Chemical mechanical polishing equipment

Abstract

The utility model discloses chemical mechanical polishing equipment which comprises a front module, a polishing module, a cleaning module, a transfer module and a liquid receiving module, the transfer module comprises a first driving assembly and a pickup part, the pickup part is used for picking up products, the first driving assembly is used for driving the pickup part to move, and the first driving assembly is used for driving the pickup part to move; and the liquid receiving module comprises a liquid receiving disc and a second driving assembly, and the second driving assembly is used for driving the liquid receiving disc to move under the picking piece and / or the product along with the picking piece so that the liquid receiving disc can collect liquid falling from the picking piece and / or the product. According to the liquid receiving tray, the occupied maintenance space can be reduced, maintenance is facilitated, the weight of the liquid receiving tray can be reduced, and then the liquid receiving tray can be conveniently disassembled and assembled.

Description

Technical Field

[0001] The present application relates to the technical field of chemical mechanical polishing, and in particular to a chemical mechanical polishing device. Background Art

[0002] In related technologies, chemical mechanical polishing equipment typically uses a dry-in-dry process. Specifically, wafers are removed from a front-opening unified pod (FOUP) and transferred to a polishing module for grinding and polishing. After polishing, the wafers are transferred to a cleaning module for cleaning. Once cleaned to a certain level of cleanliness, they are returned to the FOUP.

[0003] Because wafers come into contact with polishing fluid, deionized water, and other liquids during polishing, some liquid may drip during wafer transfer after polishing. To prevent the liquid from leaking outside the equipment, a liquid collection tray is typically installed in the dripping area to collect the liquid.

[0004] However, since the liquid collecting pan in the related art is an integral liquid collecting pan covering the entire liquid dripping area, on the one hand, the integral liquid collecting pan occupies a large space, which will occupy maintenance space and make maintenance inconvenient; on the other hand, the integral liquid collecting pan is heavy and inconvenient to disassemble and install. Utility Model Content

[0005] In response to the above-mentioned deficiencies in the related art, the present application provides a chemical mechanical polishing device to solve the problem in the related art that the integrated water receiving tray occupies a large space and is heavy.

[0006] In order to solve the above technical problems, in a first aspect, the present application provides a chemical mechanical polishing device, which includes:

[0007] A front module, which is used for checking in and out of products;

[0008] a polishing module, the polishing module being used to polish the unpolished product detected by the front module;

[0009] a cleaning module, the cleaning module being used to clean the polished product;

[0010] A transfer module, comprising a first drive assembly and a picking member, wherein the picking member is used to pick up the product, and the first drive assembly is used to drive the picking member to move so as to transfer the product detected by the front module between the polishing module and the cleaning module;

[0011] The liquid receiving module includes a liquid receiving pan and a second drive assembly, wherein the second drive assembly is used to drive the liquid receiving pan to follow the picking member and move directly below the picking member and / or the product, so that the liquid receiving pan collects liquid falling from the picking member and / or the product.

[0012] In a possible implementation of the first aspect, the liquid receiving tray is provided with a collecting tank, and the collecting tank is used to collect the liquid;

[0013] In the direction from the slot opening of the collecting tank to the bottom wall of the collecting tank, the bottom wall is gradually arranged away from the slot opening to form the lowest position farthest from the slot opening on the bottom wall, and a first liquid discharge port is arranged at the lowest position.

[0014] In a possible implementation of the first aspect, the bottom wall of the groove includes:

[0015] a first bottom wall section;

[0016] The second bottom wall section is connected to the first bottom wall section, and the second bottom wall section and the first bottom wall section are arranged in a V shape, and the connection position of the second bottom wall section and the first bottom wall section is the lowest position.

[0017] In a possible implementation of the first aspect, the liquid contact module further includes:

[0018] a liquid drain pipe, the liquid drain pipe being connected to the liquid receiving tray;

[0019] A liquid collecting piece, the liquid collecting piece is connected to the liquid drain pipe, and the liquid collecting piece is used to collect the liquid discharged from the liquid receiving tray through the liquid drain pipe

[0020] In a possible implementation of the first aspect, the drain pipe is disposed on the liquid receiving tray, and the second driving assembly is used to drive the liquid receiving tray and the drain pipe to move synchronously along the first direction;

[0021] The liquid collecting piece is provided with a strip opening for inserting the liquid drain tube into the liquid collecting piece. The length of the strip opening extends along the first direction, and the length of the strip opening is greater than or equal to the moving distance of the liquid drain tube in the first direction.

[0022] In a possible implementation of the first aspect, the liquid collection member has a first end and a second end in the first direction, the first end is provided with a second liquid discharge port, and the liquid collection member is gradually tilted downward from the second end to the first end.

[0023] In a possible implementation of the first aspect, the liquid receiving module further includes a guide component, and the guide component is used to guide the movement of the liquid receiving tray.

