Supporting device and machining equipment

Abstract

The utility model discloses a supporting device and machining equipment. The supporting device comprises a first supporting piece, a second supporting piece, a first mounting base, a first connecting base and a second connecting base. The second supporting piece is connected with the first supporting piece. The first mounting base comprises a first body and a first insulating layer, the first body is mounted on the first supporting piece, and the impact toughness of the first body is larger than that of ceramic; the first insulating layer is arranged on the surface of the first body and is used for supporting a graphite boat; the first connecting seat is mounted on the first supporting piece and is used for supporting the graphite boat; the second connecting base is installed on the second supporting piece and used for supporting the graphite boat. According to the supporting device, the toughness of the first mounting base can be effectively improved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic production equipment, and in particular to a supporting device and processing equipment. Background Art

[0002] Tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment uses an RF power source to ionize the process gas, thereby achieving film deposition. Two adjacent graphite boats serve as positive and negative electrodes. Ionization of the process gas is achieved by introducing the positive and negative electrodes of the RF power source into the graphite boat.

[0003] As a power supply method, the positive and negative electrodes of the RF power supply are mounted on the furnace body and connected to a support device. The support device includes a mounting base, a first connecting base, and a second connecting base. The first connecting base is electrically connected to the positive electrode, and the second connecting base is electrically connected to the negative electrode. The support device is used to support the graphite boat. The first and second connecting bases both contact the boat's feet, thereby providing power to the graphite boat.

[0004] In the prior art, mounting brackets made of ceramic material are used to support the graphite boat. Ceramic mounting brackets offer advantages such as high temperature resistance and insulation. However, ceramics can become brittle if exposed to high temperatures, which can lead to the brackets breaking and failing, resulting in high maintenance costs for the support device. Utility Model Content

[0005] To this end, the present application proposes a supporting device that can effectively improve the toughness of the first mounting seat.

[0006] The present application also proposes a processing device having the above-mentioned supporting device.

[0007] The supporting device according to the first embodiment of the present application includes:

[0008] a first support member;

[0009] a second supporting member connected to the first supporting member;

[0010] A first mounting seat includes a first body and a first insulating layer, wherein the first body is mounted on the first support member, and the impact toughness of the first body is greater than the impact toughness of ceramics; the first insulating layer is provided on the surface of the first body, and the first insulating layer is used to support the graphite boat;

[0011] a first connecting seat, mounted on the first supporting member, the first connecting seat being used to support the graphite boat;

[0012] The second connecting seat is installed on the second supporting member, and the second connecting seat is used to support the graphite boat.

[0013] The support device according to the embodiment of the present application has at least the following beneficial effects: the first mounting seat includes a first body and a first insulating layer, the impact toughness of the first body is greater than the impact toughness of the ceramic, thereby improving the overall toughness of the first mounting seat, and the first mounting seat is not easy to break; the first insulating layer is arranged on the surface of the first body, and the first insulating layer is used to support the graphite boat, thereby the first mounting seat has an insulating function, and the first mounting seat is not easy to leak electricity.

[0014] According to some embodiments of the present application, the material of the first insulating layer is a ceramic material, and the first insulating layer is coated on the surface of the first body.

[0015] According to some embodiments of the present application, the material of the first body is metal material.

[0016] According to some embodiments of the present application, the material of the first body is one of stainless steel, aluminum, titanium and tungsten.

[0017] According to some embodiments of the present application, the further comprising:

[0018] The second mounting seat includes a second body and a second insulating layer. The second body is mounted on the second support member. The impact toughness of the second body is greater than that of ceramics. The second insulating layer is arranged on the surface of the second body and is used to support the graphite boat.

[0019] According to some embodiments of the present application, the material of the second insulating layer is a ceramic material, and the second insulating layer is coated on the surface of the second body.

[0020] According to some embodiments of the present application, the material of the second body is metal material.

[0021] According to some embodiments of the present application, the material of the second body is one of stainless steel, aluminum, titanium and tungsten.

