with the baffle assembly, and can separate liquid droplets, which condense and fall into the collector. The gas is then output through the air outlet of the mounting portion. The mounting portion is used to install an external pipeline. Liquid droplets condensed on the inner wall of the external pipeline can also leak into the collector through the seepage hole. The annular baffle can prevent the liquid droplets from overflowing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of a gas-liquid separation device in one embodiment of the present application;

[0019] Figure 2 This is a schematic structural diagram of a gas-liquid separation device in another embodiment of the present application.

[0020] Description of labels:

[0021] 10. Separator; 11. Air inlet; 12. First mounting plate; 13. First baffle; 14. Second baffle; 15. Sealing plate; 16. Third baffle; 17. Fourth baffle; 18. Fifth baffle; 19. Connecting pipe; 20. Collector; 21. Observation window; 22. Drain interface; 30. Connecting seat; 31. Connecting part; 32. Annular baffle; 33. Seepage hole.

[0022] The purpose, features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the schemes in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments in this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0024] It should be noted that all directional indications such as up, down, left, right, front, back, etc. in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the various components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0025] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element.

[0026] In addition, the descriptions of "first", "second", etc. in the embodiments of the present application are for descriptive purposes only and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0027] The present application embodiment proposes a gas-liquid separation device, referring to Figure 1 and Figure 2The gas-liquid separation device comprises a separator 10, an accommodating cavity A is arranged in the separator 10, a gas inlet hole 11 is arranged on the side of the separator 10 and communicates with the accommodating cavity A, and a baffle assembly is further arranged in the accommodating cavity A; a collector 20 is arranged at the lower end of the separator 10 and communicates with the accommodating cavity A and is used for collecting liquid; a connecting seat 30 is arranged at the upper end of the separator 10, an installation portion and an annular baffle 32 are arranged on the side of the connecting seat 30 away from the separator 10, and the annular baffle 32 is arranged on the outer periphery of the installation portion; a gas outlet hole communicating with the accommodating cavity A is arranged on the installation portion, and a seepage hole 33 communicating with the accommodating cavity A is further arranged between the installation portion and the annular baffle 32. In the embodiment, the baffle assembly is arranged in the accommodating cavity A, so that the gas entering the accommodating cavity A from the gas inlet hole 11 collides with the baffle assembly to separate out liquid droplets and condense and fall into the collector 20. The gas is then output through the gas outlet hole of the installation portion, the installation portion is used for mounting an external pipeline, the annular groove formed between the annular baffle 32 and the installation portion can accommodate liquid droplets condensed on the inner wall of the external pipeline. In addition, the above-mentioned liquid droplets can also seep into the collector 20 through the seepage hole 33, so that the liquid droplets are prevented from overflowing.

[0028] In some embodiments, with reference to Figure 1 , the baffle assembly comprises a first installation plate 12 arranged on the upper side of the gas inlet hole 11 and a first baffle 13 arranged on the first installation plate 12; the first installation plate 12 is arranged along the gas inlet direction, the first baffle 13 is arranged opposite to the gas inlet hole 11 and the lower end thereof faces the collector 20; the first baffle 13 divides the accommodating cavity A into a first chamber close to the gas inlet hole 11 and a second chamber away from the gas inlet hole 11. In the embodiment, the gas entering the accommodating cavity A is blocked by the first baffle 13 and is transmitted downward. The liquid droplets condensed on the first baffle 13 also slide downward into the collector 20. The gas is then transmitted upward around the lower end of the first baffle 13, and in the process of vertical upward transmission, the liquid droplets collide with each other to become larger and automatically fall into the collector 20 under the action of gravity. The transmission direction of the gas flow is changed by arranging the first baffle 13, so that the preliminary gas-liquid separation is completed.

[0029] In some embodiments, with reference to Figure 1 , the first baffle 13 assembly further comprises a second baffle 14 arranged above the first installation plate 12 and opposite to the second chamber; one end of the second baffle 14 is connected to the side wall of the accommodating cavity A away from the gas inlet hole 11 and the other end is spaced apart from the side wall of the accommodating cavity A provided with the gas inlet hole 11. In the embodiment, the gas is transmitted upward and collides with the second baffle 14, and the liquid droplets are further condensed on the second baffle 14. Due to the blocking of the second baffle 14, the gas flow is transmitted laterally and reversely around the end of the second baffle 14. The complex flow channel plays a role in slowing down the gas flow, and increases the probability of collision between the liquid droplets and the probability of collision between the liquid droplets and the baffle, so that the gas-liquid separation is further performed.