[0024] In a possible implementation of the first aspect, the chemical mechanical polishing equipment further includes:

[0025] First rack;

[0026] A second frame, wherein the second frame and the first frame are spaced apart along a second direction, the second drive assembly is arranged on the first frame, the guide assembly is arranged on the second frame, and the two ends of the liquid receiving tray in the second direction are respectively connected to the second drive assembly and the guide assembly.

[0027] In a possible implementation of the first aspect, the second driving assembly includes a first slider and a driving member, the first slider is connected to the liquid receiving tray, and the driving member is used to drive the first slider to move; and / or,

[0028] The guide assembly includes a guide rail and a second slider, the second slider is guided on the guide rail, and the second slider is connected to the liquid receiving tray.

[0029] In a possible implementation of the first aspect, the transfer module further includes a position detection component, and the position detection component is used to detect the position of the picking member;

[0030] The chemical polishing equipment also includes a controller, which is connected to the position detection component and the second drive component signal. The controller is used to send instructions to the second drive component based on the position information of the picking part, so that the second drive component drives the liquid receiving plate to follow the picking part and move directly below the picking part and / or the product.

[0031] Compared with the related art, this application has at least the following beneficial effects:

[0032] In this application, since the transfer module includes a first drive assembly and a pickup member, and since the pickup member is used to pick up products, the first drive assembly is used to drive the pickup member to move, thereby transferring products detected by the pre-module between the polishing module and the cleaning module. Therefore, when the transfer module transfers wafers, the first drive assembly drives the pickup member to move, thereby transferring the wafers detected by the pre-module between the polishing module and the cleaning module.

[0033] Furthermore, since the liquid receiving module includes a liquid receiving tray and a second drive assembly, and since the second drive assembly is used to drive the liquid receiving tray to follow the picking member and move directly below the picking member and / or the product, so that the liquid receiving tray collects liquid that falls from the picking member and / or the product, the liquid receiving tray can be driven by the second drive assembly to follow the picking member and move directly below the picking member and / or the wafer, thereby collecting liquid that falls from the picking member and / or the wafer.

[0034] Compared to related technologies, the present invention uses a second drive assembly to drive the liquid collection pan, allowing the liquid collection pan to only be operated in areas where liquid is actually dripping. Unlike an integrated liquid collection pan, which needs to be made large to cover all areas where liquid may drip, the liquid collection pan of the present invention can be relatively small. Furthermore, on the one hand, the space occupied by the liquid collection pan can be reduced, which can reduce the maintenance space occupied by the liquid collection pan and facilitate maintenance. On the other hand, the weight of the liquid collection pan can be reduced, which can facilitate the removal and installation of the liquid collection pan. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 A schematic diagram of a chemical mechanical polishing apparatus provided in an embodiment of the present application;

[0037] Figure 2 A three-dimensional diagram of the layout of the cleaning module, transfer module, and liquid receiving module provided in an embodiment of the present application;

[0038] Figure 3 One of the schematic diagrams of the transfer module transfer product provided in the embodiment of the present application;

[0039] Figure 4 The second schematic diagram of the transfer module transfer product provided in the embodiment of the present application;

[0040] Figure 5 The third schematic diagram of the transfer module transfer product provided in the embodiment of the present application;

[0041] Figure 6 A schematic diagram of the assembly of the liquid receiving tray and the drain pipe provided in an embodiment of the present application;

[0042] Figure 7 Schematic diagram of the assembly of the liquid receiving tray, drain pipe and liquid collecting member provided in the embodiment of the present application;

[0043] Figure 8 A schematic diagram of assembling the guide assembly provided in an embodiment of the present application on the second frame;

[0044] Figure 9 Schematic diagram of the assembly of the second drive assembly on the first frame provided in an embodiment of the present application.

[0045] Description of reference numerals:

[0046] 1-front module;

[0047] 2-Polishing module;

[0048] 3-cleaning module; 31-first cleaning component; 32-second cleaning component;

[0049] 4-transfer module; 41-first drive assembly; 42-pickup member;

[0050] 5-Products;

[0051] 6-liquid receiving tray; 61-collecting tank; 611-notch; 612-bottom wall of the tank; 6121-first bottom wall section; 6122-second bottom wall section; 613-lowest position; 62-first liquid discharge port;

[0052] 7- second driving assembly; 71- first slider; 72- driving member;

[0053] 8-Maintenance channel;

[0054] 9-First temporary storage station;

[0055] 10-Second temporary storage station;

[0056] 20-drain pipe;

[0057] 30-liquid collecting member; 301-strip opening; 302-second liquid discharge port;

[0058] 40-guide assembly; 401-guide rail; 402-second slider;

[0059] 50-first rack;

[0060] 60-Second rack. DETAILED DESCRIPTION

[0061] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0062] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0063] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0064] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0065] Furthermore, the terms "first," "second," etc., are primarily used to distinguish between different devices, elements, or components (which may or may not be of the same type and configuration), and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0066] As described in the background of this application, chemical mechanical polishing equipment typically uses a dry-in-dry process. Specifically, wafers are removed from a front-opening unified pod (FOUP) and transferred to a polishing module for grinding and polishing. After polishing, the wafers are transferred to a cleaning module for cleaning. Once cleaned to a certain level of cleanliness, they are returned to the FOUP.