[0022] According to some embodiments of the present application, the further comprising:

[0023] a first isolation sleeve, sleeved on the first support member, the first mounting seat and the first connecting seat being mounted on the outer surface of the first isolation sleeve, and the material of the first isolation sleeve being an insulating material;

[0024] The second isolation sleeve is sleeved on the second support member, the second mounting seat and the second connecting seat are installed on the outer surface of the second isolation sleeve, and the material of the second isolation sleeve is insulating material.

[0025] The processing equipment according to the second embodiment of the present application includes:

[0026] The aforementioned supporting device;

[0027] The furnace body is provided with a processing cavity, the first support member and the second support member are both connected to the furnace body, and the supporting device is located in the processing cavity.

[0028] The processing equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned supporting device, the maintenance cost of the supporting device is lower, thereby helping to reduce the maintenance cost of the processing equipment.

[0029] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0031] Figure 1 A three-dimensional diagram of a supporting device according to an embodiment of the present application;

[0032] Figure 2 for Figure 1 a cross-sectional view of the first mounting base of the middle support device;

[0033] Figure 3 for Figure 1 A partial schematic diagram of the middle support device;

[0034] Figure 4 This is a schematic diagram of a processing device according to an embodiment of the present application.

[0035] Reference numerals: first support member 110 , second support member 120 ;

[0036] A first connecting seat 210 and a second connecting seat 220;

[0037] A first electrode 310 and a second electrode 320;

[0038] A first isolation sleeve 410 and a second isolation sleeve 420;

[0039] A first mounting base 510, a first body 511, a first insulating layer 512, a second mounting base 520, a second body 521, a second insulating layer 522, and an embracing ring 530;

[0040] Graphite Boat 600;

[0041] Furnace body 700 and processing chamber 710. DETAILED DESCRIPTION

[0042] Embodiments of the present application are described below in detail with reference to the accompanying drawings, wherein the same or similar components or components having the same or similar functions are denoted by the same or similar reference numerals throughout the drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation on the present application.

[0043] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or component referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0044] In the description of the present application, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If it is described as first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of indicated technical features.

[0045] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0046] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0047] Referring to Figure 1 and Figure 2 According to the first aspect embodiment of the present application, the support device comprises a first support member 110, a second support member 120, a first mounting seat 510, a first connecting seat 210 and a second connecting seat 220. The second support member 120 is connected with the first support member 110. The first mounting seat 510 comprises a first body 511 and a first insulating layer 512 (refer to Figure 2), the first body 511 is mounted on the first support member 110, and the impact toughness of the first body 511 is greater than that of ceramic. The first insulating layer 512 is provided on the surface of the first body 511, and the first insulating layer 512 is used to support the graphite boat 600 (refer to Figure 4 ).

[0048] The first connection base 210 is mounted on the first support member 110 and is used to support the graphite boat 600. The second connection base 220 is mounted on the second support member 120 and is used to support the graphite boat 600.

[0049] The support device according to the embodiment of the present application has at least the following beneficial effects: the first mounting seat 510 includes a first body 511 and a first insulating layer 512, and the impact toughness of the first body 511 is greater than the impact toughness of ceramics, thereby improving the overall toughness of the first mounting seat 510, and the first mounting seat 510 is not easily broken; the first insulating layer 512 is arranged on the surface of the first body 511, and the first insulating layer 512 is used to support the graphite boat 600, thereby the first mounting seat 510 has an insulating function, and the first mounting seat 510 is not easily leaked.

[0050] It should be noted that both ends of the first support member 110 are usually supported on the furnace body 700 (refer to Figure 4 ), both ends of the second support member 120 are usually supported on the furnace body 700.

[0051] Reference Figure 2 In some embodiments of the present application, the material of the first insulating layer 512 is a ceramic material, and the first insulating layer 512 is coated on the surface of the first body 511 .

[0052] Ceramic materials are resistant to high temperatures and have good insulation properties. By coating the surface of the first body 511 with ceramic material, the insulation requirements of the first mounting seat 510 and the graphite boat 600 can be better met.

[0053] Specifically, the ceramic material may be aluminum oxide, silicon nitride or silicon carbide.

[0054] In another embodiment, the material of the first insulating layer 512 may also be glass or mica.

[0055] Reference Figure 2 In some embodiments of the present application, the material of the first body 511 is metal material.