[0030] In some embodiments, with reference to Figure 1 The side wall of the separator 10 adjacent to the air inlet 11 is provided with an access opening, which is equipped with a sealing plate 15. The second baffle 14 is mounted on the sealing plate 15. This access opening allows for cleaning and inspection of the interior of the separator 10. The second baffle 14 is secured to the sealing plate 15 by welding, screwing, or riveting. When the sealing plate 15 and the second baffle 14 are removed, the accommodating chamber A is free of the obstruction of the second baffle 14, providing more room for maintenance.

[0031] In some embodiments, reference Figure 1 The baffle assembly also includes a third baffle 16, one end of which is provided on the connecting seat 30. The third baffle 16 is spaced apart from the second baffle 14 and faces the air outlet. The other end of the third baffle 16 is spaced apart from the side wall of the accommodating chamber A away from the air inlet 11. In this embodiment, the third baffle 16 is L-shaped, with one end provided at the bottom of the connecting seat 30 and the other end extending vertically downward and then to the right to below the seepage hole 33. The airflow is transmitted to the right along the chamber between the second baffle 14 and the third baffle 16, and is transmitted vertically upward around the end of the third baffle 16 to the outside of the accommodating chamber A. The provision of the third baffle 16 further increases the complexity of the flow channel and enhances the separation effect of the separator 10.

[0032] In some embodiments, reference Figure 2 The baffle assembly also includes a fourth baffle 17 disposed below the connecting seat 30 and facing the air outlet, and a fifth baffle 18 located on the side of the fourth baffle 17 away from the air outlet. The fourth baffle 17 is provided with a first through hole, and the fifth baffle 18 is provided with a second through hole. In this embodiment, a mounting rod can be fixedly provided at the bottom of the connecting seat 30, and the fourth baffle 17 and the fifth baffle 18 can be fixed to the mounting rod by welding or screwing. The upper end of the separator 10 is open, and the mounting seat is provided at the above-mentioned opening to close the opening. A sealing ring can also be provided on the contact surface between the separator 10 and the mounting seat to prevent gas leakage. In addition, the inner diameter of the first through hole can be larger than the inner diameter of the second through hole. Since there are very few droplets when the airflow is transmitted to the air outlet, the first through hole is larger than the second through hole, which can reduce the obstruction of the airflow by the top baffle.

[0033] In some embodiments, reference Figure 2The separator 10 further comprises a connecting pipe 19 connecting the connector itself and the collector 20 at the lower end, and the connecting pipe 19 can be regarded as a part of the separator 10. The lower end of the connecting pipe 19 can be provided with a tee pipe, and the lower end of the tee pipe is in communication with the collector 20, and the tee pipe can be connected with the collector 20 through a flange. The side opening of the tee pipe serves as the above-mentioned gas inlet hole 11. By providing the connecting pipe 19, the gas mist can collide and combine with each other during the rising process in the connecting pipe 19, and can fall under the action of gravity, and the preliminary gas-liquid separation can be completed in the connecting pipe 19. The top of the connecting seat can be provided with a negative pressure fan or a factory fan, and the negative pressure fan can be used to discharge the waste gas in the cleaning station area to a designated area; the top device has a two-stage multi-hole partition plate (the fourth baffle 17 and the fifth baffle 18), which realizes secondary gas-liquid separation; the device has an exhaust detection port, and the device can be maintained and repaired by detecting the change of the air pressure of the inductor. The device is simple and can be detachably connected, and the internal cleaning, maintenance and repair of the device are facilitated.

[0034] In some embodiments, referring to Figure 2 , the lower end of the collector 20 is provided with a liquid discharge interface 22. In the present embodiment, the bottom surface of the collector 20 can be provided with an inclined surface, and the liquid discharge interface 22 can be arranged at the bottom of the inclined surface, so as to ensure that the accumulated liquid can be completely discharged.

[0035] In some embodiments, referring to Figure 1 , the collector 20 comprises a liquid collecting tank in communication with the accommodating cavity A, and the side of the liquid collecting tank in abutment with the separator 10 is further provided with an observation window 21. In the present embodiment, the observation window 21 can be sealed by a glass or acrylic plate, and the liquid level in the liquid collecting tank can be observed through the observation window 21, so as to clean the collected liquid in time. Of course, a liquid discharge groove can also be arranged at the edge of the upper end of the liquid collecting tank, so as to facilitate the pouring of the waste liquid from the groove.

[0036] It is worth noting that the two embodiments in Figure 1 and Figure 2 can be combined, the connecting pipe 19 is arranged in the form of a square pipe, and a plurality of baffles are arranged in the pipe, and the plurality of baffles are installed in the form of the baffle assembly in Figure 1 , that is, the gas-liquid separator can be separated through the baffles in the connecting pipe 19, and the separation effect is better through the fourth baffle 17 and the fifth baffle 18 above.