[0067] Because wafers come into contact with polishing fluid, deionized water, and other liquids during polishing, some liquid may drip during wafer transfer after polishing. To prevent the liquid from leaking outside the equipment, a liquid collection tray is typically installed in the dripping area to collect the liquid.

[0068] However, since the liquid collecting pan in the related art is an integral liquid collecting pan covering the entire liquid dripping area, on the one hand, the integral liquid collecting pan occupies a large space, which will occupy maintenance space and make maintenance inconvenient; on the other hand, the integral liquid collecting pan is heavy and inconvenient to disassemble and install.

[0069] In view of the above-mentioned problems, the present application provides a chemical mechanical polishing device to solve the problem in the related art that the integrated water receiving tray occupies a large space and is heavy.

[0070] The technical solution of this application will be further described below with reference to specific embodiments and drawings:

[0071] As shown in Figure 1 and Figure 2 , the chemical mechanical polishing device comprises a pre-module 1, a polishing module 2, a cleaning module 3, a transfer module 4 and a liquid receiving module. The pre-module 1 is used for detecting and checking in the product 5, the polishing module 2 is used for polishing the unpolished product 5 detected by the pre-module 1, and the cleaning module 3 is used for cleaning the polished product 5.

[0072] As shown in Figure 1 and Figure 2 , the transfer module 4 comprises a first driving assembly 41 and a pickup 42, the pickup 42 is used for picking up the product 5, and the first driving assembly 41 is used for driving the pickup 42 to move to transfer the product 5 detected by the pre-module 1 between the polishing module 2 and the cleaning module 3.

[0073] As shown in Figure 1 and Figure 2 , the liquid receiving module comprises a liquid receiving tray 6 and a second driving assembly 7, the second driving assembly 7 is used for driving the liquid receiving tray 6 to move below the pickup 42 and / or the product 5 to follow the pickup 42, so that the liquid receiving tray 6 collects the liquid falling from the pickup 42 and / or the product 5.

[0074] In this application, since the transfer module 4 comprises the first driving assembly 41 and the pickup 42, and since the pickup 42 is used for picking up the product 5, and the first driving assembly 41 is used for driving the pickup 42 to move to transfer the product 5 detected by the pre-module 1 between the polishing module 2 and the cleaning module 3. Therefore, when the transfer module 4 transfers the wafer (i.e. the product 5 is a wafer), the pickup 42 can be driven by the first driving assembly 41 to move to transfer the wafer detected by the pre-module 1 between the polishing module 2 and the cleaning module 3.

[0075] In addition, since the liquid receiving module comprises the liquid receiving tray 6 and the second driving assembly 7, and since the second driving assembly 7 is used for driving the liquid receiving tray 6 to move below the pickup 42 and / or the product 5 to follow the pickup 42, so that the liquid receiving tray 6 collects the liquid falling from the pickup 42 and / or the product 5. Therefore, under the driving of the second driving assembly 7, the liquid receiving tray 6 can be moved below the pickup 42 and / or the wafer to follow the pickup 42, and the liquid receiving tray 6 can collect the liquid falling from the pickup 42 and / or the wafer.

[0076] Compared with the related art, the present application drives the liquid receiving pan 6 to move through the second drive assembly 7, so that the liquid receiving pan 6 only needs to receive liquid in the area where liquid is actually dripping. Unlike the integral liquid receiving pan, it does not need to be made large to cover all areas where liquid may drip. As a result, the liquid receiving pan 6 in the present application has a relatively small size. Furthermore, on the one hand, it can reduce the space occupied by the liquid receiving pan 6 and the maintenance space occupied by the liquid receiving pan 6, which is conducive to convenient maintenance. On the other hand, it can also reduce the weight of the liquid receiving pan 6, which is conducive to convenient disassembly and installation of the liquid receiving pan 6.

[0077] In a preferred embodiment, Figure 1 and Figure 2 As shown, the cleaning module 3 includes a first cleaning component 31 and a second cleaning component 32 arranged at intervals, and the interval between the first cleaning component 31 and the second cleaning component 32 forms a maintenance channel 8, and the length direction of the maintenance channel 8 is along the first direction (such as Figure 1 Because the maintenance passage within the polishing module 2 is relatively narrow, in a preferred embodiment, the second drive assembly 7 only drives the liquid receiving pan 6 to move within the maintenance passage 8 along the first direction. This shortens the travel of the liquid receiving pan 6 driven by the second drive assembly 7, facilitating the second drive assembly 7's drive of the liquid receiving pan 6.