[0056] Generally, metal materials have a higher melting point and better impact toughness than ceramics, and can meet the use requirements. Generally, metal materials are easy to obtain and have a low cost, which helps to reduce the production cost of the first mounting base 510.

[0057] Reference Figure 2In an improved solution of the above embodiment, the material of the first body 511 is one of stainless steel, aluminum, titanium and tungsten.

[0058] Stainless steel, aluminum, titanium and tungsten all have relatively high melting points, and their impact toughness is better than that of ceramics. They also have good corrosion resistance and mechanical strength, and can better meet the requirements of use.

[0059] Reference Figure 2 In some embodiments of the present application, the support device further includes a second mounting base 520, which includes a second body 521 and a second insulating layer 522. The second body 521 is mounted on the second support member 120, and the impact toughness of the second body 521 is greater than that of ceramic. The second insulating layer 522 is disposed on the surface of the second body 521 and is used to support the graphite boat 600.

[0060] The addition of the second mounting base 520 provides more stable support for the graphite boat 600. Furthermore, the second mounting base 520 comprises a second body 521 and a second insulating layer 522. The impact toughness of the second body 521 is greater than that of ceramic, thereby improving the overall toughness of the second mounting base 520 and making it less susceptible to breakage. The second insulating layer 522 is disposed on the surface of the second body 521 and is used to support the graphite boat 600. This provides insulation for the second mounting base 520, making it less susceptible to electrical leakage.

[0061] Reference Figure 2 In some embodiments of the present application, the material of the second insulating layer 522 is a ceramic material, and the second insulating layer 522 is coated on the surface of the second body 521 .

[0062] Ceramic materials are resistant to high temperatures and have good insulation properties. By coating the surface of the second body 521 with ceramic material, the insulation requirements of the second mounting seat 520 and the graphite boat 600 can be better met.

[0063] Specifically, the ceramic material may be aluminum oxide, silicon nitride or silicon carbide.

[0064] In another embodiment, the material of the second insulating layer 522 may also be glass or mica.

[0065] Reference Figure 2 In some embodiments of the present application, the material of the second body 521 is metal material.

[0066] Generally, metal materials have a higher melting point and better impact toughness than ceramics, and can meet the use requirements. Generally, metal materials are easy to obtain and have a low cost, which helps to reduce the production cost of the first mounting base 510.

[0067] Reference Figure 2In the improved scheme of the above embodiment, the material of the second body 521 is one of stainless steel, aluminum, titanium and tungsten.

[0068] Stainless steel, aluminum, titanium and tungsten all have high melting points, and the impact toughness is better than that of ceramics, and the corrosion resistance and mechanical strength are also better, which can better meet the use requirements.

[0069] With reference to Figure 1 In some embodiments of the present application, the first connecting seat 210 is further used for electrically connecting with the first electrode 310, and the second connecting seat 220 is further used for electrically connecting with the second electrode 320.

[0070] By electrically connecting the first connecting seat 210 with the first electrode 310 and electrically connecting the second connecting seat 220 with the second electrode 320, the radio frequency power source can be conveniently introduced into the graphite boat 600.

[0071] With reference to Figure 3 It should be noted that Figure 3 In order to clearly show the relationship between the second support 120, the second isolation sleeve 420 and the second mounting seat 520, part of the parts of the support device are removed, and the front end of the second isolation sleeve 420 is partially cut off.

[0072] In some embodiments of the present application, the support device further comprises a first isolation sleeve 410 and a second isolation sleeve 420. The first isolation sleeve 410 is sleeved on the first support 110, the first mounting seat 510 and the first connecting seat 210 are mounted on the outer surface of the first isolation sleeve 410, and the material of the first isolation sleeve 410 is insulating material. The second isolation sleeve 420 is sleeved on the second support 120, the second mounting seat 520 and the second connecting seat 220 are mounted on the outer surface of the second isolation sleeve 420, and the material of the second isolation sleeve 420 is insulating material.

[0073] By surrounding the first support 110 with the first isolation sleeve 410, even if the silicon wafer dropped on the graphite boat 600 and the first isolation sleeve 410, the first support 110 and the graphite boat 600 are not easy to produce discharge arc phenomenon (at present, the first support 110 will adopt silicon carbide material, which will conduct electricity, and the first support 110 will be electrically connected with the first electrode 310), and the yield of the film coating process of the silicon wafer is higher.