[0037] The present application also provides a processing equipment, referring to Figure 1 and Figure 2 , the processing equipment comprises the above-mentioned gas-liquid separation device, and a rack for mounting the gas-liquid separation device. In the present embodiment, the processing equipment is mainly used for processing wafer products. The gas-liquid separation device can be connected with an external filtering device through a pipeline, so as to further dehumidify or purify the gas.

[0038] In the embodiment of the present application, the specific working principle of the gas-liquid separation device and the processing equipment is as follows: the gas-liquid separation device and the processing equipment include a separator 10, a collector 20 and a connecting seat 30, the separator 10 is provided with a accommodating chamber A inside, and an air inlet 11 connected to the accommodating chamber A is provided on the side, and a baffle assembly is also provided in the accommodating chamber A; the collector 20 is provided at the lower end of the separator 10, and is connected to the accommodating chamber A for collecting liquid; the connecting seat 30 is provided at the upper end of the separator 10, and the side of the connecting seat 30 away from the separator 10 is provided with a mounting portion and an annular baffle 32, and the annular baffle 32 is provided on the outer periphery of the mounting portion; the mounting portion is provided with an air outlet connected to the accommodating chamber A, and a seepage hole 33 connected to the accommodating chamber A is also provided between the mounting portion and the annular baffle 32. Gas enters chamber A through inlet 11, colliding with the baffle assembly to separate droplets, which condense and fall into collector 20. The gas is then discharged through the outlet of the mounting portion, which is used to mount external piping. Droplets condensing on the inner wall of the external piping can also leak into collector 20 through seepage holes 33. Annular baffle 32 prevents the droplets from overflowing. Waste liquid accumulated in collector 20 can be discharged through drain port 22, and the liquid level can be identified through observation window 21.

[0039] The above are only partial or preferred embodiments of the present application. Neither the text nor the drawings can limit the scope of protection of the present application. All equivalent structural transformations made using the contents of the present application specification and drawings under the overall concept of the present application, or direct / indirect application in other related technical fields are included in the scope of protection of the present application.

Claims

1. A gas-liquid separation device, characterized in that: include: The separator has an accommodating cavity inside and an air inlet hole in communication with the accommodating cavity on its side, and a baffle assembly is also provided in the accommodating cavity; a collector, disposed at the lower end of the separator and in communication with the accommodating cavity, for collecting liquid; A connecting seat is provided at the upper end of the separator. A mounting portion and an annular baffle are provided on the side of the connecting seat away from the separator. The annular baffle is provided on the outer periphery of the mounting portion. An air outlet hole connected to the accommodating cavity is provided on the mounting portion, and a seepage hole connected to the accommodating cavity is also provided between the mounting portion and the annular baffle.

2. The gas-liquid separation device according to claim 1, characterized in that: The baffle assembly includes a first mounting plate arranged on the upper side of the air inlet, and a first baffle arranged on the first mounting plate; the first mounting plate is arranged along the air inlet direction, the first baffle is arranged opposite the air inlet, and the lower end faces the collector; the first baffle separates the accommodating cavity into a first chamber close to the air inlet, and a second chamber away from the air inlet.

3. The gas-liquid separation device according to claim 2, characterized in that: The first baffle assembly also includes a second baffle arranged above the first mounting plate, and the second baffle faces the second chamber; one end of the second baffle is connected to the side wall of the accommodating chamber away from the air inlet hole, and the other end is spaced apart from the side wall of the accommodating chamber where the air inlet hole is provided.

4. The gas-liquid separation device according to claim 3, characterized in that: A side wall of the separator adjacent to the air inlet is provided with an inspection port, the inspection port is provided with a sealing plate, and the second baffle is provided on the sealing plate.

5. The gas-liquid separation device according to claim 3, characterized in that: The baffle assembly also includes a third baffle with one end disposed on the connecting seat. The third baffle is spaced apart from the second baffle and faces the air outlet. The other end of the third baffle is spaced apart from the side wall of the accommodating cavity away from the air inlet.

6. The gas-liquid separation device according to any one of claims 1 to 5, characterized in that: The baffle assembly also includes a fourth baffle disposed below the connecting seat and facing the air outlet, and a fifth baffle located on a side of the fourth baffle away from the air outlet, wherein a first through hole is provided on the fourth baffle and a second through hole is provided on the fifth baffle.

7. The gas-liquid separation device according to claim 6, characterized in that: An inner diameter of the first through hole is greater than an inner diameter of the second through hole.

8. The gas-liquid separation device according to claim 1, characterized in that: The lower end of the collector is provided with a drainage interface.

9. The gas-liquid separation device according to claim 1, characterized in that: The collector includes a liquid collecting box communicated with the accommodating cavity, and an observation window is further provided on a side of the liquid collecting box that is docked with the separator.

10. A processing equipment, characterized in that, The invention comprises the gas-liquid separation device according to any one of claims 1 to 9, and a frame for installing the gas-liquid separation device.

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