[0078] like Figure 1 and Figure 2 As shown, the chemical mechanical polishing equipment also includes a first temporary storage table 9 and a second temporary storage table 10. The first temporary storage table 9 is arranged in the maintenance channel 8 and is close to the front module 1. The first temporary storage table 9 is used to temporarily store the product 5 detected by the front module 1. The second temporary storage table 10 is arranged close to the polishing module 2 and the cleaning module 3. The second temporary storage table 10 is used to temporarily store the product 5 transferred from the polishing module 2. With this arrangement, during the process of transferring the product 5, the first temporary storage table 9 and the second temporary storage table 10 facilitate the storage of the product 5 during the transfer process. At the same time, after the product 5 is temporarily stored on the temporary storage table, the transfer module 4 can continue to transfer other products 5, which is conducive to improving the processing efficiency of the product 5.

[0079] During the processing of product 5, after polishing, if Figure 3 As shown, the first driving component 41 drives the picking member 42 to move, so that the picking member 42 can pick up the product 5 temporarily stored on the second temporary storage table 10, and then Figure 4 As shown, the picking member 42 can also be used to transfer the product 5 to the first cleaning assembly 31 or the second cleaning assembly 32 to clean the polished product 5.

[0080] Because the product 5 comes into contact with liquids such as polishing fluid and deionized water during polishing, and because the picker 42 comes into contact with liquid on the product 5 when the polished product 5 is transferred, there is a possibility that liquid will drip not only onto the product 5 but also onto the picker 42 during the process of moving from the second temporary storage station 10 to the first cleaning assembly 31 or the second cleaning assembly 32. In this case, the second drive assembly 7 drives the liquid receiving tray 6 to follow the picker 42 and move directly below the picker 42 and the product 5. This allows the liquid receiving tray 6 to collect liquid that falls from the picker 42 and the product 5, thereby preventing liquid from dripping outside the equipment during this process.

[0081] Since the front module 1 includes a robotic arm for transferring the product 5 from the cleaning module 3 to the front module 1 and a front-opening wafer pod for storing the product 5, after cleaning, the robotic arm in the front module 1 can directly transfer the cleaned product 5 from the cleaning module 3 to the front module 1, completing the check-in of the product 5 by the front module 1, and then the product 5 can be stored in the front-opening wafer pod.

[0082] During this process, since the product 5 transferred out of the cleaning module 3 is in a dry state and is transferred by the robotic arm in the front module 1, there is no liquid dripping during this process, and the liquid receiving module does not need to perform liquid receiving operations during this process. This can simplify the liquid receiving process of the liquid receiving module and facilitate the liquid receiving operation.

[0083] Before the next batch of products 5 are polished, Figure 5 As shown, the first driving component 41 drives the picking member 42 to move, so that the picking member 42 can pick up the product 5 temporarily stored on the first temporary storage table 9, and then Figure 3 As shown, the picking member 42 can also be used to transfer the product 5 to the second temporary storage station 10 for polishing.

[0084] During this process, since there is still liquid from the previous batch of products 5 remaining on the picking member 42, the second driving component 7 drives the liquid receiving pan 6 to follow the picking member 42 and move directly below the picking member 42, so that the liquid receiving pan 6 can collect the liquid falling from the picking member 42, thereby preventing the liquid from dripping out of the equipment during this process.

[0085] In other embodiments, during the process from the second temporary storage station 10 to the cleaning module 3, when there is no liquid dripping from the picking member 42, the second drive assembly 7 only needs to drive the liquid receiving pan 6 to follow the picking member 42 and move directly below the product 5, so that the liquid receiving pan 6 can collect liquid that has fallen from the product 5. This configuration can further reduce the size of the liquid receiving pan 6, thereby further reducing the maintenance space occupied by the liquid receiving pan 6 and further reducing the weight of the liquid receiving pan 6.

[0086] For the pre-module 1, the polishing module 2 and the cleaning module 3, in the embodiments of the present application, the pre-module 1, the polishing module 2 and the cleaning module 3 are flexibly arranged, and specifically, the arrangement can be made according to actual needs, which is not limited in the embodiments of the present application.

[0087] For the transfer module 4, in the preferred embodiments, the transfer module 4 is a mechanical arm, in which case, the first driving assembly 41 includes a plurality of connecting rods, a plurality of joints, and a motor driving the joints to act, and the pickup 42 is an end effector such as a robot hand.

[0088] Since the mechanical arm has multiple degrees of freedom and multiple joints that can rotate flexibly, it can move in a three-dimensional space with multiple complex paths, easily adapt to different work scenes and task requirements, and thus facilitate the transfer of the product 5.