[0074] Similarly, by surrounding the second support 120 with the second isolation sleeve 420, it is beneficial to reduce the discharge arc phenomenon between the first support 110 and the graphite boat 600, and the yield of the film coating process of the silicon wafer is higher.

[0075] Specifically, the materials of the first isolation sleeve 410 and the second isolation sleeve 420 are generally ceramic materials, such as alumina or silicon nitride materials.

[0076] It should be noted that the first support member 110 and the second support member 120 are typically rod-shaped, while the first mounting base 510 is typically ring-shaped. The first mounting base 510 is sleeved onto the first support member 110, and a pair of rings 530 are provided on either side of the first mounting base 510. The rings 530 are secured to the first isolation sleeve 410 via bolts and nuts. The rings 530 on either side restrict the movement of the first mounting base 510 along the length of the first support member 110, thereby ensuring the installation of the first mounting base 510. The installation of the second mounting base 520 is similar to that of the first mounting base 510 and will not be repeated here.

[0077] The structures of the first connecting seat 210 and the second connecting seat 220 are similar to the holding ring 530. The first connecting seat 210 is fixed to the first isolation sleeve 410 by bolts and nuts, and the second connecting seat 220 is fixed to the second isolation sleeve 420 by bolts and nuts.

[0078] Reference Figure 4 The processing equipment according to the second embodiment of the present application includes a support device and a furnace body 700. The furnace body 700 is provided with a processing chamber 710, the first support member 110 and the second support member 120 are both connected to the furnace body 700, and the support device is located in the processing chamber 710.

[0079] The processing equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned supporting device, the maintenance cost of the supporting device is lower, thereby helping to reduce the maintenance cost of the processing equipment.

[0080] Specifically, the processing equipment may be a coating equipment.

[0081] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A supporting device, characterized in that: include: a first support member; a second supporting member connected to the first supporting member; A first mounting seat includes a first body and a first insulating layer, wherein the first body is mounted on the first support member, and the impact toughness of the first body is greater than the impact toughness of ceramics; the first insulating layer is provided on the surface of the first body, and the first insulating layer is used to support the graphite boat; a first connecting seat, mounted on the first supporting member, the first connecting seat being used to support the graphite boat; The second connecting seat is installed on the second supporting member, and the second connecting seat is used to support the graphite boat.

2. The support device according to claim 1, characterized in that The material of the first insulating layer is ceramic material, and the first insulating layer is coated on the surface of the first body.

3. The supporting device according to claim 1, characterized in that The first body is made of metal.

4. The supporting device according to claim 3, characterized in that The material of the first body is one of stainless steel, aluminum, titanium and tungsten.

5. The support device according to any one of claims 1 to 4, characterized in that Also includes: A second mounting seat comprises a second body and a second insulating layer, wherein the second body is mounted on the second support member, and the impact toughness of the second body is greater than the impact toughness of ceramic; The second insulating layer is disposed on the surface of the second body, and is used to support the graphite boat.

6. The supporting device according to claim 5, characterized in that The second insulating layer is made of ceramic material and is coated on the surface of the second body.

7. The supporting device according to claim 5, characterized in that: The second body is made of metal.

8. The supporting device according to claim 7, characterized in that: The material of the second body is one of stainless steel, aluminum, titanium and tungsten.

9. The supporting device according to claim 5, characterized in that: Also includes: a first isolation sleeve, sleeved on the first support member, the first mounting seat and the first connecting seat being mounted on the outer surface of the first isolation sleeve, and the material of the first isolation sleeve being an insulating material; The second isolation sleeve is sleeved on the second support member, the second mounting seat and the second connecting seat are installed on the outer surface of the second isolation sleeve, and the material of the second isolation sleeve is insulating material.

10. Processing equipment, characterized in that, include: The support device according to any one of claims 1 to 9; The furnace body is provided with a processing cavity, the first support member and the second support member are both connected to the furnace body, and the supporting device is located in the processing cavity.

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