[0089] In other embodiments, the transfer module 4 can also include a motor, a conveyor belt mechanism, and a suction cup, wherein the conveyor belt mechanism is connected to the motor in transmission, and the suction cup is arranged on the transmission belt mechanism, in which case, the first driving assembly 41 includes the motor and the transmission belt mechanism, and the pickup 42 is the suction cup. Alternatively, the transfer module 4 can also include a motor, a guide rail, a sliding block, and a clamp, wherein the sliding block is guided to be arranged on the guide rail, the motor is connected to the sliding block in transmission, and the clamp is arranged on the sliding block, in which case, the first driving assembly 41 includes the motor, the guide rail and the sliding block, and the pickup 42 is the clamp. As can be seen, the transfer module 4 is flexibly arranged, and specifically, the arrangement can be made according to actual needs.

[0090] For the product 5, in the embodiments of the present application, the product 5 can be an optical lens, a hard disk or a ceramic substrate in addition to a wafer. The type of the product 5 is flexibly selected, and specifically, the type can be determined according to the actual application scene of the chemical mechanical polishing equipment.

[0091] For the liquid receiving tray 6, further, as shown in Figure 6 , the liquid receiving tray 6 is provided with a collection groove 61 for collecting liquid.

[0092] In the direction from the groove opening 611 of the collection groove 61 to the groove bottom wall 612 of the collection groove 61, the groove bottom wall 612 is gradually arranged away from the groove opening 611 to form a lowest position 613 farthest from the groove opening 611 on the groove bottom wall 612, and the first liquid discharge port 62 is arranged at the lowest position 613.

[0093] In the direction from the notch 611 to the bottom wall 612, the bottom wall 612 is gradually positioned away from the notch 611, so that the bottom wall 612 is gradually inclined from top to bottom. In this way, when liquid drips into the collection tank 61, due to gravity, the liquid will flow along the inclined bottom wall 612 to the lowest position 613, and then naturally discharge from the collection tank 61 through the first drain port 62 at the lowest position 613, making the drainage process smoother and avoiding the problem of liquid residue caused by the unreasonable position of the first drain port 62.

[0094] In other embodiments, the bottom wall 612 may also be a horizontal bottom wall. This configuration can simplify the structure of the bottom wall 612 and further simplify the structure of the collecting tank 61, which is conducive to facilitating the processing of the collecting tank 61.

[0095] Furthermore, if Figure 6 As shown, the groove bottom wall 612 includes a first bottom wall section 6121 and a second bottom wall section 6122. The second bottom wall section 6122 is connected to the first bottom wall section 6121, and the second bottom wall section 6122 and the first bottom wall section 6121 are arranged in a V shape. The connection position between the second bottom wall section 6122 and the first bottom wall section 6121 is the lowest position 613.

[0096] With this arrangement, after liquid drips into the slot 611, some of the liquid can converge toward the lowest position 613 along the inclined first bottom wall section 6121, while another portion of the liquid can converge toward the lowest position 613 along the inclined second bottom wall section 6122. As can be seen, the liquid only needs to flow through a portion of the slot bottom wall 612 to reach the lowest position 613. This shortens the liquid flow path and allows the liquid to be collected at the lowest position 613 more quickly.

[0097] In other embodiments, the groove bottom wall 612 may also be a single inclined bottom wall. In this case, in the length direction or width direction of the groove bottom wall 612, one end of the groove bottom wall 612 is the highest position closest to the groove opening 611, and the other end is the lowest position 613 farthest from the groove opening 611, and the groove bottom wall 612 is gradually inclined downward from the highest position to the lowest position 613.

[0098] Such an arrangement can simplify the structure of the groove bottom wall 612 at the lowest position 613 to a certain extent, and facilitates the processing of the groove bottom wall 612 .

[0099] For the liquid contact module, further, as Figure 6 and Figure 7 As shown, the liquid receiving module also includes a drain pipe 20 and a liquid collecting piece 30, wherein the drain pipe 20 is connected to the liquid receiving pan 6, and the liquid collecting piece 30 is connected to the drain pipe 20, and the liquid collecting piece 30 is used to collect the liquid discharged from the liquid receiving pan 6 through the drain pipe 20.

[0100] With this arrangement, when the liquid in the liquid receiving pan 6 reaches a certain amount or needs to be cleaned, the liquid can be smoothly drained into the liquid collecting member 30 through the drain pipe 20. The presence of the liquid collecting member 30 allows the liquid discharged from the liquid receiving pan 6 to be collected together, which is beneficial for subsequent processing of the liquid and also helps to prevent the liquid in the liquid receiving pan 6 from being overfilled and overflowing.

[0101] In a preferred embodiment, the drain pipe 20 is connected to the first drain port 62 and communicates with the first drain port 62. This arrangement facilitates the communication between the drain pipe 20 and the liquid receiving tray 6.

[0102] Furthermore, if Figure 6 and Figure 7 As shown, the drain pipe 20 is provided on the liquid receiving tray 6 , and the second driving assembly 7 is used to drive the liquid receiving tray 6 and the drain pipe 20 to move synchronously along the first direction.

[0103] like Figure 7 As shown, the liquid collecting piece 30 is provided with a strip opening 301 for the drainage tube 20 to be inserted into the liquid collecting piece 30. The length direction of the strip opening 301 extends along the above-mentioned first direction, and the length of the strip opening 301 is greater than or equal to the moving distance of the drainage tube 20 in the first direction.

[0104] With such an arrangement, first, the second drive assembly 7 drives the liquid receiving pan 6 and the drain pipe 20 to move synchronously along the first direction, so that the drain pipe 20 can always maintain a relatively fixed connection state with the liquid receiving pan 6, and will not be disconnected or twisted due to the movement of the liquid receiving pan 6, thereby ensuring that the liquid collected in the liquid receiving pan 6 can be continuously and stably discharged through the drain pipe 20.

[0105] Secondly, a strip opening 301 extending along the first direction and having a sufficient length is provided on the liquid collecting part 30, which provides sufficient space for the insertion of the drainage tube 20 during the movement, so that the drainage tube 20 can maintain communication with the liquid collecting part 30 no matter where it is in the first direction, thereby ensuring the normal realization of the drainage function of the liquid collecting plate 6 moving along the first direction.

[0106] Finally, the synchronized movement and coordinated design of the strip-shaped openings 301 eliminate the need for complex telescopic, diverting, or multi-section connections on the drain pipe 20 to accommodate the movement of the liquid collection tray 6, simplifying the overall drainage structure of the device. Furthermore, the simpler the structure, the lower the probability of failures such as loose pipe connections, seal failures, and mechanical component jamming, helping to improve the reliability and stability of the device's operation and reduce the workload and cost of equipment maintenance.

[0107] In other embodiments, when the liquid discharge pipe 20 is inserted into the one end of the liquid collecting member 30, the shape of the opening of the liquid collecting member 30 for the insertion of the liquid discharge pipe 20 can be any shape such as a circular shape or a square shape. In this case, the shape of the opening can be designed flexibly, and in particular, can be designed according to actual needs.

[0108] Further, the liquid collecting member 30 has a first end and a second end in the first direction, as shown in Figure 7 , the first end is provided with a second liquid discharge port 302, and the liquid collecting member 30 is gradually inclined downward from the second end to the first end.

[0109] The liquid collecting member 30 is gradually inclined downward from the second end to the first end, which utilizes the action of gravity to enable the liquid collected in the liquid collecting member 30 to naturally converge towards the first end. The second liquid discharge port 302 is arranged at the first end, so that when the liquid needs to be discharged, the liquid can flow out of the second liquid discharge port 302 under the action of gravity, without the need for additional power equipment to drive the liquid to be discharged, facilitating the discharge of the liquid in the liquid collecting member 30.

[0110] Further, the second liquid discharge port 302 is also in communication with a drain pipe of the machine. In this way, the liquid in the liquid collecting member 30 can be transported to a pre-set treatment system outside the machine, so that whether the liquid is recycled or treated in a harmless manner according to environmental protection requirements, it can be completed in a unified external treatment process, facilitating the treatment of the liquid in the liquid collecting member 30.

[0111] For the liquid receiving module, further, as shown in Figure 1 and Figure 8 , the liquid receiving module further comprises a guide assembly 40 for guiding the movement of the liquid receiving disc 6.

[0112] Since the liquid receiving disc 6 needs to be accurately moved to the position directly below the pickup 42 and / or the product 5 to collect the liquid, and the guide assembly 40 can provide precise path guidance for the movement of the liquid receiving disc 6, the liquid receiving disc 6 can move according to a predetermined trajectory, so as to be more accurately positioned below the position where the liquid drops, effectively avoiding the situation that the liquid cannot be completely collected due to positional deviation.

[0113] Further, as shown in Figure 2 , the chemical mechanical polishing device further comprises a first rack 50 and a second rack 60, wherein the second rack 60 and the first rack 50 are arranged in a second direction (such as the X direction in Figure 1 ) and are spaced apart, the second driving assembly 7 is arranged on the first rack 50, the guide assembly 40 is arranged on the second rack 60, and the two ends of the liquid receiving disc 6 in the second direction are connected to the second driving assembly 7 and the guide assembly 40, respectively.

[0114] This arrangement, on the one hand, achieves a rational spatial distribution of the equipment components by placing the second drive assembly 7 on the first frame 50 and the guide assembly 40 on the second frame 60, with the two frames spaced apart along the second direction. This layout fully utilizes the space in the equipment in the second direction, avoiding spatial congestion caused by the drive assembly and guide assembly being located in the same position. This makes the equipment structure more compact and orderly, leaving ample space for other modules, facilitating the overall layout of the equipment and the installation of other necessary components.

[0115] On the other hand, the two ends of the liquid collection pan 6 in the second direction are connected to the second drive assembly 7 and the guide assembly 40, respectively. This provides support and restraint for the liquid collection pan 6 from two different positions. The second drive assembly 7 is responsible for driving the movement of the liquid collection pan 6, while the guide assembly 40 is responsible for ensuring that the liquid collection pan 6 moves along the correct path. The two work together to more stably control the position and movement of the liquid collection pan 6, thereby improving the operating accuracy of the liquid collection pan 6 during the liquid collection process.

[0116] Regarding the end portion of the liquid receiving tray 6 , it needs to be explained that the end portion includes the top, side, and bottom portion of one end of the liquid receiving tray 6 in the second direction.

[0117] In a preferred embodiment, in the first direction, the travel of the liquid receiving pan 6 driven by the second driving assembly 7 and the travel of the liquid receiving pan 6 guided by the guide assembly 40 are both greater than the moving distance of the picking member 42 and the product 5 .

[0118] With this arrangement, the liquid collecting pan 6 has a sufficient range of movement to cover all possible positions of the product 5 and the picking member 42. In this way, no matter where the liquid drips in the moving path of the product 5 and the picking member 42, the liquid collecting pan 6 can move to the corresponding position to collect it, thereby preventing the liquid from dripping to other parts of the equipment and causing contamination or damage.

[0119] Furthermore, if Figure 9 As shown, the second driving assembly 7 includes a first slider 71 and a driving member 72, the first slider 71 is connected to the liquid receiving tray 6, and the driving member 72 is used to drive the first slider 71 to move; and / or, as Figure 8 As shown, the guide assembly 40 includes a guide rail 401 and a second slider 402 . The second slider 402 is guided on the guide rail 401 , and the second slider 402 is connected to the liquid receiving tray 6 .

[0120] With this arrangement, first, the first slider 71 is connected to the liquid receiving pan 6, and the driver 72 can precisely drive the first slider 71 to move, thereby driving the liquid receiving pan 6. This slider movement allows for relatively precise displacement control, as the driver 72 can accurately control the movement of the first slider 71 within a specific distance, speed, and direction according to pre-set programs or parameters.

[0121] Secondly, the guide rail 401 generally has high straightness and flatness, which allows the second slider 402 to remain stable when sliding on it, thereby facilitating the smooth movement of the liquid receiving tray 6. Moreover, this guide method can withstand a certain amount of lateral force, ensuring that the liquid receiving tray 6 will not deviate from the predetermined path due to external interference (such as equipment vibration, minor collisions, etc.) during movement.

[0122] Finally, the second drive assembly 7 and guide assembly 40 are relatively independent, consisting of the slider and other major components (drive member 72 or guide rail 401), making them easy to disassemble and install. If the first slider 71, drive member 72, second slider 402, or guide rail 401 malfunctions, technicians can easily remove them from the equipment for repair or replacement.

[0123] In a preferred embodiment, Figure 8 and Figure 9 As shown, the second driving assembly 7 includes a first slider 71 and a driving member 72 , the guide assembly 40 includes a guide rail 401 and a second slider 402 , and the first slider 71 and the second slider 402 are arranged at the same height.

[0124] With such arrangement, on the one hand, since the components of the second drive assembly 7 and the guide assembly 40 are relatively independent, the second drive assembly 7 and the guide assembly 40 are easy to disassemble and install, which is conducive to further facilitating the maintenance of the equipment.

[0125] On the other hand, the first slider 71 and the second slider 402 are set at the same height, so that the liquid receiving tray 6 can always remain horizontal during the movement under the joint support of the two sliders, ensuring that the liquid receiving tray 6 can stably collect the falling liquid and improve the reliability of liquid collection.

[0126] Regarding the drive member 72, in the embodiment of the present application, the drive member 72 may be a linear drive module or an electric cylinder. The linear drive module may be a ball screw linear drive module or a synchronous belt linear drive module. The type of drive member 72 is flexible and can be selected based on actual needs. This embodiment of the present application does not limit this.

[0127] In other embodiments, the second drive assembly 7 may include only the drive member 72. In this case, the end of the liquid receiving tray 6 close to the first frame 50 may be guided and arranged on the first frame 50. This arrangement can simplify the composition of the second drive assembly 7, facilitate the manufacture of the second drive assembly 7, and reduce costs.

[0128] In other embodiments, the guide assembly 40 may also include only the guide rail 401, and the liquid receiving tray 6 is guided and arranged on the guide rail 401. Such an arrangement can simplify the composition of the guide assembly 40, facilitate the manufacture of the guide assembly 40, and reduce costs.

[0129] For the chemical mechanical polishing equipment, the transfer module 4 further includes a position detection component, which is used to detect the position of the picking member 42.

[0130] The chemical polishing equipment also includes a controller, which is connected to the position detection component and the second drive component 7 signal. The controller is used to send instructions to the second drive component 7 based on the position information of the picking part 42, so that the second drive component 7 drives the liquid receiving plate 6 to follow the picking part 42 and move directly below the picking part 42 and / or the product 5.

[0131] With this arrangement, no matter how the pick-up member 42 and the product 5 are transferred between modules, the liquid collecting pan 6 can closely follow and always be precisely positioned directly below the pick-up member 42 and / or the product 5. This ensures that any liquid that falls from the product 5 is accurately collected by the liquid collecting pan 6, minimizing the possibility of liquid dripping onto other parts of the equipment and causing contamination and corrosion, thereby ensuring a clean environment within the equipment and the normal operation of all components.

[0132] In a preferred embodiment, since the second driving assembly 7 includes the driving member 72 , the controller and the driving member 72 are connected, thus facilitating signal connection between the controller and the second driving assembly 7 .

[0133] In a preferred embodiment, since the transfer module 4 is a robotic arm, the position detection component may include an encoder. An encoder is a device that converts mechanical motion into an electrical signal. Installing an encoder at the joints of the robotic arm allows for accurate measurement of the rotational angle or linear displacement of the joints. By measuring the angles and displacements of each joint, the position of the robotic arm's end effector (pickup element 42) can be calculated. This facilitates the position detection component's detection of the position of the pickup element 42.

[0134] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A chemical mechanical polishing device, characterized in that: include: A front module, which is used for checking in and out of products; a polishing module, the polishing module being used to polish the unpolished product detected by the front module; a cleaning module, the cleaning module being used to clean the polished product; A transfer module, comprising a first drive assembly and a picking member, wherein the picking member is used to pick up the product, and the first drive assembly is used to drive the picking member to move so as to transfer the product detected by the front module between the polishing module and the cleaning module; The liquid receiving module includes a liquid receiving pan and a second drive assembly, wherein the second drive assembly is used to drive the liquid receiving pan to follow the picking member and move directly below the picking member and / or the product, so that the liquid receiving pan collects liquid falling from the picking member and / or the product.

2. The chemical mechanical polishing equipment according to claim 1, characterized in that The liquid receiving tray is provided with a collecting trough for collecting the liquid; In the direction from the slot opening of the collecting tank to the bottom wall of the collecting tank, the bottom wall is gradually arranged away from the slot opening to form the lowest position farthest from the slot opening on the bottom wall, and a first liquid discharge port is arranged at the lowest position.

3. The chemical mechanical polishing equipment according to claim 2, characterized in that The bottom wall of the groove comprises: a first bottom wall section; The second bottom wall section is connected to the first bottom wall section, and the second bottom wall section and the first bottom wall section are arranged in a V shape, and the connection position of the second bottom wall section and the first bottom wall section is the lowest position.

4. The chemical mechanical polishing equipment according to any one of claims 1 to 3, characterized in that The liquid contact module also includes: a liquid drain pipe, the liquid drain pipe being connected to the liquid receiving tray; A liquid collecting piece is connected to the liquid drain pipe and is used to collect the liquid discharged from the liquid receiving tray through the liquid drain pipe.

5. The chemical mechanical polishing equipment according to claim 4, characterized in that: The drain pipe is provided on the liquid receiving tray, and the second driving assembly is used to drive the liquid receiving tray and the drain pipe to move synchronously along the first direction; The liquid collecting piece is provided with a strip opening for inserting the liquid drain tube into the liquid collecting piece. The length of the strip opening extends along the first direction, and the length of the strip opening is greater than or equal to the moving distance of the liquid drain tube in the first direction.

6. The chemical mechanical polishing equipment according to claim 5, characterized in that The liquid collecting member has a first end and a second end in the first direction, the first end is provided with a second liquid discharge port, and the liquid collecting member is gradually tilted downward from the second end to the first end.

7. The chemical mechanical polishing equipment according to any one of claims 1 to 3, characterized in that: The liquid receiving module further includes a guide component, and the guide component is used to guide the movement of the liquid receiving tray.

8. The chemical mechanical polishing equipment according to claim 7, characterized in that: The chemical mechanical polishing equipment also includes: First rack; A second frame, wherein the second frame and the first frame are spaced apart along a second direction, the second drive assembly is arranged on the first frame, the guide assembly is arranged on the second frame, and the two ends of the liquid receiving tray in the second direction are respectively connected to the second drive assembly and the guide assembly.

9. The chemical mechanical polishing equipment according to claim 8, characterized in that: The second driving assembly includes a first slider and a driving member, the first slider is connected to the liquid receiving tray, and the driving member is used to drive the first slider to move; and / or, The guide assembly includes a guide rail and a second slider, the second slider is guided on the guide rail, and the second slider is connected to the liquid receiving tray.

10. The chemical mechanical polishing equipment according to any one of claims 1 to 3, characterized in that: The transfer module further includes a position detection component, which is used to detect the position of the picking member; The chemical mechanical polishing equipment also includes a controller, which is connected to the position detection component and the second drive component signal. The controller is used to send instructions to the second drive component based on the position information of the picking part, so that the second drive component drives the liquid receiving plate to follow the picking part and move directly below the picking part and / or the product.

Images